• 한국전기전자재료학회논문지
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• 제17권1호
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• pp.52-58
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• 2004

Magneto-Impedance(MI) sensor is a highly sensitive sensor, which was able to detect a weak geomagnetic field. It also has a merit to be able to build in the low power system. In this study, their magnetic permeability and anisotropy field(H$\sub$k/) as a function of some different thickness of sputtered amorphous CoZrNb films with zero-magnetostriction and soft magnetic property are investigated. In order to make a uniaxial anisotropy, film was subjected to the post annealing in a static magnetic field with 1KOe intensity at 250, 300, and 320$^{\circ}C$ respectively for 2 hours. Magnetic properties of films are measured by using a M-H loop tracer. Magnetic permeability of a film is measured over the frequency range from 1 ㎒ to 750㎒. By thickening a CoZrNb film relatively, magnetic permeability and impedance are examine to design the. MI sensor which drives at 50㎒, and thereof fabricated the MI sensor which drives at the 50㎒.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2002년도 추계학술대회 논문집 Vol.15
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• pp.132-135
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• 2002

MI(Magneto-Impedance) sensor which is made by thin films has significantly high detecting sensitivity in weak magnetic field. It also has a merit to be able to build in the low power system. Its structure is simple, which makes it easier to prepare a miniature. In this study, its magnetic permeability and anisotropy field($H_{k}$) as a function of a thickness of sputtered amorphous CoZrNb films with zero-magnetostriction and soft magnetic property are investigated. In order to make a uniaxial anisotropy, film was subjected to the post annealing in a static magnetic field with 1KOe intensity at 250, 300, and $320^{\circ}C$ respectively for 2 hours. Magnetic properties of film are measured by using a MH loop tracer. Its magnetic permeability of a film is measured over the frequency range 1 MHz to 750MHz. And, it was examined on the permeability and impedance to design the MI sensor which acts at 50MHz by thickening a CoZrNb film relatively, and fabricated the MI sensor which acts at the 50MHz.

• 한국자기학회:학술대회 개요집
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• 한국자기학회 2007년도 The 1st International Symposium on Advanced Magnetic Materials
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• pp.133.2-133.2
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• 2007

• 한국자기학회지
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• 제7권4호
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• pp.180-185
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• 1997

비정질 리본으로 제조된 링 코아 시편의 자장중 열처리 조건에 따른 철손 및 보자력 등의 연자기 특성 변화를 BH loop tracer를 이용하여 최대인가자기유도 0.1 T를 유지하면서 10 kHz에서 측정하였다. 열처리 시간이 증가함에 따라 코아의 철손 및 보자력은 감소하여 최소값에 도달한 다음 다시 증가한다. 공기 중에서 열처리한 경우의 시료가 Ar 분위기에서 열처리한 시료 보다 우수한 연자기 특성을 나타낸다. 코아의 원주방향으로 자장을 인가한 경우에는 인가자장의 세기가 6 Oe 이상이어야 자장중 열처리 효과가 나타나 철손 및 보자력이 감소하였으며, 냉각시 Curie 온도근처에서의 냉각속도가 빠를 수록 철손과 보자력은 감소한다. 코아의 폭 방향으로 자장을 인가한 경우에는 보자력의 증가와 투자율의 감소 및 약간의 철손 증가가 나타났다.

• 한국자기학회지
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• 제2권1호
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• pp.29-36
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• 1992

본 연구에서는 장래의 전자공업 및 정보산업의 기본소재로서 그 응용이 기대되고 있는비정질 산화물자성체를 개발하기 위한 기초연구를 수행하였다. 현재 연구보고 되어 있는 강자성비정질 산화물은 같은 조성의 다결정 ferrite에 비하여 그 자성이 빈약하므로 자성이 좀더 강한비정질 spinel ferrite의 개발이 요구된다. 자체 제작한 쌍 roller 초급내장치로써 $CaO-B_{2}O_{3}$ 계 amorphous ferrite 시료를 제조하고 얻어진 시편의 제특성을 조사하기 위해 XRD, DTA/TG, VSM, $M\"{o}ssbauer$ spectrum으로 측정한 결과 다음과 같은 결론을 얻었다. $CaO-Bi_{2}O_{3}$ 계 amorphous ferrite는 10-50 mole% CaO, 10-50 mole% $Bi_{2}O_{3}$. 40-70 mole% $Fe_{2}O_{3}$의 조성 영역에서 제조가 가능하고 $BiFeO_{3}$와 $CaFe_{4}O_{7}$의 혼합 조성부근에서 강력한 자화를 나타낸다. 특히 ${(CaO)}_{20}-{(Bi_{2}O_{3})}_{15}{(Fe_{2}O_{3}}_{65}$의 조성에 있어서는 자화가 약 21.84 emu/g(10 kOe)이며 강 자성적인 거동을 나타낸다. 이 비정질 ferrite는 반강자성상($\alpha$-상)과 강자성상($\beta$-상)으로 되어 있다. 비정질 ferrite의 결정화는 $550^{\circ}C$와 $775^{\circ}C$에서 2단계로 일어나고, 그때 나타나는 결정상은 $BiFeO_{3}$의 perovskite 상과 ${\alpha}-Fe_{2}O_{3}$ 상이다.

