• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2001.11a
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• pp.176-180
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• 2001

There are several factors causing re-work in CMP process such as improper polish time calculation by operator, removal rate decline of the polisher, unstable in-suit pad conditioning, slurry supply module problem and wafer carrier rotation inconsistency. And conclusively those fundimental reason for the re-work rate increasement is mainly from the cycle time delay between wafer polish and post measurement. Therefore, Wafer thickness measurement in wet condition could be able to remove those improper process conditions which may happen during the process in comparison with the conventional dried wafer measurement system and it can be able to reduce the CMP process cycle time. CMP scrap reduction by overpolish, re-work rate reduction, thickness control efficiency also can be easily achieved. CMP Equipment manufacturer also trying to develop integrated system which has multi-head & platen, cleaner, pre & post thickness measure and even control the polish time from the calculated removal rate of each polishing head by software. CMP re-work problem such as over & under polish by target thickness may result in the cycle time delay. By reducing those inefficient factors during the process and establish of the automatic process control, CLC system need to be adopted to maximize the process performance. Wafer to Wafer Polish Time Feed Back Control by measuring the wafer right after the polish shorten the polish time calculation for the next wafer and it lead to the perfect Post CMP target thickness control capability. By Monitoring all of the processed the wafer, CMP process will also be stabilize itself.

• KIPS Transactions on Computer and Communication Systems
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• v.8 no.12
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• pp.297-304
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• 2019

The technological advances such as communication, sensor, and artificial intelligence lead smart factory construction. Smart factory aims at efficient process control by utilizing data from the existing automation process and intelligence technology such as machine learning. As a result of constructing smart factory, productivity increases, but costs increase. Therefore, small companies try to make a step-by-step transition from existing process to smart factory. In this paper, we have proposed a remote control system that support data collection, monitoring, and control for manufacturing equipment to support the construction of CNC cutting machine based small-scale smart factory. We have proposed the structure and design of the proposed system and efficient sensing data transmission scheme. To check the feasibility, the system was implemented for CNC cutting machine and functionality verification was performed. For performance evaluation, the web page access time was measured. The results means that the implemented system is available level.

• Proceedings of the Korean Institute of Information and Commucation Sciences Conference
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• 2010.05a
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• pp.245-249
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• 2010

In the stereo vision system, information about an object could be gained by searching through images. Edges which are based on the information about an object are used to find the position of the object and send a message of its position coordinate to a unmanned crain. This thesis proposes an algorithm to find the center point of the object's surface which is connected to the unmanned crain's arm, and to recognize the shape of the object by using two CCD cameras. At first, getting information about the edges, and distinguishing each edge's characteristics depend on user's option, and then find the location information by a set of positions that are proposed. This thesis is expected to be devoted to the development of an automation system of unmanned moving equipment.

• Journal of the Korea Institute of Information and Communication Engineering
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• v.12 no.11
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• pp.1923-1932
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• 2008

In this paper, We suggest a method, which extract the 3-Dimension location coordinate of object, stat and coil, using Laser sensor. In order to extract the 3-Dimension location coordinate of object, First, we extract the edge of object. Second, extract the z-axis angle of Laser sensor. Third, extract the 2-Dimension location coordinate of object using edge of object and z-axis of Laser senor. Fourth, discriminate between Slat and Coil. The result of study is expected that the help which is considerable to the automation system development of unmanned transportation equipment will become.

• Proceedings of the Korean Institute of Navigation and Port Research Conference
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• 2023.05a
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• pp.59-60
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• 2023

The automation of container terminals is an important factor that determines port competitiveness, and global advanced ports tend to strengthen their competitiveness through container terminal automation. The operational efficiency of the AGV, which is an essential transport equipment of the automated terminal, can improve the productivity of the automated terminal. The operation of AGVs in automated container terminals differs from that of conventional container terminals, as it is based on an automated system in which AGVs travel along designated paths and operate according to assigned tasks, requiring consideration of factors such as workload, congestion, and collisions. To prevent such problems and improve the efficiency of AGV operations, a more sophisticated model is necessary. Thus, this paper proposes an AGV scheduling model that takes into account the AGV travel path and task assignment within the terminal The model prevent the problem of deadlock and. various cases are generated by changing AGV algebra and number of tasks to create AGV driving situations and evaluate the proposed algorithm through algorithm and optimization analysis.

• KSCE Journal of Civil and Environmental Engineering Research
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• v.34 no.5
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• pp.1609-1623
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• 2014

A number of studies have been conducted recently regarding the development of automation systems for the construction sector. Much of this attention has focused on earthwork because it is highly dependent on construction machines and is regarded as being basic for the construction of buildings and civil works. For example, technologies are being developed in order to enable earthwork planning based on construction site models that are constructed by automatic systems and to enable construction equipment to perform the work based on the plan and the environment. There are many problems that need to be solved in order to enable the use of automatic earthwork systems in construction sites. For example, technologies are needed for enabling collaborations between similar and different kinds of construction equipment. This study aims to develop a construction system that imitates collaborative systems and decision-making methods that are used by humans. The proposed system relies on the multi-agent concept from the field of artificial intelligence. In order to develop a multi-agent-based system, configurations and functions are proposed for the agents and a framework for collaboration and arbitration between agents is presented. Furthermore, methods are introduced for preventing duplicate work and minimizing interference effects during the collaboration process. Methods are also presented for performing advance planning for the excavators and compactors that are involved in the construction. The current study suggests a theoretical framework and evaluates the results using virtual simulations. However, in the future, an empirical study will be conducted in order to apply these concepts to actual construction sites through the development of a physical system.

