• Title/Summary/Keyword: chloropolysilanes (CPS)

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Synthesis and property analysis of hydropolysilanes for amorphous and polycrystalline silicon (무정형 또는 다결정성 규소를 위한 하이드로폴리실란의 합성과 물성 분석)

  • Ahn, Sun-Ah;Lee, Sung-Hwan;Song, Young-Sang;Lee, Gyu-Hwan
    • Analytical Science and Technology
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    • v.24 no.2
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    • pp.105-112
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    • 2011
  • Syntheses and property analysis of hydropolysilanes were studied. Those hydropolysilanes can be utilized as precursors for amorphous silicon and polycrystallline silicon for the purpose of the solar cell and the thin film transister for the next generation's semiconductors. Most important characteristics of this study are to find optimized conditions for the synthesis and property analysis of soluble hydropolysilanes. Also the possibility of pyrolytic conversion to amorphous and polycrystalline silicon was investigated.