• 한국입자에어로졸학회지
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• 제4권1호
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• pp.21-25
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• 2008

$Pb(Zr_{0.53}Ti_{0.47})O_3$ (PZT) was synthesized by a multiple wet dry process. Precipitates prepared from reaction between $ZrOCl_2{\cdot}8H_2O$ and $TiOCl_2$ and $NH_4OH$ in an aqueous solution was dried at $100^{\circ}C$, and calcined at $500^{\circ}C$ and $700^{\circ}C$. The mixture mixed with PbO and as-dried or calcined $Zr_{0.53}Ti_{0.47}O_4$ (ZT) powders was calcined again at 700 and $800^{\circ}C$. Well crystallized ZT and PZT were formed at even $700^{\circ}C$. PZT piezoelectric ceramics of more than 98.5% in a relative density was obtained by sintering at as low as $900^{\circ}C$.

• 한국세라믹학회지
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• 제21권2호
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• pp.105-112
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• 1984

The Effect of Dditives $ZrO_2$ and $TiO_2$ on the enstatite body the composition of which was MgO.$SiO_2$ has been closely investigated on the physical properties and microstructure. $ZrO_2$ and $TiO_2$ as additives were added by weight 5, 10, 15, 20, 25% and 1, 2, 2.5, 5, 10, 20% respectively to the mixture (MgO : SiO2=1:1) and fired at the temperature ranging from 130$0^{\circ}C$ to 145$0^{\circ}C$ and 1275$^{\circ}C$ to 1375$^{\circ}C$. Increasing the add ition or $ZrO_2$ to 20% the physical property became better. In case of $TiO_2$ the sample containing 20% $TiO_2$ had a best effect on the enstastite body. The optimum firing range proved to 14$25^{\circ}C$ for $ZrO_2$ and 1325~135$0^{\circ}C$ for $TiO_2$. The effect of $ZrO_2$ and $TiO_2$ addition on the thermal expansion was observed not ot be remarkable.

• 한국전기전자재료학회논문지
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• 제20권3호
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• pp.234-239
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• 2007

This paper describes the TiW ohmic contact characteristics under the surface treatment of the polycrystalline 3C-SiC thin film grown on $SiO_2/Si(100)$ wafers by APCVD. The poly 3C-SiC surface was polished by using CMP(chemical mechanical polishing) process and then oxidized by wet-oxidation process, and finally removed SiC oxide layers. A TiW thin film as a metalization process was deposited on the surface treated poly 3C-SiC layer and was annealed through a RTA(rapid thermal annealing) process. TiW/poly 3C-SiC was investigated to get mechanical, physical, and electrical characteristics using SEM, XRD, XPS, AFM, optical microscope, I-V characteristic, and four-point probe, respectively. Contact resistivity of the surface treated 3C-SiC was measured as the lowest $1.2{\times}10^{-5}{\Omega}cm^2$ at $900^{\circ}C$ for 45 sec. Therefore, the surface treatments of poly 3C-SiC are necessary to get better contact resistance for extreme environment MEMS applications.

• 마이크로전자및패키징학회지
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• 제7권3호
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• pp.7-11
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• 2000

공침법을 이용하여 제조한 $SrTiO_3$분말에 $CuO-SiO_2$첨가물을 혼합하여 저전압구동형 SrTiO$_3$세라믹 바리스터 소자를 제조하였다. $CuO-SiO_2$첨가물을 이용한 $SrTiO_3$세라믹 바리스터제조 공정은 복잡한 공정을 단순화시킬 수 있을 뿐만 아니라, 일반적인 소결온도보다 100~$150^{\circ}C$ 낮은 온도에서도 소결이 되었다. 이 바리스터의 비직선계수($\alpha$) 값은 첨가물 5 wt% 혼합하여 $1350^{\circ}C$에서 하소한 시편에서 8.47의 최고값을 나타냈으며, 이때의 구동전압은 7 V 이하로 낮은 구동전압을 가진 바리스터를 제조할 수 있었다.

• Journal of Mechanical Science and Technology
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• 제18권12호
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• pp.2204-2208
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• 2004

Ti-8Ta-3Nb has been developed as a new biomaterial. The experimental specimens are as-cast and forged Ti-8Ta-3Nb alloys. Treatment in a solution, ranging from 760 to 960$^{\circ}C$ has carried out. The microstructural research has carried out after the solution treatment and the hardness was measured. The specific heat and the length variations of Ti-8Ta-3Nb were also measured. The optimum temperature for the solution heat treatment of Ti-8Ta-3Nb was found to be 880$^{\circ}C$. This was based on the mechanical properties and the volume fraction of ${\alpha}$ phase and their phases shown from the results of the solution heat treatment. From the results, the ${\beta}$ transition temperature of Ti-8Ta-3Nb was found to be between 860$^{\circ}C$ and 880$^{\circ}C$.

