• Title/Summary/Keyword: clean room

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Room Temperature Hydrogen Sensor

  • Cho, Hyoung Jin;Zhang, Peng;Seal, Sudipta
    • 한국신재생에너지학회:학술대회논문집
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    • 2010.06a
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    • pp.51.3-51.3
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    • 2010
  • Due to the recent public awareness of global warming and sustainable economic growth, there has been a growing interest in alternative clean energy sources. Hydrogen is considered as a clean fuel for the next generation. One of the technical challenges related to the use of hydrogen is safe monitoring of the hydrogen leak during separation, purification and transportation. For detecting various gases, chemiresistor-type gas sensors have been widely studied and used due to their well-established detection scheme and low cost. However, it is known that many of them have the limited sensitivity and slow response time, when used at low temperature conditions. In our work, a sensor based on Schottky barriers at the electrode/sensing material interface showed promising results that can be utilized for developing fast and highly sensitive gas sensors. Our hydrogen sensor was designed and fabricated based on indium oxide (In2O3)-doped tin oxide (SnO2) semiconductor nanoparticles with platinum (Pt) nanoclusters in combination with interdigitated electrodes. The sensor showed the sensitivity as high as $10^7%$ (Rair/Rgas) and the detection limit as low as 30 ppm. The sensor characteristics could be obtained via optimized materials synthesis route and sensor electrode design. Not only the contribution of electrical resistance from the film itself but also the interfacial effect was identified as an important factor that contribute significantly to the overall sensor characteristics. This promises the applicability of the developed sensor for monitoring hydrogen leak at room temperature.

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A Study on the Water-soluble Fiber at the Room Temperature using Carboxymethylcellulose(CMC) Synthesis (Carboxymethylcellulose 제조공정을 이용한 상온에서의 수용성 섬유에 관한 연구)

  • Song, Ho-Jun;Choi, Youngmin;Park, Jin-Won
    • Clean Technology
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    • v.11 no.2
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    • pp.105-116
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    • 2005
  • Carboxymethylcellulose(CMC) which is water soluble at room temperature was manufactured from the cellulose material in this study. Experimental parameters were reaction temperature, time and concentration of NaOH and monochloroacetic acid. CMC was tested for solubility, degree of substitution(D.S.) and tensile strength. The surface structure of CMC fiber was tested using scanning electron microscope(SEM). CMC manufactured from viscose rayon was affected by the chemical concentration rather then the reaction time and temperature. Also, degree of substitution is closely related to the solubility of the CMC.

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Simulation of a Clean Room Fire I. Effects of Smoke Curtain (청정실 화재의 시뮬레이션 I. 방연커튼의 효과)

  • Park Woe-Chul
    • Fire Science and Engineering
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    • v.19 no.2 s.58
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    • pp.8-12
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    • 2005
  • A fire in a clean room may cause a serious loss by spreading smoke particles. The effects of the width of smoke curtains on delay in smoke spread, which is located the work area boundaries, were investigated by using a computational fluid dynamics, for loss prevention by smoke spreading from one fire area to another. The fire scenario was set to a 1 MW methanol fire in a space of $30m\times10m$ floor and 4 m high. Distributions of temperature and smoke particles were compared for the width of the smoke curtains 0 (without smoke curtains), 1, 2, 3m. It was confirmed that a larger width of the smoke curtain delays spread of smoke more, and that making the work areas compartments is necessary to confine the smoke in the fire area.

The Prediction and Evaluation of Contamination in the Large Clean Room for Manufacturing Electronic Components (대형 클린룸내 전자부품 생산공정에서의 이물전이 예측을 위한 기류해석에 관한 연구)

  • Jeong, Gi-Ho;Shin, An-Seob;Park, Chang-Sik;Byun, Hyang-Eun
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2008.11a
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    • pp.202-202
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    • 2008
  • The world gross market of many kinds of electronics, such as TV and mobile phone has been increasing rapidly these days. It is mainly caused by the amazing developments of IT technology during past decade and the changes of individual life style for the better. Thanks to the increases of electronics manufactured in quantity, much more electronic components such as MLCC (multi layer ceramic capacitor) and PCB (printed circuit board), which are our main products, have been needed as a consequence. Though it was reported that total market of electronic components exceeds several hundreds of billion dollars, there are many manufactures struggling for survival in the competition of electronics components. Then the recognition of quality as a key technology has spread and the efforts for high-yield production lines have been kept in many companies. In this paper, our efforts to eliminate the contamination of particles and the diffusion of some volatile organic compounds which is very harmful to workers at production line have been introduced.

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Flow Analysis around the Roller Conveyor in a Clean Room (클린룸 내 롤러 컨베이어 운송장치 주위의 유동해석)

  • Jeon, Hyun-Joo;Park, Chan-Woo;Im, Ik-Tae
    • Proceedings of the SAREK Conference
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    • 2009.06a
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    • pp.1507-1512
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    • 2009
  • Flow field in a roller conveyor system, induced from the movement of a cassette in which glasses for flat panel display are loaded, is numerically studied in this paper. Contamination on the glass surface by dust particles produced from mechanical friction between roller and cassette is predicted from the analysis results of flow fields. Results show that a large swirl flow is formed under the moving cassette with constant speed. This swirl flow is confined only under the cassette because two main streams from the backward and the fan filter unit on the top ceiling are sufficiently strong. Therefore, it can be said that possibility of the contamination by the particles originated from the friction is relatively low. It is also revealed that flow direction between glass plates is changed according to the speed of the cassette movement due to the shear force of glass plates.

