• 한국재료학회지
• /
• 제23권4호
• /
• pp.240-245
• /
• 2013

Electrochemical surface treatment is commonly used to form a thin, rough, and porous oxidation layer on the surface of titanium. The purpose of this study was to investigate the formation of nanotubular titanium oxide arrays during short anodization processing. The specimen used in this study was 99.9% pure cp-Ti (ASTM Grade II) in the form of a disc with diameter of 15 mm and a thickness of 1 mm. A DC power supplier was used with the anodizing apparatus, and the titanium specimen and the platinum plate ($3mm{\times}4mm{\times}0.1mm$) were connected to an anode and cathode, respectively. The progressive formation of $TiO_2$ nanotubes was observed with FE-SEM (Field Emission Scanning Electron Microscopy). Highly ordered $TiO_2$ nanotubes were formed at a potential of 20 V in a solution of 1M $H_3PO_4$ + 1.5 wt.% HF for 10 minutes, corresponding with steady state processing. The diameters and the closed ends of $TiO_2$ nanotubes measured at a value of 50 cumulative percent were 100 nm and 120 nm, respectively. The $TiO_2$ nanotubes had lengths of 500 nm. As the anodization processing reached 10 minutes, the frequency distribution for the diameters and the closed ends of the $TiO_2$ nanotubes was gradually reduced. Short anodization processing for $TiO_2$ nanotubes of within 10 minutes was established.

• Nuclear Engineering and Technology
• /
• 제6권1호
• /
• pp.14-22
• /
• 1974

아노다이징 전압이 탄탈양극산화피막의 주파수 특성에 미치는 영향을 다음 임피단스 식을 이용하여 분석하였다. (equation omitted) 여기서 $R_{f}$, $C_{f}$는 각각 양극산화피막의 등가직렬저항, 등가직련용량, 유전 손실이다. 파라데타 P, $\tau$$_{ο}$, $\tau$$_{\omega}$, Co는 다음과 같이 정의된다. P=(d-w)/w, $\tau$$_{ο}$=$textsc{k}$$\rho$$_{ο}$, $\tau$$_{\omega}$=$textsc{k}$$\rho$$_{\omega}$, $C_{ο}$=$textsc{k}$A/d 여기서 d는 양극산화피막의 두께, $\omega$는 화산층의 두께, $\rho$$_{ο}$는 금속과산화물의 계면에서의 산화물의 비저항, $\rho$$_{omega}$는 앙극산화피막의 진성영역에서의 비저항, A는 양극산화 피막의 면적이며, $textsc{k}$=0.0885$\times$$10^{-12}$ $\times$유전상수(in farad/cm). 등가직렬용량의 주파수에 따른 변화와 유전손실은 아노다이징전압이 증가함에 따라 감소하였다. 이 현상은 산화피막의 화산충의 두께가 아노다이징전압이 증가함에 따라 약간 증하는반면 선화피막 전체두께는 아노다이징전압에 비례하여 증가한다는 사실 때문이다. 실험측정치가 tan$\delta$$_{f}$=0.682$\Delta$ $C_{f}$ 관계식으로부터 부로 이탈하는것을 위의 임피단스식에 바탕을 두고 검토하였다. 여기서 $\Delta$ $C_{f}$는 0.1과 1KHZ 사이에서의 용량변화이다.이다.다.

• 한국전기전자재료학회:학술대회논문집
• /
• 한국전기전자재료학회 2009년도 추계학술대회 논문집
• /
• pp.242-242
• /
• 2009

Fabrication of Anodic aluminum oxide under DC vias condition has been studied. When bias and time of anodic aluminum oxide process change, the hole distance and diameter size change. Comparison of fabricated AAO between AC vias and DC vias condition has been studied in this experiment. The first and second anodization of one aluminum is done by using DC and AC power supplier. And first and second anodization of another aluminum is done by DC power supplier. The size of the aluminum is $1cm{\times}3cm$, and second anodic aluminum oxide process takes about 45min. It is found that the hexagonal shape appears on the surface of the AAO. AC power source can fabricate aao which have a nano hole array. We can see that the hole on the surface of the AC vias has a better rounded hole than DC vias AAO. we need more data so we can get characteristic about AC power generated AAO.

• 한국전기전자재료학회:학술대회논문집
• /
• 한국전기전자재료학회 2009년도 하계학술대회 논문집
• /
• pp.427-428
• /
• 2009

The authors investigated anomalous nanoporous structures of aluminum oxides during the Al anodization process. We implemented two-steps anodizing process for the electrolyte of oxalic acid. As increasing DC voltages, lattice constants are proportionally increased. For the curved surface, the surface electric field was distorted so that the nanoporous pipe channel changed to a cone-type shape. We confirmed the periodicity by using the FFT(Fast Fourier Transform) analysis.

