Journal of Energy Engineering (에너지공학)

The Korean Society for Energy (한국에너지학회)
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Flow Analysis around the Multi-beam Robot in a Clean Room

클린룸 내 다관절 로봇 주위의 유동해석

  • Lee, Suk Young (Department of Mechanical Engineering, Inha Technical College)
  • Received : 2015.08.04
  • Accepted : 2015.09.16
  • Published : 2015.09.30
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Abstract

We carried out three-dimensional flow analysis in a clean room. Flow field in a robot experiment system, induced from the moving robot, is numerically studied in this paper. The effects of moving robot in a clean room are investigated in order to find the section of dust accumulation. Contamination on the bottom produced from the moving robot is predicted from the analysis results from the flow fields. Results show that a large swirl flow is formed around the moving robot. Consequently, the optimal flow condition can be obtained by controlling the fluid velocity through the fixing of inlet or outlet position.

본 연구에서는 클린룸에서의 3차원 유동해석을 수행하였다. 로봇실험 장치에서 로봇의 움직임에 의해 형성되는 유동장에 대한 수치적인 분석을 본 연구에서는 다루고 있으며, 클린룸에서 로봇의 움직임에 대한 영향을 분진이 쌓이는 영역을 찾기 위해서 진행된다. 다관절 로봇의 움직임에 의해 생성되는 바닥 표면의 분진은 유동장 분석에 의해 예측될 수 있으며, 해석결과는 커다란 스월유동이 움직이는 로봇 주위에서 생성된다고 분석된다. 따라서, 가장 바람직한 유동 조건은 공기의 입구와 출구부의 위치를 다시 정하여 유동속도를 변화시키면서 검토해야 한다.

Keywords

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