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Trend in Research and Application of Hard Carbon-based Thin Films (탄소계 경질 박막의 연구 및 산업 적용 동향)

  • Lee, Gyeong-Hwang;Park, Jong-Won;Yang, Ji-Hun;Jeong, Jae-In
    • Proceedings of the Korean Institute of Surface Engineering Conference
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    • 2009.05a
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    • pp.111-112
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    • 2009
  • Diamond-like carbon (DLC) is a convenient term to indicate the compositions of the various forms of amorphous carbon (a-C), tetrahedral amorphous carbon (ta-C), hydrogenated amorphous carbon and tetrahedral amorphous carbon (a-C:H and ta-C:H). The a-C film with disordered graphitic ordering, such as soot, chars, glassy carbon, and evaporated a-C, is shown in the lower left hand corner. If the fraction of sp3 bonding reaches a high degree, such an a-C is denoted as tetrahedral amorphous carbon (ta-C), in order to distinguish it from sp2 a-C [2]. Two hydrocarbon polymers, that is, polyethylene (CH2)n and polyacetylene (CH)n, define the limits of the triangle in the right hand corner beyond which interconnecting C-C networks do not form, and only strait-chain molecules are formed. The DLC films, i.e. a-C, ta-C, a-C:H and ta-C:H, have some extreme properties similar to diamond, such as hardness, elastic modulus and chemical inertness. These films are great advantages for many applications. One of the most important applications of the carbon-based films is the coating for magnetic hard disk recording. The second successful application is wear protective and antireflective films for IR windows. The third application is wear protection of bearings and sliding friction parts. The fourth is precision gages for the automotive industry. Recently, exciting ongoing study [1] tries to deposit a carbon-based protective film on engine parts (e.g. engine cylinders and pistons) taking into account not only low friction and wear, but also self lubricating properties. Reduction of the oil consumption is expected. Currently, for an additional application field, the carbon-based films are extensively studied as excellent candidates for biocompatible films on biomedical implants. The carbon-based films consist of carbon, hydrogen and nitrogen, which are biologically harmless as well as the main elements of human body. Some in vitro and limited in vivo studies on the biological effects of carbon-based films have been studied [$2{\sim}5$].The carbon-based films have great potentials in many fields. However, a few technological issues for carbon-based film are still needed to be studied to improve the applicability. Aisenberg and Chabot [3] firstly prepared an amorphous carbon film on substrates remained at room temperature using a beam of carbon ions produced using argon plasma. Spencer et al. [4] had subsequently developed this field. Many deposition techniques for DLC films have been developed to increase the fraction of sp3 bonding in the films. The a-C films have been prepared by a variety of deposition methods such as ion plating, DC or RF sputtering, RF or DC plasma enhanced chemical vapor deposition (PECVD), electron cyclotron resonance chemical vapor deposition (ECR-CVD), ion implantation, ablation, pulsed laser deposition and cathodic arc deposition, from a variety of carbon target or gaseous sources materials [5]. Sputtering is the most common deposition method for a-C film. Deposited films by these plasma methods, such as plasma enhanced chemical vapor deposition (PECVD) [6], are ranged into the interior of the triangle. Application fields of DLC films investigated from papers. Many papers purposed to apply for tribology due to the carbon-based films of low friction and wear resistance. Figure 1 shows the percentage of DLC research interest for application field. The biggest portion is tribology field. It is occupied 57%. Second, biomedical field hold 14%. Nowadays, biomedical field is took notice in many countries and significantly increased the research papers. DLC films actually applied to many industries in 2005 as shown figure 2. The most applied fields are mold and machinery industries. It took over 50%. The automobile industry is more and more increase application parts. In the near future, automobile industry is expected a big market for DLC coating. Figure 1 Research interests of carbon-based filmsFigure 2 Demand ratio of DLC coating for industry in 2005. In this presentation, I will introduce a trend of carbon-based coating research and applications.

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Limitation of Nitrogen ion Implantation and Ionplating Techniques Applied for Improvement of Wear Resistance of Metallic Implant Materials (금속 임플란트 소재의 내마모성 향상을 위하여 적용되는 질소 이온주입 및 이온도금법의 한계)

  • 김철생
    • Journal of Biomedical Engineering Research
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    • v.25 no.2
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    • pp.157-163
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    • 2004
  • Nitrogen ion implantation and ion plating techniques were applied for improvement of the wear resistance of metallic implant materials. In this work, the wear dissolution behaviour of a nitrogen ion implanted super stainless steel (S.S.S, 22Cr-20Ni-6Mo-0.25N) was compared with those of S.S.S, 316L SS and TiN coated 316L SS. The amounts of Cr and Ni ions worn-out from the specimens were Investigated using an electrothermal atomic absorption spectrometry. Furthermore, the Ti(Grade 2) disks were coated with TiN, ZrN and TiCN by use of low temperature arc vapor deposition and the wear resistance of the coating layers was compared with that of titanium. The chemical compositions of the nitrogen ion implanted and nitride coated layers were examined with a scanting auger electron spectroscopy. It wat observed that the metal ions released from the nitrogen ion implanted S.S.S surface were significantly reduced. From the results obtained, it was shown that the nitrogen ion implanted zone obtained with 100 KeV ion energy was easily removed within 200,000 revolutions from a wear dissolution testing under a similar load condition when applied to artificial hip joint. The remarkable improvement in wear resistance weir confirmed by the nitrides coated Ti materials and the wear properties differ greatly according to the chemical composition of the coating layers. for specimens with the same coating thickness of about 3$\mu\textrm{m}$, TiCN coated Ti showed the highest wear resistance. However, after removing the coating layers, the wear rates of all nitrides coated Ti reverted to their normal rates of below 10,000 revolutions from Ti-disk-on-disk wear testing under the same load condition. From the results obtained, it is suggested that the insufficient depth of the 100 Kel N$\^$+/ ion implanted zone and of the nitrides coated layers of 3$\mu\textrm{m}$ are subject to restriction when used as frictional parts of load bearing implants.

