• Journal of the Semiconductor & Display Technology
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• v.2 no.4
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• pp.19-22
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• 2003

In this paper, Si anisotropic etching characteristics of tetramethylammonium hydroxide (TMAH)/ammonium persulfate (AP) solutions were investigated to realize the optimum structure of a diaphragm for the piezoresistive pressure sensor application. Due to its low toxicity and its high compatibility with the CMOS processing, TMAH was used as Si anisotropic etchants. The variations of Si etch rate on the etching temperature, TMAH concentration, and etching time were obtained. With increasing the etching temperature and decreasing TMAH concentrations, the Si etch rate is increased while a significant non-uniformity exists on the etched surface because of formation of hillocks on the <100> surface. With the addition of AP to TMAH solution, the Si etch rate is increased and an improvement in flatness on the etching front is observed. The Si etch rate is also maximized with increasing the number of addition of AP to TMAH solution per one hour. The Si square diaphragms of 20$\mu\textrm{m}$ thickness and 100-400 $\mu\textrm{m}$ one-side length were fabricated successfully by adding AP of (5/6)g to 800 ml TMAH solution every 10 minutes.

• Resources Recycling
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• v.31 no.4
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• pp.40-48
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• 2022

In waste lithium iron phosphate (LFP) batteries, the cathode material contains approximately 4% lithium. Recycling the constituent elements of batteries is important for resource circulation and for mitigating the environmental pollution. Li contained in the waste LFP cathode powder was selectively leached using persulfate-based oxidizing agents, such as sodium persulfate, potassium persulfate, and ammonium persulfate. Leaching efficiency and waste LFP powder properties were compared and analyzed. Pulp density was used as a variable during leaching, which was performed for 3 h under each condition. The leaching efficiency was calculated using the inductively coupled plasma (ICP) analysis of the leachate. All types of persulfate-based oxidizing agents used in this study showed a Li leaching efficiency over 92%. In particular, when leaching was performed using (NH₄)₂S₂O₈, the highest Li leaching percentage of 93.3% was observed, under the conditions of 50 g/L pulp density and an oxidizing agent concentration of 1.1 molar ratio.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2005.07a
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• pp.416-417
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• 2005

In this study, we optimized the process of Si anisotropy etching by combing tetramethyl ammonium hydroxide (TMAH) etching process with ultrasonic wave technology. New ultrasonic TMAH etching apparatus was developed and it was used for fabricating a $20{\mu}m$ thick diaphragm for Si piezoresistive pressure sensors. Based on comparison study on etch rate and surface flatness, it was observed that the Si anisotropy etching methode with new ultrasonic TMAH etching apparatus (at 40 kHz/ 500 watt) was superior to conventional etching methods with TMAH or TMAH+ammonium persulfate(AP) solutions.

• Proceedings of the Korean Society Of Semiconductor Equipment Technology
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• 2003.05a
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• pp.23-28
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• 2003

본 논문에서는 MEMS 공정기술을 이용하는 압저항(piezoresistive) 압력센서용 다이아프램의 최적구조 제작을 위한 TMAH(Tetramethyl Ammonium Hydroxide)의 식각특성을 연구하였다. KOH, EDP 등 기존의 공정 수행에 있어서 부딪치게 되는 환경적 요인을 개선하고, 생산성 향상을 위해 독성이 없고 CMOS 집적회로 공정과 호환성이 높은 TMAH를 사용하여, 식각온도와 TMAH 농도 및 식각시간에 따른 에칭률 변화를 측정하였다. 식각온도가 증가 함에 따라, 그리고 TMAH 농도가 감소함에 따라, Si 에칭률은 증가하였으나 hillock 발생률이 증가하여 식각표면의 평탄화 정도가 나빠졌다. 이러한 단점을 AP(Ammonium Persulfate) 첨가제를 이용하여 해결하였다. l5wt% 농도의 TMAH 800ml 용액을 가지고 매 10분당 같은 양의 AP를 1시간당 5g이 되도록 첨가하여, 한변의 길이가 100~400 $\mu\textrm{m}$인 정사각형 모양을 가진 우수한 이방성 다이아프램을 성공적으로 제작하였다.

• Polymer(Korea)
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• v.25 no.5
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• pp.617-624
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• 2001

The core-shell composite latexes were synthesized by stage emulsion polymerization of methyl methacrylate (MMA) and styrene (St) with ammonium persulfate after preparing monomer pre-emulsion in the presence of anionic surfactant. However, in preparation of core-shell composite latex, several unexpected results are observed, such as, particle coagulation, low degree of polymerization, and formation of new particles during shell polymerization. To solve the disadvantages, We study the effect of initiator concentrations, surfactant concentrations, and reaction temperature on the core-shell structure of polymethyl methacrylate/polystyrene and polystyrene/polymethyl methacrylate. Particle size and particle size distribution were measured using particle size analyzer, and the morphology of the core-shell composite latex was determined using transmission electron microscope. Glass temperature was also measured using differential scanning calorimeter. To identify the core-shell structure, pH of the two composite latex solutions were measured.

