1 |
Xinxin Li, Yitshak Zohar, Man Wong, 'Fabrication and characterization of nickel-induced laterally crystallized polycrystalline silicon piezo-resistive sensors,' Sensors and Actuators, Vol.82, pp. 281-285, 2000
DOI
ScienceOn
|
2 |
S. Brida, L.Ferario, V.Guarnieri, F.Giacomozzi, B.Margesin, M.Paranjape, G.Verzellesi, M.Zen,' Optimization of TMAH etching for MEMS', Part of the Symposium on Design, Test, and Microfabrication of MEMS and MOEMS Paris, France, March-April, 1999
DOI
|
3 |
Gwiy-Sang Chung, Tae-Song Kim, Won-Fae Lee, Jae-Sung Song, 'The Effect of Pyrazine on TMAH : IPA Singal-Crystal Silicon Anisotropic Etching Properties'. Transactions on Electrical and Electronic Materials, Vol.2, No.2, pp21-25, 2001
과학기술학회마을
|
4 |
A.Merlos, M.Acero, M.H. Bao, J.Bausells and J.Estive, 'TMAH/IPA anisotropic etching characteristics', Sensors and Actuators A, Vol.737, pp.37-38, 1993
DOI
ScienceOn
|
5 |
U.Schnakenberg, W.Benecke, and P.Lange, 'TMAH etchants for Silicon micromachining', proc. 6th Int'l. Conf. On Solid-State Sensors and Actuators(Transducers'91), Sanfransisco, CA, pp.815, 1991
DOI
|
6 |
K.E.Bean, 'Anisotropic Etching in Silicon.' IEEE Trans. on Electron Devices, ED-25, p1185, 1978
|
7 |
정귀상, 박진성, 최영규, 'TMAH/IPA의 실리콘 이방성 식각특성,' Journal of the Korean Institute of Electrical and Electronic Material Engineers, Vol. 10, No. 5, pp.481-486, 1997
과학기술학회마을
|