• 제목/요약/키워드: apparatus

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전자빔 네가티브 레지스트의 건식현상에 관한 연구 (A study on the dry development of Electron beam negative resist)

  • 박종관;박상근;조성욱;우호환;김영봉;이덕출
    • 대한전기학회:학술대회논문집
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    • 대한전기학회 1994년도 추계학술대회 논문집 학회본부
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    • pp.278-280
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    • 1994
  • The purpose of this paper is to describe an application of plasma polymerized thin film as an electron beam resist. Plasma polymerized thin film was prepared using an interelectrod inductively coupled gas-flow-type reactor. Styrene was chosen as the monomer to be used. This thin films were also delineated by the electron-beam apparatus and the pattern in the resist was developed with RIE and plasma polymerized apparatus. The effect of charge of pressure on growth rate and etching rate of the thin films were studied. The molecular structure of thin film was investigated by FT-IR and then was discussed in relation to its quality as a resist.

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25.8kV 25kA 3상 GIS 모선의 온도상승 예측 (Temperature Rise Prediction of 25.8kV 25kA Three-phase GIS Bus Bar)

  • 김중경;한성진;오연호;박경엽
    • 대한전기학회:학술대회논문집
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    • 대한전기학회 2007년도 제38회 하계학술대회
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    • pp.894-895
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    • 2007
  • This paper presents coupled analysis between finite element method and analytic technique for predicting temperature rise of 25.8kV 25kA three-phase GIS bus bar. The power losses and temperature distribution of three-phase GIS bus bar model are analyzed by magneto-thermal finite element method. The heat transfer coefficients on the boundaries are analytically calculated by applying Nusselt number considering material constant and model geometry for the natural convection. And these are used as the input data to predict the temperature rise of three-phase GIS bus bar model by coupled magneto-thermal F.E.A. The predicted temperature of 25.8kV 25kA three-phase GIS bus bar model shows good agreement with the experimental data.

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초음파 기술을 이용한 실리콘 이방성 식각 공정에서의 표면 평탄화 향상 연구 (Surface Flatness Improvement in Si Anisotropy Etching Process Utilizing Ultrasonic Wave Technology)

  • 윤의중;김좌연;이강원;이석태
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2005년도 하계학술대회 논문집 Vol.6
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    • pp.416-417
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    • 2005
  • In this study, we optimized the process of Si anisotropy etching by combing tetramethyl ammonium hydroxide (TMAH) etching process with ultrasonic wave technology. New ultrasonic TMAH etching apparatus was developed and it was used for fabricating a $20{\mu}m$ thick diaphragm for Si piezoresistive pressure sensors. Based on comparison study on etch rate and surface flatness, it was observed that the Si anisotropy etching methode with new ultrasonic TMAH etching apparatus (at 40 kHz/ 500 watt) was superior to conventional etching methods with TMAH or TMAH+ammonium persulfate(AP) solutions.

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인쇄전자를 위한 그라비아 옵셋 인쇄 (Gravure Offset Printing for Printed Electronics)

  • 김충환;최병오;류병순;김동수
    • 한국정밀공학회지
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    • 제25권5호
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    • pp.96-102
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    • 2008
  • Manufacturing of printed electronics using printing technology has begun to get into the hot issue in many ways due to the low cost effectiveness to existing semi-conductor process. This technology, with low cost and high productivity, can make it possible to produce printed electronics such as TFT, solar cell, RFID Tag, printed battery, and so on. In this study, apparatus of gravure-offset printing are developed for fine line-width/gap printing and the results obtained from the apparatus shows that it is possible to make around 20 micro-meter line-width/gap printing patterns. The roll-to-roll printing system for fine line-width printing based on primary experiment is presented. The printing results obtained from the system shows around 30 micro-meter line-width/gap printing patterns.

마찰 하중에 의한 HMX, RDX, AP기반 고에너지물질의 발화특성모델링 연구 (Friction-induced ignition and initiation modeling of HMX, RDX and AP based energetic materials)

  • 곽민철;유지창;여재익
    • 한국추진공학회:학술대회논문집
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    • 한국추진공학회 2008년도 제31회 추계학술대회논문집
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    • pp.283-287
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    • 2008
  • 충격과 관통 같은 에너지의 소실은 열을 발생시키며 이를 통하여 기계적 변화와 더불어 열적 변화를 유발하게 된다. 고에너지 물질의 경우 이런 마찰에 의해 발생되는 열이 점화 원인이 될 수 있다. 그래서 본 연구에는 BAM 마찰 실험을 통하여 획득된 HMX, RDX 그리고 AP를 기반으로 한 추진제의 마찰 점화 실험 자료를 바탕으로 하여 마찰에 의한 고에너지 물질의 점화를 모델링한다.

