• ETRI Journal
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• 제16권1호
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• pp.45-57
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• 1994

The effects of reactive ion etching (RIE) of $SiO_2$ layer in $CHF_3/C_2F_6$ on the underlying Si surface have been studied by X-ray photoelectron spectroscopy (XPS), secondary ion mass spectrometer, Rutherford backscattering spectroscopy, and high resolution transmission electron microscopy. We found that two distinguishable modified layers are formed by RIE : (i) a uniform residue surface layer of 4 nm thickness composed entirely of carbon, fluorine, oxygen, and hydrogen with 9 different kinds of chemical bonds and (ii) a contaminated silicon layer of about 50 nm thickness with carbon and fluorine atoms without any observable crystalline defects. To search the removal condition of the silicon surface residue, we monitored the changes of surface compositions for the etched silicon after various post treatments as rapid thermal anneal, $O_2$, $NF_3$, $SF_6$, and $Cl_2$ plasma treatments. XPS analysis revealed that $NF_3$ treatment is most effective. With 10 seconds exposure to $NF_3$ plasma, the fluorocarbon residue film decomposes. The remained fluorine completely disappears after the following wet cleaning.

• 한국환경과학회지
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• 제16권3호
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• pp.299-310
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• 2007

It will be necessary to make proper management plans to preserve the air quality in good level for the public. In order to make these plans, source information and detail emission inventories of the city and near industrial areas should be given. However, lack of the source measurements data makes us more difficult to complete the source inventory. VOC source Inventory could be utilized for the feasibility study to estimate the contribution of VOC sources presenting to the receptor such as residential area. It may give policy maker an idea how to control the air quality, and improve their social environment in the area. This study shows data that measured VOCs concentrations from the local industrial areas in Jeonju during from May 2005 to January 2006. The samples were collected from the near sources in 7 major factories in the industrial park as well as 5 general sources in near city Jeonju area to elucidate the abundances of speciated VOCs and their spacial and temporal distributions depending on source bases. Industrial sources are as follows; chemical, food, paper, wood, metal, non-metal (glass), and painting (coating) industries. The 5 general sources are sampled from tunnel, gasoline gas station, dry cleaning shop, printing (copy) shop, and road pavement working place in urban area. To understand the near source effect at receptor, samples from the 2 receptor sites (one is at center of the industrial complex and the other site is at distance residential area downwind from the center) were collected and analyzed for the comparison to source concentration. The mass contributions of the speciated VOC to total mass of VOCs measured from the different sources and ambient (2 receptors) were presented and discussed.

• 상하수도학회지
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• 제25권1호
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• pp.95-106
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• 2011

Even though MBR processes have many advantages such as high quality effluents, a small footprint and convenience for operation compared to conventional activated sludge processes, there are some shortcomings in terms of the cost and potential fouling incident that keeps MBR (Membrane bioreactor) processes from being widely applied. To reduce these problems, PTFE (Polytetrafluoroethylene) flat sheet membranes that have excellent permeability and durability were tested instead of PVDF (Polyvinylidene fluoride) membrane which is being used widely in water treatment. Low concentration of sodium hydroxide (NaOH) was also added into the membrane modules in order to prevent the membrane fouling as well as to provide the alkalinity. With conditions mentioned above, a pilot-scale MBR system based on the MLE (Modified Ludzack Ettinger) process was operated at flux of 40 $L/m^{2}/hr$ and over 15,000 mg/L MLSS concentration for about 8 months. And coagulant(alum) was added into the membrane tank to remove phosphorus. Although the more coagulant is added the more effectively phosphorus is removed, that can lead to fouling for a long operation(Ronseca et al.,2009). By the way there is a research that fouling grow up after stopping injection of coagulant(Holbrook, 2004). Stable operation of MBR systems was achieved without major chemical cleaning and the effluent quality was found to be good enough to comply with the treated waste water quality regulations of the Korea.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2009년도 제38회 동계학술대회 초록집
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• pp.86-86
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• 2010

