• Title/Summary/Keyword: amorphous/crystalline Si

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Effect of Ag on microstructural behaviour of Nanocrystalline $Fe_{87-x}Zr_7B_6Ag_x$($0{\leq}x_{Ag}{\leq}4$) Magnetic Thin Films Materials

  • Lee, W.J.;Min, B.K.;Song, J.S.
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2002.04a
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    • pp.3-6
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    • 2002
  • Effect of Ag additive element on microstructure of $Fe_{87-x}Zr_7B_6Ag_x$, magnetic thin films on Si(001) substrates has been investigated using Transmission Electron Microscopy(TEM) and X-ray Diffraction(XRD). All samples with additive Ag element were made by DC-sputtering and subjected to annealing treatments of $300^{\circ}C{\siim}600^{\circ}C$ for 1 hr. TEM and XRD showed that perfectly amorphous state in Ag-free Fe-based films was observed in as-deposited condition. The as-deposited Fe-based films with the presence of Ag constituent have a mixture of Fe-based amorphous and nano-sized Ag crystalline phases. In this case, additive element, Ag was soluted into Fe-based matrix. With the increase in additive element, Ag, insoluble nano-crystalline Ag particles were dispersed in the Fe-based amorphous matrix. Crystallization of Fe-based amorphous phase in the matrix of $Fe_{82}Zr_7B_6Ag_5$ thin films occurred at an annealing temperature of $400^{\circ}C$. Upon annealing, the amorphous-Ag crystalline state of Fe-Zr-B-Ag films was transformed into the mixture of Ag crystalline phase + Fe-based amorphous phase + ${\alpha}$-Fe cluster followed by the crystallization process of ${\alpha}$-Fe nanocrystalline + Ag crystalline phases.

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Hydrogen-Dependent Catalytic Growth of Amorphous-Phase Silicon Thin-Films by Hot-Wire Chemical Vapor Deposition (HWCVD를 이용한 Amorphous Si 박막 증착공정에서 수소량에 따른 박막성장 특성)

  • Park, Seungil;Ji, Hyung Yong;Kim, MyeongJun;Kim, Keunjoo
    • Current Photovoltaic Research
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    • v.1 no.1
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    • pp.27-32
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    • 2013
  • We investigated the growth mechanism of amorphous-phase Si thin films in order to improve the film characteristics and circumvent photo-degradation effects by implementation of hot-wire chemical vapor deposition. Amorphous silicon thin films grown in a silane/hydrogen mixture can be decomposed by a resistive heat filament. The structural properties were observed by Raman spectroscopy, FTIR, SEM, and TEM. The electrical properties of the films were measured by photo-conductivity, dark-conductivity, and photo-sensitivity. The contents of Si-H and $Si-H_n$ bonds were measured to be 19.79 and 9.96% respectively, at a hydrogen flow rate of 5.5 sccm, respectively. The thin film has photo-sensitivity of $2.2{\times}10^5$ without a crystalline volume fraction. The catalyst behavior of the hot-wire to decompose the chemical precursors by an electron tunneling effect depends strongly on the hydrogen mixture rate and an amorphous Si thin film is formed from atomic relaxation.

A Study of Crystalline Behaviour on $\textrm{As}^{+}$ Ion-Implanted Silicon (As 이온 주입된 Si의 결정성 거동에 관한 연구)

  • Mun, Yeong-Hui;Song, Yeong-Min;Kim, Jong-O
    • Korean Journal of Materials Research
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    • v.9 no.1
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    • pp.99-103
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    • 1999
  • We investigated the crystalline behavior in active ion implanted silicon through Raman spectroscopy. Four a-Si(amorphous Si) peaks were observed that are related to the ion implantation induced a-Si layer. After the isochronical anneal(30min). and isothermal anneal($450^{\circ}C$), noticeable recovery of crystalline-Si peak at 519cm\ulcorner and peak center shift of the a-Si TO from 465cm\ulcorner to 480cm\ulcorner were observed by RNM(Random Network Model). By applying RNM and SCLM(Spatial Correlation Length Model), the peak center and FWHM(the Full Width at half Maximum) of a-Si were changed dramatically between T\ulcorner=$200^{\circ}C$ and 30$0^{\circ}C$. From the results, it can be said that there is an abrupt structural change at this temperature region.

