• Title/Summary/Keyword: catalytic CVD

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Synthesis and field emission of double-walled carbon nanotubes

  • Lee, S.H.;Jung, S.I.;Lee, T.J.;Kim, W.S.;Cho, J.H.;Kang, H.J.;Kwon, G.M.;Park, C.J.;Seo, S.H.;Jeon, K.Y.;Ha, B.;Lee, C.J.
    • 한국정보디스플레이학회:학술대회논문집
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    • 2005.07b
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    • pp.1087-1090
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    • 2005
  • We have investigated the synthesis and field emission properties of high-quality double-walled carbon nanotubes (DWCNTs) using a catalytic chemical vapor deposition method and a hydrogen arc discharge method. The produced carbon materials using a catalytic CVD method indicated high-purity DWCNT bundles free of amorphous carbon covering on the surface. By adopting a hydrogen arc discharge method, we could obtained high-purity DWCNTs in large-scale. DWCNTs showed low turn-on voltage and higher emission stability compared with SWCNTs.

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Catalytic CVD-Kinetics of Pyrolytic Carbon and SiC on the Stainless Steel Stent (Stainless Steel Stent에 Pyrolytic Carbon과 SiC의 촉매적 CVD-Kinetic연구)

  • 이보성;이무용
    • Proceedings of the KAIS Fall Conference
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    • 2000.10a
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    • pp.30-33
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    • 2000
  • 최근 국내에서도 관 동맥 질환 환자의 수가 급증하고 있으며, 관 동맥 질환의 치료 방법인 관 동맥 성형 술은 관 동맥 stent의 도입에 의하여 보편화되어 국내에서 년간 5000개 이상의 stent가 시술되고 있다. 그러나 stent는 고가(1,200천원/개)로 전량 수입에 의존하고 있으며, 시술 후 사망까지 이를 수 있는 혈전에 의한 급성 페쇠와 재 협착이 문제점이다. 이를 위한 한가지 방법이 생체 적합성이 뛰어난 복합 stent의 개발인데 SiC나 Carbon을 coating한 stent는 시술 후 혈전 형성을 억제하는 것으로 알려져 있다. 특히 가장 순수한 Pyrolytic carbon은 hemocompatibility가 탁월하고 기밀 성이기 때문에 본 연구에서 그의 CVB-Kinetics를 연구코저 하는 것이다. methane으로부터 pyrolytic carbon의 CVD는 온도에 따라서 다양한 구조를 가지며 따라서 그의 mechanism도 다양하다는 것은 잘 알려져 있다. 더구나 광간(균질)반응과 표면(불균질)반응의 정량적 관계에 따라서도 다르다는 것도 확인되었다. 그러나 stainless steel 316L로 만든 stent는 12 - 15 %의 Ni과 2%의 Mo을 함유해서 금속성을 잃지 않는 저온(600℃)에서도 pyrolytic carbon의 속매적 CVD가 가능함을 그리고 SiC의 코팅에 적합한 buffer layer 역할을 함을 확인하였다. 그리하여 본 연구는 반응기 설계에 필요한 저온 촉매적 pyrolytic carbon의 CVD-kinetics의 연구결로 그의 mechanism과 함께 rate law 식을 유도, 확인하였으며 600℃, 90kPa에서 P/sub ch4//P/sub H2/=5:1과 체류시간 1.8 sec가 최적임을 발견하였다. 이때 석출속도 11.2 g-mol/g-cat.h 혹은 두께속도로 73 nm/sec를 나타내었다.메타놀-물 (1 : 1) 유출액에서 $(0.80\;{\mu}g)$ 검출되었다. 하면 morey eel내장에서 얻은 독물질도 DEAE-셀루로즈에서 ST-1 과 ST-2로 나누어지며, 이 ST-1의 TLC, HPLC 및 알루미나 컬럼상의 거동이 파랑비늘돔에서 얻은 ST-1의 그것과 같으므로 scaritoxin으로 보고한 ST-1은 ciguatoxin의 형태인 less polar cigutoxin (LPCTX) 으로 생각된다.에서 각각 대조구의 57, 413 및 315% 증진되었다. 거품의 열안정성은 15분 whipping시, pH 4.0(대조구, 30.2%) 및 5.0(대조구, 23.7%)에서 각각 $0{\sim}38.0$$0{\sim}57.0%$이었고 pH 7.0(대조구, 39.6%) 및 8.0(대조구, 43.6%)에서 각각 $0{\sim}59.4$$36.6{\sim}58.4%$이었으며 sodium alginate 첨가시가 가장 양호하였다. 전체적으로 보아 거품안정성이 높은 것은 열안정성도 높은 경향이며, 표면장력이 낮으면 거품형성능이 높아지고, 비점도가 높으면 거품안정성 및 열안정성이 높아지는 경향이 있었다.protocol.eractions between application agents that are developed using different languages. Dynamic agent invocation is accomplished by Java Native Interface(JNI) that links two heterogeneous methods, and by KQML language interface that facilitates the communications between heterogeneous agents. This scheme of dyna

