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Electrochemical Corrosion and Chemical Mechanical Polishing(CMP) Characteristics of Tungsten Film using Mixed Oxidizer (혼합 산화제를 사용한 텅스텐 막의 전기화학적 부식 및 CMP 특성)

  • Na, Eun-Young;Seo, Yong-Jin;Lee, Woo-Sun
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.18 no.4
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    • pp.303-308
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    • 2005
  • In this paper, the effects of oxidants on tungsten chemical mechanical polishing (CMP) process were investigated using three different oxidizers such as Fe(NO₃)₃, KIO₃ and H₂O₂. Moreover, the interaction between the tungsten film and the oxidizer was discussed by potentiodynamic polarization measurement with three different oxidizers, in order to compare the effects of W-CMP and electrochemical characteristics on the tungsten film as a function of oxidizer. As an experimental result, the tungsten removal rate reached a maximum at 5 wt% Fe(NO₃)₃concentration, and when 5 wt% H₂O₂was added in the slurry, the removal rate of W increased. Also, the microstructures of surface layer by atomic force microscopy(AFM) image were greatly influenced by the slurry chemical composition of oxidizers. It was shown that the surface roughness and removal rate of the polished surface were improved in Fe(NO₃)₃than KIO₃. The electrochemical results indicate that the corrosion current density of the 5 wt% H₂O₂ and 5 wt% H₂O/sub 2+/+ 5 wt% Fe(NO₃)₃was higher than the other oxidizers. Therefore, we conclude that the W-CMP characteristics are strongly dependent on the kinds of oxidizers and the amounts of oxidizer additive.

Control of morphology and interfacial tension of PC/SAN blends with compatibilizer

  • Kim, J.H.;Kim, M.J.;Kim, C.K.;Lee, J.W.
    • Korea-Australia Rheology Journal
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    • v.13 no.3
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    • pp.125-130
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    • 2001
  • Block copolymers of PC-b-PMMA (polycarbonate-b-polymethylmethacrylate) and PC -b-SAN (polycarbonate-b-(styrene-c-acrylonitrile)), were examined as compatibilizers for blonds of PC with SAN copolymer. The average diameter of the dispersed particles was measured with an image analyser, and the interfacial properties of the blonds were analysed with an imbedded fiber retraction (IFR) technique. The average diameter of dispersed particles and interfacial tension of the PC/SAN blends reached a minimum value when the SAN copolymer contained about 24 wt% AN. Interfacial tension and particle size were further reduced by adding compatibilizer to the PC/SAN blends. PC-b-PMMA was more effective than PC-b-SAN as a compatibilizer in reducing the average diameter of the dispersed particles and interfacial tension of PC/SAN blend. A direct proportionality between the particle diameter and interfacial tension was also observed. The interfacial properties of the PC/SAN blends were optimized by adding a block copolymer and using an SAN copolymer that had minimum interaction energy with PC.

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A Characteristic Analysis of Physical, Chemical and Electrical Property for Bunker C Fly Ash (Bunkder C유 회분의 물리적, 화학적, 전기적 특성분석)

  • 이재근;이정언;안영철
    • Proceedings of the Korea Society for Energy Engineering kosee Conference
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    • 1996.04a
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    • pp.88-96
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    • 1996
  • The characteristic analysis of fly ash generated from a fired power plant using bunker-C oil has been investigated. Ash size distribution by an optical microscopy with image processing technique, morphological shape by a scanning electron microscope(SEM) and microscope, chemical composition by the inductively coupled plasma emission spectrometry(ICP), and resistivity measurement as a function of temperature and moisture content by the resistivity meter are performed. A study of physical, chemical and electrical characteristics of bunker-C fly ash plays an important role of improving the performance of an electrostatic precipitator and protecting air pollution. The samples of bunker-C fly ash for analysis were collected from the electrostatic precipitator hopper of Ulsan Power Plant Unit 1 and Pusan Power Plant Unit 1. Mass median diameter(MMD) of bunker-C fly ash was measured 12.7${\mu}{\textrm}{m}$, while MMD of fly ash generated from the mixture of bunker-C oil(40%) and domestic anthracitic coal(60%) was 25.7${\mu}{\textrm}{m}$. The morphological structure of bunker-C fly ash consisted of fine particles of non-spherical shape. The primary chemical components of bunker-C fly ash were composed of SiO2(2.36%), Al2O3(4.91%), Fe2O3(14.33%) and C(11.84%). Resistivity of bunker-C fly ash was found to be increased with increasing temperature at the range of 100~15$0^{\circ}C$ and was measured 103~104 ohm-cm.

