• Title/Summary/Keyword: chemical filter

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A study of improving filtration efficiency through SiC whisker synthesis on carbon felt by CVD VS method

  • Kim, Gwang-Ju;Choe, Du-Jin
    • Proceedings of the Korean Vacuum Society Conference
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    • 2016.02a
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    • pp.150-150
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    • 2016
  • Mankind is enjoying a great convenience of their life by the rapid growth of secondary industry since the Industrial Revolution and it is possible due to the invention of huge power such as engine. The automobile which plays the important role of industrial development and human movement is powered by the Engine Module, and especially Diesel engine is widely used because of mechanical durability and energy efficiency. The main work mechanism of the Diesel engine is composed of inhalation of the organic material (coal, oil, etc.), combustion, explosion and exhaust Cycle process then the carbon compound emissions during the last exhaust process are essential which is known as the major causes of air pollution issues in recent years. In particular, COx, called carbon oxide compound which is composed of a very small size of the particles from several ten to hundred nano meter and they exist as a suspension in the atmosphere. These Diesel particles can be accumulated at the respiratory organs and cause many serious diseases. In order to compensate for the weak point of such a Diesel Engine, the DPF(Diesel Particulate Filter) post-cleaning equipment has been used and it mainly consists of ceramic materials(SiC, Cordierite etc) because of the necessity for the engine system durability on the exposure of high temperature, high pressure and chemical harsh environmental. Ceramic Material filter, but it remains a lot of problems yet, such as limitations of collecting very small particles below micro size, high cost due to difficulties of manufacturing process and low fuel consumption efficiency due to back pressure increase by the small pore structure. This study is to test the possibility of new structure by direct infiltration of SiC Whisker on Carbon felt as the next generation filter and this new filter is expected to improve the above various problems of the Ceramic DPF currently in use and reduction of the cost simultaneously. In this experiment, non-catalytic VS CVD (Vapor-Solid Chemical Vaporized Deposition) system was adopted to keep high mechanical properties of SiC and MTS (Methyl-Trichloro-Silane) gas used as source and H2 gas used as dilute gas. From this, the suitable whisker growth for high performance filter was observed depending on each deposition conditions change (input gas ratio, temperature, mass flow rate etc.).

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Investigation for Utilization of Separator Bag Filter Cement (세퍼레이터 백필터 집진 미립자시멘트 (SBFC : Separator Bag Filter Cement)의 활용성 검토)

  • Kim, Kyoung-Min;Park, Sang-Joon;Yoo, Jea-Kang;Lee, Eui-Bae
    • Journal of the Korean Recycled Construction Resources Institute
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    • v.5 no.3
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    • pp.78-83
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    • 2010
  • This paper presents the feasibility of incorporating ultrafine particles collected in the separator bag filter (separator bag filter cement, SBFC) during the cement manufacturing process as an substitution material for cement. SBFC does not require additional processes needed in the existing processes to manufacture high early strength cement such as modifying mineral components and adjusting the firing temperature. Moreover, it can also solve the issue of efficiency decrease resulted from the increase of the grinding time applied in the existing process of manufacturing microcement. Therefore, this research has examined the characteristics of SBFC and fresh properties and mechanical properties after making paste and mortar using SBFC in order to use SBFC as a material to gain early strength of concrete. For results, analyzing the chemical composition and physical properties of SBFC, its blaine value was $6,953cm^3/g$, about double than that of OPC, but its chemical composition showed no significant difference. According to the result of the paste and mortar examination, the paste and mortar mixed with SBFC showed a lower flowability, earlier setting time, and higher compressive strength than that with OPC. The result of microstructure analysis of paste, the paste mixed with SBFC indicated about 9% lower internal porosity at an early age than that of OPC. The compressive strength and flexural strength of mortar were higher in the order of SBFC ratio of 100, 50 and 0% SBFC.

