• 제목/요약/키워드: charge-redistribution

검색결과 23건 처리시간 0.016초

Study of the Structure Change on Ion-Beam-Mixed CoPt Alloys.

  • Son, J.H.;Lee, Y.S.;Lim, K.Y.;Kim, T.G.;Chang, G.S.;Woo, J.J.;Whang, C.N.
    • 한국진공학회:학술대회논문집
    • /
    • 한국진공학회 1998년도 제14회 학술발표회 논문개요집
    • /
    • pp.135-136
    • /
    • 1998
  • By the ion bombardment the original discrete layered structure is damaged and a uniformly mixed layer is formed by the intermixing of the films. Immediately after this dynamic cascade mixing a structure of this mixed layer is likely to be a mixture of randomly distributed atoms. Subsequently the mixed layered structure becomes a non-equilibrium structure such as the metastable pphase because the kinetic energies of the incident ions rappidly dissippate and host atoms within the collision cascade region are quenched from a highly energetic state. The formation of the metastable transition metal alloys using ion-beam-mixing has been extensively studied for many years because of their sppecific ppropperties that differ from those of bulk materials. in ion-beam-mixing the alloy or comppound is formed due to the atomic interaction between different sppecies during ion bombardment. in this study the metastable pphase formed by ion-beam-mixing pprocess is comppared with equilibrium one by arc-melting method by GXRD and XAS. Therfore we studied the fundamental characteristics of charge redistribution uppon alloying and formation of intermetallic comppounds. The multi-layer films were depposited on a wet-oxidized Si(100) substrate by sequential electron beam evapporation at a ppressure of less than 5$\times$10-7 Torr during depposition. These compprise 4 ppairs of Co and ppt layers where thicknesses of each layer were varied in order to change the alloy compposition.

  • PDF

전하트랩형 NVSM의 게이트 유전막을 위한 질화산화막의 재산화특성에 관한 연구 (Characteristics of reoxidation of nitried oxide for gate dielectric of charge trapping NVSM)

  • 이상은;한태현;서광열
    • 한국결정성장학회지
    • /
    • 제11권5호
    • /
    • pp.224-230
    • /
    • 2001
  • 초박막 게이트 유전막 및 비휘발성 기억소자의 게이트 유전막으로 연구되고 있는 $NO/N_2O$ 열처리된 재산화 질화산 화막의 특성을 D-SIMS(Dynamic Secondary Ion Mass Spectrometry), ToF-SIMS(Time-of-Flight Secondary Ion Mass Spectrometry), AES(Auger Electron Spectroscopy)으로 조사하였다. 시료는 초기산화막 공정후에 NO 및 $N_2O$ 열처리를 수행하였으며, 다시 재산화공정을 통하여 질화산화막내 질소의 재분포를 형성토록하였다. 재산화에 있어서 습식산화시 공정에 사용된 수소에 의한 영향으로 계면 근처에 축적된 질소가 Si≡N 결합을 쉽게 이탈함에 따라 방출이 촉진되어 건식산화에 비하여 질소의 감소가 더욱 두드러지게 나타났다. 재산화에 따른 질화산화막내 질소의 거동은 외부로의 방출과 기판으로의 확산이 동시에 나타난다. 재산화후 질화산화막내 축적된 질소의 결합종을 분석한 결과, 초기산화막 계면근처의 질소는 SiON의 결합종이 주도적으로 나타나는 반면 재산화 후 새롭게 형성된 $Si-SiO_2$ 계면근처로 확산한 질소는 $Si_2NO$ 결합종이 주로 검출된다. SiON에 의한 질소의 미결합손과 $Si_2$NO에 의한 실리콘의 미겨랍손은 기억특성에 기여하는 결함을 포함하기 때문에 재산화 질화산화막내 존재하는 SiON과 $Si_2$NO 결합종은 모두 전하트랩의 기원과 관련된 결합상태로 예상된다.

