• 한국정보디스플레이학회:학술대회논문집
• /
• 2009.10a
• /
• pp.1500-1503
• /
• 2009

In this paper, we studied about atmospheric pressure remote plasma ashing of photoresist(PR), by using a modified dielectric barrier discharge(DBD). The effect of various gas combinations such as $N_2/O_2$, $N_2/O_2+SF_6$ on the changes PR ashing rate was investigated as a function of power. The maximum PR ashing rate of 1850 nm/min was achieved at $N_2$ (70 slm)/ $O_2$ (200 sccm) + $SF_6$ (3 slm). We found that as the oxygen and fluorine radical peaks were increased, the ashing rate is increased, too.

• The Transactions of The Korean Institute of Electrical Engineers
• /
• v.61 no.5
• /
• pp.717-720
• /
• 2012

Various types of dielectric-barrier-discharge (DBD) devices have been developed for diverse applications for the last decade. In this study, a flat non-thermal DBD micro plasma source under atmospheric pressure has been developed. The flat-panel type plasma is generated by bipolar pulse voltages, and driving gas is air. In this study, the plasma source was investigated with intensified charge coupled device (ICCD) images and Optical Emission Spectroscopy (OES). The micro discharges are generated on the crossed electrodes. For theoretical analysis, 2-dimensional fluid simulation was performed. The plasma source can be driven in air, and thus the operation cost is low and the range of application is wide.

• Transactions of the Korean Society of Machine Tool Engineers
• /
• v.17 no.4
• /
• pp.89-94
• /
• 2008

Differential pressure flow meters which have a shape of triangular separate bar(TSB) were tested for investigating the flow rate characteristics of the flow meters with varying the temperature of the gas flow. Three kinds of the triangular separate bar flow meters whose aerodynamic angles are different one another are used. The mass flow rate of the flow meters are evaluated using a non-dimensional parameter which includes the gas temperature, exhaust gas pressure and differential pressure at the flow meters, and atmospheric pressure. A burner system which is similar to gas turbine was used for raising the gas flow temperature. The burner system was operated with varying the air/fuel ratio by controlling both the fuel injection rate from the fuel nozzle and air flow rate from a blower. An empirical correlation between the mass flow rate at the TSB flow meter and the non-dimensional parameter was obtained. The empirical correlation showed linear relationship between the mass flow rate and the non-dimensional parameter H. Also, the mass flow rate characteristics at the TSB flow meter was affected by the gas temperature.

• Journal of the Korean Vacuum Society
• /
• v.20 no.6
• /
• pp.409-415
• /
• 2011

The method to improve the detection sensitivity of Hand-held XRF (X-Ray Fluorescence) device currently being developed is discussed. To minimize the loss of the intensity due to atmospheric gas molecules, the vacuum module, which can be filled with atmospheric or He gas, between the sample and the detector was installed. And the change of the detection sensitivity was measured in a vacuum and in the He gas-filled state. As a result, the following three important results were obtained; Firstly, XRF intensity was increased 2~4 times in the low energy range (3~4 keV). It is a very important result because the enhancement of the detection sensitivity means shortening of the detection time in Hand-held XRF device. Secondly, the possibility of detection of the elements less than 3 keV in emission energy was confirmed. Thirdly, the absorption by atmospheric gas molecules can be minimized without vacuum- sealed vessel in Hand-held XRF device, if the vacuum module filled with He gas is used. We concluded that all of three results are very meaningful in the development of a Hand-held XRF device.

• Applied Biological Chemistry
• /
• v.19 no.4
• /
• pp.202-218
• /
• 1976

In this experiment American Summer Pairman apple was selected as test fruit in order to study the effect of sub-atmospheric pressure storage in the apple. keeping a certain pressure condition, a new sub-atmospheric pressure system was designed and constructed in which fruits were stored at $25^{\circ}C$ under two different atmospheric pressure conditions such as Normal Atmospheric Pressure (NAP) and Sub-Atmospheric Pressure (SAP). Moreover, they were divided into plots of 5% and 0% of $CO_2$, on the basis of gas composition. Under these conditions, the amount of respiration and ethylene evolution, and the changes of intercellular gas composition and organic components were investigated throughout the storage. The results obtained are as follows: (1) The intercellular gas was exhausted so rapidly by the SAP treatment that the gas equilibrium in the tissues reached within 5 minutes. (2) The amount of respiration was found to be higher in plots of NAP than SAP, and under the conditions, controlling $CO_2$ content, plots of $CO_2$ 5% were lower in the amount of respiration than $CO_2$ 0%. The climateric rise was revealed more slowly in plots of the SAP than NAP. These results indicate that the SAP treatment was an efficient method for controlling the respiration of fruits. Furthermore, these results were also realized with the results of the respiratory quotient (R.Q) and intercellular gas composition. (3) Evolution of ethylene, the ripening hormone in plant, was shown the similar tendency to the climacteric pattern of respiration; at the stage of climacteric maximum, the maximun amount of ethylene was found earlier in plots of NAP than SAP, and post climacteric stage was prolonged in the plots of the SAP compared to those of the NAP. The ethylene concentration in tissue appeared lower in plots of the SAP than NAP, which might suggest that the SAP treatment was caused to restriction of ethylene evolution. (4) Effects of the SAP treatment mentioned hitherto were proved also with the test of the external appearance such as changes of color and freshness, firmness, rotting and weight loss. (5) In the investigation of organic components, vitamin C and organic acids varied less in plots of SAP than NAP. Specially, it was remarkable that the loss of malic acid was least decreased by the SAP treatment. These effects of the SAP treatment were distinctive in the changes of the ratios of malic and citric acid to total acid, and the ratios of free sugar to free acid.