• 한국정보통신학회:학술대회논문집
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• 한국해양정보통신학회 2003년도 춘계종합학술대회
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• pp.501-504
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• 2003

본 연구에서는 박막트랜지스터의 특성 향상을 위하여 강유전성 박막을 게이트 절연충으로 사용하기 위하여 강유전성 박막과 a-Si:H 의 계면특성을 조사하였다. 먼저 강유전성 박막 중에 대표적인 SrTiO$_3$를 E-BEAM 증착기로 박막을 형성시켰다. 형성된 박막은 $N_2$ 분위기에서 15$0^{\circ}C$~$600^{\circ}C$로 1시간 ANNEALING 하여 전자현미경으로 표면을 측정하였다. SrTiO$_3$의 유전상수는 50~100 정도였으며 항복전계는 1~l.5 MV/cm로 매우 우수한 유전특성을 갖고 있었다. 강유전체 박막 위에 a-SiN:H,a-Si:H(n-type a-Si:H) 등을 PECVD로 증착하여 MFNS구조를 형성하였다. 계면특성을 C-V PLOTTER로 측정한 결과 SrTiO$_3$ 박막은 SiN 과의 접합이 매우 안정되어 있었고 C-V특성은 SiN/a-Si:H 과 유사하였다. 그러나 FERROELECTRIC/a-S:H의 경우가 훨씬 CAPACITANCE값이 컸으며, 이는 강유전체 박막의 높은 유전상수에 기인 된 것이라 생각된다.

• 한국표면공학회지
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• 제30권1호
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• pp.33-43
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• 1997

The effects of process parameters substrate such as substrate current and substrate temperature on the corrosion resistance of ion plated TiN film were investigated. TiN fims were deposited on speed steel on which Ti or Ni hed been previously evaporated. Dense TiN films could be obtained under higher substrate current(1A) and substrate temperature($500^{\circ}C$), whereas TiN films deposited with lower substances current(0.5A) and substrate temperature($300^{\circ}C$) showed porous structure. The corrosion resistances of high speed steel was considerably increased when dense TiN films had been formed on it. The effect of Ti and Ni interlayer on the increase of the corrosion resistance was also significant with dense TiN films, while there was little effect of interlayer on the corrosion resistance when TiN films were porous. the effect of interlayer on the corrosion resistance was more outstanding with Ti then with Ni, because Ti reacts more easily with oxygen to form an oxide layer, and it also shows higher resistance against chlorine containing corrosion media.

• 한국세라믹학회지
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• 제41권9호
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• pp.657-662
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• 2004

마그카본계 내화물의 산화저항성을 증대시키기 위하여 섭씨 100$0^{\circ}C$에서 120$0^{\circ}C$에서 산화기구를 조사하고, TiC를 첨가하여 산화저항성 증가에 대한 효과를 관찰하였다. 산소공급을 위해 공기를 분당 0.2리터의 속도로 흘려주었으며 열천칭으로 무게변화가 없어질 때까지 매 30초 간격마다 무게감소를 측정하였다 본 실험에서 사용된 마그카본계 시편의 산화거동과 관련한 유효확산 계수는 1.39${\times}$$10^{-4}$ $m^2$/sec이다. 이러한 실험조건에서 총체적인 산화공정은 산화된 기공층을 통하여 내부로 향하는 산소의 확산에 의해 지배되는 반응으로 해석할 수 있다. TiC를 첨가한 시편은 마그카본계 내화물의 산화 저항성을 증대시켰다.

• Environmental Engineering Research
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• 제12권5호
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• pp.218-223
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• 2007

The hybrid $C/TiO_2$ complexes were prepared by a method involving the penetration of titanium n-butoxide (TNB) solution with porous carbons. The photocatalysts were investigated for their surface textural properties and SEM morphology, structural crystallinity and elemental identification between porous carbon and $TiO_2$, and dye decomposition performance. For all the $C/TiO_2$ complexes prepared by TNB solution methods, the excellent photocatalytic effect for dye degradation should be attributed to the synergitic effects between photo-decomposition of the supported $TiO_2$ and adsorptivity of the porous carbons.

• 한국세라믹학회지
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• 제25권3호
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• pp.277-283
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• 1988

동결건조법에 의하여 $TiCl_4$로부터 아주 미세한 $TiO_2$ 분말을 합성하고, 상전이와 전기전도도를 논하였다. 동결건조법에 의하여 합성된 $TiO_2$ 분말의 anatase에서 rutile로의 상전이는 64$0^{\circ}C$에서 일어나 92$0^{\circ}C$에서 완전히 이루어졌다. 이러한 저온에서의 상전이는 미세한 분말과 비표면적에 기인한다. 전기전도도값으로 부터 얻은 활성화에너지값은 비교적 높은 1.63eV인데 이는 시편의 다공성 때문이다.