• 전기학회논문지
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• 제64권12호
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• pp.1742-1747
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• 2015

An improved transfer alignment method for a strap-down inertial navigation system (SDINS) is presented here. The alignment accuracy in conventional method is vulnerable to the data latency of a Master INS (MINS) in high maneuverable platforms. We propose a time delay compensation equation considering higher-order terms in the attitude measurement equation of the Kalman filter. The equation incorporates additional information including angular rate, angular acceleration and linear acceleration from the MINS. Simulation results show that the transfer alignment accuracy is significantly improved in the high dynamic environment by incorporating the latency compensation technique.

• 한국정밀공학회지
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• 제20권2호
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• pp.40-49
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• 2003

Ferrule is widely used as fiber optic connecters. In fiber-optic communications. the shape accuracy such as coaxiality and cylindricity of ferrule affects insertion loss. When coaxial grinding of ferrule supported by two pin. pin alignment and chucking accuracy are very important. In this research, the kinematic behavior of the ferrule centers are investigated in the case where the ferrule is chucked with the cone-shaped center pins and bail centers, With homogeneous coordinate transformation and numerical analysis, the obtained results are as follows: In the case of cone-type center, the alignment errors between center pins alone do not affect the rotation accuracy of ferrule. The alignment errors between center holes cause sinusoidal displacement of ferrule. And the maximum displacement of ferrule centers is proportional to the center pin angle. In the case of ball-type center, the displacements of ferrule centers has similar pattern as cone-type center, and the alignment errors art proportional to ball diameters.

• 반도체디스플레이기술학회지
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• 제22권3호
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• pp.90-95
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• 2023

We describe an optimal alignment method for improving accuracy of dynamic spectroscopic polarimeter based on monolithic polarizing interferometer. The dynamic spectroscopic polarimeter enables real-time measurements of spectral ellipsometric parameters by using a spectral carrier frequency concept. However, the non-polarizing beam splitter used in the monolithic polarizing interferometer cannot maintain the polarization state perfectly due to phase retardation caused by optical anisotropic characteristics of the non-polarizing beam splitter, resulting in degraded measurement accuracy. The effect of the beam splitter can be minimized through optimal alignment of the polarizers used in the polarizing interferometer and the analyzer. We demonstrate how much the proposed alignment method can enhance the measurement accuracy by comparing with previous alignment approach.

• 한국정밀공학회지
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• 제18권11호
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• pp.138-147
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• 2001

Alignment systems are frequently used under various semiconductor manufacturing environment. Particularly in PDP(Plasma Display Panel) manufacturing process, the alignment system is applied to the combining and sealing processes of the upper and lower glass panels of PDP, where these processes are performed in the vacuum chamber of high vacuum and high temperature. In this paper, the XYΘ-alignment stage is developed to align PDP panels. Because of high vacuum and high temperature environment, the alignment chamber has been designed to isolate the inner part of the alignment chamber from the outer environment of high vacuum and high temperature, in which every part of the alignment stage is inserted. As it is difficult to attach feedback sensors to the alignment stage in the alignment chamber, the alignment stage is implemented with the open loop algorithm, where the parallel link structure has been designed using step-motors and ball-screws for structural simplicity. The kinematic analysis is performed to drive the parallel link structure, based on the experiments of actuation-compensation of the alignment stage. For the error compensation, the hyperpatch model has been used to model the errors. From the experiments, the positional accuracy of the alignment stage can be improved significantly.

• 반도체디스플레이기술학회지
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• 제6권1호
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• pp.43-48
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• 2007

For exposure systems, very accurate alignment between the mask and the substrate is indispensable. In this paper, an automatic alignment system using machine vision for exposure systems is described. Machine vision algorithms are described in detail including extraction of an alignment mark's center position and camera calibration. Methods for extracting parameters for alignment are also presented with some compensation techniques to reduce alignment time. Our alignment system was implemented with a vision system and motion control stages. The performance of the alignment system has been extensively tested with satisfactory results. The performance evaluation shows alignment accuracy of lum within total alignment time of about $2{\sim}3$ seconds including stage moving time.