• Transactions of the Korean Society of Mechanical Engineers
• /
• v.17 no.5
• /
• pp.1246-1252
• /
• 1993

Coal-Water slurry (CWS) is a new potential form of fuel for use in power plants and industrial furnaces. The evaporation and ignition characteristics of CWS have been studied in the post-flame region generated by a flat flame burner. Individual droplets with initial diameters of 1-3mm were supported around the thermocouples and raidly exposed to a hot gas stream. The gas temperature ranged between $950^{\circ}C$ and 1600.deg. C at atmospheric pressure. The effect of droplet size, gas temperature and radiative heat transfer by screen were studied experimentally. The ignition criterion was either a rapid temperature rise in time-temperatuire curves or onset of visible flame in experiment. Incresing the gas temperature or decreasing the droplet size reduced the time required for evaporation and ignition.

• Electrical & Electronic Materials
• /
• v.8 no.1
• /
• pp.21-26
• /
• 1995

Highly sensitive and mechanically stable gas sensors have been fabricated using the microfabrication and micromaching techniques. The sensing material used to detect the offensive trimethylarnine ((CH$_{3}$)$_{3}$N) gas is 6 wt% $Al_{2}$O$_{3}$-doped, 1000.angs.-thick ZnO deposited by r. f. magnetron sputtering. The optimum operating temperature of the sensor is 350.deg.C and the corresponding heater power is about 85mW. Excellent thermal insulation is achieved by the use of a double-layer structure of 0.2.mu.m -thick silicon nitride and 1.4.mu.m-thick phosphosilicate glass(PSG) prepared by low pressure chemical vapor deposition(LPCVD) and atmospheric pressure chemical vapor deposition(APCVD), respectively. The sensors are mechanically stable enough to endure at least 43, 200 heat cycles between room temperature and 350.deg. C.

• Proceedings of the IEEK Conference
• /
• 2001.10a
• /
• pp.711-714
• /
• 2001

A new technology to make fluoride gas such as NF$_3$contained in the exhaust gas from semiconductor manufacturing plants convert directly into a harmless substance have been established and new concept on the disposal treatment of global warming gases were presented. Experimental results verify that the chemical reactions can be take place at substantially lower temperature of 80-40$0^{\circ}C$ as compared with the combustion treatment method. Reaction product is mainly metal fluoride which is a harmless and a valuable chemical material as one of new resources. The other favorable characteristics are that the continuous treatment is possible at a low temperature under atmospheric pressure. Furthermore this process is compact, easily controllable and safely operable at low running cost. This paper concerns with a new harmless disposal treatment of toxic global warming gas.

• Proceedings of the Korean Environmental Sciences Society Conference
• /
• 2003.11a
• /
• pp.65-68
• /
• 2003

A quantitative study of the amount of air transported between the boundary layer and the free atmosphere is important for understanding air quality and upper tropospheric ozone, which is a greenhouse gas. Frontal systems are known to be an effective mechanism for the vertical transport of pollutants. Numerical experiments have been performed with a simple two-dimensional front model to simulate vertical transport of trace gases within developing cold fronts. Three different trace gases experiments have been done numerically according to the different initial fields of trace gases such as aerosol, ozone and $H_2O_2$. Trace gas field tilts to the east while the front tilts to the west. Aerosol simulation shows that pollutants can be transported out of the boundary to altitudes of about 10 km. The stratospheric ozone is brought downwards in a tropopause fold behind of the frontal surface. The meridional gradient in trace gas ($H_2O_2$) can cause a complicate structure in the trace field by the meridional advection.

• Proceedings of the KSME Conference
• /
• 2003.11a
• /
• pp.899-904
• /
• 2003

A new model for dense gas dispersion is formulated within the Lagrangian framework. In several accidental released situations, denser-than-air vapour clouds are formed which exhibit dispersion behavior markedly different from that observed for passive atmospheric pollutants. For relevant prediction of dense gas dispersion, the gravity and entrainment effects need to implemented. The model deals with negative buoyancy which is affected by gravity. Also, the model is subjected to entrainment. The mean downward motion of each particle was accounted for by considering the Langevin equation with buoyancy correction term.