• Korean Journal of Materials Research
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• v.24 no.12
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• pp.682-688
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• 2014

Physical and chemical changes in a polished wafer and in $2.5{\mu}m$ & $4{\mu}m$ epitaxially grown Si layer wafers (Epilayer wafer) after surface treatment were investigated. We characterized the influence of surface treatment on wafer properties such as surface roughness and the chemical composition and bonds. After each surface treatment, the physical change of the wafer surface was evaluated by atomic force microscopy to confirm the surface morphology and roughness. In addition, chemical changes in the wafer surface were studied by X-ray photoemission spectroscopy measurement. Changes in the chemical composition were confirmed before and after the surface treatment. By combined analysis of the physical and chemical changes, we found that diluted hydrofluoric acid treatment is more effective than buffered oxide etching for $SiO_2$ removal in both polished and Epi-Layer wafers; however, the etch rate and the surface roughness in the given treatment are different among the polished $2.5{\mu}m$ and $4{\mu}m$ Epi-layer wafers in spite of the identical bulk structural properties of these wafers. This study therefore suggests that independent surface treatment optimization is required for each wafer type, $2.5{\mu}m$ and $4{\mu}m$, due to the meaningful differences in the initial surface chemical and physical properties.

• Proceedings of the Korean Powder Metallurgy Institute Conference
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• 2001.11a
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• pp.22-22
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• 2001

전통적으로 초경합금은 무라까미 용액에서 에칭하거나 묽은 염산에 넣고 끓이는 방법에 의해 그 밋구조를 관찰하였다. 그러나 carbide 입자가 suvmicron 크기인 초경합금에서는 전통적인 에칭 방법으 에칭 후에도 입자/기지상, 입자/입자 입계를 동시에 구분시킬 수 있는 SEM 사진을 얻을 수 없다. 본 연구에서는 submicron 크기 초경합금의 고배율 SEM 사진을 얻을 수있는 90H2O2 - 10HNO3 (vol%)의 새로운 에칭 용액을 개발하였다. 경명의 submicron 크기 WC-Co 시편을 샐운 에칭 용액인 90H2O2 - 10HNO3 (vol%)에 넣고 약 6$0^{\circ}C$에서 약 12분 동안 에칭하였다. 에칭에 의해 Co 기지상은 빠르게 제기(dissolution)되었고, 동시에 표면의 WC 입자들은 각각의 결정학적 방향에 따라 천천히(slowly) 다른 속도로 부식(sissolution)되었다. 고배율 SEM을 관찰한 결과 WC/기지상 계면과 WC/WC 입계가 명화갛게 관찰되었다. WC 입자의 성장을 억제시키는입자성장 억제제(Cr3C2, TaC,VC)가 첨가된 WC Co 초경합금을 새로운 에칭 용액인 90H2O2 - 10HNO3 (vol%)에 넣고 약 6$0^{\circ}C$에서 약 12분동안 에칭하였다. 매우 작은 입자를 갖는 미세구조임에도 불구하고 고배율 SEM에서 WC/기지상 계면과 WC/WC 입계가 명확하게 관찰되었다. 90H2O2 - 10HNO3 (vol%)에서 Co 기지상이 빠르게 제거되는 것은 산 (acid)인 HNO3)에서 금속인 Co가 쉽게 녹기 때문이다. 동시에 WC 입자들이 각각 다른 속도로 에칭 된 것은 강력한 산화제인 H2O2가 각각의 WC입자 표면에 얇은 텅스텐 산화물 층을 형성시켰고 이들이 산인 HNO3에서 녹았기 때문이다. 본 연구에서 개발된 새로운 에칭 용액인 90H2O2 - 10HNO3 (vol%)의 에칭 원리가 똑같이 적용 가능한 다른 종류의 초경 합금에서도 사용이 가능할 것으로 판단된다.로 판단된다.

