• Applied Science and Convergence Technology
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• 제25권6호
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• pp.138-144
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• 2016

The discharge characteristics of pulse-driven coplanar micro barrier discharges for an ultraviolet (UV) light source using Ne-Xe mixture have been investigated using a two-dimensional fluid simulation at near-atmospheric pressure. The densities of electrons, the radiative excited states, the metastable excited states, and the power loss are investigated with the variations of gas pressure and the gap distance. With a fixed gap distance, the number of the radiative states $Xe^*(^3P_1)$ increases with the increasing driving voltage, but this number shows weak dependency on the gas when that pressure is over 400 Torr. However, the number of the radiative states increases with the increase of the gap distance at a fixed voltage, while the power loss decreases. Therefore, a long gap discharge has higher efficiency for UV generation than does a short gap discharge. A slight change in the electrode tilt angle enhances the number of radiative species 2 or 3 times with the same operation conditions. Therefore, the intensity and efficiency of the UV light source can be controlled independently by changing the gap distance and the electrode structure.

• Transactions on Electrical and Electronic Materials
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• 제7권4호
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• pp.204-209
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• 2006

Photo Resist (PR) ashing process was carried out with the atmospheric pressure- dielectric barrier discharge (ADBD) using $SF_6/N_2/O_2$. Ashing rate (AR) was sensitive to the mixing ratio of the oxygen and nitrogen of the blower type of ADBD asher. The maximum AR of 5000 A/min was achieved at 2% of oxygen in the $N_2$ plasma. With increasing the oxygen concentration to more than 2% in the $N_2$ plasma, the discharge becomes weak due to the high electron affinity of oxygen, resulting in the decrease of AR. When adding 0.5% of SF6 to $O_2/N_2$ mixed plasma, the PR AR increased drastically to 9000 A/min and the ashed surface of PR was smoother compared to the processed surface without $SF_6$. Carbon Fluorinated polymer may passivate the PR surface. It was also observed that the glass surface was not damaged by the fluorine.

• 한국환경과학회지
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• 제30권7호
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• pp.507-517
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• 2021

In this study, the bathymetric data acquired from 2018 to 2020 and the precipitation and suspended sediment data were analyzed for changes in bathymetry owing to the discharge from the Nakdong River barrier and environmental factors, especially the torrential rain in 2020. Sediment erosion and deposition processes are repeated because of complex environmental factors such as discharge from the Nakdong River barrier and the influence of waves generated from the external sea. In the first half of the year after the dry season, bathymetric data showed relative erosion trends, whereas in the second half after the flood season, deposition trends were identified owing to the increase in sediment transport. However, the data from the second half of 2020 showed a large amount of erosion, resulting in tendencies different to those of erosion in the first half and deposition in the second half of the year. This result is judged to be influenced by the weather in the summer of 2020. The torrential rain in the summer of 2020 resulted in a higher force of erosion than that of deposition. In summary, the tendency for erosion is more significant than that of sedimentation, especially in the main channel area of the Nakdong River.

• 공업화학
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• 제18권3호
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• pp.213-217
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• 2007

본 연구에서는 유전체장벽방전을 이용하여 휘발성 유기화합물의 일종인 벤젠의 분해 경향과 분해 생성물의 선택성에 대해서 연구하였다. 유전체장벽방전의 공정변수에 따른 벤젠의 분해율과 분해 생성물의 선택성을 높이기 위해서 반응기 내부에 촉매(H-ZSM-5, Na-Y)를 사용하였다. 실험은 대기압에서 수행하였으며, 방전전압, 체류시간, 농도 등의 공정변수에 따른 분해율을 조사하였다. 유전체 장벽방전만을 사용하는 방법과 비교하여 여기에 촉매를 동시에 사용하는 하이브리드 방전이 같은 전압과 체류시간조건에서 보다 효과적인 벤젠의 분해 방법임을 확인하였다.

• 상하수도학회지
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• 제33권4호
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• pp.243-250
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• 2019

This objective of this study was to investigate the degradation characteristics of phenol, a refractory substance, by using a submerged dielectric barrier discharge (DBD) plasma reactor. To indirectly determine the concentration of active species produced in the DBD plasma, the dissolved ozone was measured. To investigate the phenol degradation characteristics, the phenol and chemical oxygen demand (COD) concentrations were evaluated based on pH and the discharge power. The dissolved ozone was measured based on the air flow rate and power discharged. The highest dissolved ozone concentration was recorded when the injected air flow rate was 5 L/min. At a discharge power of 40W as compared to 70W, the dissolved ozone was approximately 2.7 - 6.5 times higher. In regards to phenol degradation, the final degradation rate was highest at about 74.06%, when the initial pH was 10. At a discharged power of 40W, the rate of phenol decomposition was observed to be approximately 1.25 times higher compared to when the discharged power was 70W. It was established that the phenol degradation reaction was a primary reaction, and when the discharge power was 40W as opposed to 70W, the reaction rate constant(k) was approximately 1.72 times higher.