  • PDF

漢江 水質保全 行政에 관한 硏究 (A Study on the Administration for the Han River Water Quality Control)

  • Kim, Kwang Hyop
    • 한국환경보건학회지
    • /
    • 제10권2호
    • /
    • pp.9-40
    • /
    • 1984
  • This thesis purports to overview the diverse administrative and organizational factors and plannings developed by the government organizations, municipal or otherwise, to tackle the Han River water pollution issues in the past years. This thesis also looks into the ever-worsening Han River water pollution problems, in particular, in terms of the various government plans ostensibly designed to reduce the pollution level but with little success. Also dealt with are the efficiencies with which the laws and decrees on water pollution the administrative organizations put to use in the prosecution of the diverse antiwater pollution projects involving the Han River basin. From the early 1960's up to the 1970's the government had concentrated on the growth-oriented economic policy with the result that little attention had been paid to the water pollution and other environmental issues that are bound to arise from the massive economic growth. Belatedly, the five-year Hah River Development Project was initiated in 1982 with emphasis on reducing the water pollution level at Hah River to the minimum. The following are the gists of the thesis and recommendations for the future antiwater pollution plans by the administrative organizations: 1. Documents to date indicate that the irrigation projects along the Han River area had been the main focus of attention during the Yi Dynasty and under the Japanese rule of the country. 2. Despite that the water pollution issue became the subject of many debates among the academic and research institutions in the 1960's and in the 1970's, the administrative organizations in charge of the Han River water quality control failed to come up with a concrete plan for the river's water quality control. 3. Nevertheless, the water pollution of the Han River area in fact began in the 1950's, with the unprecedented concentration into Seoul of population and the industrial facilities on a larger scale, in particular, enforced by the government's strong growthoriented policy in its Economic Development plans in the 1960's. 4. Starting in the 1960's, the Han River water pollution level dramatically increased, but the government was reluctant to promulgate or put into effect strong measures to curb the many factors contributing to the river water pollution, thus worsening the environmental issues along the Han River basin. 5. The environmental protection law and other laws and decrees relating to the antiwater and air pollution issues that were subsequently put into effect underwent so many changes that efficient anti-water pollution policies could not be effected for the Han River basin. The frequent organizational reshuffle within the administrative units concerned with environmental problems has resulted in the undue waste in personnel management and finance. 6. The administration on the environmental protection could not be efficiently carried out due to the organizational overlapping. Under the existing law, frequent organizational frictions and inefficiency are bound to occur among the central government offices themselves, as well as between the central government and the Seoul city administration, and among the city's administrative offices over the conservation of the Han River basin and over the river's anti-water pollution issue. 7. In the planning and prosecution of the Han River project, political influences from the president down to the lower-level politicious appear to have been involved. These political influences in the past had certainly had negative influence on the project, nevertheless, it appears that in the recent years, these political influences are not all that negative in view of the fact that they serve as a positive contributing factor in developing a better water quality control project along the Han River basin. The following are a few recommendations based on the data from the thesis: First, officials in charge of the Han River water quality control should pay attention to a careful screening of the opinions and recommendations from the academic circles and from the public should be made so that the government could better grasp the core issues in the environmental problems that require preventive and other necessary measures. Second, vigorous redistribution policies of population and industrial facilities away from the Seoul area should be pursued. Third, the government should refrain from revising or revamping too frequently the laws and decrees on the anti-water pollution, which is feared to cause undue inconveniences in the environmental administration. Fourth, a large-scale streamlining should be made to the existing administrative organization in an effort to do away with the inter- and intra-organizational friction. It is recommended that a secretariat for the Hah River basis conservation be established. Fifth, High-level administrative officials, with a thorough knowledge and vision on the Han River water quality control, should be prepared to better deal with the budgeting and personnel management for the Han River water pollution control not only at the control government, but also at the Seoul city municipal government levels. Environmental issues should be kept distinct from political issues. Environmental issues should not serve as a window-dressing for sheer political purposes. Sixth, the Hah River proiect should also include, along with the main Han River basin, those areas covering North Han River, South Han River, and the tributaries to the main river basin. The 'Han River Basin Water Quality Control Board' should be established immediately as a means of strengthening the current Han River basin water quality control policy. Seventh, in drawing up the Han River proiect, the administrative officials should be aware that Han River basin is a life line for those people in the region, providing them with not only a sheer physical space, but with a psychological living space for their everyday life.

  • PDF