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Study on Structural properties of As Ion -Implanted Si (As이온이 주입된 Si의 구조적 특성 연구)

  • 믄영희;배인호;김말문;한병국;김창수;홍승수;신용현;정광화
    • Journal of the Korean Vacuum Society
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    • v.5 no.3
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    • pp.218-222
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    • 1996
  • STrained layers and strain depth profile of high dose As ion implanted (100) si wafer annealed at various temperatures have been investigated by means of X-ray double crystal diffractometry (X-ray DCD). The results obtained by x-ray rocking curve analysis showed a defect layer at the original amorphous /crystalline interface of 1400$\AA$ depth. In addition arsenic ion concentrtion profiles and defect distributions in depth were obtained by the SIMS and TRIM -code simulation . the positive strain depth profile determined from the rocking curve analysis were only presented under 0.14 $\mu$m from the surface for samples ananelaed at $600^{\circ}C$. The results was shown that the thickness of amprphous layer is 0.14 $\mu$m indirectry, and it was good agreement with the TRIM -Code simulation. Additionally, it could be thought that the positive strain have been affected residual intersitial atoms under the amorphous/crystalline interface formed by ion implantation.

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Crystallization behavior of Amorphous Silicon with Al and Ni (Al과 Ni를 이용한 비정질 실리콘의 결정화 거동)

  • Kwon, Soon-Gyu;Choi, Kyoon;Kim, Byung-Ik;Hwang, Jin-Ha
    • Journal of the Korean Ceramic Society
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    • v.43 no.4 s.287
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    • pp.230-234
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    • 2006
  • Metal-Induced Crystallization (MIC) of amorphous silicon (a-Si) using aluminum and nickel as catalysts were performed with a variation of metal thickness and temperature. Raman results showed that the crystallization of a-Si depended on the thickness of aluminum while not on nickel. Nickel that forms silicide nodules during annealing simply catalyzed the formation of crystalline silicon (c-Si) while aluminum was consumed and transferred during MIC, which resulted in more complex microstructural characteristics. Crystalline silicons after NIC had elongated shape with a twin along the long axis. Morphological change after Aluminum-Induced Crystallization (AIC) showed more equiaxial grains. The nucleation and growth mechanism of AIC was discussed.

Switching Characteristics of Amorphous GeSe TFT for Switching Device Application

  • Nam, Gi-Hyeon;Kim, Jang-Han;Jo, Won-Ju;Jeong, Hong-Bae
    • Proceedings of the Korean Vacuum Society Conference
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    • 2012.02a
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    • pp.403-404
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    • 2012
  • We fabricated TFT devices with the GeSe channel. A single device consists of a Pt source and drain, a Ti glue layer and a GeSe chalcogenide channel layer on SiO2/Si substrate which worked as the gate. We confirmed the drain current with variations of gate bias and channel size. The I-V curves of the switching device are shown in Fig. 1. The channel of the device always contains amorphous state, but can be programmed into two states with different threshold voltages (Vth). In each state, the device shows a normal Ovonic switching behavior. Below Vth (OFF state), the current is low, but once the biasing voltage is greater than Vth (ON state), the current increases dramatically and the ON-OFF ratio is high. Based on the experiments, we draw the conclusion that the gate voltage can enhance the drain current, and the electric field by the drain voltage affects the amorphous-amorphous transition. The switching device always contains the amorphous state and never exhibits the Ohmic behavior of the crystalline state.