CNT Growth Behavior on Ti Substrate by Catalytic CVD Process with Temperature Gradient in Tube Furnace (촉매 화학기상증착 공정에서 온도구배 설정을 통한 타이타늄 기판에서의 CNT 성장 거동)

  • Park, Ju Hyuk;Byun, Jong Min;Kim, Hyung Soo;Suk, Myung-Jin;Oh, Sung-Tag;Kim, Young Do
    • Journal of Powder Materials
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    • v.21 no.5
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    • pp.371-376
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    • 2014
  • In this study, modified catalytic chemical vapor deposition (CCVD) method was applied to control the CNTs (carbon nanotubes) growth. Since titanium (Ti) substrate and iron (Fe) catalysts react one another and form a new phase ($Fe_2TiO_5$) above $700^{\circ}C$, the decrease of CNT yield above $800^{\circ}C$ where methane gas decomposes is inevitable under common CCVD method. Therefore, we synthesized CNTs on the Ti substrate by dividing the tube furnace into two sections (left and right) and heating them to different temperatures each. The reactant gas flew through from the end of the right tube furnace while the Ti substrate was placed in the center of the left tube furnace. When the CNT growth temperature was set $700/950^{\circ}C$ (left/right), CNTs with high yield were observed. Also, by examining the micro-structure of CNTs of $700/950^{\circ}C$, it was confirmed that CNTs show the bamboo-like structure.

Photocatalytic Reactivity of Titanium Dioxide in the Removal of Benzene from Air (공기중의 벤젠제거에 대한 산화티타늄 광촉매 반응특성)

  • 박달근
    • Journal of Korean Society for Atmospheric Environment
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    • v.16 no.4
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    • pp.389-398
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    • 2000
  • Photocatalytic removal of benzene from air was examined using titanium dioxide photocatalyst films prepared on soda lime glass(50$\times$50$\times$2 mm) by spin coating and chemical vapor deposition. For the measurement of photocatalytic reactivity titanium dioxide coated glass was placed into a batch reactor and concentration of benzene in the reactor was set to abuot 100 ppm, and then illuminated with UV. It was found that catalytic reactivity of titanium dioxide films increased with the increase of titanium dioxide film thickness and then level off beyond a certain film thickness. UV absorption by the films showed the similar trend. The formation of stoichiometric amount of carbon dioxide was confirmed by measurement of carbon dioxide concentration in the reactor. In general spin coated films revealed better photocatalytic reactivity than chemically deposited one within the experimental ranges covered in this study. Morphology and crystal structure of prepared films were investigated by XRD and SEM and they showed significant difference between spin coated films and CVD films. Highest quantum efficiency of prepared titanium dioxide photocatalyst was close to 50%.

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HWCVD를 이용하여 Microcrystalline film 성장시 Silane 농도에 따른 박막 성장 특성

  • Park, Seung-Il;Lee, Jung-Tack;Lee, Jeong-Chul;Huh, Yun-Sung;Kim, Keun-Joo
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2010.06a
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    • pp.267-267
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    • 2010
  • The structural and electrical properties of microcrystalline silicon films were investigated by hot wire chemical vapor deposition(HWCVD) often called catalytic chemical vapor deposition(Cat-CVD). The Si microcrystalline phase is easily controlled by changing the rate of the silane concentration of $SiH_4$ to $H_2$ during deposition. The Structural property was observed by Raman and SEM. Photo-conductivity and dark conductivity, and photo-sensitivity were observed by Sunsimulator (AM 1.5 illumination). The film color was changed by the variation of silane concentration. HWCVD is useful for the formation of Si thin films for solar cell and needs further commercialized development for mass production.