• Journal of the Korean Association of Oral and Maxillofacial Surgeons
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• v.42 no.6
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• pp.345-351
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• 2016

Objectives: This study compared the impact of implant surface treatment on the stability and osseointegration of implants in dog mandibles. Materials and Methods: Six adult dogs received a total of 48 implants that were prepared using four different surface treatments; resorbable blast media (RBM), hydroxyapatite (HA), hydrothermal-treated HA, and sand blasting and acid etching (SLA). Implants were installed, and dogs were separated into 2- and 4-week groups. Implant stability was evaluated via Periotest M, Osstell Mentor, and removal torque analyzers. A histomorphometric analysis was also performed. Results: The stability evaluation showed that all groups generally had satisfactory values. The histomorphometric evaluation via a light microscope revealed that the HA surface implant group had the highest ratio of new bone formation on the entire fixture. The hydrothermal-treated HA surface implant group showed a high ratio of bone-to-implant contact in the upper half of the implant area. Conclusion: The hydrothermal-treated HA implant improved the bone-to-implant contact ratio on the upper fixture, which increased the implant stability.

• The Journal of Korean Academy of Prosthodontics
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• v.32 no.2
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• pp.225-233
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• 1994

The restorations of the severely damaged teeth by post core have been increased with the developement of endodontic procedures. But high failure rates of these procedures being reported, various restorative modifications were induced for successful treatments. Cast post-core and prefabricated post with core buildups are choice of treatment. The main causes of failure of the restorations are the fracture of post and core, root fracture, and recurrent caries due to microleakage. Recently, the acid etching technique and the use of dentin bonding agent at tooth surface to reduce the possible microleakage at the tooth-restoration interfaces were introduced. The object of this study was to measure and compare the microleakage by the types and cementation methods of post-core. For this study, forty extracted human anterior teeth were selected for specimen. After cleansing and routine endodontic procedures, anatomic crowns of each specimen were removed at the level of 2mm above the cementoenamel junction. Canals were preparated for post insertion and specimens were divided into four groups randomly. Post-cores were fabricated according to method for each group. Microleakage was measured by length of dye penetration at the tooth-restoration interfaces with measuring microscope at 50 magnification. Oneway ANOVA and t-test were performed for statistical analysis of resulting data. The following results were obtained from this study. 1. There wert significant statistical differences in degree of microleakage between each group (p<0.01). 2. Cast post-core cemented with ZPC (Group I) showed the most severe microleakage pattern$(1.5547{\pm}0.0872mm)$, and cast post-core cemented with adhesive resin cement after tooth surface treatment with dentin bonding agent (Group II) showed the least microleakage $(0.1497{\pm}0.0872mm)$. 3. Group IV revealed less dye penetrations than group III, but no statistical significance was seen between two groups.

• The korean journal of orthodontics
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• v.24 no.4 s.47
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• pp.957-967
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• 1994

The purpose of this study was to evaluate the effects of different bases of ceramic brackets on shear bond strength and to observe failure patterns of bracket bondings. Lower bicuspid brackets whose bases designed for the macromechanical and silane treated chemical bonding those for silane treated chemical bonding, those for micromechanical bonding, and those for macromechanical bonding were tested as experimental groups, and foil mesh-backed metal brackets as a control group. All the brackets were bonded with $Mono-Lok\;2^{(TM)}$ on the labial surface of extracted human lower bicuspids after etching the enamel with $38\%$ phosphoric acid solution for 60 seconds. The shear bond strengths were measured on the universal test machine after 24 hours passed in the $37^{\circ}C$ water bath. The gathered data were evaluated and tested by ANOVA and Duncan's multiple range test, and those results were as follows. The shear bond strengths of brackets for macromechanical and chemical bonding, those for chemical bonding, and those for micromechanical bonding were not different (p>0.05), but showed statistically higher than those of metal bracket and those of ceramic bracket for micromechanical bonding(p<0.05). The shear bond strengths of ceramic bracket for micromechanical bonding showed statistically lower than those of metal bracket(p<0.05). The enamel fractures and/or ceramic bracket fractures were observed in the cases of higher bond strength than that of metal bracket. These results supported that silane treated base of ceramic bracket show higher shear bond strength than that of metal bracket, and suggested that micromechanical form of ceramic bracket bases show higher shear bond strength than that of macromechanical form.

