• Journal of Surface Science and Engineering
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• v.29 no.5
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• pp.570-576
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• 1996

Cu films for future ULSI metallization were prepared by partially ionized beam (PIB) deposition and characterized in terms of preferred orientation, grain size, roughness and resistivity. PIB-Cu films were prepared on Si (100) at pressure of $8 \times 10^{-7}$~$1 \times 10^{-6}$ Torr. Effects of acceleration voltage and ionization potential on the properties of PIB-Cu films have been investigated. As the acceleration voltage increased at constant ionization potential of 400 V, the degree of preferred orientation and surface smoothness of the Cu film increased. At the ionization potential of 450 V, the degree of preferred orientation at the acceleration voltage higher than 2 kV decreased and surface roughness increased with acceleration voltage. Grain size of Cu films increased to 1100 $\AA$ initially up to applied acceleration voltage of 1 kV, above which a little increase occurred with the acceleration voltage. There was no indication of impurities such as C, O in all sample. Resistivity of Cu film had the same trends as the surface roughness with acceleration voltage and ionization potential. The increase of electrical resistivity of PIB-Cu films was explained in terms of grain size and surface roughness

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2004.05b
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• pp.69-72
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• 2004

In recent, there have been several developments in lamp technology that promise savings in electrical power consumption and improved quality of the lighting space. Above all, the advantage of ring-shaped electrodeless fluorescent lamp is the removal of internal electrodes and heating filaments that are a light-limiting factor of conventional fluorescent lamps. The ring-shaped electrodeless lamp is intended as a high efficacy replacement for the incandescent reflector lamp in many applications. Therefore, the life time of ring-shaped electrodeless fluorescent lamps is substantially higher than that of conventional fluorescent lamps and last up to 60,000 hours. In this paper, we present measurement results of electrical characteristics of a ring-shaped electrodeless fluorescent lamp as a function of frequency and number of coil turns using a highly permeable Mn-Zn ferrite. It is found that the impedance are increased while the quality factor decreases as frequency increases.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2004.07a
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• pp.239-242
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• 2004

We investigated the nanotopography impact on the post-chemical mechanical polishing (post-CMP) oxide thickness deviation(OTD) of ceria slurry with a surfactant. Not only the surfactant but also the slurry abrasive size influenced the nanotopography impact. The magnitude of the post-CMP OTD increased with adding the surfactant in the case of smaller abrasives, but it did not increase in the case of larger abrasives, while the magnitudes of the nanotopography heights are all similar. We created a one-dimensional numercal simulation of the nanotopography impact by taking account of the non-Prestonian behavior of the slurry, and good agreement with experiment results was obtained.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2005.07a
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• pp.160-161
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• 2005

The $(Sr_{1-x}Ca_x)TiO_3$(SCT) thin films are deposited on Pt-coated electrode (Pt/TiN/$SiO_2$/Si) using RF sputtering method with substitutional contents of Ca. The optimum conditions of RF power and $Ar/O_2$ ratio were 140[W] and 80/20, respectively. Deposition rate of SCT thin film was about 18.75$[{\AA}/min]$. The dielectric constant was increased with increasing the substitutional contents of Ca, while it was decreased if the substitutional contents of Ca exceeded over 15[mol%]. All SCT thin films used in this study show the phenomena of dielectric relaxation with the increase of frequency, and the relaxation frequency is observed above 200[kHz].

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2005.07a
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• pp.66-67
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• 2005

In this study, in order to develop multilayer piezoelectric actuator, PMN-PNN-PZT ceramics were fabricated using $Li_2CO_3-Na_2CO_3$ as sintering aids and their piezoelectric and dielectric characteristics were investigated with the function of PNN substitution. With increasing PNN substitution, dielectric constant(${\varepsilon}r$), electromechanical coupling factor(kp), and piezoelectric d constant($d_{33}$) were increased at 10~12[mol%] PNN substitution and then decreased at all sintering temperature. With increasing PNN substitution, phase changed from tetragonal to rhombohedral at [10~12mol%] PNN substitution. At the 12[mol%] PNN substituted PMN-PZT composition ceramic sintered at 950[$^{\circ}C$], density, ${\varepsilon}r$, kp, $d_{33}$ and Qm showed the optimum value of 7.79[$g/cm^3$], 1160, 0.599, 419[pC/N) and 894, respectively for multilayer piezoelectric actuator application.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2004.07b
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• pp.798-801
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• 2004

In this study, in order to develop low temperature sintering ultrasonic vibrator, PCW-PMN-PZT ceramics with the amount of $Nb_2O_5$ addition were manufactured. All of the fabricated sample showed pure pervoskite structure of tetragonal phase. With increasing the amount of $Nb_2O_5$ addition, mechanical quality factor Qm were increased up to 0.2wt%$Nb_2O_5$ addition and then decreased. And also, with increasing the amount of $Nb_2O_5$ addition, grain size, kp, density and dielectric constant were linearly decreased. At the 0.2wt% $Nb_2O_5$ addition composition ceramic, kp of 0.48, Qm of 2186, ${\varepsilon}r$ of 1219 were shown, respectively. Their values were suitable for ultrasonic vibrator application.