Micro- and nanoscale texturing and control of surface energy have been considered for superhydrophobicity on polymer and silicon. However these surfaces have been reported to be difficult to meet the robustness and transparency requirements for further applications, from self cleaning windows to biochip technology. Here we provided a novel method to fabricate a nearly superhydrophobic soda-lime glass using two-step method. The first step involved wet etching process to fabricate micro-sale patterns on soda-lime glass. The second step involved application of $SiO_x$-incorporated DLC to generate high intrinsic contact angle on the surface using chemical vapor deposition (CVD) process. To investigate the effect of surface roughness, we used both positive and negative micro-scale patterns on soda-limeglass, which is relatively hard for surface texturing in comparison to quartz or Pyrex glasses due to the presence of impurities, but cheaper. For all samples we tested the static wetting angle and transparency before and after 100 cycles of wear test using woolen steel. The surface morphology is observed using optical and scanning electron microscope (SEM). The results shows that negative patterns had a greater wear resistance while the hydrophobicity was best achieved using positive patterns having static contact angle up to 140 deg. with about 80% transparency. The overall experiment shows that positive patterns at etching time of 1 min shows the optimum transparency and hydrophobicity. The optimization of micro-scale pattern to achieve a robust, transparent, superhydrophobic soda-lime glass will be further investigated in the future works.

• 멤브레인
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• 제23권1호
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• pp.45-53
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• 2013

현재 분리막 여과 공정은 정수처리에서 많은 관심을 받고 있다. 하지만, 분리막의 효율적인 운영을 위하여 '혼화/응집(/침전)' 등의 전처리 시설 설치로 인한 부지면적 및 비용증가와 5~10%의 배출수 문제가 추가적으로 발생한다. 그래서 본 연구에서는 전처리 공정 없이 지표수(한강)에 대하여 가압식 PVDF 분리막[(주)에코니티]으로 운전하여 성능을 검토하였으며 그 결과 1년 동안 화학적 세정 없이 여과 flux가 1~2.4 m/d (at $25^{\circ}C$)로 운전되었고, 유입원수의 탁도와 상관없이 분리막 처리수의 탁도는 0.05 NTU 이하로 안정되게 유지되었다. 또한, 회수율 제고를 위하여 1개월 동안 가압식 배출수(역세수 + 배수)를 침지식 PE 분리막[(주)에코니티]으로 연계하여 2단 막여과 운영을 한 결과 전체 공정 회수율을 99.5%까지 증가시킬 수 있었다.

• 상하수도학회지
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• 제19권2호
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• pp.200-208
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• 2005

In this study, a new submerged membrane bioreactor process packed with granular sulfur (MBR-GS) was operated to identify the biological nitrogen removal behaviors with plating wastewater containing high-strength $NO_3{^-}$ concentration. The continuous denitrification was carried out at $20^{\circ}C$ with various nitrogen loading rates using synthetic wastewater, which composed of $NO_3{^-}$ and $HCO_3{^-}$, but also actual plating wastewater, which was collected from the effluent of the H metal plating company. As a result, high-rate denitrification in the range of $0.8kg\;NO_3{^-}-N/m^3\;day$ was accomplished at nitrogen loading rate of $0.9kg\;NO_3{^-}-N/m^3\;day$ using synthetic wastewater. Also, higher-rate denitrification with actual plating wastewater was achieved up to $0.91kg\;NO_3{^-}-N/m^3\;day$ at the loading rate of $1.11kg\;NO_3{^-}-N/m^3\;day$. Additionally, continuous filtration was possible during up to 30 days without chemical cleaning in the range of 20 cmHg of transmembrane pressure. On the basis of the proposed stoichiometry, ${SO_4}^{2-}$ production could be estimated efficiently, while observed alkalinity consumption was somewhat lower than theoretical value. Consequently, a new process, MBR-GS is capable of high-rate autotrophic denitrification by compulsive flux and expected to be utilized as an alternative of renovation techniques for nitrogen removal from not only plating wastewater but also municipal wastewater with low C/N ratio.