Geochemistry of the Hydrothermal Chimneys in the Manus Basin, Southwestern Pacific Ocean (남서태평양 Manus Basin에서 산출되는 열수 분출구에 대한 지화학적 연구)

  • 이경용;최상훈;박숭현
    • Economic and Environmental Geology
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    • v.35 no.1
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    • pp.1-12
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    • 2002
  • Manus Basin, located in the equatorial western Pacific, is a back arc basin formed by collision between the IndoAustralian and the Pacific Plates. The basin is host to numerous hydrothermal vent fields and ore deposits. The basement rocks of the Manus Basin consist primarily of dacite and basaltic andesite. Some of the minerals that form the hydrothermal chimneys that were dredged on the Manus basin include pyrite, chalcopyrite, marcasite, sphalerite and galena. The chimneys can be classified into chalcopyrite dominant Cu-rich type and sphalerite dominant Zn-rich type. The concentration of Zn shows good positive correlation with that of Sb, Cd and Ag. The content of Cu, on the other hand, positively correlates with that of Mo, Mn and Co. For samples that were taken from Zn-rich chimney, a strong positive correlation is found between Au and Zn contents. The chimney also shows enrichments of Cd, Mn and Sb. On the other hand, the samples from Cu-rich chimney exhibit strong correlation among Au, Zn and Pb, and are enriched in Mo and Co concentration. Average contents of Au in Cu-rich and Znrich chimneys were 15.9 ppm and 29.0 ppm, respectively. Because of high concentration of Au with Ag and Cu, the ore deposit have high economic potential. Homogenization temperatures and salinities of fluid inclusions in anhydrite and amorphous silica from Zn-rich chimney are estimated to be l74-220$^{\circ}$C and 2.7-3.6 equiv. wt. % NaCI, respectively. These value suggest that ore forming processes were occurred at around 200$^{\circ}$C and that the oxygen fugacity changed from 2: 10$^{-39.5}$bar to -s: 10$^{-40.8}$bar and the sulfur fugacity from -s: 10$^{-14.7}$bar to 10$^{-13.4}$bar during the process. It appears that the temperature at which the ores formed on Cu-rich chimney was higher than that on Zn-rich chimney.

Origin and Evolution of Leucogranite of NE Yeongnam Massif from Samcheok Area, Korea (삼척지역 북동 영남 육괴에 분포하는 우백질 화강암의 기원 및 진화)

  • Cheong, Won-Seok;Na, Ki-Chang
    • The Journal of the Petrological Society of Korea
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    • v.17 no.1
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    • pp.16-35
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    • 2008
  • We study metamorphism of metasedimetary rocks and origin and evolution of leucogranite form Samcheok area, northeastern Yeongnam massif, South Korea. Metamorphic rocks in this area are composed of metasedimentary migmatite, biotite granitic gneiss and leucogranite. Metasedimentary rocks, which refer to major element feature of siliclastic sediment, are divided into two metamorphic zones based on mineral assemblages, garnet and sillimanite zones. According to petrogenetic grid of mineral assemblages, metamorhpic P-T conditions are $740{\sim}800^{\circ}C$ at $4.8{\sim}5.8\;kbar$ in the garnet zone and $640-760^{\circ}C$ at 2.5-4.5kbar in sillimanite zone. The leucogranite (Imwon leucogranite) is peraluminous granite which has high alumina index (A/CNK=1.31-1.93) and positive discriminant factor value (DF > 0). Thus, leucogranite is S-type granite generated from metasedimentary rocks. Major and trace element diagram ($R_1-R_2$ diagram and Rb vs. Y+Nb etc.) show collisional environment such as syn-collisional or volcanic arc granite. Because Rb/sr ratio (1.8-22.9) of leucogranites is higher than Sr/Ba ratio (0.21-0.79), leucogranite would be derived from muscovite dehydrate melting in metasedimentary rocks. Leucogranites have lower concentration of LREE and Eu and similar that of HREE relative to metasedimentary rocks. To examine difference of REEs between leucogranites and metasedimentary rocks, we perform modeling using volume percentage of a leucogranite and a metasedimenatry rock from study area and REE data of minerals from rhyolite (Nash and Crecraft, 1985) and melanosome of migmatite (Bea et al., 1994). Resultants of modeling indicate that LREE and HREE are controlled by monazites and garnet, respectively, although zircon is estimated HREE dominant in some leucogranite without garnet. Because there are many inclusions of accessary phases such as monazite and zircon in biotites from metasedimentary rocks. leucogranitic magma was mainly derived from muscovite-breakdown in metasedimenary rocks. Leucogranites can be subdivided into two types in compliance with Eu anomaly of chondrite nomalized REE pattern; the one of negative Eu anomaly is type I and the other is type II. Leucogranites have lower Eu concetnrations than that of metasedimenary rocks and similar that of both type. REE modeling suggest that this difference of Eu value is due to that of components of feldspars in both leucogranite and metasedimentary rock. The tendency of major ($K_2O$ and $Na_2O$) and face elements (Eu, Rb, Sr and Ba) of leucogranites also indicate that source magma of these two types was developed by anatexis experienced strong fractionation of alkali-feldspar. Conclusionally, leucogranites in this area are products of melts which was generated by muscovite-breakdown of metasedimenary rock in environment of continetal collision during high temperature/pressure metamorphism and then was fractionated and crystallized after extraction from source rock.