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IN SITU STRESS MEASUREMENTS OF Co-BASED MULTILAYER FILMS

  • Kim, Young-Suk;Shin, Sung-Chul
    • 한국자기학회지
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    • 제5권5호
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    • pp.470-473
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    • 1995
  • We have constructed an apparatus for in sity measurement of stress of the film prepared by sputtering using an optical noncontact displacement detector. A Change of the gap distance between the detector and the substrate, caused by stress of a deposited film, was detected by a corresponding change of the reflectivity. The sensitivity of the displacement detector was $5.9\;{\mu}V/{\AA}$ and thus, it was turned out to be good enough to detect stress caused by deposition of a monoatomic layer. The apparatus was applied to in situ stress measurements of Co/X(X=Pd or Pt) multilayer thin films prepared on the glass substrates by dc magnetron sputtering. At the very beginning of the deposition, both Co and X sublayers have subjected to their own intrinsic stresses. However, when the film was thicker than about $100{\AA}$, constant tensile stress in the Co sublayer and compressive stress in the X sublayer were observed, which is believed to be related to a lattice mismatch between the matching planes of Co and X.

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Edge Impulse 기계 학습 기반의 임베디드 시스템 설계 (Edge Impulse Machine Learning for Embedded System Design)

  • 홍선학
    • 디지털산업정보학회논문지
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    • 제17권3호
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    • pp.9-15
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    • 2021
  • In this paper, the Embedded MEMS system to the power apparatus used Edge Impulse machine learning tools and therefore an improved predictive system design is implemented. The proposed MEMS embedded system is developed based on nRF52840 system and the sensor with 3-Axis Digital Magnetometer, I2C interface and magnetic measurable range ±120 uT, BM1422AGMV which incorporates magneto impedance elements to detect magnetic field and the ARM M4 32-bit processor controller circuit in a small package. The MEMS embedded platform is consisted with Edge Impulse Machine Learning and system driver implementation between hardware and software drivers using SensorQ which is special queue including user application temporary sensor data. In this paper by experimenting, TensorFlow machine learning training output is applied to the power apparatus for analyzing the status such as "Normal, Warning, Hazard" and predicting the performance at level of 99.6% accuracy and 0.01 loss.

PET 라이너를 적용한 공기호흡기용 타입 복합재료 4 압력용기 개발 (Development of Type 4 Composite Pressure Vessel by using PET Liner for Self-contained Breathing Apparatus)

  • 조성민;이승국;조민식;류성기
    • 한국기계가공학회지
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    • 제17권6호
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    • pp.164-169
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    • 2018
  • In this study, we solved the human hazard problem of aluminum liner by applying plastic PET liner which is widely used as a material for food and beverage containers in the market. In order to reinforce dome area by using low strength / high elongation plastic liner, The aluminum boss was covered on the plastic liner surface. In order to predict the performance of the developed product, the structural analysis was carried out by applying the three - dimensional laminated solid element, and the soundness of the product was verified through the prototype performance test.

Density Measurement of Powdery and Porous Substances with a Gravimetric BET Adsorption Apparatus

  • Kim Han-Sung;Cho Hyun-Woo;Lee Kwang-Soon;Ahn Woon-Sun
    • Bulletin of the Korean Chemical Society
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    • 제13권3호
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    • pp.332-334
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    • 1992
  • An accurate method of density measurement is proposed. The method makes use of a gravimetric adsorption apparatus and is quite suitable for powdery and porous solid samples. The sample volume is determined by measuring its buoyancy with microbalance and the mass is measured in vacuum in the absence of buoyancy effect. Densities of inorganic compounds, such as alumina and perovskite, and some organic compounds are determined with the proposed method, and the results are compared with the values either determined with conventional methods or obtained from literatures.

Three newly recorded heterotrophic euglenids(Protist), Entosiphon oblongum, Euglena longa and Keelungia pulex from South Korea

  • Lee, Won Je
    • Journal of Species Research
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    • 제11권2호
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    • pp.89-93
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    • 2022
  • Three heterotrophic euglenids from marine water column (Seodo port, Yeosu) and freshwater sediment (Seodong-chun, Incheon), Korea were identified as Entosiphon oblongum Cavalier-Smith and Vickerman, 2016; Euglena longa (Pringsheim, 1936) Marin and Melkonian, 2003; and Keelungia pulex Chan and Moestrup, 2013 based on morphological characters and 18S rDNA sequence analysis. These species are reported taxonomically for the first time from Korea and are described with micrographs. Diagnoses of these species are as follows. Entosiphon oblongum: phagotrophic, gliding, size in vivo, 23.1-29.3 ㎛ (Avg. 26.5 ㎛, n=30) long, ovate with a protrusive feeding siphon (apparatus), several deep grooves and two heterodynamic flagella. Euglena longa: osmotrophic, swimming, size in vivo, 32.3-52.2 ㎛ (Avg. 42.2 ㎛, n=26) long, elongated with many paramylum granules and two flagellar. Keelungia pulex: phagotrophic, gliding, size in vivo, 13.5-19.7 ㎛(Avg. 16.4 ㎛, n=97) long, oblong to ovoid with a hook-shaped ingestion apparatus, several dorsal ridges and two flagella.