• Transactions of the Korean Society for Noise and Vibration Engineering
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• v.12 no.2
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• pp.124-131
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• 2002

This paper presents the design of an active vibration suppression controller for an air-spring type vibration isolation table. Firstly, isolation system model is constructed considering the isolation table, attached equipment and voice-coil actuator. An active control system is designed based on frequency-shaped sliding mode control theory rewarding high frequency uncertainties with respect to attached equipments on the isolation table. Finally. the performance of the active isolation system is evaluated by simulation under some disturbance conditions which are transmitted from base structure of the isolation system.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2002.11a
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• pp.309.2-309
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• 2002

This paper is concerned with the development of the vibration isolation system using piezoelectric actuators and sensors. The active vibration absorber system consists of 4 pairs of PZT actuators bonded on aluminum plates making s- shaped device. Hence, the active system is directly connected to the passive system. The rubber attached to the end of the beam is connected to the upper base as a structural member. It allows bending thus maximizing the vertical movement generated by the piezoceramic actuators. (omitted)

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2001.11a
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• pp.476-481
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• 2001

This research is concerned with development of the active vibration absorber using piezoelectric actuators. This active isolation system consists of a-pairs of PZT actuators bonded on a S-shaped aluminum plate and the passive damping material. The active system is connected to the passive system in series. In this paper, one of the popular control techniques which have been successfully applied to the smart structure is the Positive Position Feedback(PPF) control. The digital PPF control lows downloaded to the DSP chip and a main program, which runs SISO PPF algorithm. The structure and dynamic characteristics of the proposed active vibration isolation system and described in detail. To demonstate the effectiveness of the active vibration control, the PPF controller is first employed. Experimental results show that the active vibration isolation is possible by means of the proposed system.

• Proceedings of the Korean Society of Machine Tool Engineers Conference
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• 2003.10a
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• pp.227-232
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• 2003

As the most precision equipment requiring very strict vibration environment are vulnerable to the surrounding vibration condition, they adapt the passive or active vibration isolation system. When it comes to the passive isolation system, the resonance of the isolation system causes excessive resonance response, and finally results in the degrade the equipment performance. This paper deals with the active control method to control this resonance induced response, and includes the experiment on the active control for controlling the resonance response on the table against the excitation of the same frequency with the natural frequency of the isolation system. The electromagnetic actuator was designed and the control effect was verified by the experiment. The experiment showed that the electromagnetic actuator is effective for controlling the low frequency isolation resonance response of the precision equipment.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2005.11a
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• pp.176-179
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• 2005

To control the vibration transmitted to the precision instruments from ground has always been of great interest among the researchers. This paper proposes a single axis vibration isolation system which can be used as a module far a table top six axis isolator for highly precise measurement and actuation system. The combined active-passive isolation principle is used for vertical vibration isolation by mounting the instrument on a passively damped isolation system made of Elastomer along with the active stage in series which consists of very stiff piezo actuator. The active stage works in combination with the passive stage for working as a very low frequency vibration attenuator. The active stage is isolated from the payload disturbance through the Passive stage and thus modularity in control is achieved. This made the control algorithm much easier as it does not need to be tuned to specific payload.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2006.11a
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• pp.909-914
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• 2006

Vibration isolation tables are mostly required in precise measurement and manufacturing system. Among the vibration isolation tables, an air spring is the most favorable equipment because of low resonant frequency and high damping ratio. However, it is difficult to design the air spring with the required stiffness and damping ratio. Futhermore, whenever conventional active control methods are applied to the air spring, it may be difficult to obtain effective control performance due to high nonlinearity of air spring. In this paper, the optimal design of the air spring is performed using genetic algorithm to bring out low resonant frequency and high damping ratio. Also, active control of the vibration isolation table with 3-DOF model is proposed using the adaptive control method. Through experiments, optimal design is shown to be effective. And performance of the proposed control method is verified to be better than those of the passive control method and the conventional active control methods.

• Journal of the Semiconductor & Display Technology
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• v.6 no.4
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• pp.17-22
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• 2007

Vibration isolation equipments are mostly required in precise measurement and manufacturing system. Among all the vibration isolation equipments, air-spring is the most widely used equipment because of low resonant frequency and high damping ratio. In this study, we used Takagi-Sugeno fuzzy method to design an active vibration isolation system using air-spring, and compared the fuzzy method with passive control method and PID control method. Due to the non-linearity characteristics of air-spring, fuzzy controller was verified to be the most effective both in simulation and experiment.

• Journal of the Semiconductor & Display Technology
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• v.21 no.4
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• pp.59-64
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• 2022

Vibration is one of the factors that degrades the performance of equipment and measurement equipment used in high-tech industries such as semiconductors and display. The vibration isolator is classified into passive type and active type. The passive vibration isolator has the weakness of insufficient vibration isolation performance in the low frequency band, so an active vibration control system that can overcome these problems is used recently. In this paper, PID controller is used to control the active vibration isolator. Methods for setting the gain of the PID controller include the Zeigler-Nichols method, the pole placement method. These methods have the disadvantage of requiring a lot of time or knowing the system model accurately. This paper proposes the gain auto tuning method of the active vibration isolator applied with the PSO algorithm, which is an optimization algorithm that is easy to implement and has stable convergence performance with low calculations. It is expected that it will be possible to improve vibration isolation performance and reduce the time required for gain tuning by applying the proposed PSO algorithm to the active vibration isolator.

• Transactions of the Korean Society of Mechanical Engineers
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• v.18 no.7
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• pp.1605-1617
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• 1994

Air-spring is widely used in vibration isolation to reduce the table vibration. When a disturbance is applied to a table, however, it starts virbrating with a low frequency, but has a large displacement due to the reacting force of air-spring. In this study, to solve the table vibration problem, an active vibration control device based on state feedback control using air-spring and proportional control valves was designed. This device can suppress the displacement of the isolation table within allowable range, even any kind of disturbances are applied to the table. Firstly, theoretical analysis of an air-spring isolator was done. Secondly, characteristics of the isolator was investigated via computer simulation and experiment. Finally, active control of air-spring isolator was tested using optimal(LQG) and fuzzy control algorithms was performed to show the effectiveness of the control schems.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2007.05a
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• pp.185-190
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• 2007

In recent days, vibration isolation system is mostly required in precise measurement and manufacturing system to reduce vibration due to external disturbances and internal actuators. Among all the vibration isolation systems, air spring is widely used because of its low resonant frequency and high damping ratio. In this study, we first analyze the passive air-spring system using leveling valve, and then design the active vibration isolation system. Because the non-linearity of pneumatic characteristics, we try to design the fuzzy controller which is better than PID controller at complex and non-linear system, and then compare them both in experiment and simulation.