• Polymer(Korea)
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• v.34 no.2
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• pp.89-96
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• 2010

Adhesive binders with core-shell structure of organic/organic pair were prepared by emulsion polymerization of acrylic monomers, such as methyl methacrylate(MMA), ethyl acrylate(EA), n-butyl acrylate(BA), and styrene(St). Ammonium persulfate (APS) was used as an water soluble initiator in the presence of an anionic surfactant, sodium dodecyl benzene sulfonate (SDBS). Non-woven fabric and leather were impregnated with the adhesive binder. The surface of the impregnated fabric and leather were treated with plasma technique and then kinetics analysis and mechanical properties were measured. The conversions of the polymerization of core-shell binder (MMA/EA, MMA/BA) were greater than 90%. When the core-shell binder was prepared at equimolar conditions, the increasing effect of the core-shell binder on the state peel strength of the impregnated and plasma-treated non-woven/non-woven fabric has the order of MMA/St, EA/BA, BA/MMA, EA/St, and EA/MMA. When the core-shell binder was prepared at non-equimolar conditions, the increasing effect of the core-shell binder on the state peel strength of the non-woven fabric/leather has the order of MMA/BA, BA/EA, MMA/EA, St/MMA, and EA/St.

• Journal of the Korean Applied Science and Technology
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• v.22 no.2
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• pp.96-105
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• 2005

Core-shell polymers of methyl methacrylate-styrene system were prepared by sequential emulsion polymerization in the presence of sodium dodecyl benzene sulfonate(SDBS) as an emulsifier using ammonium persulfate(APS) in an initiator and the characteristics of these core-shell polymers were evaluated. Core-shell composite latex has the both properties of core and shell components in a particle, whereas polymer blends or copolymers show a combined physical properties of two homopolymers. This unique behavior of core-shell composite latex can be used in various industrial fields. However, in preparation of core-shell composite latex, several unexpected matters are observed, for examples, particle coagulation, low degree of polymerization, and formation of new particles during shell polymerization. To solve this matters, we study the effects of surfactant concentrations, initiator concentrations, and reaction temperature on the core-shell structure of PMMA-PSt and PSt-PMMA. Particle size and particles distribution were measured by using particle size analyzer, and the morphology of the core-shell composite latex was observed by using transmission electron microscope. Glass temperature was also measured by using differential scanning calorimeter. To identify the core-shell structure, pH of the composite latex solutions was measured.

• Polymer(Korea)
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• v.24 no.5
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• pp.629-637
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• 2000

Dispersion polymerization of acrylamide in the media of t-butyl alcoho1/$H_2O$ mixtures at 30~5$0^{\circ}C$ in the presence of hydroxypropyl cellulose and ammonium persulfate as steric stabilizer and initiator, respectively, was carried out. It was studied the effects of concentrations of initiator and steric stabilizer, amount of monomer, polymerization temperature, t-butyl alcohol/$H_2O$ ratio, concentration of crosslinker, purification of monomer and nitrogen purge on the particle size of the resulting acrylamide latices and molecular weight of the latex-poly(acrylamide). In this study, poly(acrylamide) latices of 0.1~0.5 ${\mu}{\textrm}{m}$ with 470000~2080000 in (equation omitted) were prepared and the resulting PAM latices were all dissolved in water in stantly.

• Membrane Journal
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• v.6 no.4
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• pp.258-264
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• 1996

Polyanilines were prepared by the oxidative polymerization in the presence of ammonium persulfate as an oxidant. After dehydration, a doping was carried out by mixing the polymer solution with dopants and immersing into aqueous dopant solutions. Using various riopants, the d-spacing of polyanilines can be controlled from $3.72{\AA}$ to $4.844{\AA}$. The d-spacing of polyanilines with polymeric or bulky dopants was larger than that of as-cast polyaniline. The characterization of the physical properties were confirmed by Fourier transform infrared spectroscopy (FT-IR), differential scanning calorimetry (DSC), dielectric analyzer (DEA) etc. Annealed polyaniline membrane exhibited the oxygen permeability of 0.072 barrer and the oxygen selectivity to nitrogen was 6.87. For the gas separation of polyanilines with polymeric or bulky riopants, the permeability increased while the selectivity detereased. Permeability can be readily controlled by the use of bulky dopants.

• Journal of the Institute of Electronics Engineers of Korea SD
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• v.41 no.3
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• pp.9-14
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• 2004

In this study, Si anisotropic etching characteristics of tetramethylammonium hydroxide (TMAH)/ ammonium persulfate(AP)/isopropyl alcohol(IPA) solutions were investigated to realize the optimum structure of a diaphragm for the piezoresistive pressure sensor application. Due to its low toxicity and its high compatibility with the CMOS processing, TMAH was used as Si anisotropic etchants. The variations of Si etch rate on the etching temperature, TMAH concentration, and etching time were obtained. With increasing the etching temperature and decreasing TMAH concentrations, the Si etch rate is increased while a significant non-unifonnity exists on the etched surface because of formation of hillocks on the (100) surface. The addition of IPA to TMAH solution leads to smoother etched surfaces but, makes the Si etch rate lower. However, with the addition of AP to TMAH solution, the Si etch rate is increased and an improvement in flatness on the etching front is observed. The Si etch rate is also maximized with increasing the number of addition of AP to TMAH solution per one hour. The Si square membranes of 20${\mu}{\textrm}{m}$ thickness and l00-400${\mu}{\textrm}{m}$ one-side length were fabricated successfully by applying optimum Si etching conditions of TMAH/AP solutions.