Effect of Oxygen Addition on Residual Stress Formation of Cubic Boron Nitride Thin Films |
Jang, Hee-Yeon
(Thin Film Materials Research Center, Korea Institute of Science and Technology)
Park, Jong-Keuk (Thin Film Materials Research Center, Korea Institute of Science and Technology) Lee, Wook-Seong (Thin Film Materials Research Center, Korea Institute of Science and Technology) Baik, Young-Joon (Thin Film Materials Research Center, Korea Institute of Science and Technology) Lim, Dae-Soon (Department of Materials Science and Engineering, Korea University) Jeong, Jeung-Hyun (Thin Film Materials Research Center, Korea Institute of Science and Technology) |
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