• 한국세라믹학회지
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• 제35권9호
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• pp.969-973
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• 1998

Pb(Zr, Ti)O3 (PZT) (Zr:Ti= 52: 48) thin films were prepared on MgO(100) substrates by dipping-py-rolysis process using metal naphthenates as starting materials. Thin films were fabricated by spin coating technique and the precursor films were prefired at 20$0^{\circ}C$ in air for 0.5, 1, 2, 3, and 24 h followed by final heat treatment at 75$0^{\circ}C$ for 30min. Film prefired for 24 h lost orientational properties and pole figure analysis showed the lost of the epitaxial relationship between the films and substrate while highly a/c-axis oriented thin films were obtained for the samples prefired for 1, 2, and 3h.

• 한국세라믹학회지
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• 제30권5호
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• pp.411-419
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• 1993

A process for the preparation of cobalt oxide powders was developed by the evaporaton of emulsion containing cobalt. The characteristics of powders were examined by means of DTA, X-ray diffracton, SEM, PSA. Cobalt oxide powders were produced by evaporating the emulsion prepared by mixing cobalt sulfate solution and organic phase consisted of kerosene, Span 80 and D2EHPA in the kerosene bath at 16$0^{\circ}C$, then the precursor obtained was calcined at 100$0^{\circ}C$. As the concentration of cobalt ions in the aqueous solution, Span 80 and the stirring speed increased, the mean size of cobalt oxide powders decreased and the size distribution was improved. At the volume ratio of one of the aqueous to organic phase, the finest mean size and the optimum size distribution was obtained. On the other hand the concentration of D2EHPA and liquid paraffin had little effect on the mean size as well as on the size distribution of powders.

• 한국반도체및디스플레이장비학회:학술대회논문집
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• 한국반도체및디스플레이장비학회 2006년도 추계학술대회 발표 논문집
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• pp.14-17
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• 2006

This paper describes a novel processing technique for fabrication of polymer-derived SiCN (silicone carbonitride) microstructures for super-temperature MEMS applications. PDMS (polydimethylsiloxane) mold is fabricated on SU-8 photoresist using standard UV photolithographic process. Liquid precursor is injected into the PDMS mold. Finally, solid polymer structure is cross-linked using HIP (hot isostatic pressure) at $400^{\circ}C$, 205 bar Optimum pyrolysis and anneal ins conditions are determined to form a ceramic microstructure capable of withstanding over $1400^{\circ}C$. The fabricated SiCN ceramic microstructure has excel lent characteristics, such as shear strength (15.2 N), insulation resistance ($2.163{\times}10^{14}\;{\Omega}$) and BDV (min. 1.2 kV) under optimum process condition.

• 한국세라믹학회지
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• 제42권8호
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• pp.548-553
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• 2005

$TiO_2$ nanofibers were fabricated by annealing electrospun $TiO_2$/PVP nanofibers for 3 h at $500^{\circ}C$ in air. Size and uniformity of electrospun $TiO_2$ nanofiber diameters were evaluated via XRD and SEM by varying electric field, PVP concentration, Ti tetraisopropoxide concentration and precursor flow rate. Experimental results revealed that the effect of PVP concentration on size and uniformity of electrospun $TiO_2$ nanofiber diameters was most profound, however, the other effects were relatively small. Uniform fibers with no beads were observed for the electrospun anatase titania nanofibers with a diameter of 170 nm.

• 한국세라믹학회지
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• 제28권7호
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• pp.503-508
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• 1991

High pure and fine mullite powders were synthesized from Al-secbutoxide[Al(OC4H9)3] and TEOS[Si(OC2H5)4] (SiO2/Al2O3=2/3 mole). Sol-Gel process by partial hydrolysis technique, as it were, first, TEOS was partially hydrolysized and then mixed with Al-secbutoxide for complete hydrolysis was used. The mullite precursor was synthesized within 30 hrs, which was reduced about a half of synthetic time in comparison with the other's study. Al-Si spinel was formed at 980℃ and mullite crystal was formed at 1200℃. Mullite powders synthesized in this study was spherical type like those of the other studies and particle sizes were very fine. Also mullite powders calcined at 1,600℃ had a stoichiometric composition (3Al2O3·2SiO2) and lattice constants were coincided with known theoretical values.