• Bulletin of the Korean Chemical Society
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• v.21 no.7
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• pp.679-684
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• 2000

The Sr2Co0.5Nb(Ta)0.5O4 and Sr3CoNb(Ta)O7 compounds, both with Ruddlesden-Popper structures, have been synthesized by the ceramic method at $1150^{\circ}C$ under atmospheric pressure. The crystallographic structure of the compounds was assigned to the tetr agonal system with space group 14/mmm by X-ray diffraction(XRD) Rietveld refinement. The reduced lattice volume and lattice parameters increased as the Ta with 5d substitutes for the Nb with 4d in the compounds. The Co/Nb(Ta)O bond length has been determined by X-ray absorption spectroscopic(EXAFS/XANES) analysis and the XRD refinement. The CoO6,octahedra were tetragonally distorted by elongation of Co-O bond along the c-axis. The magnetic measurement shows the compounds Sr2Co0.5Nb(Ta)0.5O4 and Sr3CoNb(Ta)O7 have paramagnetic properties and the Co ions with intermediate spin sates between high and low spins in D4h symmetry. All the compounds showed semiconducting behavior whose electrical conductivity increased with temperature up to 1000 K. The electrical conductiviy increased and the activation energy for the conduction decreased as the number of perovskite layers increased in the compounds with chemical formula An+1BnO3n+1.

• Journal of the Semiconductor & Display Technology
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• v.18 no.4
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• pp.51-56
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• 2019

LuAG:Ce(Lu₃Al₅O₁₂:Ce³⁺) nano phosphor were synthesized by applying the coprecipitation method. It is used to increase the color rendering of phosphor ceramic plate for high power LEDs and laser lighting. Internal quantum efficiency and absorption of LuAG:Ce nano phosphor are 51.5 % and 64.4 %, respectively, which is higher than the previously studied nano phosphors. The maximum absorption wavelength of this phosphor is 450 nm blue light, and the emission wavelength is 510 nm. The emission wavelength shifted to longer wavelength when the concentration of Ce increased in the heat treatment of the reducing atmosphere. Thermal quenching of LuAG nano phosphor was 70 % at 200 ℃, it was explained by their significant quenching of all raman scattering modes, implying the restriction of electron-phonon couplings caused by their defects.

• Steel and Composite Structures
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• v.30 no.6
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• pp.567-576
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• 2019

Time-dependent creep analysis of a rotating functionally graded cantilever beam with trapezoidal longitudinal cross section subjected to thermal and inertia loading is investigated using first-order shear deformation theory (FSDT). The model described in this paper is a simple simulation of a turbine blade working under creep condition. The material is a metal based composite reinforced by a ceramic where the creep properties of which has been described by the Sherby's constitutive model. All mechanical and thermal properties except Poisson's ratio are assumed to be variable longitudinally based on the volume fraction of constituent. The principle of virtual work as well as first order shear deformation theory is used to derive governing equations. Longitudinal distribution of displacements and stresses are investigated for various volume fractions of reinforcement. Method of successive elastic solution is employed to obtain history of stresses and creep deformations. It is found that stresses and displacements approach their steady state values after 40000 hours. The results presented in this paper can be used for selection of appropriate longitudinal distribution of reinforcement to achieve the desired stresses and displacements.

• Nuclear Engineering and Technology
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• v.54 no.3
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• pp.991-996
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• 2022

Microstructures of monolithic high purity SiC and SiC with sintering additives after neutron irradiation to a fluence of 2.0-2.5 × 10²⁴ n/m² (E > 0.1 MeV) at 333-363 K and after post-irradiation annealing up to 1673 K were observed using a transmission electron microscopy. Results showed that no black spot defects or dislocation loops in SiC grains were found after the neutron irradiation for all of the specimens owing to the moderate fluence at low irradiation temperature. Thus, it is confirmed that these specimens were swelled mostly by the formation of point defects. Black spots and small dislocation loops were discovered only after the annealing process in PureBeta-SiC and CVD-SiC, where the swelling almost diminished. Anomalous-shaped YAG grains were found in SiC ceramics containing sintering additives. These grains contained dense black spots defects and might lose crystallinity after the neutron irradiation, while these defects may annihilate by recrystallization during annealing up to 1673 K. Amorphous grain boundary phase was also presented in this ceramic, and a large part of it was crystallized through post-irradiation annealing and could affect their recovery behavior.