• Journal of the Institute of Electronics and Information Engineers
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• v.51 no.3
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• pp.185-193
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• 2014

In this paper, we developed a 4-channel particle counter for measuring particles, temperature, humidity in production facilities of clean-room environment, and the measured data can be transmitted via bluetooth. To measure the particle size ranging 0.3um~5um, we designed optical lens, particle detection chamber and multi-channel particle detection circuit. And we also developed a FMS program for real-time monitoring of measuring data, which resulted in the stable operation.

• Transactions of the Korean Society of Mechanical Engineers B
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• v.30 no.4 s.247
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• pp.306-313
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• 2006

Automated material handling system is being used as a method to reduce manufacturing cost in the semiconductor and flat panel displays (FPDs) manufacturing process. Those are considering switch-over from the traditional cassette system to single-substrate transfer system to reduce raw materials of stocks in the processing line. In the present study, the wafer transportation speed has been evaluated by numerical and experimental method for three propulsion nozzle array (face, front, rear) in an air levitation system. Test facility for 300 mm wafer was equipped with two control tracks and a transfer track of 1,500mm length. The diameter of propulsion nozzle is 0.8mm and air velocity of wafer propulsion is $50\sim150m/s$. We found that the experimental results of the wafer transportation speed were well agreed with the numerical ones. Namely, the predicted values of the maximum wafer transportation speed are higher than those values of experimental data by 16% and the numerical result of the mean wafer transportation speed is higher than the experimental result within 20%.

• Korean Journal of Human Ecology
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• v.10 no.3
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• pp.303-315
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• 2001

The purpose of this study is to evaluate the housing unit and investigate needs of housing in Home Economics curriculum of Home Economics teachers. The questionnaire survey was conducted 98 teachers participated in the minor training course in Chungbuk, August of 2000. When the teachers made their class in the section of housing, they emphasized respectively as the textual order: the space of housing and family life, the utilization of space, clean of residing circumstance in the middle school: and in the high school there was also concerned to the textual order: choice of housing, the house planning, interior design, maintenance of house. The teachers focused into the arrange of furniture and interior design for the students in the class, drawing of a plan in the contents of practical experience and performance. According to the survey results, the main point of class in housing should be emphasized the arranging of own room and function of other spaces in house for the students in the middle school. The high school curriculum should focus on the practical area to connect with the interior design. And in the section of housing it was needed to add the contents of management in the multi-family housing, housing problems, neighborhood environment for elderly, and also community planning.

• Journal of Korean Society of Occupational and Environmental Hygiene
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• v.26 no.1
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• pp.1-10
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• 2016

Objectives: The aim of this study is to review the results of exposure to chemicals and to extremely low frequency(ELF) magnetic fields generated in wafer fabrication operations in the semiconductor industry. Methods: Exposure assessment studies of silicon wafer fab operations in the semiconductor industry were collected through an extensive literature review of articles reported until the end of 2015. The key words used in the literature search were "semiconductor industry", "wafer fab", "silicon wafer", and "clean room," both singly and in combination. Literature reporting on airborne chemicals and extremely low frequency(ELF) magnetic fields were collected and reviewed. Results and Conclusions: Major airborne hazardous agents assessed were several organic solvents and ethylene glycol ethers from Photolithography, arsenic from ion implantation and extremely low frequency magnetic fields from the overall fabrication processes. Most exposures to chemicals reported were found to be far below permissible exposure limits(PEL) (10% < PEL). Most of these results were from operators who handled processes in a well-controlled environment. In conclusion, we found a lack of results on exposure to hazardous agents, including chemicals and radiation, which are insufficient for use in the estimation of past exposure. The results we reviewed should be applied with great caution to associate chronic health effects.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2003.05a
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• pp.1099-1106
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• 2003

진동에 민감한 각종 정밀장비를 갖추고 있는 공장구조물은 설립하는 설계 초기단계에서부터 정밀장비가 정상 운용을 위하여 공장구조물의 진동허용규제치 및 동특성허용규제치를 결정해야 한다. 이를 만족할 수 있도록 공장구조물 설계시 진동측면에 대하여 동적 특성을 검토해야만 한다. 이때 반드시 필요한 자료로 정밀장비 Maker에게서 제공되는 진동허용규제치 및 구조물의 동특성허용규제치 등 설치시방의 상세한 자료를 제공받아야 한다 이러한 선계조건을 만족시켜주기 위한 방안으로 외부에서 정밀장비로 유입되는 진동에 대한 진동절연을 위하여 진동전달률 이론을 적용하여 방진효율 산출하는 방법과 정밀장비에서 발생하는 동하중을 고려하여 공장구조물에 대한 동적설계를 수행하는 것으로, 구조물 동특성을 요구되는 만큼 구조물 동특성 변경 SDM(Structural Dynamic Modifacation)방법이 주로 활용된다. 이에 본 연구에서는 앞서 언급한 구조물의 동적설계시 후자조건인 구조물의 동특성을 변경하고자 하는 경우에 실구조물에 하중을 정량적으로 조절하며 가할 수 있는 VSD 시스템을 이용하여 구조물의 동특성을 변화시키는 것을 동적해석으로 예측하였고, 현장에서 실제 동적실험으로 구한 결과를 동적설계 목표치와 비교하여 유용성에 대하여 확인하였다.

