• 반도체디스플레이기술학회지
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• 제16권3호
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• pp.41-46
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• 2017

This study aims to select suitable co-solvents and to obtain optimal process conditions in order to improve process efficiency and productivity through experimental results obtained under various experimental conditions for the etching and rinsing process using liquid carbon dioxide and supercritical carbon dioxide. Acetone was confirmed to be effective through basic experiments and used as the etching solution for MEMS-wafer etching in this study. In the case of using liquid carbon dioxide as the solvent and acetone as the etching solution, these two components were not mixed well and showed a phase separation. Liquid carbon dioxide in the lower layer interfered with contact between acetone and Mems-wafer during etching, and the results after rinsing and drying were not good. Based on the results obtained under various experimental conditions, the optimum process for treating MEMS-wafer using supercritical CO2 as the solvent, acetone as the etching solution, and methanol as the rinsing solution was set up, and MEMS-wafer without stiction can be obtained by continuous etching, rinsing and drying process. In addition, the amount of the etching solution (acetone) and the cleaning liquid (methanol) compared to the initial experimental values can be greatly reduced through optimization of process conditions.

• Membrane and Water Treatment
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• 제13권3호
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• pp.121-128
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• 2022

A tremendous amount of energy resources is being wasted in cleaning wastewater to save the environment across the globe. Several different procedures are commercially available to process wastewater. In this work, membrane filtration technique is used to treat the textile wastewater because of its cost effectiveness and low environmental impacts. Mixed Matrix Membrane (MMM) consist of Polyvinyl Alcohol (PVA) in which Graphene Oxide (GO) was added as a filler material. Five different membranes by varying the quantity of GO were prepared. The prepared membrane has been characterized by Scanning Electron Microscopy (SEM), X-Ray Diffractometry (XRD), Fourier Transformed Infrared Spectroscopy (FTIR) and Water Contact Angle (WCA). The prepared membranes have been utilized to treat textile wastewater. The synthesized membranes are used for the elimination of total dissolve solids (TDS), total suspended solids (TSS), Methylene blue (MB) dye and copper metallic ions from textile wastewater. It is concluded that amount of GO has direct correlation with the quality of wastewater treatment. The maximum removal of TDS, TSS, MB and copper ions are found to be 7.42, 23.73, 50.53 and 64.5% respectively and are achieved by 0.02 wt% PVA-GO membrane.

• Membrane and Water Treatment
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• 제8권3호
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• pp.279-292
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• 2017

This study was aimed at ultrafiltration (UF) as a pretreatment before reverse osmosis (RO) within the scheme of hybrid reverse osmosis-multistage flush (RO-MSF) desalination. Seawater at elevated temperature (after MSF heat-exchangers) was used as a feed in this process. The pretreatment system was represented as a set of functionally-linked technological segments such as: UF filtration, backwashing, chemical- enhanced backwashing, cleaning, waste disposal, etc. The process represents the sequences of operating cycles. The cycle, in turn, consists of the following unit operations: filtration, backwashing and chemical-enhanced backwashing (CEB). Quantitative assessment was based on the following indicators: normalized permeability, transmembrane pressure, specific energy and water consumption, specific waste generation. UF pre-treatment is accompanied by the following waste streams: $W1=1.19{\times}10$ power of $-2m^3$ (disposed NaOCl with 0.0044% wt.)/$m^3$ (filtrate); $W2=5.95{\times}10$ power of $-3m^3$ (disposed $H_2SO_4$ with 0.052% wt.)/$m^3$(filtrate); $W3=7.26{\times}10$ power of $-2m^3$ (disposed sea water)/$m^3$ (filtrate). Specific energy consumption is $1.11{\times}10$ power of $-1kWh/m^3$ (filtrate). The indicators evaluated over the cycles with conventional (non-chemical) backwashing were compared with the cycles accompanied by CEB. A positive impact of CEB on performance indicators was demonstrated namely: normalized UF resistance remains unchanged within the regime accompanied by CEB, whereas the lack of CEB results in 30% of its growth. Those quantitative indicators can be incorporated into the target function for solving different optimization problems. They can be used in the software for optimisation of operating regimes or in the synthesis of optimal flow- diagram. The cycle characteristics, process parameters and water quality data are attached.