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Structure and Magnetic Properties of a Fe73.5Si13.5B9Nb3Cu1 Alloy Nanopowder Fabricated by a Chemical Etching Method and Milling Procedure

  • Hong, Seong-Min;Kim, Jeong-Gon;Kim, Cheol-Gi
    • Journal of Magnetics
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    • v.14 no.2
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    • pp.71-74
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    • 2009
  • The magnetic and structural properties of FINEMET (the Hitachi product name of the Fe-Si-B-Nb-Cu alloy) nanopowder with a composition of $Fe_{73.5}Si_{13.5}B_9Nb_3Cu_1$ atomic percent were investigated after annealing, chemical etching, and mechanical milling. The primary and secondary crystallization temperatures were 523 and $550^{\circ}C$, respectively. The grain size of the particles was adjusted by annealing time. Optimally annealed particles exhibited a homogenous microstructure composed of nanometer-sized crystalline grains. The grain boundary of the annealed particles was etched preferentially by chemical etching. Chemically etched particles were broken at the grain boundary by high-energy ball milling. As a result, a nanometer-sized FINEMET powder with a uniform size of crystalline grains was fabricated.

Simple Analysis for Interaction between Nanoparticles and Fluorescence Vesicle as a Biomimetic Cell for Toxicological Studies

  • Umh, Ha Nee;Kim, Younghun
    • Bulletin of the Korean Chemical Society
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    • v.33 no.12
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    • pp.3998-4002
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    • 2012
  • With continuing progress of nanotechnologies and various applications of nanoparticles, one needs to develop a quick and fairly standard assessment tool to evaluate cytotoxicity of nanoparticles. However, much cytotoxicity studies on the interpretation of the interaction between nanoparticles and cells are non-mechanistic and time-consuming. Here, we propose a simple screening method for the analysis of the interaction between several AgNPs (5.3 to 64 nm) and fluorescence-dye containing vesicles ($12{\mu}m$) acting as a biomimetic cell-membrane. Fluorescence-dye containing vesicle was prepared using a fluorescence probe (1,6-diphenyl-1,3,5-hexatryene), which was intercalated into the lipid bilayer due to their hydrophobicity. Zeta potential of all materials except for bare-AgNPs (+32.8 mV) was negative (-26 to -54 mV). The morphological change (i.e., rupture and fusion of vesicle, and release of dye) after mixing of the vesicle and AgNPs was observed by fluorescence microscopy, and fluorescence image were different with coating materials and surface charge of x-AgNPs. In the results, we found that the surface charge of nanoparticles is the key factor for vesicle rupture and fusion. This proposed method might be useful for analyzing the cytotoxicity of nanoparticles with cell-membranes instead of in vitro or in vivo cytotoxicity tests.

PEDOT: PSS 박막의 대면적 나노패터닝을 통한 구조형성방법 및 응용

  • Yu, Jeong-Hun;Nam, Sang-Hun;Lee, Jin-Su;Hwang, Gi-Hwan;Yun, Sang-Ho;Bu, Jin-Hyo
    • Proceedings of the Korean Vacuum Society Conference
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    • 2013.08a
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    • pp.127.2-127.2
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    • 2013
  • 오늘날 유기고분자기반 태양전지는 다른 태양전지와 비교될 정도로 낮은 광변환효율로 인해 효율향 상을 위한 많은 연구들이 진행되어 왔다. 그중 패터닝을 통한 광포집률과 charge carrier 수집효율이 증가되었다는 많은 보고들이 있었다. 따라서 우리는 200~1,400 nm polystyrene bead를 합성하여 air-liquid interfacial 방법을 이용해 2차원 육방조밀구조를 갖는 template를 형성하고 Nanosphere lithography (NSL)를 이용하여 대면적으로 균일한 poly(3,4-ethylenedioxythiophene) poly(styrenesulfonate) (PEDOT:PSS)를 패턴화하였다. 균일한 패턴형성을 측정하기위해 Field Emission Scanning Electron Microscopy (FE-SEM), image를 얻었으며, Atomic Force Microscopy (AFM)를 통해 형성된 패턴의 낙차 높이를 얻었고, Near IR-UV-Vis을 통해 bead size 변화에따라 얻어진 PEDOT:PSS 패턴의 반사율을 측 정하였다.

