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http://dx.doi.org/10.5806/AST.2011.24.2.105

Synthesis and property analysis of hydropolysilanes for amorphous and polycrystalline silicon  

Ahn, Sun-Ah (Department of Chemistry, Hannam University)
Lee, Sung-Hwan (Department of Chemistry, Hannam University)
Song, Young-Sang (R&D Center, Samsung Fine Chemicals Co., Ltd.)
Lee, Gyu-Hwan (Department of Chemistry, Hannam University)
Publication Information
Analytical Science and Technology / v.24, no.2, 2011 , pp. 105-112 More about this Journal
Abstract
Syntheses and property analysis of hydropolysilanes were studied. Those hydropolysilanes can be utilized as precursors for amorphous silicon and polycrystallline silicon for the purpose of the solar cell and the thin film transister for the next generation's semiconductors. Most important characteristics of this study are to find optimized conditions for the synthesis and property analysis of soluble hydropolysilanes. Also the possibility of pyrolytic conversion to amorphous and polycrystalline silicon was investigated.
Keywords
chloropolysilanes (CPS); hydropolysilanes (HPS); property analysis of hydropolysilanes; amorphous silicon (a-Si); polycrystalline silicon (p-Si);
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