• Journal of Sensor Science and Technology
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• v.18 no.3
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• pp.239-244
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• 2009

We fabricated nano-templates by low temperature BCP(block copolymer) process at 180 $^{\circ}C$, then we deposited 10 nm-thick $TiO_2$ layers with ALD(atomic layer deposition) at low temperature of 150 $^{\circ}C$. Through FE-SEM analysis, we confirmed the successful formation of the groove-type(width of crest : 30 nm, width of trough : 18 nm) and the cylinder-type(diameter : 10 nm, distance between hole : 25 nm) templates. Moreover, after $TiO_2$-ALD processing, we confirmed the deposition of the uniform nano layers of $TiO_2$ on the nano-templates. Through AFM analysis, the pitches of the crest-through(in groove-type) and hole-hole(in cylinder-type) were the same before and after $TiO_2$-ALD processing. In addition, we indirectly determined the existence of the uniform $TiO_2$ layers on nano-templates as the surface roughness decreased drastically. We successfully fabricated nano-template at low temperature and confirmed that the three-dimensional nano-structure for sensor application could be achieved by $TiO_2$-ALD processing at extremely low temperature of 150 $^{\circ}C$.

• Proceedings of the Korean Magnestics Society Conference
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• 2002.12a
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• pp.34-35
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• 2002

CoCrPt alloy films are attracting wide attention for applications to high-density magnetic recording media and hard magnetic layer in spin valve structure due to their high coercivity and strong magnetocrystalline anisotropy. Diblock copolymer templates are one of the most promising candidates for nanoscale patterning otherwise inaccessible by lithographic procedures [1]. In this study, we have investigated magnetic properties of Co$\sub$68/Cr$\sub$18/Pt$\sub$14/ nanodot arrays made by self-assembling polystyrene-block-methyl methacrylate ((PS-b-PMMA), (Mn = 82.5 Kg/mol, with a 1.12 polydispersity)) diblock copolymer. (omitted)

• Membrane Journal
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• v.20 no.1
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• pp.55-61
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• 2010

A diblock copolymer of polystyrene-b-poly(oxyethylene methacrylate) (PS-b-POEM) was synthesized via atom transfer radical polymerization (ATRP), as revealed by FT-IR spectroscopy. The self-assembled block copolymer membrane was prepared and used to template the growth of silver nanoparticles in the solid state by the introduction of $AgCF_3SO_3$ precursor and UV irradiation process. Transmission electron microscopy (TEM) and UV-visible spectroscopy confirmed the in situ formation of silver nanoparticles within the block copolymer membranes, and the size of nanoparticles were controlled by adjusting the moiety of hydrophilic POEM domains. PS-b-POEM block copolymer with a lower POEM content was effective in generating smaller size of metal nanoparticles.

• Polymer(Korea)
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• v.35 no.3
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• pp.238-243
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• 2011

Organic/inorganic hybrid materials have a lot of interest in various areas due to their fascinating properties. To control the location and dispersion of inorganic nanoparticles within polymer matrix. thiol-terminated polymeric ligands have been widely used to tune the surface property of nanoparticles. However, the specific binding between the thiol functional group and metal is unstable with increasing temperature. To archive the thermally-stable Au nanoparticles, we previously synthesized various UV-crosslinkable polymeric ligands, which have different compositions of polar, UV-crosslinkable azide unit comparing to non-polar 스티렌 units. After crosslinking the Au nanoparticles, it was found that the nanoparticles had superb stability at high temperature (above $180^{\circ}C$). In this work, we used thermally-stable Au nanoparticles to control the location within the polymer matrix. By changing the amount of polar azide units in the polymeric ligands, we could precisely control the location of nanoparticles from one domain to the interface of block copolymer templates.

• Journal of the Korean Chemical Society
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• v.57 no.5
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• pp.618-624
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• 2013

We demonstrated unique inter- and intra-plasmonic coupling effects in bimetallic Au@Ag core-shell NP arrays which are regularly or randomly arranged on self-assembled block copolymer (BCP) inverse micelle monolayers. Polyvinylpyrrolidone (PVP)-stabilized Au@Ag core-shell NP arrays in regular or disordered configuration were incorporated and assembled on reconstructed PS-b-P4VP inverse micelle templates through two types of processes. The intensively enhanced LSPR coupling properties of individual and assembled Au@Ag NPs were evaluated by UV-visible spectroscopy in terms of the type of ligand stabilizer, coupling between Au and Ag, thickness of Ag shell, and type of array configuration. Finally, Au@Ag core-shell NP arrays were employed as active substrates for surface enhanced Raman spectroscopy (SERS) and a significantly enhanced signal enhancement was observed in accordance with the coupling intensity of Au@Ag NPs patterns.

