• Title/Summary/Keyword: aluminum beam

Search Result 284, Processing Time 0.025 seconds

Molecular Dynamics Simulation on the Thermal Boundary Resistance of a Thin-film and Experimental Validation (분자동역학을 이용한 박막의 열경계저항 예측 및 실험적 검증)

  • Suk, Myung Eun;Kim, Yun Young
    • Journal of the Computational Structural Engineering Institute of Korea
    • /
    • v.32 no.2
    • /
    • pp.103-108
    • /
    • 2019
  • Non-equilibrium molecular dynamics simulation on the thermal boundary resistance(TBR) of an aluminum(Al)/silicon(Si) interface was performed in the present study. The constant heat flux across the Si/Al interface was simulated by adding the kinetic energy in hot Si region and removing the same amount of the energy from the cold Al region. The TBR estimated from the sharp temperature drop at the interface was independent of heat flux and equal to $5.13{\pm}0.17K{\cdot}m^2/GW$ at 300K. The simulation result was experimentally confirmed by the time-domain thermoreflectance technique. A 90nm thick Al film was deposited on a Si(100) wafer using an e-beam evaporator and the TBR on the film/substrate interface was measured using the time-domain thermoreflectance technique based on a femtosecond laser system. A numerical solution of the transient heat conduction equation was obtained using the finite difference method to estimate the TBR value. Experimental results were compared to the prediction and discussions on the nanoscale thermal transport phenomena were made.

A Study on Electron Dose Distribution of Cones for Intraoperative Radiation Therapy (수술중 전자선치료에 있어서 선량분포에 관한 연구)

  • Kang, Wee-Saing;Ha, Sung-Whan;Yun, Hyong-Geun
    • Progress in Medical Physics
    • /
    • v.3 no.2
    • /
    • pp.1-12
    • /
    • 1992
  • For intraoperative radiation therapy using electron beams, a cone system to deliver a large dose to the tumor during surgical operation and to save the surrounding normal tissue should be developed and dosimetry for the cone system is necessary to find proper X-ray collimator setting as well as to get useful data for clinical use. We developed a docking type of a cone system consisting of two parts made of aluminum: holder and cone. The cones which range from 4cm to 9cm with 1cm step at 100cm SSD of photon beam are 28cm long circular tubular cylinders. The system has two 26cm long holders: one for the cones larger than or equal to 7cm diamter and another for the smaller ones than 7cm. On the side of the holder is an aperture for insertion of a lamp and mirror to observe treatment field. Depth dose curve. dose profile and output factor at dept of dose maximum. and dose distribution in water for each cone size were measured with a p-type silicone detector controlled by a linear scanner for several extra opening of X-ray collimators. For a combination of electron energy and cone size, the opening of the X-ray collimator was caused to the surface dose, depths of dose maximum and 80%, dose profile and output factor. The variation of the output factor was the most remarkable. The output factors of 9MeV electron, as an example, range from 0.637 to 1.549. The opening of X-ray collimators would cause the quantity of scattered electrons coming to the IORT cone system. which in turn would change the dose distribution as well as the output factor. Dosimetry for an IORT cone system is inevitable to minimize uncertainty in the clinical use.

  • PDF

Dielectric properties of ${Ta_2}{O_5}$ thin film capacitor with $SnO_2$ thin film underlayer ($SnO_2$ 박막을 이용한 ${Ta_2}{O_5}$박막 커패시터의유전특성)

  • Kim, Jin-Seok;Jeong, Gang-Min;Lee, Mun-Hui
    • Korean Journal of Materials Research
    • /
    • v.4 no.7
    • /
    • pp.759-766
    • /
    • 1994
  • Our investigation aimed to reduce the leakage current of $Ta_2O_5$ thin film capacitor by layering SnOz thin film layer under Ta thin film, thereby supplying extra oxygen ions from the $SnO_{2}$ underlayer to enhance the stoichiometry of $Ta_2O_5$ during the oxidation of Ta thin film. Tantalum was evaporated by e-beam or sputtered on p-Si wafers with various deposition temperatures and was oxidized by dry--oxygen at the temperatures between $500^{\circ}C$ and $900^{\circ}C$. Aluminum top and bottom electrodes were formed to make Al/$Ta_2O_5$/p-Si/Al or $Al/Ta_2O_5/SnO_2$p-Si/AI MIS type capacitors. LCR meter and pico-ammeter were used to measure the dielectric constants and leakage currents of the prepared thm film capacitors. XRD, AES and ESCA were employed to confirm the crystallization of the thin f~lm and the compositions of the films. Dielectric constant of $Ta_2O_5$ thin film capacitor with $SnO_{2}$ underlayer was found to be about 200, which is about 10 times higher than that of $Ta_2O_5$ thin film capacitor without $SnO_{2}$ underlayer. In addition, higher oxidation temperatures increased the dielectric constants and reduced the leakage current. Higher deposition temperature generally gave lower leakage current. $Ta_2O_5/SnO_2$ capacitor deposited at $200^{\circ}C$ and oxidized at $800^{\circ}C$ showed significantly lower leakage current, $10^{-7}A/\textrm{cm}^2$ at $4 \times 10^{5}$V/cm, compared to the one without $SnO_{2}$ underlayer. XRD showed that $Ta_2O_5$ thin film was crystallized above $700^{\circ}C$. AES and ESCA showed that initially the $SnO_{2}$, underlayer supplied oxygen ions to oxidize the Ta layer, however, Sn also diffused into the Ta thin film layer to form a new $Ta_xSn_YO_Z$ , ternary oxide layer after all.

  • PDF

Ultasonic Reflection Characteristics of the Underwater Corner Reflector (수중코오너리프렉터의 초음파반사특성에 관한 연구)

  • Lee, Dae-Jae;Sin, Hyeong-Il
    • Journal of the Korean Society of Fisheries and Ocean Technology
    • /
    • v.19 no.1
    • /
    • pp.25-32
    • /
    • 1983
  • The corner reflector is used to increase the echoing area of radar targets in the air, and it can also be applied to increase the echoing area of the sonar targets under water. As the basic research for this application, the authors investigated the ultrasonic reflection characteristics under water for the corner reflector which was made of aluminum plate. The experiments were made by pulse measuring method with the magnetostrictive ferrite transducers of 28, 50 and 75KHz in the experimental water tank. The results obtained are as follows; 1. The target strength of corner reflectors were increased in proportion to the diameter and were greater at higher frequency of 75KHz than at lower frequency of 28KHz. 2. In the case of 5 corner reflectors of 150mm in diameter which have corner angles of 15$^{\circ}$, 30$^{\circ}$, 45$^{\circ}$, 60$^{\circ}$ and 90$^{\circ}$the measured values of the maximum target strength at 75KHz were-25.0 dB, -17.2dB, -15.1dB, -13.4dB and 11.0dB, and then the number of main lobes showing the maximum target strength in the backscattering patterns were 24, 12, 8, 6 and 4, respectively. 3. When 7 corner reflector of 80mm in diameter and 90$^{\circ}$ in the corner angle was located on the minor axis of the horizontal section with directional angles of 0$^{\circ}$, 2.5$^{\circ}$, 5.0$^{\circ}$, 7.5$^{\circ}$, 10$^{\circ}$ and 12.5$^{\circ}$ against the sound beam axis, the measured values of the target strength on each position at 75KHz were -21.2dB, -21.9dB, -26.0dB, -30.5dB and -36.8dB, respectively.

  • PDF