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Electrical discharge properties in vacuum by carbon nanotube electrodes (탄소나노튜브 전극에 의한 진공 방전 특성의 평가)

  • Kim, Hyun-Jin;Lee, Sang-Hoon;Kim, Seong-Jeen
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2004.04b
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    • pp.60-63
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    • 2004
  • Recently, carbon nanotubes(CNTs) have been demonstrated to possess remarkable mechanical and electronic properties, in particular, for field emission applications. Its high aspect ratio and extremely small diameter, hollowness, together with high mechanical strength and high chemical stability, are advantages for use in field emitter. In this paper, we demonstrate electrical discharge properties from carbon nanotube cathode electrodes to use as an emitter electrode of vacuum gauges. Vertically aligned $2{\times}2mm^2$ CNT arrays on the silicon substrate were synthesized by the thermal CVD method on Fe catalytic metal, and a glass patterning by the sand blast method and the silicon/glass anodic bonding processes were applied to make samples with 2 electrodes. The field emission was examined under the vacuum range of $10^{-3}$ Torr.

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Role of Metal Catalyst and Substrate Site for the Growth of Carbon Nanomaterials

  • Manocha, L.M.;Valand, Jignesh;Manocha, S.
    • Carbon letters
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    • v.6 no.2
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    • pp.79-85
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    • 2005
  • The work reported in this paper relates to preparation and characterization of carbon nanomaterials by CVD method on different substrates by decomposition of certain hydrocarbons at 550-$800^{\circ}C$ using a horizontal quartz tube reactor. Monometallic and bimetallic catalyst system of iron and nickel were used for the preparation of different carbon nanomaterials. The influence of various parameters such as substrate/catalyst preparation parameters, the nature of substrate, catalyst concentration, reaction time and temperature on the growth, yield and alignment of carbon nanotubes has been studied. The characterization of carbon nanomaterials has been carried out using SEM, TEM and TGA. The carbon nanomaterials developed were vertically aligned on a large area of flat quartz substrate.

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The Study of Nanocrystalline Silicon Bottom-gate Thin Film Transistor Fabricated at Low Temperature for Flexible Display

  • Lee, Youn-Jin;Lee, Kyoung-Min;Hwang, Jae-Dam;No, Kil-Sun;Yoon, Kap-Soo;Yang, Sung-Hoon;Hong, Wan-Shick
    • 한국정보디스플레이학회:학술대회논문집
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    • 2009.10a
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    • pp.557-559
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    • 2009
  • We attempted modulation of hydrogen dilution ratio to achieve both the minimal incubation layer and high deposition rate. The incubation layer thickness was estimated by transmission electron microscopy (TEM) and crystallization fraction was measured by Raman spectroscopy.

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A study of improving filtration efficiency through SiC whisker synthesis on carbon felt by CVD VS method

  • Kim, Gwang-Ju;Choe, Du-Jin
    • Proceedings of the Korean Vacuum Society Conference
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    • 2016.02a
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    • pp.150-150
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    • 2016
  • Mankind is enjoying a great convenience of their life by the rapid growth of secondary industry since the Industrial Revolution and it is possible due to the invention of huge power such as engine. The automobile which plays the important role of industrial development and human movement is powered by the Engine Module, and especially Diesel engine is widely used because of mechanical durability and energy efficiency. The main work mechanism of the Diesel engine is composed of inhalation of the organic material (coal, oil, etc.), combustion, explosion and exhaust Cycle process then the carbon compound emissions during the last exhaust process are essential which is known as the major causes of air pollution issues in recent years. In particular, COx, called carbon oxide compound which is composed of a very small size of the particles from several ten to hundred nano meter and they exist as a suspension in the atmosphere. These Diesel particles can be accumulated at the respiratory organs and cause many serious diseases. In order to compensate for the weak point of such a Diesel Engine, the DPF(Diesel Particulate Filter) post-cleaning equipment has been used and it mainly consists of ceramic materials(SiC, Cordierite etc) because of the necessity for the engine system durability on the exposure of high temperature, high pressure and chemical harsh environmental. Ceramic Material filter, but it remains a lot of problems yet, such as limitations of collecting very small particles below micro size, high cost due to difficulties of manufacturing process and low fuel consumption efficiency due to back pressure increase by the small pore structure. This study is to test the possibility of new structure by direct infiltration of SiC Whisker on Carbon felt as the next generation filter and this new filter is expected to improve the above various problems of the Ceramic DPF currently in use and reduction of the cost simultaneously. In this experiment, non-catalytic VS CVD (Vapor-Solid Chemical Vaporized Deposition) system was adopted to keep high mechanical properties of SiC and MTS (Methyl-Trichloro-Silane) gas used as source and H2 gas used as dilute gas. From this, the suitable whisker growth for high performance filter was observed depending on each deposition conditions change (input gas ratio, temperature, mass flow rate etc.).

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