• Title/Summary/Keyword: ZnO : Al

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The non-uniformity study of AZO thin films by pulse magnetron sputtering for large area (대면적 펄스 마그네트론 스퍼터링에 의한 AZO 박막의 균일도 문제)

  • Yang, Won-Gyun;Ju, Jeong-Hun
    • Proceedings of the Korean Institute of Surface Engineering Conference
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    • 2008.11a
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    • pp.23-24
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    • 2008
  • Bipolar pulsed dc magnetron sputtering을 이용하여 태양전지의 투명 전도막용으로 유리기판 위에 Al doped ZnO (AZO) 박막을 증착하였다. $400{\times}400\;mm$의 대면적 기판에 증착하기 위해서 $5{\times}25$ inch 대형 사각 AZO target (Al 2 wt%)을 사용했고, $50{\sim}250\;kHz$의 bipolar pulse를 인가하였다. 실제로는 $400{\times}400\;mm$ 면적의 기판에 slide glass 16개를 사용했으며, 약 700 nm 두께에서 두께와 투과도, 비저항의 균일도를 평가하였다. Bipolar pulse의 주파수 150 kHz일 때, 가장 우수한 특성을 갖는 AZO가 증착되었으며, $2.13{\times}10^{-3}{\Omega}{\cdot}cm$의 비저항에 가시광선 영역에서 82%의 투과율을 보였다. 또한, $400{\times}400\;mm$ 대면적 기판에서의 두께와 투과도, 비저항의 불균일도는 각각 5%, 1%, 9% 였다.

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Modified magnetron sputtering for fast deposition of Al doped Znic oxide film

  • Wen, Long;Piao, Jinxiang;Kumar, Manish;Han, Jeon-Geon
    • Proceedings of the Korean Institute of Surface Engineering Conference
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    • 2015.05a
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    • pp.114-115
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    • 2015
  • 개량한 플라즈마 소스를 이용하여 Al doped ZnO (AZO) 박막을 증착하였다. 이 실험에서 박막의 증착두께를 200nm로 고정하였고 공정압력과 기판사이 거리는 4 mTorr과 4 cm로 정하였다. 인가전력 그리고 윗 타겟 인가전압을 변수로 하였을 경우 AZO 박막의 방향성과 결정성을 XRD로 측정하고 분석하였고 박막의 전기적 특성을 Hall measurment로 측정하였다. 그 결과 인가파워가 2W/cm2, 윗 타겟 인가전압이 0 W 일 때 박막의 전기적 특성이 가장 좋게 나타났다.

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Geochemical Study of Some Mesozoic Granitic Rocks in South Korea (남한의 일부 중생대 화강암류의 지구화학적 연구)

  • Kim, Kyu Han
    • Economic and Environmental Geology
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    • v.25 no.4
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    • pp.435-446
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    • 1992
  • REE, major and trace elements analyses of the Jurassic Daebo granite and Cretaceous Bulguksa granite were carried out to interpet their petrogenesis and relationships between petrogenesis and tectonics. Analytical results are summarized as follows. (1) $SiO_2$ content of the Bulguksa granite (aver. 74.6%) are significantly higher than those of the Daebo granite (aver. 68.1%). Major elements of $TiO_2$, $Al_2O_3$, $P_2O_5$, CaO, MgO, Total FeO, and trace elements of Co, V and Sr are negatively correlated with $SiO_2$. Incompatible elements such as Ba, Sr, Y, Zr and HREE are contained differently in the Bulguksa granites distributed in between Okchon folded belt and Kyongsang sedimentary basin. (2) Trace element abundances show a good discrimination between two goups of granitic rocks. Ba, Sr and V are enriched in Daebo granites, while Zn and Cr are depleted in them. (3) Jurassic granites have quite different Eu anomalies and REE patterns from those of Cretaceous granites: Large negative Eu anomaly in the former and mild or absent Eu anomaly in the latter. The large Eu negative of Cretaceous granitic rocks are interpreted as a differentiated product of fractional crystallization of granitic magma from the upper mantle. Meanwhile, the Daebo plutonic rocks was resulted from the partial melting of subcrustal material or crustal contamination during ascending granitic magma from the mantle. Senario of igneous activities of Mesozoic age in South Korea was proposed based on Kula-Pacific ridge subduction model.

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Geochemical Properties of Deep Sea Sediment in the Benthic Environmental Impact Experiment Site (BIS) of Korea (심해 저층환경충격 시험지역의 퇴적물 지화학적 특성)

  • Kong, Gee Soo;Hyeong, Kiseong;Choi, Hun-Soo;Chi, Sang-Bum
    • Ocean and Polar Research
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    • v.36 no.4
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    • pp.407-421
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    • 2014
  • The benthic environmental impact experiment addresses environmental impacts at a specific site related to deep-sea mineral resource development. We have acquired several tens of multi- or box core samples at 31 sites within the Benthic environmental Impact Site (BIS) since 2010, aiming to examine the basic properties of surficial deep-sea sediment as a potential source for deep-water plumes. In this study, we present the geochemical properties such as major elements, rare earth elements (REEs), and heavy metal contents at the BIS. Such proxies vary distinctly according to the Facies association. The lithology of all core sediments in the BIS corresponds to both Association Ib and Association IIIb. The vertical profiles of some major elements ($SiO_2$, $Fe_2O_3$, CaO, $P_2O_5$, MgO, MnO) show noticeable differences between Association Ib and IIIb, while others ($Al_2O_3$, $TiO_2$, $Na_2O$, and $K_2O$) do not vary between Association Ib and IIIb. REEs are also distinctly different for Associations Ib and IIIb; in Association Ib, REY and HREE/LREE are uniform through the sediment section, while they increase downward in Association IIIb like the major elements; below a depth of 8 cm, REY is over 500 ppm. The metal enrichment factor (EF) evaluates the anthropogenic influences of some metals (Cu, Ni, Pb, Zn, and Cd) in marine sediments. In both Associations, the EF for Cu is over 1.5, the EF for Ni and Pb ranges from 0.5 to 1.5, and the EF for Zn and Cd are less than 0.5, indicating Cu is enriched but Zn and Cd are relatively depleted in the BIS. The vertical variations of geochemical properties between Association Ib and IIIb are shown to be clearly different, which seems to be related to the global climate changes such as the shift of Intertropical convergence zone (ITCZ).

