• 한국진공학회:학술대회논문집
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• 한국진공학회 2013년도 제44회 동계 정기학술대회 초록집
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• pp.274-274
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• 2013

We fabricate encapsulation-layer of OLED panel from organic-inorganic hybrid thin film by atomic layer deposition (ALD) molecular layer deposition (MLD) using Al2O3 as ALD process and Adipoyl Chloride (AC) and 1,4-Butanediamine as MLD process. Ellipsometry was employed to verify self-limiting reaction of MLD. Linear relationship between number of cycle and thickness was obtained. By such investigation, we found that desirable organic thin film fabrication is possible by MLD surface reaction in monolayer scale. Purging was carried out after dosing of each precursor to eliminate physically adsorbed precursor with surface. We also confirmed roughness of the organic thin film by atomic force microscopy (AFM). We deposit AC and 1,4-Butanediamine at $70^{\circ}C$ and investigated surface roughness as a function of increasing thickness of organic thin film. We confirmed precursor's functional group by IR spectrum. We calculated WVTR of organic-inorganic hybrid super-lattice epitaxial layer using Ca test. WVTR indicates super-lattice film can be possibly use as encapsulation in flexible devices.

• 대한전자공학회논문지
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• 제26권11호
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• pp.1631-1636
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• 1989

A space charge model for semiconductor reduced gas sensors has been roposed and applied to gas sensing mechanism. SnO2-x and SnO2-x/Pt thin film were deposited by vacuum evaporating method. And Hall effect and gas sensitivity characteristics of these sensors were measured. From the space charge model and carrier concentration, the number of the adsorbed gas atom on the solid surface was calculated quantitatively. The gas sensing model was compared with CO gas sensitivities of the fabricated thin film gas sensors.

• 한국재료학회:학술대회논문집
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• 한국재료학회 1994년도 춘계 학술발표 강연 및 논문 개요집
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• pp.82-83
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• 1994

• 한국광학회지
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• 제15권6호
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• pp.531-538
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• 2004

균일한 표면에서 일어나는 가파른 계단형식의 흡착에 대한 연구는 이차원 현상에 대한 이해를 한층 높일 수 있다. 이를 위해 편광변조 타원해석법을 이용한 흡착측정장치를 제작하였다. 타원해석법 신호가 흡착막 형성의 과정을 원자층 이하 (∼0.3 $\AA$)로 매우 예민하게 측정할 수 있음을 확인할 수 있었다. HOPG (highly oriented pyrolytic graphite) 표면에서의 아르곤의 흡착 다층막을 측정한 결과, 34.04 K에서는 수천여개의 흡착층이 형성되어 완전 젖음이 일어남을 관찰할 수 있었다. 또한 67.05 K에서는 선명한 계단 형식으로 일어나는 9개의 흡착과 탈착을 확인할 수 있었다. 이에서 얻은 등온흡착곡선들은 많은 열역학적 상태에 관한 정보, 표면과 기체의 결합에너지에 대한 정보, 흡착막의 구조전이에 대한 정보 등을 줄 수 있을 것이다.

• KSBB Journal
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• 제17권4호
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• pp.345-349
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• 2002

항균성 물질이 함유된 투명한 신기능 포장필름의 제조를 위하여 흡착제로서 수용성 silica를 선택하여 항균성 물질의 흡착 및 내열성을 조사하였다. Methanol 자화 방선균 (MO-16, MO-17)이 생산하는 천연 항균성 물질을 ethylacetate로 추출, 농축하여 silica에 흡착시킨 후 열처리한 결과 15$0^{\circ}C$에서 5분까지 항균효과가 유지되었다. 따라서 투명필름의 제조시에 흡착제로서 silica의 첨가가 효과적이라고 판단되었다. 항균제인 benzoic acid(BA) 는 세균 및 곰팡이에 강한 항균효과를 나타내었으며, 특히 곰팡이에 대한 항균력이 우수하였고, 10$0^{\circ}C$, 5분간 열처리시에도 항균력을 유지하였다. 또한 항균성 물질과 공동 첨가시 약간의 상승효과를 나타내어 필름 제조시 공동 첨가하므로서 첨가량의 감소에 따른 비용의 절감 및 항진균 효과가 보완된 필름제조가 가능하다고 사료되었다.

