• Proceedings of the Korean Vacuum Society Conference
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• 2012.08a
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• pp.267-267
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• 2012

최근 국내 반도체 장비 업체들에 의해서 차세대 반도체용 450 mm 웨이퍼 공정용 장비 개발이 진행 중에 있다. 반도체 산업은 계속해서 반도체 칩의 크기를 작게 하고, 웨이퍼 크기를 늘리면서 웨이퍼 당 칩수를 증가시켜 생산성을 향상해오고 있다. 현재 300 mm 웨이퍼에서 450 mm 웨이퍼를 도입하게 되면, 생산성 뿐만 아니라 30%의 비용절감과 50%의 cycle-time 단축이 기대되고 있다. 장비에 대한 이해와 공정에 대한 해석 능력을 위해 비용과 시간이 많이 들기 때문에 최근 컴퓨터를 활용한 수치 모델링이 진행되고 있다. 또한, 수치 모델링은 실험 결과와의 비교가 필수적이다. 본 연구에서는 450 mm 웨이퍼 공정용 장비의 전자밀도를 cut off probe를 통해 100 mTorr에 서 Ar 플라즈마를 파워에 따라 측정했다. 13.56 MHz 200 W, 500 W, 1,000 W로 입력 파워가 증가하면서 웨이퍼 중심에서 $6.0{\times}10^9#/cm^3$, $1.35{\times}10^{10}#/cm^3$, $2.4{\times}10^{10}#/cm^3$로 증가했다. 450 mm 웨이퍼 영역에서 전자 밀도의 불균일도는 각각 10.31%, 3.24%, 4.81% 였다. 또한, 이 450 mm 웨이퍼용 CCP 장비를 축대칭 2차원으로 형상화하고, 전극에 13.56 MHz를 직렬로 연결된 blocking capacitor ($1{\times}10^{-6}$ F/$m^2$)를 통해 인가할 수 있도록 상용 유체 모델 소프트웨어(CFD-ACE+, EXI corp)를 이용하여 계산하였다. 주요 전자-중성 충돌 반응으로 momentum transfer, ionization, excitation, two-step ionization을 고려했고, $Ar^+$와 $Ar^*$의 표면 재결합 반응은 sticking coefficient를 1로 가정했다. CFD-ACE+의 CCP 모델을 통해 Poisson 방정식을 풀어서 sheath와 wave effect를 고려하였다. Stochastic heating을 고려하지 않았을 때, 플라즈마 흡수 파워가 80 W, 160 W, 240 W에서 실험 투입 전력 200 W, 500 W, 1,000 W일 때와 유사한 반경 방향의 플라즈마 밀도 분포를 보였다. 200 W, 500 W, 1,000 W일 때의 전자밀도 분포는 수치 모델링과 전 범위에서 각각 10%, 3%, 2%의 오차를 보였다. 450 mm의 전극에 13.56 MHz의 전력을 인가할 때, 파워가 증가할수록 전자밀도의 최대값의 위치가 웨이퍼 edge에서 중심으로 이동하고 있음을 실험과 모델링을 통해 확인할 수 있었다.

• The Korean Journal of Physiology and Pharmacology
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• v.21 no.2
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• pp.169-177
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• 2017

Lamotrigine is an antiepileptic drug widely used to treat epileptic seizures. Using whole-cell voltage clamp recordings in combination with a fast drug application approach, we investigated the effects of lamotrigine on 5-hydroxytryptamine $(5-HT)_3$ receptors in NCB-20 neuroblastoma cells. Co-application of lamotrigine ($1{\sim}300{\mu}M$) resulted in a concentration-dependent reduction in peak amplitude of currents induced by $3{\mu}m$ of 5-HT for an $IC_{50}$ value of $28.2{\pm}3.6{\mu}M$ with a Hill coefficient of $1.2{\pm}0.1$. These peak amplitude decreases were accompanied by the rise slope reduction. In addition, $5-HT_3$-mediated currents evoked by 1 mM dopamine, a partial $5-HT_3$ receptor agonist, were inhibited by lamotrigine co-application. The $EC_{50}$ of 5-HT for $5-HT_3$ receptor currents were shifted to the right by co-application of lamotrigine without a significant change of maximal effect. Currents activated by 5-HT and lamotrigine co-application in the presence of 1 min pretreatment of lamotrigine were similar to those activated by 5-HT and lamotrigine co-application alone. Moreover, subsequent application of lamotrigine in the presence of 5-HT and 5-hydroxyindole, known to attenuate $5-HT_3$ receptor desensitization, inhibited $5-HT_3$ receptor currents in a concentration-dependent manner. The deactivation of $5-HT_3$ receptor was delayed by washing with an external solution containing lamotrigine. Lamotrigine accelerated the desensitization process of $5-HT_3$ receptors. There was no voltage-dependency in the inhibitory effects of lamotrigine on the $5-HT_3$ receptor currents. These results indicate that lamotrigine inhibits $5-HT_3$-activated currents in a competitive manner by binding to the open state of the channels and blocking channel activation or accelerating receptor desensitization.