• 한국세라믹학회지
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• 제28권9호
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• pp.705-711
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• 1991

Alumina precursor sol was obtained by the reaction of Al(OC4H9)3 and acetylacetone in the solvent followed by the partial hydrolysis. This sol was measured by viscosity and the effect of pH. The powders obtained from this sol were calcined at the various temperatures. The transition of crystals and crystal state were investigated at the various temperatures. The powders dried at 90$^{\circ}C$ showed amorphous and ${\gamma}$-Al2O3 at 900$^{\circ}C$, ${\alpha}$-Al2O3 mono-phase at 1050$^{\circ}C$ respectively. As a result of Al27-MASNMR analysis, amorphous and ${\alpha}$-Al2O3 powders showed 6-coordinated Al, ${\gamma}$-Al2O3 4-coordinated Al respectively.

• 한국세라믹학회지
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• 제33권6호
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• pp.693-699
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• 1996

YIG precursor powder was obtained by homogeneous precipitation in chloride salt solution by thermal decom-position of urea. It was found that ferric ions precipitated prior to yttrium ions. The precipitate was minute and spherical in shape. The precipitate formed consisted of the mixture of amorphous and ferric oxyhydroxide. Crystallization of YIG was proceeded by solid state reaction of intermediate YFeO3 and Fe2O3 in the temperature range of 85$0^{\circ}C$ to 140$0^{\circ}C$. Single phase of YIG was obtained by heat-treatment of the powder at 140$0^{\circ}C$ for 6 hrs in air. The powder calcined was molded into pellets and sintered in air. The maximum density of 4,92 g/cm3(95.1% of theoretical density) was obtainable for the pellet sintered at 145$0^{\circ}C$ using the powder calcined at 90$0^{\circ}C$.

• 한국세라믹학회지
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• 제34권11호
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• pp.1182-1186
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• 1997

La0.8Ca0.2Cr0.98O3 powder was prepared using the modified Pechini process. Various crystalline phases formed during thermal decomposition were investigated. (La,Ca)CrO4 phase, first formed from the precursor, was transformed to (La,Ca)CrO3 and CaCrO4 above 80$0^{\circ}C$, which remained up to 110$0^{\circ}C$. However, only (La,Ca)CrO3 phase consisting of orthorhombic and intermediate rhombohedral polymorphs was observed after sintering at 125$0^{\circ}C$. The specimens sintered at 140$0^{\circ}C$ exhibited 98% of relative density and rather wide grain size distribution with average grain size of 3-4 ${\mu}{\textrm}{m}$. Densification and grain growth of the specimens observed above 125$0^{\circ}C$ were presumably attributed to liquid phase sintering resulted from melting of Ca3(CrO4)2 phase.

• 한국세라믹학회지
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• 제34권11호
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• pp.1159-1164
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• 1997

Magnetite(Fe3O4) powders were synthesized through glycothermal reaction by using crystalline $\alpha$-FeOOH as precursor and ethyleanne glycol as solvent. The phase, morphology and particle size of synthesized powders were characterized by XRD and an SEM. When only ethylene glycol was used as solvent, the phase was transformed from $\alpha$-FeOOH to $\alpha$-Fe2O3 and finally Fe3O4 at 27$0^{\circ}C$ for 6hr without morphological change. But by addition of water, Fe3O4 powders were synthesized at 23$0^{\circ}C$ for 3hr through solution-recrystalization process. As the content of water addition increased, the particle shape changed from sphere to octahedron and the partcle size increased. When the excess amount of water added, residual $\alpha$-FeOOH or $\alpha$-Fe2O3 was recrystalized.

• 한국세라믹학회지
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• 제30권9호
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• pp.723-730
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• 1993

The mechanism of formation of perovskite phase and the dielectric properties of PZMN[Pb(Zn, Mg)1/3Nb2/3O3] ceramics were examined using two different types of the columbite precursors, (Mg, Zn)Nb2O6 (MZN) and MgNb2O6＋ZnNb2O6 (MN＋ZN). The formatin of perovskite phase in PbO＋MN＋ZN system is characterized by an initial rapid formation of Mg-rich perovskite phase, followed by a sluggish formation of Zn-rich perovskite phase. On the other hand, thepyrochlore/perovskite transformation in the PbO＋MZN system proceeded uniformly with a spatial homogeneity. The degree of diffuseness of the rhombohedral/cubic phase transitionis higher in the PbO＋MN＋ZN system than in the PbO＋MZN specimen, indicating a broadened compositional distributjion of the B-site catons (Nb+5, Zn+2, Mg+2) in the PbO＋MN＋ZN system.