• Journal of the Korean Society for Precision Engineering
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• v.21 no.7
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• pp.185-194
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• 2004

In order to analyze the motion errors of the aerostatic stage, it is necessary to consider the influence of the moment variation occurred inside the pads. In this paper, a motion error analysis method utilizing the transfer functions on the reaction force and moment is proposed, and general characteristics of the transfer functions are discussed. Calculated motion errors by the proposed method show good agreement with the ones calculated by Multi fad Method, which is considered the entire table as an analysis object. Also, by the introduction of the transfer function of motion errors, which represent the relationship between the spatial frequency components of the rail form error and motion errors, motional characteristics of the porous aerostatic stage can be generalized. In detail, the influence of the spatial frequencies is analyzed qualitatively, and the patterns of the insensitive frequencies which almost do not affect the linear motion error or angular motion error according to the rail length ratio and the number of the pad are verified. The relationship between the moment variation occurred inside the pads and the motion errors is also verified together.

• Journal of the Korean Society for Precision Engineering
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• v.21 no.9
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• pp.167-173
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• 2004

The heterodyne He-Ne laser interferometer is the most widely used sensing unit to measure the position error. It measures the positioning error from the displacement of a moving reflector in terms of the wave length. But, the wave length is affected by the variation of atmospheric temperature. Temperature variation of 1$^\circ C$ results in the measuring error of 1ppm. In this paper, for measuring more accurately the position error of the ultra precision stage, the refractive index compensation method is introduced. The wave length of the laser interferometer is compensated using the simultaneously measured room temperature variations in the method. In order to investigate the limit of compensation, the stationary test against two fixed reflectors mounted on the zerodur$\circledR$ plate is performed firstly. From the experiment, it is confirmed that the measuring error of the laser interferometer can be improved from 0.34${\mu}m$ to 0.11${\mu}m$ by the application of the method. Secondly, for the verification of the compensating effect, it is applied to estimate the positioning accuracy of an ultra precision aerostatic stage. Two times of the refractive index compensation are performed to acquire the positioning error of the stage from the initially measured data, that is, to the initially measured positioning error and to the measured positioning error profile after the NC compensation. Although the positioning error of an aerostatic stage cannot be clarified perfectly, it is known that by the compensation method, the measuring error by the laser interferometer can be improved to within 0.1${\mu}m$.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2006.05a
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• pp.141-142
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• 2006

This paper describes estimation method for 2D position error of planar XY stage from measured profiles of guide-ways. The XY stage usually moves along its guide ways. The motion error of each stage has effect on 2D position errors of XY stages and affected mainly by profiles of guide-ways. To estimate 2D position error and flatness of stages, the profiles of guide-ways were measured and used in motion error estimation.

• Wind and Structures
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• v.37 no.1
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• pp.39-56
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• 2023

To ensure the wind stability of a long-span suspension bridge during deck erection under skew wind, based on the aerostatic and self-excited aerodynamic force models under skew wind, a computational approach of refined flutter analysis for long-span bridges under skew wind is firstly established, in which the effects of structural nonlinearity, the static wind action and full-mode coupling etc are fully considered, and the corresponding computational procedure is programmed. By taking the Runyang suspension bridge over the Yangtze River as example, the flutter stability of the bridge in completion under skew wind is then analyzed with the aerodynamic parameters of a similar bridge deck measured from the sectional model wind tunnel test under skew wind. Finally, through simulating the girder segments erected symmetrically from the midspan to towers, from the towers to midspan and simultaneously from the towers and midspan to the quarter points, respectively, the evolutions of flutter stability limits during the deck erection under skew wind are investigated numerically, the favorable aerodynamically deck erection sequence is proposed, and the influences of skew wind and static wind effect on the flutter stability of suspension bridge under construction are ascertained.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2005.06a
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• pp.792-795
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• 2005

The guide-ways of precision machine tools are one of important element of machine tools. It has usually a pair of surfaces for constraint of one direction with bearing. In the case of precision machine tools, non-contact bearing such as hydrostatic bearing and aerostatic bearing is adopted usually. In this case, profiles of rails has effect on straightness and the clearance of bearing has effect on stiffness of guide way, which changes to higher if clearance changes to smaller. The clearance is varied along moving table according to relative distance of pair of rails. The relative distance of pair of rail can be divided by three properties. First and second properties are straightness of each pair of rail and bearing pad. And, third is parallelism about pair of rails and pairs of bearing pad. There are several methods for measuring straightness of each surface such as reversal method, sequential two point method, and way straightness. These straightness measuring methods are always acquiring deviation of profile from eliminating linear fitted inclined line and don't have the information of parallelism. Therefore, to get the small clearance for high stiffness, the straightness of rail and bearing pad and parallelism about pair of rails and pair of bearing pads are measured for correction such as regrinding, reassembling and lapping. In this research, new and easy method for measuring parallelism of pair of rails is suggested. Two displacement probe and sensor stage, which is carry on the displacement sensor, are needed. The simulation and experiment was accomplished about pair of horizontal guide way to confirm the measurement of parallelism. And, the third probe is added to measure the straightness of each rails by sequential two point method. From the estimation of combined these two methods, it is confirmed that the profiles of a pairs of rails can be measured.

• Journal of Korean Society of Steel Construction
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• v.20 no.6
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• pp.751-759
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• 2008

In this study, the effect of an unsteady flow field around a body of aerostatic/aerodynamic forces were investigated using rectangular cylinders (B/D = 2, 3, 4, 5). Proper orthogonal decomposition (POD) was introduced to the analysis of the fluctuating pressure field that was measured on the stationary/oscillatory B/D=4 rectangular cylinder, and the characteristics of the proper functions with flow patterns were identified. In addition, the physical decoupling and interactions in the different co-existing flow patterns were investigated through POD. The comparison with the identified proper function associated with a particular flow pattern revealed that the Karman vortex is almost not affected by the separation bubble, but that the Karman vortex considerably interferes in the development of the separation bubble around the trailing edge. It can be considered that the Karman vortex induces the increment of the curvature of the substantial separated flow.