• 한국진공학회지
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• 제20권2호
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• pp.86-92
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• 2011

본 연구에서는 새롭게 개발된 센서인 in-situ particle monitor (ISPM)와 기존센서의 기능을 업그레이드 한 센서인 self-plasma optical emission spectroscopy (SPOES)를 이용해 화학기상증착 진공공정을 진단하였다. 본 연구에서 사용된 증착공정 장비는 silane 가스를 이용한 silicon plasma enhanced chemical vapor deposition과 borophosphosilicate glass 증착장비이다. 두 장비의 증착 또는 클리닝 조건에서의 배출되는 오염입자와 배기가스를 개발된 센서를 이용해 공정상태를 실시간으로 진단하는 것과 개발된 센서의 센싱 능력을 검증하고자 하는 목적으로 연구가 진행되었다. 개발된 센서는 장비 배기구 설치되었으며, 공정압력, 유량, 플라즈마 파워 등의 공정변수 변화에 따른 오염입자 크기 및 분포와 배기 부산물의 변화를 측정하고, 측정 결과의 상호 연관성을 분석하였다.

• Tribology and Lubricants
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• 제35권5호
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• pp.274-285
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• 2019

Chemical mechanical polishing (CMP), which is a material removal process involving chemical surface reactions and mechanical abrasive action, is an essential manufacturing process for obtaining high-quality semiconductor surfaces with ultrahigh precision features. Recent rapid growth in the industries of digital devices and semiconductors has accelerated the demands for processing of various substrate and film materials. In addition, to solve many issues and challenges related to high integration such as micro-defects, non-uniformity, and post-process cleaning, it has become increasingly necessary to approach and understand the processing mechanisms for various substrate materials and abrasive particle behaviors from a tribological point of view. Based on these backgrounds, we review recent CMP R&D trends in this study. We examine experimental and analytical studies with a focus on substrate materials and abrasive particles. For the reduction of micro-scratch generation, understanding the correlation between friction and the generation mechanism by abrasive particle behaviors is critical. Furthermore, the contact stiffness at the wafer-particle (slurry)-pad interface should be carefully considered. Regarding substrate materials, recent research trends and technologies have been introduced that focus on sapphire (${\alpha}$-alumina, $Al_2O_3$), silicon carbide (SiC), and gallium nitride (GaN), which are used for organic light emitting devices. High-speed processing technology that does not generate surface defects should be developed for low-cost production of various substrates. For this purpose, effective methods for reducing and removing surface residues and deformed layers should be explored through tribological approaches. Finally, we present future challenges and issues related to the CMP process from a tribological perspective.

• 한국방재안전학회논문집
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• 제17권1호
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• pp.27-35
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• 2024

본 논문은 순환골재 표면에 부착된 시멘트 페이스트 및 모르타르를 제거하는 데 있어 화학적 중화반응 및 초음파 세척의 적용 가능성을 평가하기 위한 실험적 연구 결과를 제시한다. 최적의 초음파 세척 효율 및 화학적 중화반응을 도출하기 위하여 초음파 진동수, 화학용액의 종류 등을 변수로 한 실험이 수행되었다. 그 결과 최적 진동수는 24 kHz로 나타났으며, 염산 15% 용액에 침지시킨 후 30분 가진하는 것이 최적 조건이라는 결론이 도출되었다. 또한, 품질 개선된 순환 굵은 골재의 비중, 흡수율, 마모율은 일반골재와 유사하며 KS F 2527 기준을 모두 만족하는 것으로 나타났다. 따라서, 본 연구를 통해 제안된 방법을 통해 품질 개선된 순환골재는 콘크리트용으로 사용이 가능할 것으로 판단된다.

