• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2009.06a
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• pp.216-216
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• 2009

This paper describes a novel processing technique for the fabrication of polymer-derived SiCN (silicone carbonitride) microstructures for extreme microelectromechanical system (MEMS) applications. A polydimethylsiloxane (PDMS) mold was formed on an SU-8 pattern using a standard UV photolithographic process. Next, the liquid precursor, polysilazane, was injected into the PDMS mold to fabricate free-standing SiCN microstructures. Finally, the solid polymer SiCN microstructure was cross-linked using hot isostatic pressure at $400^{\circ}C$ and 205 bar. The optimal pyrolysis and annealing conditions to form a ceramic microstructure capable of withstanding temperatures over $1400^{\circ}C$ were determined. Using the optimal process conditions, the fabricated SiCN ceramic microstructure possessed excellent characteristics includingshear strength (15.2 N), insulation resistance ($2.163{\times}10^{14}\;{\Omega}$, and BDV (1.2 kV, minimum). Since the fabricated ceramic SiCN microstructure has improved electrical and physical characteristics compared to bulk Si wafers, it may be applied to harsh environments and high-power MEMS applications such as heat exchangers and combustion chambers.

• Korean Journal of Materials Research
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• v.12 no.8
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• pp.595-599
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• 2002

A homogeneous and stable, amorphous-type, anorthite (CaO $Al_2$$O_3$ $2SiO_2$)powder was synthesized by an organic-inorganic steric entrapment route. Polyvinyl alcohol ( PVA) was used as an organic carrier for the precursor ceramic gel. The PVA content, its degree of polymerization and type of silica sol had a significant influence on the calcination and crystallization behavior of the precursors. For densifiction and crystallization at low temperature, porous and soft, amorphous-type anorthite powder was planetary milled for 20h. The milled powder crystallized to stable anorthite phase and densified to a relative density of 94% below $1000^{\circ}C$. In the development of crystalline phases of the planetary milled powder, omisteinbergite phase was unusually observed at $900^{\circ}C$, and then anorthite was observed at $950^{\circ}C$. The sintered anorthite had a thermal expansion coefficient of $4.6$\times$10^{-6}$ /$^{\circ}C$ and a dielectric constant of 7.5 at 1 MHz. Finally, the anorthite synthesized by the new process is expected to be an useful material for low-firing ceramic substrate.

• Journal of the Korean Ceramic Society
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• v.47 no.6
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• pp.572-577
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• 2010

Reaction-bonded $Si_3N_4$ has cost-reduction merit because inexpensive silicon powder was used as a start material. But its density was not so high enough to be used for structural materials. So the sintered reaction-bonded $Si_3N_4$techniques were developed to solve the low density problem. In this study the sintered reaction-bonded $Si_3N_4$ manufacturing method by using polymer precursor which recently attained significant interest owing to the good shaping and processing ability was proposed. The formations, properties of reaction-bonded $Si_3N_4$ from silicon and polysilazane mixture were investigated. High density reaction-bonded $Si_3N_4$ was manufactured from silicon and silicon-containing preceramic polymers and post-sintering technique. The mixtures of silicon powder and polysilazane were prepared and reaction sintered in $N_2$ atmosphere at $1350^{\circ}C$ and post-sintered at 1600~$1950^{\circ}C$. Density and phase were analyzed and correlated to the resulting material properties.

• Journal of the Korean Ceramic Society
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• v.31 no.9
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• pp.1060-1068
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• 1994

Stable zirconia sol was prepared from zirconium butoxide Zr(OC4O9)4 as a precursor and ethylacetoacetate(EAcAc) or diethylene glycol(DEG) as a chelating agent under ambient agent under ambient atmosphere by Sol-Gel process. The sythesized sol was coated on 304 stainless steel substrate by dip coating, thereafter zirconia film could be obtained by heat-treatment at $600^{\circ}C$. The characteristics of coating film were determined by FT-IR, XRD, and ellipsometion peak represented Zr-O-Zr bonding of tetragonal phase was shown at 470cm-1. Crystallization of zirconia gel and film from amorphous state to tetragonal phase started at 40$0^{\circ}C$, and then transformed into monoclinic phase around $700^{\circ}C$. Zirconia film coated on 304 stainless steel substrate showed relatively low porosity of 16% when it was coated with 0.4M zirconia sol and thereafter heat-treated at 80$0^{\circ}C$ and the film was densified continuously up to 90$0^{\circ}C$. The zirconia film of 10 nm thick acted as a protective layer against oxidation up to $700^{\circ}C$.

• Proceedings of the Korean Powder Metallurgy Institute Conference
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• 2006.09b
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• pp.1181-1182
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• 2006

Y-type barium ferrite $(Ba_2Zn_2Fe_{12}O_{22})$ was prepared by the glass-ceramic method. Glasses with composition of $0.1ZnO{\cdot}0.9(0.3Fe_2O_3{\cdot}0.5BaO{\cdot}0.2B_2O_3)$ were prepared, and the precipitation behavior of Y-type ferrite from the glass matrix was investigated by heating glass specimens at various temperature. $\alpha-BaFe_2O_4$ which is a precursor of M-type ferrite $(BaFe_{12}O_{19})$ was precipitated at about 813 K and an unknown compound, phase X, was precipitated at about 850 K. M-type ferrite and Y-type ferrite started to form at about 923 K and 1103 K, respectively. The formation of Y-type ferrite was int erpreted as the result of the reaction of M-type ferrite with a melt of phase X.