• 한국공작기계학회논문집
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• 제15권6호
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• pp.64-70
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• 2006

The optical element was usually used in optical devices and optical transfer devices, but it has been recently used in communication, computer and medical equipment. With the development of very high speed optical-communication, the development of the kernel parts of optical communication has also increased. Presently, the alignment of the optical element is time consuming, and an effective alignment algorithm has not yet to be developed. In this paper, the alignment automation of the optical element is studied. The ultra precision stage is applied to an optical element alignment to improve the accuracy of the alignment. The automation program of the optical element alignment is developed by LabVIEW programming to save the alignment time. The alignment algorithms of the optical element consist of field search and peak search algorithms.

• 한국항해항만학회:학술대회논문집
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• 한국항해항만학회 2006년도 International Symposium on GPS/GNSS Vol.1
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• pp.355-359
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• 2006

For the poor observability of azimuth misalignment angle and east gyro drift rate of the traditional initial alignment, a bran-new SINS stationary fast self-alignment approach is proposed. By means of analyzing the characteristic of the strapdown inertial navigation system (SINS) stationary alignment seriously, the new approach takes full advantage of the specific force and angular velocity information given by inertial measurement unit (IMU) instead of the mechanization of SINS. Firstly, coarse alignment algorithm is presented. Secondly, a new fine alignment model for SINS stationary self-alignment is derived, and the observability of the model is analysed. Then, a modified Sage-Husa adaptive Kalman filter is introduced to estimate the misalignment angles. Finally, some computer simulation results illustrate the efficiency of the new approach and its advantages, such as higher alignment accuracy, shorter alignment time, more self-contained and less calculation.

• 대한기계학회:학술대회논문집
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• 대한기계학회 2003년도 춘계학술대회
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• pp.987-991
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• 2003

Ferrule is widely used as fiber optic connecters. In fiber-optic communications, the shape accuracy such as coaxiality and cylindricity of ferrule affects insertion loss. When coaxial grinding of ferrule supported by two pin, pin alignment and chucking accuracy are very important. In this research, the kinematic behavior of the ferrule center is investigated in the case where cone-shaped center pins and round circle holes which make contact with each other near the edge of the holes, using homeogenous coordinate transformation and numerical analysis. The obtained results are as follows: The alignment errors between center holes cause a sinusoidal displacement of ferrule. And the maximum displacement of ferrule centers increase in proportion to the center pin angle. The relationship between center pins displacement in coaxial grinding and grinding accuracy was explained.

• 전기학회논문지
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• 제68권1호
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• pp.108-121
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• 2019

This paper presents the study results on the design of the correction filter to improve the azimuth error estimation of the high-speed guided missile launched from the warship after the transfer alignment. We theoretically proved that the transfer alignment performance is determined by the accuracy of the marine inertial navigation system and the observability of the attitude error state variable in the transfer alignment filter, and that most of navigation errors in high-speed guided missile are caused by azimuth error. In order to improve the azimuth estimation performance of the correction filter, the multiple adaptive estimation method and the adaptive filters adapting the measurement noise covariance or the process noise covariance are proposed. The azimuth estimation performance of the proposed adaptive filter and the existing Kalman filter are compared and analyzed each other for 8 different transfer alignment accuracy cases. As a result of comparison and analysis, it was confirmed that the adaptive filter adapting the process noise covariance has the best azimuth estimation performance. These results can be applied to the design of correction filters for high-speed guided missile.

• 한국기계가공학회지
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• 제21권3호
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• pp.100-109
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• 2022

In this study, calibration technology that increases the alignment accuracy in large flexible flat panels was studied. For precise of calibration, a systematization of the calibration algorithm was established, and a calibration correction technique was studied to revise calibration errors. A coordinate systems of camera and UVW stage was established to get the global position of the mark, and equations for translational and rotational calibration were systematically derived based on geometrical analysis. Correction process for the calibration data was carried, and alignment experiments were performed sequentially in cases of the presence or absence of calibration-correction. Alignment results of both calibration correction and non-calibration correction showed accuracy performance less than 1㎛. On the other hand, the standard deviation in calibration-correction is smaller than non-calibration correction. Therefore, calibration correction showed improvement of the alignment repeatability.