• Proceedings of the Korean Vacuum Society Conference
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• 2012.02a
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• pp.463-463
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• 2012

ITRS (international technology roadmap for semiconductors)에 따르면 MOS(metal-oxide-semiconductor)의 CD (critical dimension)가 45 nm node이하로 줄어들면서 poly-Si/$SiO_2$를 대체할 수 있는 poly-Si/metal gate/high-k dielectric이 대두된다고 보고하고 있다. 일반적으로 high-k dielectric를 식각시 anisotropic 한 식각 형상을 형성시키기 위해서 plasma를 이용한 RIE (reactive ion etching)를 사용하고 있지만 PIDs (plasma induced damages)의 하나인 PIED (plasma induced edge damage)의 발생이 문제가 되고 있다. PIED의 원인으로 plasma의 direct interaction을 발생시켜 gate oxide의 edge에 trap을 형성시키므로 그 결과 소자 특성 저하가 보고되고 있다. 그러므로 본 연구에서는 이에 차세대 MOS의 high-k dielectric의 식각공정에 HDP (high density plasma)의 ICP (inductively coupled plasma) source를 이용한 원자층 식각 장비를 사용하여 PIED를 줄일 수 있는 새로운 식각 공정에 대한 연구를 하였다. One-monolayer 식각을 위한 1 cycle의 원자층 식각은 총 4 steps으로 구성 되어 있다. 첫 번째 step은 Langmuir isotherm에 의하여 표면에 highly reactant atoms이나 molecules을 chemically adsorption을 시킨다. 두 번째 step은 purge 시킨다. 세 번째 step은 ion source를 이용하여 발생시킨 Ar low energetic beam으로 표면에 chemically adsorbed compounds를 desorption 시킨다. 네 번째 step은 purge 시킨다. 결과적으로 self limited 한 식각이 이루어짐을 볼 수 있었다. 실제 공정을 MOS의 high-k dielectric에 적용시켜 metal gate/high-k dielectric CMOSFETs의 NCSU (North Carolina State University) CVC model로 구한 EOT (equivalent oxide thickness)는 변화가 없으면서 mos parameter인 Ion/Ioff ratio의 증가를 볼 수 있었다. 그 원인으로 XPS (X-ray photoelectron spectroscopy)로 gate oxide의 atomic percentage의 분석 결과 식각 중 발생하는 gate oxide의 edge에 trap의 감소로 기인함을 확인할 수 있었다.

• Journal of Magnetics
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• v.1 no.2
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• pp.75-81
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• 1996

Study on the HDDr Characteristics of Nd16Fe76-xB8Zrx (x=0-2.0) Alloys and the Magnetic Properties of the HDDR Materials Nd16Fe76-xB8Zrx (where x=0-2.0) have been studied to see the effect of Zr addition on HDDR characteristics. A particular emphasis was place upon the anisotropy of the HDDR material. Anisotropy of the HDDR powder material has been evaluated by comparing the remanence values of the aligned sample measured along the aligning direction and the direction perpendicular to it. The HDDR characteristics of the alloys were investigated by means of DAT and TPA. Magnetic chracterisation of the HDDR processed materials was performed using a VSM and a TMA. The magnetic domain structure of the HDDR materials was examined by means of polarised microscope using a solid HDDR processed material. It has veen found that small addition (0.1 at %) of Zr to Nd-Fe-B-type alloy retards thedisproportionatio kinetics of the hydrogenated material. Desorption characteristic of the disproportionated materials has been found not to be affected significantly by the Zr addition. The Zr addition has been found to facilitate size of the powder. As the particle size decreases, the intrinsic coercivity decreases radically, and this is explained in terms of structural damage and/or oxidation caused during mechanical milling. It has also been found that the degree of alignment representing the anisotropic character of the HDDR powder is enhanced with decreasing particle size. Alloys with compositions based on

• Proceedings of the Korean Vacuum Society Conference
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• 2012.02a
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• pp.114-114
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• 2012