• 한국건설순환자원학회논문집
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• 제6권2호
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• pp.108-114
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• 2018

콘크리트 구조물은 사용기간 동안 표면 열화 및 오염으로 인해 미관의 저하 및 내구성 저하가 발생된다. 최근 들어 광촉매(photocatalyst)를 이용하여 유기산화물을 제거하고 표면자기정화(self cleaning) 성능을 개선하려는 연구가 시도되고 있다. 본 논문은 실리케이트 기반 광촉매 함침을 위한 기초연구로서 CS와 SC 두 가지 함침 용액을 대상으로 하였다. 실리케이트 기반 용액의 점성과 표면장력을 평가하였으며 콘크리트에 적용하여 부착강도를 평가하였다. 또한 실리케이트 용액에 침지된 콘크리트에 대하여, 광촉매 용액의 침지 및 분무를 한 후 콘크리트 강도 평가와 SEM을 통한 표면상태를 조사하였다. 실리케이트 용액의 침지 후 30분간 기건 상태를 유지하고 분무하는 방법이 가장 효과적으로 광촉매의 표면 흡착을 유도하는 것으로 평가되었으며, 강도 개선에도 효과적임을 알 수 있다.

• 한국토양환경학회지
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• 제4권1호
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• pp.69-73
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• 1999

PCAPS는 토양 간극수를 효율적으로 포집하기 위해서 fiberglass wick의 모세관 잠재력을 이용하여 토양오염을 조사하는 장치이다. Fiberglass에 붙어 있는 불순물은 wick의 모세관 성질과 포집된 시료의 화학적 성질에 영향을 미치게 되므로 4가지 처리방법들 (소각처리, 아세톤처리, 세정제처리, 비세척)을 이용하여 불순물을 제거하였다. Wick은 미국의 PPG Industries와 Manville Company에서 생산되는 제품을 사용하였다. 실험결과로, PPG fiber는 소각처리에 의해 원래 부피의 3.4%정도 손실되었으며, Manville fiber 는 0.6%미만이 손실되었다. 이들 손실은 제작과정에 사용된 유기합성물이 소각되면서 발생하였다. 모든 세척방법들은 비세척 방법보다 모세관의 상승높이가 더 크게 나타났다. 소각이 가장 좋은 세척방법으로 나타났으며 40$0^{\circ}C$의 온도에서 4시간 처리시 불순물의 98~100%를 제거할 수 있었다.

• 한국물환경학회지
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• 제28권2호
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• pp.269-276
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• 2012

The surface characteristics and performance of PTFE (polytetrafluoroethylene) hollow fiber membranes have been systematically investigated at lab- and pilot-scale to assess their application to membrane-bioreactor, particularly for integrating wastewater reclamation and rainwater harvesting. The PTFE membrane expressed some surface features, such as hydrophobicity, which might enhance membrane fouling. However, lab-scale performance and cleaning experiments under various conditions demonstrated that the PTFE membrane could produce the desirable water flux with good cleaning efficiency, implying easy operation and maintenance due to superior chemical resistance of PTFE membranes. Most of effluent water qualities were met with Korean standard for discharge and reuse, except color. Color level was further reduced by blending with rainwater at 75:25 ratio. Based on the lab-scale experimental results, the pilot plant was designed and operated. Pilot operation clearly showed sTable performance with satisfactory water quality, suggesting that PTFE membrane could be applied for decentralized MBR integrated with rainwater use.

• 상하수도학회지
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• 제22권4호
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• pp.429-436
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• 2008

Membrane system has been increasingly considered as a safe and cost-effective water treatment process especially in case of small scale water works. This research is a basis of membrane application in water works through a long period test with obtaining operation skills and evaluation of water quality and cost competitiveness. For the research, the UF membrane system was installed in small water treatment plant that uses river-bed water as raw water. The system was consisted of 2 stage membrane and operated in constant flow mode (Flux: 1.5, 1.0, 0.9, 0.6). In each different flux condition, TMP trends were showed better results at lower flux condition. And through the high flux condition test, it is certified that membrane system could deal with breakdown of one stage. Water quality of permeate was satisfied the water quality standards especially turbidity. To know what mainly causes fouling on membrane, the test by membrane with several cleaning agents and EDX analysis have done in lab. Through the tests, ferrous concentration in raw water, backwashing water and membrane surface etc. was high and it causes fouling inside and outside of membrane. So acid cleaning using organic acid such as oxalic acid is necessary in Chemical in Place (CIP). At the economical aspect the electrical cost of membrane system is higher than that of slow sand filtration but labor cost can be reduced by automation. However, the use of labor should be determined considering effectiveness and stability of operation. Because during the operation, there are several breakdown such as electrical shock by lightning, water drop in summer, etc.