• Journal of the Korea Society of Computer and Information
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• v.15 no.9
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• pp.57-65
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• 2010

This paper describes the method of efficient container number recognition in colored container image with number plate at ATC(Automatic Transfer Crane) in container terminal yard. At the Sinseondae terminal gate in Busan, the container number recognition system is installed by "intelligent port-logistics system technology development", that is government research and development project. It is the method that it sets up the tunnel structure inside camera on the gate and it recognizes the container number in order to recognize the export container cargo automatically. However, as the automation equipment is introduced to the container terminal and the unmanned of a task is gradually accomplished, the container number recognition system for the confirmation of the object of work is required at ATC in container terminal yard. Therefore, the container number recognition system fitted for it is necessary for ATC in container terminal yard in which there are many intrusive of the character recognition through image including a sunlight, rain, snow, shadow, and etc. unlike the gate. In this paper, hardware components of the camera, illumination, and sensor lamp were altered and software elements of an algorithm were changed. that is, the difference of the brightness of the surrounding environment, and etc. were regulated for recognize a container number. Through this, a shadow problem, and etc. that it is thickly below hung with the sunlight or the cargo equipment were solved and the recognition time was shortened and the recognition rate was raised.

• Journal of the Korean Institute of Gas
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• v.25 no.5
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• pp.1-10
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• 2021

Semiconductor Photo Resist (PR) automation equipment uses a mixture of several flammable substances, and when it leaks during the process, it can lead to various accidents, therefore, risk assessment is necessary. This study analyzed the frequency of leakage of Acetone and PGMEA used in PR automation equipment and the frequency at which such leakage could lead to a fire accident through the frequency analysis method, and evaluated the need for additional risk reduction measures in the current facility. Based on the process leak data and ignition probability data of IOGP, leak frequency analysis and ignition probability were derived, and the frequency of actual fire accidents was analyzed by combining them. The frequency of material leakage in semiconductor PR process is 7.30E-03/year, and fire accidents can occur by acetone that exists above the flash point when the material is leaked, the frequency was calculated at the level of 1.24E-05/year. According to the UK HSE, for a major accident occurring with a frequency of 1.24E-05/year, it is defined as "Broadly Acceptable", a level that does not require additional measures for risk reduction when it causes 7 or less deaths, and due to the process operated by two people, no additional risk reduction are required.

• KIPS Transactions on Computer and Communication Systems
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• v.10 no.7
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• pp.199-204
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• 2021

Digital substation refers to a substation that digitizes functions and communication methods of power facilities such as monitoring, measuring, control, protection, and operation based on IEC 61850, an international standard for the purpose of intelligent power grids. Based on the intelligent operating system, efficient monitoring and control of power facilities is possible, and automatic recovery function and remote control are possible in the event of an accident, enabling rapid power failure recovery. With the development of digital technology and the expansion of the introduction of eco-friendly renewable energy and electric vehicles, the spread of direct current distribution systems is expected to expand. MVDC is a system that utilizes direct current lines with voltage levels and transmission capacities between HVDCs applied to conventional transmission systems and LVDCs from consumers. Converting existing lines in substations, where most power equipment is alternating current centric, to direct current lines will reduce transmission losses and ensure greater current capacity. The process bus of a digital substation is a communication network consisting of communication equipment such as Ethernet switches that connect installed devices between bay level and process level. For MVDC linkage to existing digital substations, the process level was divided into two buses: AC and DC, and a system that can be comprehensively managed in conjunction with diagnostic IEDs as well as surveillance and control was proposed.

• Journal of the Korean Society of Marine Environment & Safety
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• v.27 no.2
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• pp.363-368
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• 2021

Ship engine rooms have improved automation systems owing to the advancement of technology. However, there are many variables at sea, such as wind, waves, vibration, and equipment aging, which cause loosening, cutting, and leakage, which are not measured by automated systems. There are cases in which only one engineer is available for patrolling. This entails many risk factors in the engine room, where rotating equipment is operating at high temperature and high pressure. When the engineer patrols, he uses his five senses, with particular high dependence on vision. We hereby present a preliminary study to implement an engine-room patrol robot that detects and informs the machine room while a robot patrols the engine room. Images of ship engine-room equipment were classified using a convolutional neural network (CNN). After constructing the image dataset of the ship engine room, the network was trained with a pre-trained CNN model. Classification performance of the trained model showed high reproducibility. Images were visualized with a class activation map. Although it cannot be generalized because the amount of data was limited, it is thought that if the data of each ship were learned through transfer learning, a model suitable for the characteristics of each ship could be constructed with little time and cost expenditure.