• 한국세라믹학회지
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• 제32권3호
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• pp.305-312
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• 1995

Thin films of Pb(Mg, Zn)1/3Nb2/3O3 were fabricated by spin coating the Pb-Mg-Zn-Nb-O complex alkoxide sols on(111) Pt-coated MgO (100) planes. It was observed that the content of H2O and the rheological characteristics of sol greatly influenced the orientation of perovskite grains after thin-film formation. A strong preferential orientation of (100)-type planes of the perovskite grains was obtained for the sol aged for 15 days with the molar ratio of H2O to total metal alkoxides=2. As small angle X-ray scattering experiment in the Porod region was performed to correlate the observed preferential orientation with the network structure of precursors at various stage of aging. It was shown that the degree of branching of the Pb-Mg-Zn-Nb-O precursor chain had a direct effect on the preferred oreintation, and weakly branched precursor systems led to highly oriented grains after thin-film formation.

• 한국재료학회지
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• 제15권10호
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• pp.678-682
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• 2005

We studied the possibility of $Zn_4O(Ac)_2(OH)$ formation as a precursor for ZnO nano particles in sol-gel method. Four different additives such as tetra methyl ammonium hydroxide, mono ethanol amine (MEA), LiOH, and $H_2O$ were used for zinc acetate dissolved in 2-methoxy ethanol. ZnO particles of 5-6 nm in size were observed. Existence of $Zn_4O(Ac)_6$ was not verified. $Zn_4O(Ac)_2(OH)$ molecules were observed and they were believed to be the precursors of ZnO. A peak at 275nm in UV-Vis analysis was observed In the case of MEA and $H_2O$ but no ZnO particles were detected in transmission electron microscopy.

• 반도체디스플레이기술학회지
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• 제20권4호
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• pp.1-5
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• 2021

Field-effect transistors based on solution-processed metal oxide semiconductors has attracted huge attention due to their intrinsic characteristics of optical and electrical characteristics with benefits of simple and low-cost process. Especially, spray-pyrolysis has shown excellent device performance which compatible to vacuum-processed Field-effect transistors. However, the high annealing temperature for crystallization of MOS and narrow range of precursors has impeded the progress of the technology. Here, we demonstrated the nc-ZnO/ZnO films performed by spray-pyrolysis with incorporating ZnO nanoparticles into typical ZnO precursor. The films exhibit preserving morphological properties of poly-crystalline ZnO and enhanced electrical characteristics with potential for low-temperature processability. The influence of nanoparticles within the film was also researched for realizing ZnO films providing good quality of performance.

• 한국진공학회지
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• 제18권1호
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• pp.73-78
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• 2009

본 연구에서는 metal oxide chemical vapor deposition (MOCVD)을 이용하여 p형 실리콘(100) 기판 위에 30 nm 두께의 산화 아연 완충층을 $500^{\circ}C$ 에서 증착 시킨 후, 그 위에 산화 아연 나노로드를 수열합성법을 이용하여 성장시켰다. 그리고 산화아연 나노로드 성장 시 0.02몰${\sim}$0.5몰의 다양한 농도의 전구체를 사용함으로써 그에 따라 변화되는 산화 아연 나노로드의 배열상태, 구조적, 그리고 광학적 특성 평가를 실시하였다. 특성 평가는 FE-SEM(field emission scanning electron microscopy), XRD(X-ray diffraction), 그리고 PL(photoluminescence) 등의 분석 방법들을 통해 이루어졌다 본 연구를 통하여 전구체의 농도가 증가할수록 나노로드의 직경과 길이가 길어지며 0.3몰의 농도에서 뛰어난 광학 특성이 나타나는 것을 발견할 수 있었다.

• 한국세라믹학회지
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• 제41권1호
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• pp.76-80
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• 2004

분무연소합성법을 이용하여 나노 크기의 산화아연(ZnO) 콜로이드를 제조하였다. 연소반응을 위한 산화제로서 $Zn(NO_3)_2{\cdot}6H_2O$와 환원제(연료)로서 $CH_6N_4O$를 사용하였다. DTA/TGA를 이용하여 열분석을 행한 결과 $230^{\circ}C$에서 전구체 혼합물의 착화(ignition)에 의한 연소반응으로 생각되는 발열피크가 나타났다. 그러나 분무 연소 반응의 경우 ${\mu}m$ 크기의 액적들로 인해 착화를위한 분자 또는 기들의 함량이 상대적으로 적기 때문에 분무된 액적들의 착화를 위해 연소반응기의 온도를 $500^{\circ}C$로 유지하였다. 응집체의 형성을 억제하기 위하여 여과매체를 사용하여 액적의 개수 농도를 감소시켰으며, 에어로졸 입자의 체류시간을 2.5초로 조절하여 열 유체의 흐름을 층류로 유도하였다. 제조된 입자들의 모양은 모두 구형이었으며, 평균 입자 크기는 180nm이었다. XRD와 TEM 분석 결과 각각의 콜로이드들은 ZnO 고유의 결정성을 나타내고 있었으며, hexagonal 구조를 가지는 것으로 확인되었다.

• 반도체디스플레이기술학회지
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• 제22권1호
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• pp.78-82
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• 2023

Metal oxide semiconductor (MOS) adapting spray-pyrolysis deposition technique has drawn large attention based on their high quality of intrinsic and electrical properties in addition to simple and low-cost processibility. To fully utilize the merits of MOS field-effect transistors (FETs) , transparency, it is important to understand the instability behaviors of FETs under illumination. Here, we studied the photo-induced properties of nc-ZnO/ZnO field-effect transistors (FETs) based on spray-pyrolysis under illumination which incorporating ZnO nanocrystalline nanoparticles into typical ZnO precursor. Our experiments reveal that nc-ZnO in active layer suppressed the light instabilities of FETs.

