• Title/Summary/Keyword: a-C:Ti

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Microwave Dielectric Properties of the (l-x)$TiTe_3O_{8}$-x$MgTiO_3$ Ceramics with Sintering Temperature (소결온도에 따른 (l-x)$TiTe_3O_{8}$-x$MgTiO_3$ 세라믹스의 마이크로파 유전 특성)

  • 최의선;김재식;이문기;류기원;이영희
    • The Transactions of the Korean Institute of Electrical Engineers C
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    • v.53 no.9
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    • pp.459-463
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    • 2004
  • In this study, the (l-x)$TiTe_3O_{8}$-x$MgTiO_3$ ceramics were investigated to obtain the improved dielectric properties of a high temperature stability and a sintering temperature of less than $900^{\circ}C$ which was necessary for the LTCC. According to the X-ray diffraction patterns of the (l-x)$TiTe_3O_{8}$-x$MgTiO_3$(x=0∼1) ceramics, the columbite structure of $TiTe_3O_{8}$ and ilmenite structure of $MgTiO_3$ were coexisted. Increasing the $MgTiO_3$ mole ratio(x), the density and dielectric constant were decreased and temperature coefficient of resonant frequency was moved to the negative direction and the quality factor was increased. In the case of the 0.6$TiTe_3O_{8}$-0.4$MgTiO_3$ ceramics sintered at $830^{\circ}C$ for 3hr., the microwave dielectric properties were $\varepsilon_{\gamma}$=29.3, Q${\times}$$f_{\gamma}$=39.600GHz and $\tau$$_{f}$=+9.3ppm/$^{\circ}C$.

Ohmic contact formation of single crystalline 3C-SiC for high temperature MEMS applications (초고온 MEMS용 단결정 3C-SiC의 Ohmic Contact 형성)

  • Chung, Gwiy-Sang;Chung, Su-Yong
    • Journal of Sensor Science and Technology
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    • v.14 no.2
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    • pp.131-135
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    • 2005
  • This paper describes the ohmic contact formation of single crystalline 3C-SiC thin films heteroepitaxially grown on Si(001) wafers. In this work, a TiW (Titanium-tungsten) film as a contact matieral was deposited by RF magnetron sputter and annealed with the vacuum and RTA (rapid thermal anneal) process respectively. Contact resistivities between the TiW film and the n-type 3C-SiC substrate were measured by the C-TLM (circular transmission line model) method. The contact phases and interface the TiW/3C-SiC were evaulated with XRD (X-ray diffraction), SEM (scanning electron microscope) and AES (Auger electron spectroscopy) depth-profiles, respectively. The TiW film annealed at $1000^{\circ}C$ for 45 sec with the RTA play am important role in formation of ohmic contact with the 3C-SiC substrate and the contact resistance is less than $4.62{\times}10^{-4}{\Omega}{\cdot}cm^{2}$. Moreover, the inter-diffusion at TiW/3C-SiC interface was not generated during before and after annealing, and kept stable state. Therefore, the ohmic contact formation technology of single crystalline 3C-SiC using the TiW film is very suitable for high temperature MEMS applications.

High Temperature Oxidation of Ti3Al/SiCp Composites in Oxygen

  • An, Sang-Woo;Kim, Young-Jig;Park, Sang-Whan;Lee, Dong-Bok
    • The Korean Journal of Ceramics
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    • v.5 no.1
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    • pp.44-49
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    • 1999
  • In order to improve the oxidation resistance of $Ti_3Al$, Ti-25at.%Al composites containing dispersed particles of 15wt.%SiC were prepared by a tubular mixing-spark plasma sintering method. The sintered composites had $Ti_3Al$, SiC, $Ti_5Si_3$ and TiC. The presence of $Ti_5Si_3$ and TiC indicates that some of SiC particles reacted with Ti to from more stable phases. From oxidation tests at 800, 900 and $1000^{\circ}C$ under 1 atm of pure oxygen, it was found that the oxidation rate of Ti3Al was effectively reduced by the addition of SiC. The scale was primarily composed of an outer $TiO_2$ layer having some $Al_2O_3 $islands, an intermediate relatively thick $Al_2O_3 $ layer, and an inner $TiO_2+Al_2O_3+SiO_2$ mixed layer. Beneath the scale, Kirkendall voids were seen.

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Microstructure and Positive Temperature Coefficient of Resistivity Characteristics of Na2Ti6O13-Doped 0.94BaTiO33-0.06(Bi0.5Na0.5)TiO3 Ceramics (Na2Ti6O13를 도핑한 0.94BaTiO3-0.06(Bi0.5Na0.5)TiO3 세라믹스의 미세구조와 Positive Temperature Coefficient of Resistivity 특성)

