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http://dx.doi.org/10.4313/JKEM.2009.22.5.411

Large-area Uniform Deposition of Amorphous Hydrogenated Carbon Films using a Plasma CVD Method  

Yun, Sang-Min (전북대학교 전기공학과)
Yang, Sung-Chae (전북대학교 전기공학과)
Publication Information
Journal of the Korean Institute of Electrical and Electronic Material Engineers / v.22, no.5, 2009 , pp. 411-414 More about this Journal
Abstract
It has been investigated for the film uniformity and deposition rate of a-C:H films on glass substrate and polymeric materials in the presence of the modulated crossed magnetic field. We used Plasma CVD, i.e, using a crossed electromagnetic field, for uniform depositing thin film. The optimum discharge condition has been discussed for the gas pressure, the magnetic flux density and the distance between substrate and electrodes, As a result, it is found that the optimum discharge conditions are $CH_4$ concentration $CH_4$=10 %, modulated magnetic flux density B=48 Gauss, pressure P=100 mTorr, discharge power supply voltage V=l kV under these experimental conditions. By using these experimental condition, it is possible to prepare the most uniform film extends over about 160 mm of the film width. In this study, we deposited a-C:H thin film on glass substrate, and have a plan that using this condition, study depositing a-C:H thin film on polymeric substrate in next studies.
Keywords
SPM(Scanning plasma method); DLC(Diamond-like carbon); Large-area uniform;
Citations & Related Records
Times Cited By KSCI : 2  (Citation Analysis)
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1 H. Fujiyama, Y. Tokitu, Y. Uchikawa, K. Kuwahara, K. Miyake, and A. Doi, 'Ceramics inner coating of narrow tubes by a coaxial magnetron pulsed plasma', Surface and Coatings Technology, Vol. 98, Issues 1-3, p. 1467, 1998   DOI   ScienceOn
2 L. Ji, H. Li, F. Zhao, J. Chen, and H. Zhou, 'Microstructure and mechanical properties of Mo/DLC nanocomposite films', Diamond and Related Materials, Vol. 17, Issue 11, p. 1949, 2008   DOI   ScienceOn
3 조욱, 양성채, '저온프로세스를 이용한 고분자 필름의 플라즈마 표면처리', 전기전자재료학회논문지, 21권, 5호, p. 486, 2008   DOI   ScienceOn
4 S. Meskinis, R. Gudaitis, V. Kopustinskas, and S. Tamulevicius, 'Electrical and piezoresistive properties of ion beam deposited DLC films', Applied Surface Science, Vol. 254, Issues 16, 15, p. 5252, 2008   DOI   ScienceOn
5 최원석, 박문기, 홍병유, 'PECVD로 합성한 다이아몬드상 카본박막의 전기적 특성', 전기전자재료학회논문지, 21권, 11호, p. 973, 2008   DOI   ScienceOn
6 D. Caschera, F. Federici, S. Kaciulis, L. Pandolfi, A. Cusmà, and G. Padeletti, 'Deposition of Ti-containing diamond-like carbon (DLC) films by PECVD technique', Materials Science and Engineering, Vol. 27, Issues 5-8, p. 1328, 2007   DOI   ScienceOn
7 G. Reisel and A. Dorner-Reisel, 'Hydrogen containing DLC coatings on UHMW-PE deposited by r.f.-PECVD', Diamond and Related Materials, Vol. 16, Issue 15, p. 1370, 2007   DOI   ScienceOn
8 Y. Maemura, S.-C. Yang, and H. Fujiyama, 'Transport of negatively charged particles by E ${\times}$ B drift in silane plasmas', Surface and Coatings Technology, Vol. 98, Issues 1-3, p. 1420, 1998   DOI   ScienceOn