• Journal of Korean Society for Atmospheric Environment
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• v.7 no.3
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• pp.169-179
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• 1991

Atmospheric $O_3$ in the biosphere is formed under the favourable meteorological condition, when the primary pollutants, such as $NO_2, HC, CO, CH_4$, etc., react with over constituents. Observed annual average concentrations for 1989 and 1990 were 11.8 and 10.4 ppb, respectively. THe number of days measured ozone over 80 ppb in Seoul were 36 in 1989 and 39 in 1990. In general, monthly maximum values occurred in May and August. In comparison with 1 $\sim$ 2 maxima of $O_3$ distribution in large cities in other countries, it was found that there were 3 $\sim$ 4 maxima in Seoul and its suburbs. Topographic effects, resulted by wind channelling in the Han River valley and by the blocking of air pollutants in the mountain, appeared to produce multiple centres of $O_3$ maxima in Seoul. Surface $O_3$ values were low with decreasing solar radiation, when the cloudiness increased and precipitation occurred. According to 12 cases examined, 2 cases shown here, $O_3$ values exceeding 80 ppb were occurred when the Korean peninsular was under the influence of the backside airflows with high intensity of solar radiation. Occasionally, sea breezes were observed to occur in warm seasons, and the chanelling effect of the Han River valley appeared to increase the general wind (speed) to the east side of Seoul. In this meso-scale situation $O_3$ in downwind is highly correlated with precursors. The sea breeze of 2 $\sim$ 4 m $s^{-1}$ will take 3 $\sim$ 5 hours to transport photochemical precursors for 20 $\sim$ 50 km. In turn the areas of maximum $O_3$ occurrence in Seoul are in the range of meso-scale transport of air pollutants.

• Korean Journal of Clinical Pharmacy
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• v.23 no.4
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• pp.322-326
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• 2013

Purpose: Telmisartan, an angiotensin receptor blocker has been known to be a potent blocker of both CYP2J2 and P-glycoprotein (P-gp) in vitro. This study aims to investigate the drug-drug interactions between telmisartan and ebastine, a CYP2J2 and P-gp substrate in rats. Method: Ebastine (10 mg/kg) was orally given in the presence and absence of telmisartan (4 mg/kg, p.o.). Heparinized blood was serially taken and the plasma concentrations of ebastine and its three metabolites (hydroxyebastine, carebastine and desalkylebastine) were determined using LC-MS/MS, and their pharmacokinetic parameters were compared. Results: Peak concentrations ($C_{max}$) and AUC of ebastine were significantly (p<0.05) increased in the presence of telmisartan by 2.1 and 1.9 times, respectively. While $C_{max}$ of hydroxyebastine was significantly increased by 1.9 times, the half-life of hydroxyebasteine was decreased significantly with telmisartan (p<0.05). There was no change in the pharmacokinetic parameters of carebastine, the active metabolite of ebastine, and desalkylebastine was not detected in plasma. The systemic exposure of ebastine was significantly augmented by telmisartan, indicating that telmisartan may enhance the absorption of ebastine by blocking P-gp. Conclusion: Although telmisartan may also partially contribute to inhibit the biotransformation to hydroxyebastine, the inhibitory action seemed to be overridden by the enhancement of absorption, because the generation of hydroxyebastine was not diminished. In spite of such interactions between telmisartan and ebastine, no clinical consequence could be expected due to no significant change of the active metabolite, carebastine.

• Journal of the korean academy of Pediatric Dentistry
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• v.45 no.3
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• pp.393-399
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• 2018

The aim of this review is to introduce about the issue of benzocaine and methemoglobinemia. Through blocking the pain during dental treatment, fear and anxiety of patients will be reduced. Thus, anesthetic agent containing benzocaine is commonly used while controlling the pain of patients during treatment. However, on May 28, 2018, the Ministry of Food and Drug Safety reported a medication safety report about restricting the use of benzocaine-containing agents in infants under 24 months and children. Also, they recommended a cautious use to adolescents and adults to prevent methemoglobinemia (MHb). This report was published due to an advice from Food and Drug Administration (FDA) on May 23, 2018. When using agents containing benzocaine, dentists must consider the probability of MHb and prepare for early diagnosis and appropriate action. Since 1930s, methylene blue is known to cure MHb patients. Therefore, the proper use of methylene blue for emergencies and diagnosis methods for early diagnosis of MHb should be familiar to dentists planning for the use of topical anesthetic agents. Dentists should be trained for emergency situation of MHb caused by the use of benzocaine.