  • Cha, Yu-Joung;Jeong, Young-Hun;Lee, Young-Jin;Paik, Jong-Hoo;Lee, Wu-Young;Kim, Dae-Joon
    • Korean Journal of Materials Research
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    • v.20 no.11
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    • pp.575-580
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    • 2010
  • The microstructure and positive temperature coefficient of resistivity (PTCR) characteristics of 0.1 mol%$Na_2Ti_6O_{13}$ doped $0.94BaTiO_3-0.06(Bi_{0.5}Na_{0.5})TiO_3$ (BBNT-NT001) ceramics sintered at various temperatures from $1200^{\circ}C$ to $1350^{\circ}C$ were investigated in order to develop eco-friendly PTCR thermistors with a high Curie temperature ($T_C$). Resulting thermistors showed a perovskite structure with a tetragonal symmetry. When sintered at $1200^{\circ}C$, the specimen had a uniform microstructure with small grains. However, abnormally grown grains started to appear at $1250^{\circ}C$ and a homogeneous microstructure with large grains was exhibited when the sintering temperature reached $1325^{\circ}C$. When the temperature exceeded $1325^{\circ}C$, the grain growth was inhibited due to the numerous nucleation sites generated at the extremely high temperature. It is considered that $Na_2Ti_6O_{13}$ is responsible for the grain growth of the $0.94BaTiO_3-0.06(Bi_{0.5}Na_{0.5})TiO_3$) ceramics by forming a liquid phase during the sintering at around $1300^{\circ}C$. The grain growth of the BBNT-NT001 ceramics was significantly correlated with a decrease of resistivity. All the specimens were observed to have PTCR characteristics except for the sample sintered at $1200^{\circ}C$. The BBNT-NT001 ceramics had significantly decreased $\tilde{n}_{rt}$ and increased resistivity jump with increasing sintering temperature at from $1200^{\circ}C$ to $1325^{\circ}C$. Especially, the BBNT-NT001 ceramics sintered at $1325^{\circ}C$ exhibited superior PTCR characteristics of low resistivity at room temperature ($122\;{\Omega}{\cdot}cm$), high resistivity jump ($1.28{\times}10^4$), high resistivity temperature factor (20.4%/$^{\circ}C$), and a high Tc of $157.9^{\circ}C$.

Ductile-Brittle Transition Property of Sintered TiC-Nb Composites (TiC-Nb 소결 복합재료의 연성-취성 천이 특성)

  • Shin, Soon-Gi
    • Korean Journal of Materials Research
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    • v.24 no.1
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    • pp.13-18
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    • 2014
  • In order to clarify the effect of Nb addition on the ductile-brittle transition property of sintered TiC, TiC-10 mol% Nb composites were researched using a three-point bending test at temperatures from room temperature to 2020 K, and the fracture surface was observed by scanning electron microscopy. It was found that the Nb addition decreases the ductile-brittle transition temperature of sintered TiC by 300 K and increases the ductility. The room temperature bending strength was maintained at up to 1800 K, but drastically dropped at higher temperatures in pure TiC. The strength increased moderately to a value of 320MPa at 1600 K in TiC-10 mol% Nb composites, which is 40% of the room temperature strength. Pores were observed in both the grains and the grain boundaries. It can be seen that, as Nb was added, the size of the grain decreased. The ductile-brittle transition temperature in TiC-10 mol% Nb composites was determined to be 1550 K. Above 1970 K, yieldpoint behavior was observed. When the grain boundary and cleavage strengths exceed the yield strength, plastic deformation is observed at about the same stress level in bending as in compression. The effect of Nb addition is discussed from the viewpoint of ability for plastic deformation.

Slow-Cooling Calcination Process to Potassium Tetratitanate and Potassium Hexatitanate Fibers (서냉소성법에 의한 사티탄산칼륨 및 육티탄산칼륨 섬유의 합성)

  • 최진호;한양수;송승완
    • Journal of the Korean Ceramic Society
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    • v.30 no.8
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    • pp.664-670
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    • 1993
  • Potassium tetratitanate (K2Ti4O9) and Potassium hexatitanate (K2Ti6O13) fibers have been prepared by the slow-cooling calcination process in a temperature range from 125$0^{\circ}C$ to 95$0^{\circ}C$ using the K2CO3 and TiO2 as the starting materials. Optimum fiber growth conditions have been also investigated by changing the physical parameters, such as calcination time and temperature, and cooling rate. Relatively long K2Ti4O9 fibers ( 1.2mm) have been grown with quite a high aspect ratio (c/a 500)when the starting material with a nominal composition of K2O and TiO2 with 1:4 was calcined at 115$0^{\circ}C$ for 4h, and then was slowly cooled to 95$0^{\circ}C$ with a rate of 2$0^{\circ}C$/h. In case of a K2O.6TiO2 composition, acicular shaped K2Ti6O13 fibers with 20~300${\mu}{\textrm}{m}$ long and low aspect ratio (c/a 10~15) have been formed irrespective of the coolign rate. The growth condition of fibers have been discussed based upon the phase diagram of K2O-TiOa2.