• E2M - 전기 전자와 첨단 소재
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• 제10권8호
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• pp.813-818
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• 1997

In this study the thin film air core and magnetic core inductors consisting of planar coil and/or CoNbZr amorphous magnetic layers on a Si substrate were fabricated as spiral type by using rf magnetron sputtering and wet etching methods. The etchant solution was achieved by iron chloride solution(17.5 mol%) mixed with HF (20 mol%) during 150 sec which etched Cu films and CoNbZr/Cu/CoNbZr multi-layer films. They were about 10${\mu}{\textrm}{m}$ of thickness and 10$\times$10 mm$^2$of size. The properties of thin film magnetic core inductor were 400 nH of Q value at 10 MHz and the resonance frequency was about 300 MHz.

• 한국자기학회지
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• 제26권3호
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• pp.76-80
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• 2016

CoSiB은 비정질 구조를 갖는 강자성체 물질이며, CoSiB과 Pd을 포함한 다층박막은 수직자기이방성을 갖는다. 수직자기이방성은 수평자기이방성에 비해 STT-MRAM에 적용되기에 좋은 이점이 있으며, 특히 비정질 강자성체를 포함한 다층박막은 결정질강자성체를 포함한 다층박막과 비교하여 몇 가지 이점을 지니는데, 첫째는 grain boundary가 없다는 것이며 둘째는 결정질 재료에 비교하여 열적안정성이 보다 좋다는 것이다. 이러한 이유에 따라 우리는 비정질 강자성체 $Co_{75}Si_{15}B_{10}$을 포함하는 다층박막을 제작하여 그 자기적 특성을 연구하였다. 본 연구는 [CoSiB(3, 4, 5, 6) ${\AA}$/Pd(11, 13, 15, 17, 19, 24${\AA})]_5$ 다층박막을 제작하여 VSM 측정을 통해 두께에 따른 그 자기적 특성의 변화를 살펴보았으며, 이후 일부 다층박막의 열처리를 통해 온도에 따른 자기적 특성의 변화추이를 조사하였다. 포화자화값과 보자력은 CoSiB과 Pd 각 층의 두께 변화에 따라 증가와 감소를 반복하였으며, 열처리 온도의 범위는 상온에서 $500^{\circ}C$까지로 특정 온도에서 보자력의 증대를 보였다.

• 연구논문집
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• 통권30호
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• pp.147-157
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• 2000

The filtered vacuum arc source (FVAS), which is adopted by magnetic filtering methode to remove the macro-particle in vacuum arc plasma, was composed of a torus structure with bending angle of 60 degree. The radius of torus was 266 mm, the radius of plasma duct was 80 mm and the total length was 600 mm. The magnet parts were consisted of one permanent magnet, one magnetic yoke and five solenoid magnets. The plasma duct was electrically isolated from the ground so that a bias voltage could be applied. The baffles inside plasma duct were installed in order to prevent the recoil effect of macro-particles. Graphite was used as the cathode material to coat the amorphic diamond film and its diameter was 80 mm. The amorphic diamond film attracts much attention due to its excellent mechanical, optical and tribological properties suitable for wide range of applications. The effects of solenoid magnet in plasma extraction were studied by computer simulation and experiment using Taguchi's method. The source and extraction magnet affected the arc stabilization. The extraction beam current was maximized with low value of the source magnet current and high value of the filtering magnet current. Optimum deposition condition was obtained when the currents of arc discharge, source, extraction, bending, deflection and outlet magnet were 30 A, 1 A, 3 A, 5 A, and 5 A, respectively.

• 한국전기전자재료학회논문지
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• 제19권4호
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• pp.339-343
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• 2006

We observed the application possibility of inductive coupler for the underground high-voltage power line communication by means of analysis of signal transmission characteristics and magnetic properties on annealing temperatures for high-permeability Fe-base amorphous alloys. The best electromagnetic and transmission characteristics were shown in nano-crystalline precipitated alloy annealed at temperature $510^{\circ}C$. The transmission characteristics in the low-frequency band depend on permeability of magnetic core materials and its properties of high-frequency band can be improved by impedance matching. Using the high pass filter embedded in the coupler, other noise signal band except for communication signals could be cut off.

• 한국전기전자재료학회논문지
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• 제22권5호
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• pp.411-414
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• 2009

It has been investigated for the film uniformity and deposition rate of a-C:H films on glass substrate and polymeric materials in the presence of the modulated crossed magnetic field. We used Plasma CVD, i.e, using a crossed electromagnetic field, for uniform depositing thin film. The optimum discharge condition has been discussed for the gas pressure, the magnetic flux density and the distance between substrate and electrodes, As a result, it is found that the optimum discharge conditions are $CH_4$ concentration $CH_4$=10 %, modulated magnetic flux density B=48 Gauss, pressure P=100 mTorr, discharge power supply voltage V=l kV under these experimental conditions. By using these experimental condition, it is possible to prepare the most uniform film extends over about 160 mm of the film width. In this study, we deposited a-C:H thin film on glass substrate, and have a plan that using this condition, study depositing a-C:H thin film on polymeric substrate in next studies.