• Transactions of the Korean Society of Mechanical Engineers A
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• v.24 no.3 s.174
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• pp.603-612
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• 2000

Corrosion characteristics on the 12Cr alloy steel of turbine blade was electro-chemically investigated in 3.5wt% NaCI and 12.7wt% Na2S04 solution, respectively. Electro-chemical polarization test, Huey test and Oxalic acid etching test were previously conducted to estimate corrosion susceptibility of the material. And, using the horizontal corrosion fatigue tester, corrosion fatigue characteristics of 12Cr alloy steel in distilled water, 3.5wt% NaCI solution, and 12.7wt%(1M) Na2S04 solution were also fracture-mechanically estimated and compared their results. Parameter considered was room temperature, 60'C and 90'C. Corrosion fatigue crack length was measured by DC potential difference method.Obtained results are as follows,1) 12Cr alloy steel showed high corrosion rate in 3.5wt% NaCI solution and Na2S04 solution at high tempratue.2) Intergranular corrosion sensitivity of 12 Cr alloy was smaller than austenitic stainless steel.3) Corrosion fatigue crack growth rate in 3.5wt% NaCI and 12.7wt%(IM) Na2S04 solution is entirely higher than in the distilled water, and also increased with the temperature increase.

• Air Cleaning Technology
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• v.17 no.4 s.67
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• pp.39-57
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• 2004

첨단산업으로 불리는 반도체, LCD, PDP, 유기EL(OLED) 등의 생산 공정은 고도의 청정상태를 요구하며, 때문에 이들의 생산공정 중 대부분이 클린룸 내에서 이루어진다. 클린룸 내에서의 주요공정은 크게 박막형성(Layering), 노광(Photo Lithography), 식각(Etching) 등 3가지 공정으로 나눌 수 있으며, 반도체 제조공정의 경우 특별히 도핑(Doping) 공정이 추가된다. 오염물질을 함유하는 클린룸 배기는 일반적으로 산, 알칼리, Toxic(PFCs, Flammable), VOC 등으로 분류하며, 각각의 배기는 각 배기특성에 맞는 오염제어 장치를 통해, 정화된 후, 대기로 방출된다. 산, 알칼리 배기는 일반적으로 최종 단계에서 중앙집중식 습식스크러버에 의해 흡수, 중화 처리되며, VOC의 경우 농축기(Concentrator) & 축열식 열 산화장치(RTO) 설비에 의해 연소 처리된다. 하지만 CVD공정으로부터의 배기가 주를 이루는 Toxic배기의 경우, 다량의 PFCs(과불소화합물) 가스를 함유하고 있는 이유로, 대부분 클린룸 내부에 P.O.U(Point of use) 처리장치가 설치되며, P.O.U에 의해 1차 처리된 후 최종적으로 중앙집중식 습식스크러버를 거쳐 대기로 방출된다. 알칼리배기의 주성분으로는 암모니아($NH_3$), HMDS (Hexa Methyl DiSilazane), TMAH (Tetra Methyl Ammonium Hydroxide), LGL, CD 등이며 흡수액에 황산(Sulfuric Acid)용액을 공급, 중화처리하고 있다. 탄소성분을 먹이로 하는 미생물의 번식에 의한 막힘 문제를 제외하고는 큰 문제가 없다. 하지만 Toxic배기 및 산배기의 경우 처리효율이, 가스흡수 이론에 의한 계산결과와 비교할 때, 매우 저조하게 나타나는 효율부족 현상을 겪고 있으며, 이는 잔여 PFCs 가스성분 및 반응에어로졸, 응축에어로졸 등의 영향으로 추정하고 있다. 최근 Toxic 배기의 경우, P.O.U 설비를 Burn & Wet type으로 변경하여, 배기 중 PFCs 및 반응에 에어로졸($SiO_2$)의 농도를 원천적으로 감소시키는 노력이 진행 중이다. 산배기의 경우, 산결로 현상에 의한, 응축에어로졸이 문제가 되고 있으나 내식열교환기(Anti-Corrosive Heat Exchanger), 하전액적스크러버 시스템(Charged Droplets Scrubber System), Wet ESP(Wet Electrostatic Procipitator) 등의 도입을 통해 문제해결을 위한 노력을 경주하고 있다.

