• 한국진공학회지
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• 제13권4호
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• pp.150-156
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• 2004

Si(100) 기판 위에 RF UBM 스퍼터링 (Unbalanced Magnetron Sputtering) 방법을 이용하여 BN 박막을 증착하였다. 이온 충돌 에너지에 영향을 주는 증착 압력과 기판 바이어스 전압을 변화시켜, 증착된 BN박막의 미세구조와 압축응력의 변화를 살펴보았다. 높은 증착 압력에서는 hBN laminate의 정렬도가 기판 바이어스 전압이 증가함에 따라 선형적으로 증가한 반면, 낮은 증착 압력에서는 낮은 기판 바이어스 전압에서 hBN laminate의 정렬도가 높게 나타났다. hBN 박막의 응력 변화와 표면 형상은 hBN laminate의 정렬도와 밀접한 관계가 있는 것으로 관찰되었는데, 이의 적절한 조절에 의해 압축응력의 증가 없이도 hBN 박막 위에 cBN 상의 핵 형성이 일어날 수 있었다.

• 한국표면공학회지
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• 제40권2호
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• pp.91-97
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• 2007

In this study we investigated the oxygen effect on the nucleation and its residual stress during unbalanced magnetron sputtering. Up to 0.5% in oxygen flow rate, cubic phase (c-BN) was dominated with extremely small fraction of Hexagonal phase (h-BN) of increasing trend with oxygen concentration, whereas hexagonal phase is dominated beyond 0.75% flow rate. Interestingly, the residual stress in cubic-phase-dominated films was substantially reduced with small amount of oxygen (${\sim}0.5%$) down to a low value comparable to the h-BN case. This may be because oxygen atoms break B-N $sp^3$ bonds and make B-O bonds more favorably, increasing $sp^2$ bonds preference, as revealed by FTIR and NEXAFS. It was confirmed by experimental facts that the threshold bias voltage for nucleation and growth of cubic phase were increased from -55 V to -70 V and from -50 V to -60 V respectively. The reduction of residual stress in O-added c-BN films is seemingly resulting from the microstructure of the films. The oxygen tends to increase slightly the amount of h-BN phase in the grain boundary of c-BN and the soft h-BN phase of 3D network including surrounding nano grains of cubic phase may relax the residual stress of cubic phase.

• 한국주조공학회지
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• 제17권3호
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• pp.276-285
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• 1997

The effect of wheel surface condition on solidification behavior of Al-Cu ribbon was investigated in order to establish extreme levels of heat extraction. The condition of wheel surface was changed either by heating the wheel surface up to $200^{\circ}C$ or by coating boron nitride(BN) onto the the rim of a wheel. Heating the wheel surface up to $200^{\circ}C$ improved the wetting behavior between the molten metal and the rotating wheel, leading to an increase in the ratio of columnar structure to the entire thickness of Al-4.3wt%Cu and Al-33.2wt%Cu ribbons. For Al-4.3wt%Cu ribbon, assuming one grain as a single heterogeneous nucleation event at the contact point, the nucleation density with the wheel surface heated to $200^{\circ}C$, was $4{\times}10^6/mm^2$, and in the cases of BN coating with thin and thick layers, $10^5/mm^2$ and $5{\times}10^4/mm^2$, respectively. The largest cooling capacity of the wheel corresponded to the heated wheel surface, and as the thickness of BN coating layer increased, the cooling capacity of the wheel gradually decreased.

• 열처리공학회지
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• 제12권2호
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• pp.99-107
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• 1999

The graphitization is affected by the addition of small amount of the elements(such as Si, Al, Ni, B, Cr and Mn etc.) and the pre-treatment(such as cold rolling). Boron is well known element to accelerate the graphitization of cementite in high carbon steels. Also, cold rolling is known to accelerate the graphitization. But the graphitization nucleation mechanism by cold rolling is few reported. Therefore the effect of cold rolling in Fe-0.5%C-1.0%Si-0.47%Mn-0.005%B steel on the graphitization is investigated quantitatively using hardness test, optical microscope and scanning electron microscope, neutron induced microscopic radiography. The nucleation of graphite in cold-rolled Fe-0.5%C-1.0%Si-0.47%Mn-0.005%B steel is formed at void which is formed at pearlite/pearlite boundary by cold rolling. But the effect of cold rolling on graphitization in boron addition steel is more effective than that of no boron addition steel due to segregation of BN at void in boron addition steel.