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Effects of Various Facility Factors on CMP Process Defects (CMP 공정의 설비요소가 공정 결함에 미치는 영향)

  • Park, Seong-U;Jeong, So-Yeong;Park, Chang-Jun;Lee, Gyeong-Jin;Kim, Gi-Uk;Seo, Yong-Jin
    • The Transactions of the Korean Institute of Electrical Engineers C
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    • v.51 no.5
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    • pp.191-195
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    • 2002
  • Chemical mechanical Polishing (CMP) process is widely used for the global planarization of inter-metal dielectric (IMD) layer and inter-layer dielectric (ILD) for deep sub-micron technology. However, as the IMD and ILD layer gets thinner, defects such as micro-scratch lead to severe circuit failure, which affect yield. In this paper, for the improvement of CMP process, deionized water (DIW) pressure, purified $N_2$ ($PN_2$) gas, point of use (POU) slurry filler and high spray bar (HSB) were installed. Our experimental results show that DW pressure and P$N_2$ gas factors were not related with removal rate, but edge hot-spot of patterned wafer had a serious relation. Also, the filter installation in CMP polisher could reduce defects after CMP process, it is shown that slurry filter plays an important role in determining consumable pad lifetime. The filter lifetime is dominated by the defects. However, the slurry filter is impossible to prevent defect-causing particles perfectly. Thus, we suggest that it is necessary to install the high spray bar of de-ionized water (DIW) with high pressure, to overcome the weak-point of slurry filter Finally, we could expect the improvements of throughput, yield and stability in the ULSI fabrication process.

Comparison of Particle Loading Characteristics onto Ceramic Candle Filters in Filtration System at Different Gas Inflow Pattern (가스 유입 방식에 따른 집진장치 내에서의 세라믹 캔들 필터로의 입자 부하 특성 비교)

  • Park, Seok-Joo;Lim, Jeong-Hwan;Lim, Kyeong-Soo
    • Korean Chemical Engineering Research
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    • v.46 no.5
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    • pp.983-987
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    • 2008
  • Computational simulation has been performed to design optimally the filtration system for IGCC pilot plant. It was analyzed how the different inflow pattern influences the flow field and the particle behavior in a filter vessel. The particle loading onto the filter surface lowers significantly and decreases dramatically with particle size when the dusty gas flows into the filter vessel with a shroud tube through a tangential inlet setup tangentially on the vessel outer wall. However, the particle loading is considerably high when the dusty gas enters the filter vessel through a normal inlet setup vertically on the vessel top wall, and the decrease of the particle loading with particle size is not steeper compared with the tangential inflow pattern.

Technology of VOC Removal in Air by Biotrickling Filter (생물살수여과법을 이용한 공기 중 VOC 제거 기술)

  • ;Marc A. Deshusses
    • Journal of Korean Society for Atmospheric Environment
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    • v.19 no.1
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    • pp.101-112
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    • 2003
  • Biological methods are frequently used for treatment of contaminated air, containing volatile organic compounds and odor compounds in low concentrations and high flow rate of air streams. For more than 20 years. biofilter has been recognized as a cost effective technology for the purification of contaminated air. Most commercial applications before 1990 were for control of odors. In the past decades major progress has been accomplished in the development of vapor phase bioreactor. in particular biotrickling filers. Biotrickling filters are more complex than biofilters. but are usually more effective, especially for the treatment of compounds which are difficult to degrade or compounds that generate acidic by-products. While the level of understanding of biotrickling filtration process for VOCs still remains limited. the evidence success of biotreatment of VOC in air resulted in pursuing active research. This paper presents fundamental and practical aspert of VOCs treatment from air in biotrickling filter. Special emphasis is given to the operating parameters and the factors influencing performance for biotrickling filter.

A Survey of water pollution and the development of water treatment system on agricultural Area (농어촌의 수질오염과 수질특성에 적합한 정수 처리시스템의 개발에 관한 연구(1))

  • 정문호;김영규;조태석;배현주;신명옥;김수연;김민지;김민영;김수복
    • Journal of environmental and Sanitary engineering
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    • v.12 no.2
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    • pp.65-74
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    • 1997
  • The purpose of this study was to investigate the removal effect and variation of contaminated water by various water treatment processes using sediment filter, activated carbon, photocatalysis, reverse osmosis, ultra violet sterilizer and ultra filtration. The removal effect of chloride and trace metal was low by activated carbon and ultra filter but high in reverse osmosis. The removal effect of bacteria and E. coli was low by activated carbon and membrane filter system using activated carbon but high in impregnated activated carbon. The removal effect of TCE was low in sand and ultra filter system as compared with activated carbon. Ultra filtration process was effective for purify agricultural water without E.coli. Reverse osmosis was effective to remove heavy metal and activated carbon was effective to remove halogenated organic chemical compound. The flux and the removal effect of COD in spiral wound ultrafilter were higher than the hollow fiber ultrafilter.

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