• 대한전기학회:학술대회논문집
• /
• 대한전기학회 2011년도 제42회 하계학술대회
• /
• pp.1495-1496
• /
• 2011

Anodic aluminum oxide (AAO) nanotemplates for nano electronic device applications have been attracting increasing interest because of ease of fabrication, low cost process, and possible fabrication in large area. The size and density of the nanostructured materials can be controlled by changing the pore diameter and the pole density of AAO nanotemplate. In this paper, AAO nanotemplate was fabricated by second anodization method. In addition, effects of electrolyte and anodization voltate on the microstructure of porous alumina films were investigated. Vertically well aligned pores had the average pore sizes of 15-70 nm and the length of approximately 40 ${\mu}m$.

• 한국정밀공학회지
• /
• 제33권3호
• /
• pp.225-230
• /
• 2016

Since the development of anodic aluminum oxide (AAO), extensive studies have been conducted ranging from fundamental research to the applications of AAO. Most of the research on AAO structures have focused on well-aligned nanoporous structures fabricated under specific conditions. This study investigated fabricable AAO structures with anodization performed with various temperatures, electrical potentials, and basal plane surfaces. As a result, nanoporous and nanofibrous structures were fabricated. The nanopores were formed at a relatively lower temperature and potential, and the nanofibers were formed at a relatively higher temperature and potential regardless of the basal plane surface. The shape of the base surface was found to influence the structural arrangement in nanoporous morphologies. These interesting findings relating to new morphologies have the potential to broaden the possible applications of AAO materials.

• Corrosion Science and Technology
• /
• 제10권1호
• /
• pp.37-42
• /
• 2011

Aluminum was electrochemically etched in acid solution and the surface area was magnified by the formation of etch pits. Etched aluminum was covered with a compact and dense dielectric oxide film by anodization and applied to the aluminum electrolytic capacitor electrode. Capacitance of aluminum electrolytic capacitor is closely related with surface area, which depends on size and number of etch pits. Size of etch pits need to be controlled because inside of the pits can be buried by the formation of dielectric oxide film. In this work, the effect of ultrasound pretreatment on the aluminum etch pit formation and capacitance were investigated. Additionally, the relationship between the second etching effect on pit size and capacitance was studied.

• 한국결정성장학회:학술대회논문집
• /
• 한국결정성장학회 1996년도 The 9th KACG Technical Annual Meeting and the 3rd Korea-Japan EMGS (Electronic Materials Growth Symposium)
• /
• pp.494-496
• /
• 1996

The purpose of this study is to investigate the effect of process conditions on pore distribution in porous silicon layer prepared by electrochemical reaction. Porous silicon layers formed on p-type silicon wafer show the network structure of fine porse whose diameters are less than 100${\AA}$. In n-type porous silicon, selective growth was found on the pore surface by wet etching process after PR patterning. And numerical method showed high current density on the pore tip. With this result we confirmed that pore formation has two steps. First step is the initial attack on the surface and second step is the directional growth on the pore tip.

• 한국전기전자재료학회논문지
• /
• 제14권2호
• /
• pp.117-122
• /
• 2001

In this paper, we report on photoelectrochemical etching process of 6H-SiC semiconductor wafer. The etching was performed in two-step process; anodization of SiC surface to form a deep porous layer and thermal oxidation followed by an HF dip. Etch rate of about 615${\AA}$/min was obtained during the anodization using a dilute HF(1.4wt% in H$_2$O) electrolyte with the etching potential of 3.0V. The etching rate was increased with the bias voltage. It was also found out that the adition of appropriate portion of H$_2$O$_2$ into the HF solution improves the etching rate. The etching process resulted in a higherly anisotropic etching characteristics and showed to have a potential for the fabrication of SiC devices with a novel design.

• 센서학회지
• /
• 제27권4호
• /
• pp.264-268
• /
• 2018

Vertically-aligned $TiO_2$ nanotube electrodes have attracted considerable attention for applications in solar cells, catalysts, and sensors, because of their ideal structure for electron transport and electrolyte diffusion. Here, we prepare vertically-aligned $TiO_2$ nanotube electrodes using a two-step anodization process. The prepared $TiO_2$ nanotube electrodes exhibit uniform pore structures with an inner diameter of ~80-90 nm and wall thickness of ~20-25 nm. In addition, they exhibit an anatase crystal phase after a high-temperature annealing. The annealed $TiO_2$ nanotube electrodes are applied in dye-sensitized solar cells (DSSCs) as photoanodes. The fabricated DSSC exhibits conversion efficiencies of 3.46 and 2.15% with liquid- and gel-type electrolytes, respectively.