• New & Renewable Energy
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• v.9 no.2
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• pp.30-39
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• 2013

Multi-crystalline silicon solar cells is not exist a specific crystal direction different from single crystalline silicon solar cells. In functional materials, therefore, isotropic wet etching of mc-Si solar cell is easy the acid solution rather than the alkaline solution. The reflectance of wet texturing process is about 25% and the reflectance of RIE texturing process is achieved less than 10%. In addition, wet texturing has many disadvantages as well as reflectance. So wet texturing process has been replaced by a RIE texturing process. In order to apply BIPV, RIE and wet textured multi-crystalline silicon solar cell modules was manufactured by different kind of EVA sheet. Moreover, in case of BIPV, the short circuit current characteristics according to the angle of incidence is more important, because the installation of BIPV is fixed location. In this study, we has measured SEM image and I-V curve of RIE and wet textured silicon solar cell and PV module. Also we has analyzed quantum efficiency characteristics of RIE and wet textured silicon solar cell for PV modules depending on incidence angle.

• The Journal of Advanced Prosthodontics
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• v.12 no.1
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• pp.22-32
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• 2020

PURPOSE. The aim of this study was to evaluate the microshear bond strength (µSBS) of four computer-aided design/computer-aided manufacturing (CAD/CAM) blocks repaired with composite resin using three different surface treatment protocols. MATERIALS AND METHODS. Four different CAD/CAM blocks were used in this study: (1) flexible hybrid ceramic (FHC), (2) resin nanoceramic (RNC), (c) polymer infiltrated ceramic network (PICN) and (4) feldspar ceramic (FC). All groups were further divided into four subgroups according to surface treatment: control, hydrofluoric acid etching (HF), air-borne particle abrasion with aluminum oxide (AlO), and tribochemical silica coating (TSC). After surface treatments, silane was applied to half of the specimens. Then, a silane-containing universal adhesive was applied, and specimens were repaired with a composite, Next, µSBS test was performed. Additional specimens were examined with a contact profilometer and scanning electron microscopy. The data were analyzed with ANOVA and Tukey tests. RESULTS. The findings revealed that silane application yielded higher µSBS values (P<.05). All surface treatments were showed a significant increase in µSBS values compared to the control (P<.05). For FHC and RNC, the most influential treatments were AlO and TSC (P<.05). CONCLUSION. Surface treatment is mandatory when the silane is not preferred, but the best bond strength values were obtained with the combination of surface treatment and silane application. HF provides improved bond strength when the ceramic content of material increases, whereas AlO and TSC gives improved bond strength when the composite content of material increases.

• Journal of Korean Society of Environmental Engineers
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• v.35 no.4
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• pp.257-262
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• 2013

The fluorine-containing waste water tends to show a higher removal efficiency through the coagulative precipitation process with calcium. However the tetrafluoroborate produced from the etching process is difficult to remaval due to it's low reactivity with calcium. The objective of this study is improving the efficiency of fluoride ion removal in tetrafluoroborate through decomposing. Research on tetrafluoroborate decomposition depending on reaction pH, temperature, and aluminum dosage were conducted, using a laboratory-scale reactor. The result shows that the reaction of tetrafluoroborate with aluminum is faster with lower pH, higher water temperature, and higher Al/T-F (Aluminum/Total Fluoride) mole ratio. It is found that there was no big change in concentration after over 120 minutes of reaction. This study is to be able to improve the efficiency of tetrafluoroborate and fluoride wastewater treatment by using aluminum.