• 한국진공학회:학술대회논문집
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• 한국진공학회 2013년도 제45회 하계 정기학술대회 초록집
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• pp.287.2-287.2
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• 2013

We synthesized a new composite of poly sodium 4-styrenesulfonate intercalated graphene oxide for energy storage devices by controlling oxidation time in the synthesis of graphite oxide. Specific capacitance was improved from 20 F/g of the previous composites to 88 F/g of the new composite at the current density of 0.3 A/g. The capacitance retention was 94% after 3000 cycles, indicating that the new composites of high cyclic stability, prominent performance as electric double layer capacitor, and even low resistance could be an excellent carbon based electrode for further energy storage devices.

• Carbon letters
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• 제24권
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• pp.1-9
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• 2017

We studied the basic properties and fabrication of reduced graphene oxide (rGO) prepared using eco-friendly reduction agents in the graphene solution process. Hydrazine is generally used to reduce graphene oxide (GO), which results in polluting emissions as well as fixed nitrogen functional groups on different defects in the graphene sheets. To replace hydrazine, we developed eco-friendly reduction agents with similar or better reducing properties, and selected of them for further analysis. In this study, GO layers were produced from graphite flakes using a modified Hummer's method, and rGO layers were reduced using hydrazine hydrate, L-ascorbic acid, and gluconic acid. We measured the particle sizes and the dispersion stabilities in the rGO dispersed solvents for the three agents and analyzed the structural, electrical, and optical properties of the rGO films. The results showed that the degree of reduction was in the order L-ascorbic acid ${\geq}$ hydrazine > glucose. GO reduced using L-ascorbic acid had a sheet resistance of $121k{\Omega}/sq$, while that reduced using gluconic acid showed worse electrical properties than the other two reduction agents. Therefore, L-ascorbic acid is the most suitable eco-friendly reduction agent that can be substituted for hydrazine.

• 한국재료학회지
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• 제18권10호
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• pp.529-534
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• 2008

The hydrogen gas sensing properties of a zinc oxide nanowire structure were studied. Porous zinc oxide nanowire structures were fabricated by oxidizing zinc deposited on a single-wall carbon nanotube (SWNT) template. This revealed a porous ZnO-SWNT composite due to the porosity in the SWNT film. The gas sensing properties were compared with those of zinc oxide thin films deposited on SiO2/Si substrates in sensitivity and operating temperature. The composite structure showed higher sensitivity and lower operating temperature than the zinc oxide film. It showed a response even at room temperature while the film structure did not.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2011년도 제40회 동계학술대회 초록집
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• pp.284-284
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• 2011

Recently, the increasing degree of device integration in the fabrication of Si semiconductor devices, etching processes of nano-scale materials and high aspect-ratio (HAR) structures become more important. Due to this reason, etch selectivity control during etching of HAR contact holes and trenches is very important. In this study, The etch selectivity and etch rate of TEOS oxide layer using ACL (amorphous carbon layer) mask are investigated various process parameters in CH2F2/C4F8/O2/Ar plasma during etching TEOS oxide layer using ArF/BARC/SiOx/ACL multilevel resist (MLR) structures. The deformation and etch characteristics of TEOS oxide layer using ACL hard mask was investigated in a dual-frequency superimposed capacitively coupled plasma (DFS-CCP) etcher by different fHF/ fLF combinations by varying the CH2F2/ C4F8 gas flow ratio plasmas. The etch characteristics were measured by on scanning electron microscopy (SEM) And X-ray photoelectron spectroscopy (XPS) analyses and Fourier transform infrared spectroscopy (FT-IR). A process window for very high selective etching of TEOS oxide using ACL mask could be determined by controlling the process parameters and in turn degree of polymerization. Mechanisms for high etch selectivity will discussed in detail.

• 전기화학회지
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• 제13권2호
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• pp.132-137
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• 2010

본 연구는 KOH 전해질에서 전기화학적으로 석출된 망간 산화물이 산소 환원 반응에 미치는 전기화학적 촉매 역할에 대해 고찰하였다. 나노 사이즈 망간 산화물들은 Glassy carbon(GC), Gold(Au) 그리고 Titanium(Ti)로 이루어진 전극에 전해방식으로 석출시켰으며, 각 전극 표면에 나노 사이즈로 균일하게 분포되어 있는 것이 SEM 관찰을 통해서 확인되었다. 망간산화물의 한 종류인 $\gamma$-MnOOH는 산소 환원반응에 수반되는 4-electron 반응에서 촉매 역할을 하는 것을 확인하였다. 망간산화물이 전기화학적으로 석출된 전극들은 전해석출을 하지 않은 전극들에 비해서 양극 전위가 낮아지는 것을 확인할 수 있었다.