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Surface Properties of Electrolytic-Polished 316L Stainless Steel Welding Tube for Semi-Conductor Fab. - As the Relation of Electrolysis Conditions with Surface Characteristics - (반도체 제조 설비용 전해 연마된 STS316L 용접강관의 표면 성질 - 전해 조건과 표면 성상의 관계를 중심으로 -)

  • Kim, Ki-Ho;Cho, Bo-Yeon
    • Journal of the Korean institute of surface engineering
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    • v.41 no.1
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    • pp.38-42
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    • 2008
  • 316L stainless steel welding tube was electrolytically polished and the inner surface characteristics of the tube were tested. Electro-polishing variables such as current, voltage, concentration of electrolyte and electropolishing time were changed to seek for optimum condition. These makes a optimum conditions for the electro-polishing as 4000 A, 9 V, 1.7 specific gravity of electrolyte, and 30 minute of electro-polishing time. It makes the surface roughness as Ra < $0.25{\mu}m$. XPS test resulted as the ratio of CrO/FeO equals or more to 3/1. AES test resulted as the thickness of CrO film of $38{\AA}$. DTA test resulted as the tube did not react with $N_2,\;H_2\;and\;O_2$ gas below 1073K. As summarize above results, the electro- polished 316L stainless steel welding tube satisfied the conditions to apply as a pipeline for semi- conductor production facility and clean room.

Prediction of Useful Life by Heat Aging of Motor Fan Isolating Rubber (모터팬 방진고무부품의 노화수명 예측)

  • Kim, W.S.;Woo, C.S.;Cho, S.J.;Kim, W.D.
    • Elastomers and Composites
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    • v.37 no.2
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    • pp.107-114
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    • 2002
  • This paper discusses the accelerated heat aging tests were carried out to predict the useful life of EPDM isolating rubber components of ventilation fan motor for clean room. 20% compression set results changes as the threshold are used for assessment of the useful life and the time to threshold value were plotted against reciprocal of absolute temperature to give the Arrhenius plot. The useful life at variable temperatures and activation energy are obtained from the Arrhenius relationship. An accelerated test program to assess useful life can be represented an appreciable investment in time was designed. We also considered the effect of antioxidant agents.

Comparative Study on Energy Consumption in Steam-Humidification- and Water-Spray-Humidification-Type Outdoor Air-Conditioning Systems for Semiconductor Manufacturing Clean Rooms (반도체 클린룸용 증기가습 및 수분무가습 외기공조시스템의 에너지소비량 비교연구)

  • Kim, Hyung-Tae;Song, Gen-Soo;Kim, Ki-Cheol;Yoo, Kyung-Hoon;Son, Seung-Woo;Shin, Dae-Kun;Park, Dug-Jun;Kwon, Oh-Myung
    • Transactions of the Korean Society of Mechanical Engineers B
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    • v.35 no.12
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    • pp.1249-1255
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    • 2011
  • In modern large-scale semiconductor manufacturing clean rooms, the energy consumed by the outdoor air-conditioning system during heating, humidification, cooling, and dehumidification of the incoming outdoor air represents about 45% of the total air-conditioning load required to maintain a clean-room environment. In particular, the energy required for humidification of the outdoor air in winter is very high. Therefore, evaluation and comparison of the energy consumption in key humidification systems, viz., steam-humidification and water-spray-humidification systems, used in outdoor air-conditioning systems would be useful to reduce the outdoor air-conditioning load in clean rooms. In the present study, an experiment with an outdoor air flow of 1000 $m^3$/h was conducted to compare the air-conditioning process and energy consumption in outdoor air-conditioning systems with electrodeboiler steam humidifiers and air-washer water spray humidification systems. The experimental results showed that the water-spray-humidification-type outdoor air-conditioning system consumed less electrical power than did the steam-humidification-type system and was more energy efficient during winter.

A Study of Developing Wear Tester to Measure and Minimize Particle Levels in Cleanroom (장비 구동부품 기인 Particle 평가를 위한 마모측정기의 개발에 관한 연구)

  • Park, Kwang Hee;Noh, Kwonhak;Chang, Sung Ho;Lee, Jonghwan;Cha, Young Cheul;Chun, Hae Dong
    • Journal of Korean Society of Industrial and Systems Engineering
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    • v.36 no.2
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    • pp.1-7
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    • 2013
  • Cleanroom could be largely classified into industrial cleanroom that can be contaminated by particles and bio-cleanroom that can be contaminated by biological particles. Electrical manufacturing companies producing precision machines and electrical parts essentially have industrial cloom facilities and clean technologies to produce defects free products due to particles. Industrial cleanroom should be controlled in respect of 4M1E to prevent from foreign materials of sub-micro unit and to keep out contamination sources from outside. In this paper, a concept for a quantitative methodology to measure the particles from running components was suggested by combining both newly making clean booth such as wear tester and laser particle counter.

Mechanical Properties of Heat Exchanger Element with Higher Capacity Waste Heat Recovery PDC Clean Ventilation System (대용량 폐열회수 PDC청정 환기시스템용 열교환 소자의 기계적 특성)

  • Ahn, S.H.;Nam, K.W.;Ahn, B.H.;Kim, D.G.;Jeong, S.K.
    • Journal of Power System Engineering
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    • v.13 no.5
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    • pp.67-75
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    • 2009
  • Recently, the higher capacity waste heat recovery PDC clean ventilation system has a tendency which is increasing due to the excellent energy reduction in factory, big building, and so on. This system was developed to complement the room environment which is deteriorated. However, the researches and technologies about this system were not well studied. Specially, the characteristic for heat exchanger element used to this system were not well known. Therefore, this study was carried out to evaluate the mechanical properties of the heat exchanger element as the core parts compose of this system. From results, tensile strength and elongation of the plate type heat exchanger element had about 10.11~14.32 kgf/$mm^2$ and 8.0~16.2%, respectively.

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