Metal-oxide-semiconductor field-effect transistors (MOSFETs)의 critical dimension (CD)가 sub 45 nm로 줄어듬에 따라 기존에 gate dielectric으로 사용하고 있는 SiO2에서 발생되는 high gate leakage current 때문에 새로운 high dielectric constant (k) 물질들이 연구되기 시작하였다. 여러 가지 high-k 물질 중에서, aluminum-oxide (Al2O3)는 높은 dielectric constant (~10)와 전자 터널링 barrier height (~2eV) 등을 가지기 때문에 많은 연구가 되고 있다. 그러나 Al2O3를 anisotropic한 patterning을 하기 위해 주로 사용되고 있는 halogen-based 플라즈마 식각 과정에서 나타나는 Al2O3와 하부 layer간의 낮은 식각 selectivity 뿐만 아니라 표면에 발생되는 defect, stoichiometry modification, roughness 변화 등의 많은 문제점들로 인하여 device performance가 감소하기 때문에 이를 해결하기 위한 많은 연구들이 진행중이다. 따라서 본 연구에서는 실리콘 기판위의 atomic layer deposition (ALD)로 증착된 Al2O3를 BCl3/Ar 중성빔을 이용하여 원자층 식각한 후 식각 특성을 분석해 보았다. Al2O3 표면을 BCl3로 absorption시킨 후 Ar 중성빔으로 desorption 시키는 과정에서 volatile한 aluminum-chlorides와 boron oxychloride가 형성되어 layer by layer로 제거됨을 관찰 할 수 있었다.

• Nuclear Engineering and Technology
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• v.51 no.2
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• pp.573-578
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• 2019

Anisotropic distribution of the turbulent kinetic energy and the near-field excitations are the main causes of the steady state Flow-Induced Vibration (FIV) which could lead to fretting wear damage in vertically arranged supported slender rods. In this article, a combined Computational Fluid Dynamics (CFD) and Computational Structural Mechanic (CSM) approach named two-way Fluid-Structure Interaction (FSI) is used to investigate the modal characteristics of a typical rod's vibration. Performance of an Unsteady Reynolds-Average Navier-Stokes (URANS) and Large Eddy Simulation (LES) turbulence models on asymmetric fluctuations of the flow field are investigated. Using the LES turbulence model, any large deformation damps into a weak oscillation which remains in the system. However, it is challenging to use LES in two-way FSI problems from fluid domain discretization point of view which is investigated in this article as the innovation. It is concluded that the near-wall meshes whiten the viscous sub-layer is of great importance to estimate the Root Mean Square (RMS) of FIV amplitude correctly as a significant fretting wear parameter otherwise it merely computes the frequency of FIV.

• Nuclear Engineering and Technology
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• v.55 no.6
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• pp.2147-2157
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• 2023

The aggregate-forming minerals in concrete undergo volume swelling and microstructure change under neutron irradiation, leading to degradation of physical and mechanical properties of the aggregates and concrete. A comprehensive investigation of volume change and elastic property variation of major aggregate-forming minerals is still lacking, so molecular dynamics simulations have been employed in this paper to improve the understanding of the degradation mechanisms. The results demonstrated that the densities of the selected aggregate-forming minerals of similar atomic structure and chemical composition vary in a similar trend with deposited energy due to the similar amorphization mechanism. The elastic tensors of all silicate minerals are almost isotropic after saturated irradiation, while those of irradiated carbonate minerals remain anisotropic. Moreover, the elastic modulus ratio versus density ratio of irradiated minerals is roughly following the density-modulus scaling relationship. These findings could further provide basis for predicting the volume and elastic properties of irradiated concrete aggregates in nuclear facilities.

• Journal of the Korean Society for Nondestructive Testing
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• v.23 no.5
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• pp.439-444
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• 2003

Acoustic emission(AE) ran be very effectively applied to locate the damaged area in large structures by detecting the elastic waves generated during the damage process within solids. Source location in the composite structures has been, however, extremely difficult due to the acoustic anisotropy with the velocity dependence on fiber orientations. In this study, it has been shown that a newly proposed method for 2-D source location of anisotropic structures is practically applicable to the real structure. The method employes wave velocities obtained with different velocities from $0^{\circ}\;to\;90^{\circ}$ for a filament wound composite pressure vessel under the air-filled and the water-filled conditions.

• Transactions of the Korean Society of Mechanical Engineers A
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• v.35 no.6
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• pp.619-628
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• 2011

Human soft tissues, including muscles, ligaments, skin, and blood vessels, are an interesting subject because damage to them can be observed in everyday life. Besides the lack of available experimental data and the large deformation upon loading, the anisotropic and compressible nature of annulus fibrosus makes it more difficult to find a simple material model. A fiber-reinforced hyperelastic material model is used to determine the stress-strain curves upon uniaxial loading. The energy potential function for annulus fibrosus is composed of three different parts: matrix, fibers, and matrix-fiber interaction, which accounts for the angles between two families of fibers. In this paper, two different types of energy potential function for the matrix are considered, and are inserted into the fiber-reinforced model. The calculated results are compared with the Neo-Hookean model and experimental data, and reasonable agreement is observed overall.