• 한국세라믹학회지
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• 제53권3호
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• pp.376-380
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• 2016

A composite electrode made of iron oxide nanoparticles/multi-wall carbon nanotube (iNPs/M) delivers high specific capacity and cycle durability. At a rate of $200mAg^{-1}$, the electrode shows a high discharge capacity of ${\sim}664mAhg^{-1}$ after 100 cycles, which is ~ 70% of the theoretical capacity of $Fe_3O_4$. Carbon black, carbon nanotube, and graphene as anode materials have been explored to improve the electrical conductivity and cycle stability in Li ion batteries. Herein, iron oxide nanoparticles on acid treated MWCNTs as a conductive platform are combined to enhance the drawbacks of $Fe_3O_4$ such as low electrical conductivity and volume expansion during the alloying/dealloying process. Enhanced performance was achieved due to a synergistic effect between electrically 3D networks of conductive MWCNTs and the high Li ion storage ability of $Fe_3O_4$ nanoparticles (iNPs).

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2009년도 추계학술대회 논문집
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• pp.74-74
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• 2009

The ArF PR mask was. developed to overcome the limit. of sub 40nm patterning technology with KrF PR. But ArF PR difficult to meet the required PR selectivity by thin PR thickness. So need to the multi-stack mask such as amorphous carbon layer (ACL). Generally capacitively coupled plasma (CCP) etcher difficult to make the high density plasma and inductively coupled plasma (ICP) type etcher is more suitable for multi stack mask etching. Hybrid Coupled Plasma source (HCPs) etcher using the 13.56MHz RF power for ICP source and 2MHz and 27.12MHz for bias power was adopted to improve the process capability and controllability of ion density and energy independently. In the study, the oxide trench which has the multi stack layer process was investigated with the HCPs etcher (iGeminus-600 model DMS Corporation). The results were analyzed by scanning electron microscope (SEM) and it was found that etching characteristic of oxide trench profile depend on the multi-stack mask.

• Journal of Electrochemical Science and Technology
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• 제8권4호
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• pp.282-293
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• 2017

A new modified carbon paste electrode (CPE) was constructed based on nickel oxide nanoparticles (NiONPs) and graphene nanosheets (Gr) for simultaneous determination of paracetamol (PCM) and mefenamic acid (MFA) in aqueous media and pharmaceutical dosage forms. NiONPs were synthesized via a simple and inexpensive technique and characterized using X-ray diffraction method. Scanning electron microscopy was used for the characterization of the morphology of modified carbon paste electrode (NiONPs/Gr/CPE). Voltammetric studies suggest that the NiONPs and Gr provide a synergistic augmentation that can increase current responses by improvement of electron transfers of these compounds on the NiONPs/Gr/CPE surface. Using cyclic voltammetry, the NiONPs/Gr/CPE showed good sensitivity and selectivity for the determination of PCM and MFA in individually or mixture standard samples in the linear range of $0.1-30{\mu}g\;mL^{-1}$. The resulted limit of detection and limit of quantification were 20 and $60ng\;mL^{-1}$ for PCM, 24 and $72ng\;mL^{-1}$ for MFA, respectively. The analytical performance of the NiONPs/Gr/CPE was evaluated for the determination of PCM and MFA in pharmaceutical dosage forms with satisfactory results.

• The Korean Journal of Ceramics
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• 제6권1호
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• pp.27-31
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• 2000

A series experiments were performed to evaluate mechanical behavior of non-oxide boride type ceramics formed on the AISI 1040 plain carbon steel. Boronizing was performed in a slurry salt bath consisting of borax, boric acid, and ferro-silicon at $950^{\circ}C$ for 2-6h. The AISI 1040 steel used as substrate material was containing 0.4%C, 0.13%Si, 0.65%Mn, 0.02%P, 0.014%S. The presence of non-oxide boride type ceramics $Fe_2B $ and FeB formed on the surface of steel was confirmed by metallographic technique and X-ray diffraction (XRD) analysis. The hardness of borides measured via Vickers indenter with a load of 2N reached a microhardness of up to 1800 DPN. The hardness of unborided steel was 185 DPN. The fracture toughness of borides measured by means of Vickers indenter with a load of 10N was about 2.30 MPa.$m^{1/2}$. The thickness of boride layers ranged from 72$\mu\textrm{m}$ to 145$\mu\textrm{m}$. Boride layers have a columnar morphology.

• 한국세라믹학회지
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• 제41권11호
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• pp.812-818
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• 2004

무수붕산(B$_2$O$_3$)과 활성탄소를 사용하여 질소 분위기에서 육방정 질화붕소(h-BN)을 합성할 때 그 생성조건 및 반응과정을 검토하였다. 육방정 질화붕소의 생성조건은 140$0^{\circ}C$ 이상에서 질화붕소가 합성되기 시작하여 155$0^{\circ}C$에서는 대부분의 합성이 이루어졌고, 그 이상의 온도에서는 생성이 크지 않았음이 확인되었다. 합성된 질화붕소의 입자 형상은 미세한 판상 결정을 나타내었다. 반응 과정은 무수붕산이 탄소에 의하여 환원되어 붕소로 기화됨과 동시에 공존하는 질소 가스와 반응하여 육방정 질화붕소로 합성되는 반응 경로를 따를 것으로 사료된다.