• 한국진공학회지
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• 제18권4호
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• pp.296-301
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• 2009

ZnO에 대한 박막증착 연구를 위하여 유도결합 플라즈마 원자층박막증착(inductively coupled plasma assisted atomic layer deposition: ICP-ALD) 장치를 제작하고, 장치에 대한 기본 공정조건을 설정하기 위하여 플라즈마를 유도하지 않은 상태에서 p-type Si(100) 기판 위에 ZnO 박막을 증착하는 다양한 실험을 수행하였다. Zn 전구체(precursor)로는 Diethyl zinc [$Zn(C_2H_5)_2$, DEZn]를, 반응가스(reaction gas)로는 $H_2O$를, 캐리어(carrier) 및 퍼지가스(purge gas)로는 Ar을 사용하였다. 기판온도 $150^{\circ}C$에서 DEZn, $H_2O$, Ar의 공급시간을 변화시켜가면서 자기제한적 표면반응(self-limiting surface reaction)에 의한 박막성장조건을 성공적으로 유도하였다. 기판온도를 변화시켜가면서($90{\sim}210^{\circ}C$) 증착실험을 반복하여, 본 장치에 대한 ALD 공정온도(thermal ALD process window)를 확립하고 성장된 ZnO박막에 대한 증착특성, 결정성, 불순물 및 내부조성비등을 조사하였다. ALD 공정온도는 기판온도 $110{\sim}190^{\circ}C$로써 이 구간에서의 박막 평균증착률은 0.29 nm/cycle로 일정하게 나타났다. 기판온도가 높아질수록 결정성이 향상되어 ZnO(002) 피크가 우세하였다. 모든 ALD 공정온도에서 Zn와 O로만 구성된 고순도의 ZnO 박막을 실현하였는데, 온도가 높아질수록 Zn와 O의 비가 1에 근접하며 안정된 hexagonal wurtzite ZnO 구조의 박막이 성장되었다.

• 한국표면공학회:학술대회논문집
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• 한국표면공학회 2015년도 춘계학술대회 논문집
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• pp.47-47
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• 2015

Atomic layer deposition (ALD) 방법으로 증착시킨 ZnO 기반의 박막물질들을 다양한 종류의 태양전지에서 TCO, Buffer Layer 등으로 활용하기 위한 노력이 최근 이루어지고 있다. 본 발표에서는 ALD를 이용한 ZnO 기반 박막물질들의 광전소자로의 적용을 위한 요구물성을 맞추기 위한 precursor/reactant의 selection을 포함한 공정 parameter가 박막의 물성에 미치는 영향 및 생산성 향상을 위한 ALD 공정장치 개발 예를 소개하고, 광전소자 특성에 미치는 영향을 살펴보았다.

• 한국세라믹학회지
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• 제55권2호
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• pp.140-144
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• 2018

$ZnO/TiO_2$ nanocomposites were synthesized via a modified sol-gel technique by incorporating 30 and 70 wt% $TiO_2$ nanopowder into a ZnO sol-gel matrix. Zinc acetate dihydrate was used as the ZnO precursor and de-ionized water as the solvent, while titanium oxysulfate was employed for the synthesis of $TiO_2$ nanopowder. The synthesized $ZnO/TiO_2$ nanocomposites were characterized by x-ray diffraction, UV-vis spectroscopy, scanning electron microscopy, and transmission electron microscopy. The $ZnO/TiO_2$ nanocomposites showed both the ZnO (wurtzite) and $TiO_2$ (anatase) phases. The average ZnO crystallite size of the $ZnO/TiO_2$ nanocomposites was found to be about 26.3 nm. The TEM results confirmed that spherical $TiO_2$ particles were embedded in the ZnO matrix. $TiO_2$ particles attached onto the rod-like ZnO particles were also observed. The $ZnO/TiO_2$ nanocomposites exhibited optical absorption properties superior to those of pure ZnO and $TiO_2$.

• Bulletin of the Korean Chemical Society
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• 제27권11호
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• pp.1809-1814
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• 2006

The L-Valinate anion coordinating zinc complex, [$Zn(val)_2(H-2O)$], was isolated and structurally characterized by single crystal X-ray crystallography. The crystal possess orthorhombic symmetry with a space group $P2_12_12_1$, Z = 4, and a = 7.4279(2)$\AA$, b = 9.4342(2)$\AA$, c =20.5862(7)$\AA$ respectively. The compound features a penta-coordinate zinc ion in which the two valine anion molecules are directly coordinating the central zinc metal ion via their N (amine) and O (carboxylate) atoms, and an additional coordination to zinc is made by water molecule (solvent) to form a distorted square pyramidal structure. In addition, further synthesis of the valine capped ZnS:Mn nanocrystal from the reaction of [$Zn(val)_2(H-2O)$] precursor with $Na_2S$ and 1.95 weight % of $Mn^{2+}$ dopant is described. Obtained valine capped nanocrystal was water dispersible and was optically characterized by UV-vis and solution PL spectroscopy. The solution PL spectrum for the valine capped ZnS:Mn nanocrystal showed an excitation peak at 280 nm and a very narrow emission peak at 558 nm respectively. The measured and calculated PL efficiency of the nanocrystal in water was 15.8%. The obtained powders were characterized by XRD, HR-TEM, and EDXS analyses. The particle size of the nanocrystal was also measured via a TEM image. The measured average particle size was 3.3 nm.