• Proceedings of the Korean Vacuum Society Conference
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• 2013.02a
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• pp.452-452
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• 2013

ZnO is one of the most attractive transparent conductive oxide (TCO) films because of low toxicity, a wide band gap material and relatively low cost. However, the electrical conductivity of un-doped ZnO is too high to use it as TCO films in practical application. To improve electrical properties of undoped ZnO, transition metal (TM) doped ZnO films such as Al doped ZnO or Ti doped ZnO have been extensively studied. Here, we prepared Ti doped ZnO thin films by atomic layer deposition (ALD) for the application of TCO films. ALD was used to prepare Ti-doped ZnO thin films due to its inherent merits such as large area uniformity, precise composition control in multicomponent thin films, and digital thickness controllability. Also, we demonstrated that ALD method can be utilized for fabricating highly ordered freestanding nanostructures of Ti-doped ZnO thin films by combining with BCP templates, which can potentially used in the photovoltaic applications.

• Proceedings of the Korean Vacuum Society Conference
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• 2012.08a
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• pp.108-109
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• 2012

This talk will begin with the demonstration of facile synthesis of silicon nanostructures using the magnesiothermic reduction on silica nanostructures prepared via self-assembly, which will be followed by the characterization results of their performance for energy storage. This talk will also report the fabrication and characterization of highly porous, stretchable, and conductive polymer nanocomposites embedded with carbon nanotubes (CNTs) for application in flexible lithium-ion batteries. It will be presented that the porous CNT-embedded PDMS nanocomposites are capable of good electrochemical performance with mechanical flexibility, suggesting these nanocomposites could be outstanding anode candidates for use in flexible lithium-ion batteries. Directed self-assembly (DSA) of block copolymers (BCPs) can generate uniform and periodic patterns within guiding templates, and has been one of the promising nanofabrication methodologies for resolving the resolution limit of optical lithography. BCP self-assembly processing is scalable and of low cost, and is well-suited for integration with existing semiconductor manufacturing techniques. This talk will introduce recent research results (of my research group) on the self-assembly of Si-containing block copolymers for the achievement of sub-10 nm resolution, fast pattern generation, transfer-printing capability onto nonplanar substrates, and device applications for nonvolatile memories. An extraordinarily facile nanofabrication approach that enables sub-10 nm resolutions through the synergic combination of nanotransfer printing (nTP) and DSA of block copolymers is also introduced. This simple printing method can be applied on oxides, metals, polymers, and non-planar substrates without pretreatments. This talk will also report the direct formation of ordered memristor nanostructures on metal and graphene electrodes by the self-assembly of Si-containing BCPs. This approach offers a practical pathway to fabricate high-density resistive memory devices without using high-cost lithography and pattern-transfer processes. Finally, this talk will present a novel approach that can relieve the power consumption issue of phase-change memories by incorporating a thin $SiO_x$ layer formed by BCP self-assembly, which locally blocks the contact between a heater electrode and a phase-change material and reduces the phase-change volume. The writing current decreases by 5 times (corresponding to a power reduction of 1/20) as the occupying area fraction of $SiO_x$ nanostructures varies.

• Journal of the Microelectronics and Packaging Society
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• v.25 no.4
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• pp.35-40
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• 2018

Simple and useful synthetic process to control the morphology of block copolymers (BCPs) is required for implementation in various device applications. However, the conventional method to use colloidal templates is not enough to realize the production of pure and massive core-shell nanoparticles due to the cost-intensive complex process. Here, we introduce a novel and facile synthesis method to realize the formation of core-shell $SiO_x$ nanoparticle power by employing an immersion annealing of a sphere-forming poly(styrene-b-dimethylsiloxane) (PS-b-PDMS) BCP. We successfully obtained a PS-encapsulated $SiO_x$ nanoparticle with a diameter of ~20 nm. In addition, we analyzed how the mixing ratio of heptane/ethanol affects the BCP morphology of self-assembled PS-b-PDMS nanoparticles, showing a worm-like structure under the optimum immersion conditions. This useful approach is expected to be extendable to other solvent-based BCP synthesis, providing a new guideline for unique BCP production.