• Journal of the Korean Society for Nondestructive Testing
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• v.19 no.2
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• pp.110-117
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• 1999

In order to ultrasonically evaluate creep cavities pure copper samples were subjected to creep test and their microstructures were examined. Ultrasonic velocities. frequency-dependent magnitude spectra and attenuations were measured on a series of copper samples obtained from the different stages of creep test. Velocities measured in three directions with respect to the loading axis decreased and their anisotropy increased as a function of the creep-induced porosity. The anisotropic behavior could be attributed to the progressive change of pore shape and preferred orientation as the creep advanced. The 2% porosity by volume decreased the longitudinal and shear wave velocities by 11% and 4%, respectively. Furthermore, both velocities decreased nonlinearly with the porosity. As the creep damage developed, the magnitude spectra lost high frequency components and their central frequencies shifted to lower values. The attenuation showed almost linear behavior in the frequency range used. Normalized velocity, central frequency shift and attenuation slope were selected as nondestructive evaluation parameters. These results were presented and showed good relations with the porosity content.

• Journal of the Korean Ceramic Society
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• v.35 no.8
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• pp.813-818
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• 1998

A simple method to measure the elastic modulus E and Poisson's ratio v of diamod-like carbon (DLC) films deposited on Si wafer was suggested. Using the anisotropic etching technique of Si we could make the edge of DLC overhang free from constraint of Si substrate. DLC film is chemically so inert that we could not on-serve any surface damage after the etching process. The edge of DLC overhang free from constraint of Si substrate exhibited periodic sinusoidal shape. By measuring the amplitude and the wavelength of the sinu-soidal edge we could determine the stain of the film required to adhere to the substrate. Since the residual stress of film can be determine independently by measurement of the curvature of film-substrate com-posite we could calculated the biaxial elastic modulus E/(1-v) using stress-strain relation of thin films. By comparing the biaxial elastic modulus with the plane-strain modulus E/(1-{{{{ { v}^{2 } }}) measured by nano-in-dentation we could further determine the elastic modulus and Poisson's ratio independently. This method was employed to measure the mechanical properties of DLC films deposited by {{{{ { {C }_{6 }H }_{6 } }} rf glow discharge. The was elastic modulus E increased from 94 to 169 GPa as the {{{{ { V}_{ b} / SQRT { P} }} increased from 127 to 221 V/{{{{ {mTorr }^{1/2 } }} Poisson's ratio was estimated to be abou 0.16∼0.22 in this {{{{ { V}_{ b} / SQRT { P} }} range. For the {{{{ { V}_{ b} / SQRT { P} }} less than 127V/{{{{ {mTorr }^{1/2 } }} where the plastic deformation can occur by the substrate etching process however the present method could not be applied.

• Structural Engineering and Mechanics
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• v.89 no.6
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• pp.557-570
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• 2024

Due to interfacial ageing, chemical action and interfacial damage, the interface debonding may appear in the interfaces of composite laminates. Particularly, the laminates display a side-dependent effect at small scale. In this work, a three-dimensional (3D) and anisotropic thick nanoplate model is proposed to investigate the effects of imperfect interface and nonlocal parameter on the bending deformation, vibrational response and buckling stability of one-dimensional (1D) hexagonal quasicrystal (QC) layered nanoplates. By combining the linear spring model with the transferring matrix method, exact solutions of phonon and phason displacements, phonon and phason stresses of bending deformation, the natural frequencies of vibration and the critical buckling loads of 1D hexagonal QC layered nanoplates are derived with imperfect interfaces and nonlocal effects. Numerical examples are illustrated to demonstrate the effects of the imperfect interface parameter, aspect ratio, thickness, nonlocal parameter, and stacking sequence on the bending deformation, the vibrational response and the critical buckling load of 1D hexagonal QC layered nanoplate. The results indicate that both the interface debonding and nonlocal effect can reduce the stiffness and stability of layered nanoplates. Increasing thickness of QC coatings can enhance the stability of sandwich nanoplates with the perfect interfaces, while it can reduce first and then enhance the stability of sandwich nanoplates with the imperfect interfaces. The biaxial compression easily results in an instability of the QC layered nanoplates compared to uniaxial compression. QC material is suitable for surface layers in layered structures. The mechanical behavior of QC layered nanoplates can be optimized by imposing imperfect interfaces and controlling the stacking sequence artificially. The present solutions are helpful for the various numerical methods, thin nanoplate theories and the optimal design of QC nano-composites in engineering practice with interfacial debonding.