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Formation of Ti3SiC2 Interphase of SiC Fiber by Electrophoretic Deposition Method

  • Lee, Hyeon-Geun;Kim, Daejong;Jeong, Yeon Su;Park, Ji Yeon;Kim, Weon-Ju
    • Journal of the Korean Ceramic Society
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    • v.53 no.1
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    • pp.87-92
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    • 2016
  • Due to its stability at high temperature and its layered structure, $Ti_3SiC_2$ MAX phase was considered to the interphase of $SiC_f/SiC$ composite. In this study, $Ti_3SiC_2$ MAX phase powder was deposited on SiC fiber via the electrophoretic deposition (EPD) method. The Zeta potential of the $Ti_3SiC_2$ suspension with and without polyethyleneimine as a dispersant was measured to determine the conditions of the EPD experiments. Using a suspension with 0.03 wt.% ball milled $Ti_3SiC_2$ powder and 0.3 wt.% PEI, $Ti_3SiC_2$ MAX phase was successfully coated on SiC fiber with an EPD voltage of 10 V for 2 h. Most of the coated $Ti_3SiC_2$ powders are composed of spherical particles. Part of the $Ti_3SiC_2$ powders that are platelet shaped are oriented parallel to the SiC fiber surface. From these results we expect that $Ti_3SiC_2$ can be applied to the interphase of $SiC_f/SiC$ composites.

A Tailored Investigation for $(Ba,Sr)TiO_3$ FGMs

  • Jeon, Jae-Ho
    • Proceedings of the Korean Powder Metallurgy Institute Conference
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    • 2006.09a
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    • pp.289-290
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    • 2006
  • [ $SrTiO_3$ ] is usually added as shifters in order to move the $T_C$ of $BaTiO_3$ to lower temperatures because it is well established that the $T_C$ of $BaTiO_3$ decreases linearly with a solid solution of $Sr^{+2}$ in place of $Ba^{+2}$. It is not fully understood yet, however, how $SrTiO_3$ influences on the peak value of the dielectric constant $(\varepsilon_{max})$ at the $T_C$ of $BaTiO_3$. This research reports the effect of $SrTiO_3$ addition on εmax at the $T_C$ of $BaTiO_3$ ceramics. Based on the chemical composition and the grain size dependence of the dielectric property of $BaTiO_3$ ceramics, functionally graded $(Ba,Sr)TiO_3$ composites were designed and fabricated. Multi-layered $(Ba,Sr)TiO_3$ composites with a compositional gradient of $SrTiO_3$ exhibited a low temperature coefficient and high dielectric constant in a wide temperature range.

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고집적회로에서 TiN/Ti Diffusion Barrier의 열처리에 따른 계면반응 및 구조변화에 대한 연구

  • Yu, Seong-Yong;Choi, Jin-Seog;Paek, Su-Hyon;Oh, Jae-Eung
    • ETRI Journal
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    • v.13 no.4
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    • pp.58-69
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    • 1991
  • 고집적회로에서 A1 금속공정의 diffusion barrier로 널리 사용되는 titanium nitride의 성질을 조사하였다. 실제 회로 구조의 열적 안정성을 관찰하기 위하여 준비된 TiN/Ti다층 barrier를 $600^{\circ}C$까지 열처리하여 x-ray photoelectron spectroscopy (XPS), cross-sectional transmission electron microscopy(XTEM) 등으로 분석하였다. 열처리 온도가 증가됨에 따라 oxygen은 TiN 층의 표면과 pure-Ti 층에 pile up 된다. TiN 층의 표면에서는 $600^{\circ}C$열처리시 TiN이 분해되어 완전히 $TiO_2$가 형성되며, TiN 층 내에서는 oxygen 함량은 열처리 온도의 증가에 따라 커지고 이때 형성되는 Ti-oxide는 $TiO_2$ 보다 TiO, $Ti_2$$O_3$ 상태로 존재하게 된다. Pure-Ti 층은 열처리시 두개의 층으로 나누어 지는 데, 표면에서 침투하는 oxygen과 pure-Ti이 반응하여 Ti-oxide 층이 생기며 실리콘 기판과의 반응으로 Ti-silicide를 형성한다. $600^{\circ}C$에서 모든 Ti 층이 반응으로 소모되고 열적 stress, Ti-silicide의 grain growth, oxygen의 침입으로 TiN 층에 blistering이 발생한다.

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Study on Grain Refinement of Al-7Si Based Alloys with TiC (Al-7Si 합급의 결정립 미세화에 미치는 TiC 첨가의 영향)

  • Han, Yun-Sung;Choi, Chang-Ock
    • Journal of Korea Foundry Society
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    • v.23 no.2
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    • pp.63-68
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    • 2003
  • Al-Ti-C grain refiner form a relatively new alternative to the existing class of Al-Ti-B type grain refiners for achieving fine equiaxed structures in aluminum alloys during casting and solidification. The present study was carried out to investigate the influence of Al-Ti-C master alloys on the grain structure of Al-7Si alloys. The present study also investigates the relationship between grain refining efficiency and concentrations of Fe and Si in hypo-eutectic Al-Si alloys using Al-3Ti-0.13C master alloys. It is found that several parameters affect significantly the grain refining performance in silumin alloys. The present study reports the influence of various parameters such as alloy content, master alloy addition level, melt holding time and superheat on the grain refining efficiency in Al-7Si alloys.