• Toxicological Research
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• 제26권2호
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• pp.101-108
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• 2010

Halogenated organic compounds, such as 1-bromobutane (1-BB), have been used as cleaning agents, agents for chemical syntheses or extraction solvents in workplace. In the present study, immunotoxic effects of 1-BB and its conjugation with glutathione (GSH) were investigated in female BALB/c mice. Animals were treated orally with 1-BB at 375, 750 and 1500 mg/kg in corn oil once for dose response or treated orally with 1-BB at 1500 mg/kg for 6, 12, 24 and 48 hr for time course. S-Butyl GSH was identified in spleen by liquid chromatography-electrospray ionization tandem mass spectrometry. Splenic GSH levels were significantly reduced by single treatment with 1-BB. S-Butyl GSH conjugates were detected in spleen from 6 hr after treatment. Oral 1-BB significantly suppressed the antibody response to a T-dependent antigen and the production of splenic intracellular interlukin-2 in response to Con A. Our present results suggest that 1-BB could cause immunotoxicity as well as reduction of splenic GSH content, due to the formation of GSH conjugates in mice. The present results would be useful to understand molecular toxic mechanism of low molecular weight haloalkanes and to develop biological markers for exposure to haloalkanes.

• 한국자원공학회지
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• 제55권6호
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• pp.517-526
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• 2018

본 연구는 가학광산 오염토양 정화를 위해 토양 세척 최적조건을 수립하는데 목적이 있다. 연구지역 내 토양은 다양한 중금속에 의해 오염되어 있는데 특히 구리, 납, 아연의 농도가 높게 나타난다. 염산을 활용한 세척실험 결과 1 M의 농도로 30분 세척 시 중금속의 제거 효과가 가장 좋게 나타났다. 전체 토양의 38%는 1.18 mm 이상의 굵은 입자로 오염도가 상대적으로 낮으나 0.075 mm 이하의 작은 입자들은 오염도가 높아 고농도의 염산용액과 긴 세척시간에도 불구하고 오염도를 기준치 이내로 낮추기 어려웠다. 따라서 오염도가 높고, 중금속 농도 저감이 어려운 작은 토양입자들을 토양세척 이전에 물리적인 방법으로 분리할 필요가 있는 것으로 판단된다. 습식 사이클론을 활용한 연속식 토양세척 실험 결과 20% 이상의 미립자를 제거한 경우 오염토양의 중금속 농도를 기준치 이내로 저감시킬 수 있었다.

• 에너지공학
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• 제28권1호
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• pp.49-56
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• 2019

본 연구에서는 발전소에서 사용되는 부품의 넓은 표면을 세정하기 위한 브라스팅 노즐을 비압축성 유동해석에 기초하여 설계하였다. 설계된 노즐의 출구측 단면은 광폭의 직선 모양이다. 설계 후 3차원 프린팅으로 노즐 시제품을 제작하였고 이를 브라스팅 머신에 장착 후 세정 성능실험을 수행하였다. 해석 후 얻은 광폭 크기와 실험 후 시편 표면에서 얻은 세정된 광폭 크기가 거의 같았다. 이로부터 대면적 표면처리를 위한 브라스팅 노즐의 설계가 유효함을 확인하였다.

• 멤브레인
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• 제32권2호
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• pp.100-108
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• 2022

다양한 산업 중에서 섬유 산업은 섬유 염색을 위해 가장 많은 양의 물을 사용하는데, 이는 여러 종류의 염료를 포함한 폐수의 방대한 배출로 이어진다. 염료의 제거를 위한 방법에는 오존 처리, 흡착 등의 다양한 처리 방법이 존재한다. 하지만 이러한 처리 방법은 폐수 재사용의 문제로 인해 처리 가격이 상승하기 때문에 성공적이지 못하다. 이에 대한 대안으로 막분리 공정이 폐수의 염료 처리를 위한 가장 적절한 기술로 보고되고 있다. 이때 사용되는 분리막은 고분자 분리막과 세라믹 분리막으로 나눌 수 있다. 세라믹 분리막의 장점에는 세척의 용이함, 긴 수명, 내열성, 내화학성, 그리고 기계적 안정성이 있다. 세라믹 분리막은 다양한 원료로 만들 수 있으며, 점토, 제올라이트, 플라이 애시와 같은 천연 재료는 저렴하고 구하기 용이하다. 본 리뷰에서 폐수처리는 크게 한외여과(ultrafiltration), 정밀여과(microfiltration), 그리고 나노여과(nanofiltration) 세가지 공정으로 나누어져 있다.