• Journal of the Korean Ceramic Society
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• v.54 no.5
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• pp.395-399
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• 2017

The thermal properties and crystallization behavior of calcium phosphate glass fabricated using eggshell were examined. Nature eggshell has several impurities in the main component of $CaCO_3$. To manufacture calcium phosphate glass, washed eggshell was dissolved in aqua-regia while adding a solution of isopropyl alcohol, D. I. water and phosphoric acid. The calcined precursor was melted at $1000^{\circ}C$, and the glass ($T_g$ : $540^{\circ}C$) was crystallized at $620{\sim}640^{\circ}C$, which temperature range is relatively low compared to the crystallization temperature of other general types of calcium phosphate glass. The calcium phosphate glass using eggshell was successfully crystallized without any additional nucleating agents due to the multiple effects of impurities such as $Fe_2O_3$, $Al_2O_3$, SrO and $SiO_2$ in the eggshell. The main crystalline phase was ${\beta}-Ca(PO_3)_2$ and a biocompatible material, hydroxyapatite, was also observed. The crystallization process was completed under the condition of a holding time of only 1 h at the low temperature.

• Transactions of the Korean Society of Mechanical Engineers B
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• v.29 no.4 s.235
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• pp.504-511
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• 2005

The generation of fine relics of inorganic and metallic materials from precursor suspensions is of significant current interest as it holds the key to the fabrication of display and printed circuit board. Some novel printing methods depositing ceramic particles have been suggested in recent years. When a conducting liquid is supplied to a capillary nozzle at a low flow rate and when the interface between air and the liquid is charged to a sufficiently high electrical potential, the liquid meniscus takes the form of a stable cone, whose apex emits a microscopic jet. This is called as a cone-jet mode. In our experiments, an alumina particles flowing through a nozzle were subjected to electro-hydrodynamic printing in the cone-jet mode. The pattern of 'YONSEI' characters was tested at $10 {\mu}l/min$ of alumina ink flow rate and different applied voltages. At an applied voltage of 6 kV, feature size was in the range of $250 {\mu}m.$

• Journal of the Korean Ceramic Society
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• v.41 no.1
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• pp.76-80
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• 2004

Nano-sized ZnO colloids were prepared by use of spray combustion method. for combustion reaction, $Zn(NO_3)_2{\cdot}6H_2O$ and $CH_6N_4O$ were employed as an oxidizer and a fuel. Exothermic peak was shown at $230^{\circ}C$ by DTA/TGA, and it was considered as a combustion reaction followed by ignition of the precursor mixture. In case of spray combustion method, because insufficient contents of molecules and radicals generated from precursor droplets may lead an incomplete igmition, the ignition temperature of combustion chamber was chosen at $500^{\circ}C$. For diminishing aerosol coagulation, the droplet number concentration was reduced by filter media. The fluid was laminar with 2.5 seconds of aerosol residence time. The synthesized colloids had spherical shape with 180 nanometer size, and the crystalline phase was ZnO with hexagonal structure.

• Journal of the Korean Ceramic Society
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• v.36 no.7
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• pp.742-750
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• 1999

Nanosized TiO2 powders were synthesized using the chemical vapor conduensation (CVC) process with various precursor feeding rates (0.37 and 0.752 ml/min) and oxygen flow rates(1-2slm) conditions and powder characteristics were investigated in terms of formation of nanosized powder varying with the above processing conditions. For this study the main thermodynamic and fluid dynamic factors -supersaturation ratio collision frequency and residence time-were theoretically established and compared to the characteristics of formed TiO2 powder. The loosely combined anatase phase powders (including less than 3%of rutile phase) having 20-30nm crystallite size were obtained at overall conditions. The particle size and th degree of agglomeration for a precursor flow rate of 0.376 ml/min turn out to be smaller than for a flow rate of 0.742ml/min. And the decreasing of particles size and particle size distribution were observed with increasing oxygen flow rate as the residence time and collision frequency were reduced by increasing oxygen flow rate,. It appears that further scrutiny is needed to elucidate the influence of the individual thermodynamic and kinetic parameters mdependently.

• Journal of Powder Materials
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• v.29 no.3
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• pp.207-212
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• 2022

Nanosized rutile titanium dioxide (TiO₂) is used in inorganic pigments and cosmetics because of its high whiteness and duality. The high quality of the white pigments depends on their surface coating technique via the solgel process. SiO₂ coatings are required to improve the dispersibility, UV-blocking, and whiteness of TiO₂. Tetraethyl orthosilicate (TEOS) is an important coating precursor owing to its ability to control various thicknesses and densities. In addition, we use Na₂SiO₃ (sodium silicate) as a precursor because of its low cost. Compared to TEOS, which controls the pH using a basic catalyst, Na₂SiO₃ controls the pH using an acid catalyst, giving a uniform coating. The coating thickness of TiO₂ is controlled using a surface modifier, cetrimonium bromide, which is used in various applications. The shape and thickness of the nanosized coating layer on TiO₂ are analyzed using transmission electron microscopy, and the SiO₂ nanoparticle behavior in terms of the before-and-after size distribution is measured using a particle size analyzer. The color measurements of the SiO₂ pigment are performed using UV-visible spectroscopy.