• 대한전기학회논문지:전기물성ㆍ응용부문C
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• 제50권4호
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• pp.169-175
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• 2001

Ozone has been widely applied to many industrial fields because of its strong oxidation power, Therefore, the studies have been carried out for the methods on an effective and high concentration ozone generation. The silent or surface discharge type ozone generators have been mainly used for high concentration ozone generation in many fields of applications. But these two types of ozone generators have shortcomings to be improved. In this study, the ozone generator which improved the shortcomings of above ozone generators was proposed and fabricated for the high concentration ozone generation. And the proposed ozone generator could generate the surface and barrier discharge simultaneously. For this purpose, a mesh type discharge electrode was proposed and studied as a function of the widths output maximum ozone concentration of 2.96[vol%] was obtained at 5.6[kV], 830[mA], for 0.3[mm] width and 0.8[mm] vacancy of the mesh electrode and gap spacing of 0.65[mm] respectively.

• 한국물환경학회지
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• 제27권5호
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• pp.617-624
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• 2011

In order to confirm the creation of the OH radical which influences to RNO bleaching processes, it experimented using laboratory reactor of dielectric barrier discharge plasma (DBDP). The experiments performed in about 4 kind process variables (diameter of ground electrode, diameter of discharge electrode, diameter of quartz tube and effect of air flow rate) which influence to process. In order to examine optimum conditions of design factors as shown in Box-Behnken experiment design, ANOVA analysis was conducted against four factors. The actual RNO removal at optimized conditions under real design constraints were obtained, confirming Box-Behnken results. Optimized conditions under real design constraints were obtained for the highest desirability at 1, 1 mm diameter of ground and discharge electrode, 6 mm diameter of quartz tube and 5.05 L/min air flow rate, respectively.

• 한국대기환경학회지
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• 제20권5호
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• pp.625-632
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• 2004

Perfluorocompounds ($PFC_s$), such as tetrafluoromethane ($CF_4$) and hexafluoroethane ($C_2F_6$), have been widely used as plasma etching and chemical vapor deposition (CVD) gases for semiconductor manufacturing processes. Since these $PFC_s$ are known to cause a greenhouse effect intensively, there has been a growing interest in reducing $PFC_s$ emissions. Among various $CF_4$ decomposing techniques, a dielectric barrier discharge (DBD) is considered as one of a promising candidate because it has been successfully used for generating ozone ($O_3$) and decomposing nitrogen oxide (NO). Firstly, optimal concentration of oxygen for $CF_4$ decomposition was found to figure out how many primary and secondary reactions are associated with DBD process. Secondary, to find effective discharge method for $CF_4$ decomposition, a streamer and a glow mode in DBD are experimentally compared, which includes (i) coaxialcylinder DBD, (ii) DBD reactor packed with glass beads. and (iii) a glow mode operation with a helium gas. The test results showed that optimal concentration of oxygen was ranged 500 ppm~1% for treating 500 ppm of $CF_4$ and helium glow discharge was the most efficient one to decompose $CF_4$.

• 조명전기설비학회논문지
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• 제23권12호
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• pp.184-190
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• 2009

표면의 친수성 작용기 형성과 접촉각 향상을 위하여 대기압 플라즈마를 이용하여 Tri-acetyl-cellulose(TAC) 필름에 대한 표면개질을 연구하였다. TAC 필름의 표면개질 목적으로 대기압에서 플라즈마를 발생시키기 위한 Dielectric barrier discharge(DBD) 구조의 플라즈마 반응기 내에서 이온화된 질소 플라즈마를 사용하였다. 플라즈마 처리 공정변수인 처리속도, 방전전력, 방전 갭 및 질소 가스 유속을 변화시켜가며 접촉각을 측정하여 접촉각과 표면에너지 변화를 검토하였다. 대기압 플라즈마 처리속도 100[mm/sec], 방전 전력 1.5[kW], 방전 갭 2[mm] 및 $N_2$ 가스유량 140[LPM] 에서 가장 높은 접촉각과 표면에너지 값을 보였다. 표면친수화의 정도는 플라즈마 방전 전력과 처리 시간에 의존하였다.

• 대한전기학회논문지:전기물성ㆍ응용부문C
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• 제51권1호
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• pp.15-21
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• 2002

We investigated effects of electrical, physical, and chemical parameters on energy transfer, NO conversion, and light emission in the dielectric barrier discharge (DBD) process. As gap distance between electrodes increased, discharge onset voltage increased. However, as gap distance between electrodes increased, electric field which initiates discharge showed approximately the same value, 30kV/cm. The discharge onset voltage of the coarse surface electrode was lower than that of the smooth surface electrode. And, energy transfer was slightly enhanced in the coarse electrode condition. However, NO conversion rate decreased with the coarse surface electrode because more uniform discharge can be obtained on the smooth surface electrode. The NO conversion rate increased with decreasing the initial concentration, so the DBD process is more feasible in the lower concentration condition. The variation of gas residence time tested at the same energy density in the experiment did not affect on the NO conversion. The result shows that the NO conversion rate mainly depends on the energy density. The DBD process is able to adjust on plasma-photocatalyst process because it emits the short wavelength light in the range of ultraviolet. The intensity of light emission increased with the increase of the energy transfer to the reactor and the gas flow rate.