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Atomic Force Microscopy Simulation for Si (001) Surface Defects (Si (001) 표면 결함 원자힘 현미경 전산모사)

  • Jo, Junyeong;Kim, Dae-Hee;Kim, Yurie;Kim, Ki-Yung;Kim, Yeong-Cheol
    • Journal of the Semiconductor & Display Technology
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    • v.17 no.4
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    • pp.1-5
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    • 2018
  • Atomic force microscopy (AFM) simulation for Si (001) surface defects was conducted by using density functional theory (DFT). Three major defects on the Si (001) surface are difficult to analyze due to external noises that are always present in the images obtained by AFM. Noise-free surface defects obtained by simulation can help identify the real surface defects on AFM images. The surface defects were first optimized by using a DFT code. The AFM tip was designed by using five carbon atoms and positioned on the surface to calculate the system's energy. Forces between tip and surface were calculated from the energy data and converted into an AFM image. The simulated AFM images are noise-free and, therefore, can help evaluate the real surface defects present on the measured AFM images.

Determination of Surface Energy by Means of Home-Made Goniometer and Image Analyzing Software for Contact Angle Measurement (수제 접촉각 측정기와 영상 분석 프로그램을 이용한 표면에너지의 측정)

  • Cho, Seo-Rin;Cho, Han-Gook
    • Journal of the Korean Chemical Society
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    • v.57 no.4
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    • pp.432-438
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    • 2013
  • We report a contact angle goniometer that can be easily assembled and used in high school and general chemistry experiments. It consists of an LED flash, a sample stand, and a camera fixed on an optical bread board, and the sample area is covered to block light from outside with a box with holes on both sides. ImageJ, free image analyzing software and a JAVA plugin (Drop_analysis) were used to determine the contact angle of liquid drop resting on solid surface. The contact angles of various liquids were successfully measured on various surfaces. The solid surface energies have also been determined using the Owen-Wendt method from the contact angles of $H_2O$ and $CH_2I_2$. The results reasonably agree with the previously reported values, showing the surface characteristics and modification as well as the dispersive and polar contributions. These contact angle goniometer and method for determination of the contact angle and surface energy can be applied to observation of various surface properties including wettability, hydrophilicity, and water repelling. Students can learn how the surface properties are related to the intermolecular interactions and gain experience about the equilibrium between the related forces, optics, and mathematical derivations.

The Preparation of Phosphor Screen for Video Phone Tube by Screen Printing Method (Screen Printing법에 의한 Video Phone Tube용 형광막 제조)

  • Lee Mi-Young;Lee Jong-Wook;Kim Young-Bae;Nam Su-Yong;Lee Sang-Nam;Moon Myung-Jun
    • Journal of Environmental Science International
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    • v.14 no.8
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    • pp.801-810
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    • 2005
  • The phosphor and ITO(Indium Tin Oxide) films for video phone tube (VPT) were simply prepared by the screen printing and thermal transfer methods. The increasing order of thermal firing of acrylic binder for phosphor and ITO was M6003 < M6664 < A/A 1919 < M500l < M670 1 and all mass of binders were perfectly decomposed at lower temperature than $400^{\circ}C.$ After thermal firing of phosphor paste, the residual of binder on the surface of phosphor could not be found by SEM. Aerosil as thickner provides the thixotropy property for phosphor paste but decrease the brightness of phosphor screen as residual after thermal firing. Since the thixotropy of M5001 binder without aerosil was shown and the storage modulus of phosphor paste by increasing the angular frequency was not nearly changed and the decrease of the storage modulus of phosphor paste by increasing the strain was remarkably shown. It was possible to prepare the phosphor paste which was predominant in the plate separation and the reproduction of pattern after the screen printing. Since the addition of dispersing agent to improve the printing process decreases the electrical conductivity and light transmission of ITa film, it could be found to be necessary the development of binder for phosphor paste that decreases the amount of dispersing agent possibly and does not use the aerosil as additive.

Fast and Efficient Method for Fire Detection Using Image Processing

  • Celik, Turgay
    • ETRI Journal
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    • v.32 no.6
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    • pp.881-890
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    • 2010
  • Conventional fire detection systems use physical sensors to detect fire. Chemical properties of particles in the air are acquired by sensors and are used by conventional fire detection systems to raise an alarm. However, this can also cause false alarms; for example, a person smoking in a room may trigger a typical fire alarm system. In order to manage false alarms of conventional fire detection systems, a computer vision-based fire detection algorithm is proposed in this paper. The proposed fire detection algorithm consists of two main parts: fire color modeling and motion detection. The algorithm can be used in parallel with conventional fire detection systems to reduce false alarms. It can also be deployed as a stand-alone system to detect fire by using video frames acquired through a video acquisition device. A novel fire color model is developed in CIE $L^*a^*b^*$ color space to identify fire pixels. The proposed fire color model is tested with ten diverse video sequences including different types of fire. The experimental results are quite encouraging in terms of correctly classifying fire pixels according to color information only. The overall fire detection system's performance is tested over a benchmark fire video database, and its performance is compared with the state-of-the-art fire detection method.