• Journal of The Korean Association For Science Education
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• v.17 no.2
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• pp.179-189
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• 1997

In this study, a conceptual change model for effective laboratories was developed and its instructional effect on students' achievement, the acquisition of scientific conceptions, and the attitudes toward science was investigated. Considering several conceptual change models in literature and Korean educational situations, the conceptual change model was developed. The model consists of 5 stages; preliminary, prediction, exploration, consolidation and reconstruction, and application. The treatment and control groups (2 classes) were selected from a middle school in Seoul, and taught about the changes of states, density, and dissolution for three weeks. Prior to instruction, the Group Assessment of Logical Thinking and the Learning Approach Questionnaire were administered, and their scores were used as covariate and / or blocking variable. To examine students' alternative conceptions before the instructions, a pre-conceptions test was also administered. After the instructions, students' achievement, the acquisition of scientific conceptions, and the attitudes toward science were measured with a researcher-made achievement test, a post-conceptions test, and the subtests of the Test of Science-Related Attitudes, respectively. The results indicated that the score of the treatment group was significantly higher than that of the control group in the post-conceptions test. The students in the treatment group had also less alternative conceptions than those in the control group. However, there were no significant differences for the achievement and the attitudes toward science. Educational implications are discussed.

• Journal of The Korean Association For Science Education
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• v.17 no.3
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• pp.323-332
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• 1997

In order to use analog more systematically in science class, an instructional model was designed on the basis of analogical reasoning processes (encoding, inference, mapping, application, and response) in the Sternberg's component process theory. The model has five phases (introducing target context, cue retrieval of analog context, mapping similarity and drawing target concept, application, and elaboration), and the instructional effects of using the model upon students' comprehension of science concepts and motivation level of learning were investigated. The treatment and control groups (1 class each) were selected from 8th-grade classes and taught about chemical change and chemical reaction for the period of 10 class hours. The treatment group was taught with the materials based on the model, while the control group was taught in traditional instruction without using analog. Before the instructions, modified versions of the Patterns of Adaptive Learning Survey and the Group Assessment of Logical Thinking were administered, and their scores were used as covariates for students' conceptions and motivational level of learning, respectively. Analogical reasoning ability test was also administered, and its score was used as a blocking variable. After the instructions, students' conceptions were measured by a researcher-made science conception test, and their motivational level of learning was measured by a modified version of the Instructional Materials Motivation Scale. The results indicated that the adjusted mean score of the conception test for the treatment group was significantly higher than that of the control group at .01 level of significance. No significant interaction between the instruction and the analogical reasoning ability was found. Although the motivational level of learning for the treatment group was higher than that for the control group, the difference was found to be statistically insignificant. Educational implications are discussed.

• Convergence Security Journal
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• v.16 no.2
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• pp.25-34
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• 2016

This study aims to prevent the serious threat from dangerous person or group by responding or blocking or separating illegal activities by use of SNA: Social Network Analysis. SNA enables to identify the complex social relation of suspect and individuals in order to enhance the effectiveness and efficiency of investigation. SNS has rapidly developed and expanded without restriction of physical distance and geo-location for making new relation among people and sharing large amount of information. As rise of SNS(facebook and twitter) related crimes, terrorist group 'ISIS' has used their website for promotion of their activity and recruitment. The use of SNS costs relatively lower than other methods to achieve their goals so it has been widely used by terrorist groups. Since it has a significant ripple effect, it is imperative to stop their activity. Therefore, this study precisely describes criminal and terrorist activities on SNS and demonstrates how effectively detect, block and respond against their activities. Further study is also suggested.

• Applied Chemistry for Engineering
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• v.28 no.4
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• pp.473-478
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• 2017

In this study, the guanidine compound, 1,5,7-triazabicyclo[4.4.0]dec-5-ene (TBD) was impregnated to three kinds of silica to prepare $CO_2$ adsorbents, and the $CO_2$ adsorption and physicochemical properties of the resulting adsorbents were investigated. The TBD amount of impregnation was changed and its effect on adsorption capacity and characteristics were studied. The physicochemical properties of TBD-impregnated silica were evaluated with $N_2$ adsorption/desorption, FT-IR, elemental analysis, and thermogravimetric analysis. The TBD-impregnated silica lowered the surface area and pore volume, and the increased impregnation amount of TBD made them further decrease. When TBD was 6 mmol/g, the $CO_2$ adsorption capacity was the highest at 7.3 wt%, and the adsorption capacity decreased due to the blocking phenomenon when the TBD amount increased.

• Analytical Science and Technology
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• v.12 no.2
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• pp.105-110
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• 1999

The studies on the adsorption properties and the antibacterial effects of the Cd and Cu-treated activated carbon were carried out. From the adsorption studies on the series of these metal-treated activated carbons, typical Type-I isotherm was observed. The surface areas of the treated carbon obtained from BET equation were in the range of $1101-1418m^2/g$ for Cd-AC and of $1084-1361m^2/g$ for Cu-AC. Using ${\alpha}_s$-plot, the micropore volumes and pore size distribution were obtained. From the SEM study, it is also observed that many of micropores in activated carbon are blocked by window blocking effect of metals after the impregnation. Finally, antibacterial effects of M-activated carbon against Escherichia coli was discussed. From the study, the area of antibacterial activity becomes larger with the increase of the amount of metal treated.