• 대한화학회지
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• 제57권1호
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• pp.25-34
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• 2013

The efficiency of three complex surfactants based on sunflower oil and nitrogen containing compounds as corrosion inhibitors for mild steel in $CO_2$-saturated 1% NaCl solution, has been determined by weight loss and LPR corrosion rate measurements. These compounds inhibit corrosion even at very low concentrations. The inhibition process was attributed to the formation of an adsorbed film on the metal surface that protects the metal against corrosive media. The inhibition efficiency increases with increasing the concentration of the studied inhibitors. Maximum inhibition efficiency of the surfactants is observed at concentrations around its critical micellar concentration (CMC). Adsorption of complex surfactants on the mild steel surface is in agreement with the Langmuir adsorption isotherm model, and the calculated Gibbs free energy values confirm the chemical nature of the adsorption. Energy dispersive X-ray fluorescence microscopy (EDRF) observations of the electrode surface confirmed the existence of such an adsorbed film.

• The Korean Journal of Ceramics
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• 제4권3호
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• pp.183-188
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• 1998

Gas sensitizations of tin oxide film were investigated by measuring the change of film resistance in various gas atmospheres such as $N_2,\; O_2,\; H_2O$. The main test sample, polycrystalline $SnO_2$ film containing small Sb as a dopant was prepared by a sputtering technique and showed a long term stability in base resistance and thus, in gas sensitivity. The adsorption of oxygen on the film surface as a type of $(O_{ads})$ at the temperature of around $300^{\circ}C$ played important roles in sensor operating mechanism. The roles were ⅰ) the increase of base resistance in ambient air, which consequently lead to high sensitivity and ⅱ) the promotion of fast recovery. The reaction of hydrogen gas with the already adsorbed $(O_{ads})$ ions was considered as a decisive sensitization mechanism of tin oxide film. However, the dissociation of hydrogen molecules on film surface, by direct donation of electron to film also took a major part in the sensitization. The effect of humidity on gas sensitization was found to be negligible at the sensor operating temperature of around $300^{\circ}C$.

• 한국진공학회지
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• 제8권4A호
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• pp.438-444
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• 1999

The characterization of the reactively sputtered ITO layer on the PET film has been studied. The PEM device has been used to determine the optimum stoichimetry through control of the amount of oxygen incorporated into the alloy target and the optimum operation conditions to produce films with the highest electrical conductivity and visible transparency. The PEP film was pre-treated under the plasma discharge condition to remove the adsorbed gases and to modify the surface morphology. The results revealed that by adjusting the flow rate of oxygen with the spectral intensity of indium target, the composition of plasma gas can be kept constant during the entire deposition period. The resistivity of ITO film obtained was fond to be about 37$\Omega\Box$, and the transmittance of visual range was about 86%.

• 한국재료학회:학술대회논문집
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• 한국재료학회 2010년도 춘계학술발표대회
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• pp.23.2-23.2
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• 2010

Researches on the drying of particle/polymer suspensions receive attentions in technical applications such as manufacturing display and batteries. In this study, the effect of polymers on drying behavior of silica/poly(vinyl alcohol) suspension was investigated in terms of suspension stability and stress development during drying. The effect of polymer adsorption was studied by changing pH. More strongly flocculated suspension with lower pH became more dispersed and close-packed film after drying. Evaluation of potential energy allows us to suggest that the adsorbed polymers which bridge the particles introduce steric repulsion and lead flocculated suspension to dispersed film. When the effect of adsorption kinetics was studied by changing the mixing time, the adsorption amount, characteristic stress and dried film density showed a similar behavior in the form of with a single characteristic time. It implies that the drying process can be determined by simple characteristic equation with a single time constant.

• 반도체디스플레이기술학회지
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• 제3권1호
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• pp.15-20
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• 2004

Through shallow trench isolation (STI) chemical mechanical polishing (CMP) tests, we investigated the dependence of pad surface temperature on the abrasive and additive concentrations in ceria slurry under varying pressure using blanket film wafers. The pad surface temperature after CMP increased with the abrasive concentration and decreased with the additive concentration in slurries for the constant down pressure. A possible mechanism is that the additive adsorbed on the film surfaces during polishing decreases the friction coefficient, hence the pad surface temperature gets lower with increasing the additive concentration. This difference in temperature was more remarkable for the higher concentration of abrasives. In addition, in-situ measurement of spindle motor was carried out during oxide and nitride polishing. The averaged motor current for oxide film was higher than that for nitride film, meaning the higher friction coefficient.