• Proceedings of the SAREK Conference
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• 2008.11a
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• pp.446-451
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• 2008

Air washer remove dust on the air and use for humidification. But the last should be applied to the semiconductor and FPD industry, air washer has focused on removing pollutants. In addition, air washer within the clean room remove the pollutants as well as use for humidification in Winter. However, there is no research in the country, and for research purposes, the evaluation was conducted by atomizing water temperature variation and L/G variation. Performance evaluation results are the same conditions as the entrance of air washers ($23^{\circ}C$, 45%RH). Cooling effect is enhanced when atomizing water temperature is lower. The larger the performance of humidification to L/G lower the temperature increases.

• Journal of the Korean Magnetics Society
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• v.9 no.1
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• pp.48-54
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• 1999

For the high speed linear motor and the transportation device at clean room, a magnetic levitation rail without contact using the repulsive force of permanent magnets was newly developed. The characteristics of repulsive and lateral forces of the magnetic levitating system using permanent magnet was studied and the devised magnetic levitating system was evaluated by analytical and experimental approaches. This system is composed of two fixed guide rails with the rare earth permanent magnet array and a moving unit which is attached two magnet pairs at each sides. Because this system was forcedly levitated by the face to face repulsive forces, levitating air gap length can be repulsive force of an auxiliary magnetic repulsion system on the center of moving unit.

• Korean Journal of Air-Conditioning and Refrigeration Engineering
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• v.24 no.7
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• pp.578-584
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• 2012

In this study, the analysis on the distribution of indoor airflow velocity and temperature by using numerical simulation has carried out to make fundamental data for establishing the optimum design of laboratory animal facilities. From the results, it was found that replacement of cage lacks, air supply and exhaust system, supply air temperature, supply air velocity affect to the optimum design of laboratory animal facilities as a important element.

• Food Science and Biotechnology
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• v.16 no.1
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• pp.18-22
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• 2007

The objective of this study was to develop and assess the performance of an aseptic system for liquid milk contained in plastic bottles, from a small-scale production standpoint. Commercial sterility tests conducted on the bottled milk were utilized in our assessments of the system, via the identification and monitoring of the principal points of the process. Four 150 L batches of milk with pH values of approximately 6.7 were heat-processed at between 137 and $143^{\circ}C$ for 10 see in a plate heat exchanger, and then aseptically transferred to 500 mL high-density polyethylene (HOPE) bottles, in an ISO class 7 clean room. The aseptic condition of the bottles was achieved via 10 see of rinsing with a mixture containing 0.5% peracetic acid and 0.8% hydrogen peroxide at $30^{\circ}C$, followed by another rinse with sterile water. Of the 4 batches processed, 2 were determined to exhibit commercial sterility, on the basis of the physical-chemical and microbiological criteria adopted. It was concluded that some adjustment of the processing line was required in order to achieve full commercial sterility for all processes. The aseptic system developed and assessed in this study was demonstrated to have great potential for the processing and transferring of milk into plastic bottles, from a small-scale production standpoint.

• Fibers and Polymers
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• v.5 no.4
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• pp.280-288
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• 2004

Split-type nylon/polyester microfiber and polyester microfiber fabrics possess drapeability, softness, bulkiness, and smoothness, so that they can be applied in various industrial fields. In particular, these fabrics are able to absorb various organic solvents, and can be used as clean room materials. To investigate the chemical affinity between solvents and the compositional materials of these fabrics, the contact angle of thermally pressed film fabrics was measured with different solvents. The thermally pressed nylon/polyester fabric films showed a chemical attraction to formamide. The sorption properties of the microfiber fabrics were investigated using a real time testing device, and these tests showed that the sorption behavior was more influenced by the structure of the fibrous assembly than by any chemical attraction. The effect of the fabric density, specific weight, and sample structure on the sorption capacity and rate was examined for various organic solvents. The sorption capacity was influenced by the density and the specific weight of the fibrous assembly, and knitted fabric showed a higher sorption capacity than woven fabric. However, the sorption rate was less affected in lower viscosity solvents. On applying Poiseuille's Law, the lower viscosity solvents showed higher initial sorption rates, and more easily penetrated into the fibrous assembly.