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Electrical Switching Characteristics of Thin Film Transistor with Amorphous Chalcogenide Channel

  • Nam, Gi-Hyeon;Kim, Jang-Han;Jeong, Hong-Bae
    • Proceedings of the Korean Vacuum Society Conference
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    • 2011.08a
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    • pp.280-281
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    • 2011
  • We fabricated the devices of TFT type with the amorphous chalcogenide channel. A single device consists of a Pt source and drain, a Ti glue layer and a GeSe chalcogenide channel layer on SiO2/Si substrate which worked as the gate. We confirmed the drain current with variations of gate bias and channel size. The I-V curves of the switching device are shown in Fig. 1. The channel of the device always contains amorphous state, but can be programmed into two states with different threshold voltages (Vth). In each state, the device shows a normal Ovonic switching behavior. Below Vth (OFF state), the current is low, but once the biasing voltage is greater than Vth (ON state), the current increases dramatically and the ON-OFF ratio is about 4 order. Based on the experiments, we contained the conclusion that the gate voltage can enhance the drain current, and the electric field by the drain voltage affects the amorphous-amorphous transition. The switching device always contains the amorphous state and never exhibits the Ohmic behavior of the crystalline state.

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Colloidal Photonic Crystals with Quasi-Amorphous Structure: Angle-Independent Electrically Tunable Full Color Photonic Pixels

  • Kim, Dae-Hyeon;Jeong, Jae-Yeon;Ji, Seung-Uk;Gang, Yeong-Jong
    • Proceedings of the Korean Vacuum Society Conference
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    • 2010.08a
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    • pp.278-278
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    • 2010
  • Electrically tunable photonic band gap (PBG) materials based on crystalline structures have been developed for active components of display. Despite considerable advances, the intrinsic drawbacks of the crystalline PBG materials such as the strong angle dependent hue and difficulty of fabricating defect-free structures in large area have yet to be addressed for their practical applications. Here we report quasi-amorphous colloidal structures exhibiting angle-independent photonic colors in response to the electric stimuli. Moderately polydisperse colloidal Fe3O4@SiO2 nanoparticles dispersed in organic solvents exclusively form quasi-amorphous photonic materials at sufficiently high concentrations (> 30 wt%), and which reversibly reflect incident light in visible region ($\lambda$ peak = 490~655 nm) in response to the relatively low bias voltage (0~4 V). We show the angle-independent tunable photonic colors with the fast response time (50~170 ms) due to the isotropic nature of quasi-amorphous structures. Conventional vacuum injection technique is applicable for fabricating flexible full color photonic display pixels with various pre-defined shapes.

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Fabrication and Characteristics of Thermal Sprayed Ni-Cr-B-Si System Amorphous Coatings (Ni-Cr-B-Si계 비정질 용사피막의 제조 및 특성)

  • 정하윤;김태형;박경채
    • Journal of Welding and Joining
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    • v.17 no.4
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    • pp.53-59
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    • 1999
  • Amorphous alloys have also been called glassy alloys or non-crystalline alloys. They are made by the rapid solidification. The solidification occurs so rapid that the atoms are frozen in their liquid configuration. There are unique magnetic, mechanical, electrical and corrosive behaviors which result form their amorphous structure. In the study. amorphous coatings were manufactured with Ni-Cr-B-Si powders by flame spray. Measurement of hardness, were resistance, corrosion resistance and observation of microstructures and XRD, DSC were performed to investigate characteristics of amorphous coatings. The experimental results obtained as follow: 1) Amorphous powders could not be manufactured with the spraying in the spraying in the liquid nitrogen. But, amorphous coatings could be manufactured with the rotation cooling method by liquid nitrogen. In the fabrication of amorphous coatings, major factor was the rapid cooling by rotation of the substrate. 2) Hardness of coatings was obtained Hv 960 by formation of amorphous phase. But, wear resistance decreased. That was due to porosity in the coatings by the rapid cooling. 3) In the case of corrosion resistance, amorphous coatings were superior to air-cooled coatings. That was due to formation of amorphous phase. 4) After amorphous coatings were heat-treated at 520℃ for 1hr. hardness increased 80% and wear resistance increased 30% comparing with air cooled coatings. These were due to crystallization of amorphous phase and decrease of porosity by heat-treatment.

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