Structural and Electrical Properties of Fluorine-doped Zinc Tin Oxide Thin Films Prepared by Radio-Frequency Magnetron Sputtering

  • Pandey, Rina;Cho, Se Hee;Hwang, Do Kyung;Choi, Won Kook
    • Proceedings of the Korean Vacuum Society Conference
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    • 2014.02a
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    • pp.335-335
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    • 2014
  • Over the past several years, transparent conducting oxides have been extensively studied in order to replace indium tin oxide (ITO). Here we report on fluorine doped zinc tin oxide (FZTO) films deposited on glass substrates by radio-frequency (RF) magnetron sputtering using a 30 wt% ZnO with 70 wt% SnO2 ceramic targets. The F-doping was carried out by introducing a mixed gas of pure Ar, CF4, and O2 forming gas into the sputtering chamber while sputtering ZTO target. Annealing temperature affects the structural, electrical and optical properties of FZTO thin films. All the as-deposited FZTO films grown at room temperature are found to be amorphous because of the immiscibility of SnO2 and ZnO. Even after the as-deposited FZTO films were annealed from $300{\sim}500^{\circ}C$, there were no significant changes. However, when the sample is annealed temperature up to $600^{\circ}C$, two distinct diffraction peaks appear in XRD spectra at $2{\Theta}=34.0^{\circ}$ and $52.02^{\circ}$, respectively, which correspond to the (101) and (211) planes of rutile phase SnO2. FZTO thin film annealed at $600^{\circ}C$ resulted in decrease of resistivity $5.47{\times}10^{-3}{\Omega}cm$, carrier concentration ~1019 cm-3, mobility~20 cm2 V-1s-1 and increase of optical band gap from 3.41 to 3.60 eV with increasing the annealing temperatures and well explained by Burstein-Moss effect. Change of work function with the annealing temperature was obtained by ultraviolet photoemission spectroscopy. The increase of annealing temperature leads to increase of work function from ${\phi}=3.80eV$ (as-deposited FZTO) to ${\phi}=4.10eV$ ($600^{\circ}C$ annealed FZTO) which are quite smaller than 4.62 eV for Al-ZnO and 4.74 eV for SnO2. Through X-ray photoelectron spectroscopy, incorporation of F atoms was found at around the binding energy of 684.28 eV in the as-deposited and annealed FZTO up to 400oC, but can't be observed in the annealed FZTO at 500oC. This result indicates that F atoms in FZTO films are loosely bound or probably located in the interstitial sites instead of substitutional sites and thus easily diffused into the vacuum from the films by thermal annealing. The optical transmittance of FZTO films was higher than 80% in all specimens and 2-3% higher than ZTO films. FZTO is a possible potential transparent conducting oxide (TCO) alternative for application in optoelectronics.

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Mineralogy and Geochemistry of Shale Deposits in the Lower Anambra Basin, Nigeria: Implication for Provenance, Tectonic Setting and Depositional Environment

  • Olugbenga Okunlola;Agonsi Udodirim Lydia;Aliyu Ohiani Umaru;Raymond Webrah Kazapoe;Olusegun G. Olisa
    • Economic and Environmental Geology
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    • v.56 no.6
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    • pp.799-816
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    • 2023
  • Mineralogical and geochemical studies of shales within the Lower Anambra Basin was conducted to unravel the depositional environment, provenance, maturity, paleo-weathering conditions, and tectonic settings. Mineralogical studies conducted using X-ray diffraction analysis revealed that the samples were composed of kaolinite, montmorillonite, chlorite, and illite. KaolinIite is the dominant mineral, constituting approximately 41.5% of the bulk composition, whereas the non-clay minerals are quartz, ilmenite, and sillimanite. Geochemical analysis showed a predominance of SiO2, Al2O3, and Fe2O3 contents of the shale samples with mean values of 52.29%, 14.09%, and 6.15% for Imo Shale (IS); 52.31%, 16.70%, and 7.39% for Mamu Shale (MS); 43.21%, 21.33%, and 10.36% for Enugu Shale (ES); 53.35%, 15.64%, and 7.17% for Nkporo Shale (NS); and 51.24%, 17.25%, and 7.78% for Agwu Shale (AS). However, the shales were depleted in Na2O, MgO, K2O, MnO, TiO2, CaO, and P2O5. The trace element ratios of Ni/Co and Cu/Zn of the shale suggest an oxic depositional environment. The average SiO2 vs. Al2O3 ratio of the shales indicated textural maturity. Compared to the PAAS standard, the shales plot below the PAAS value of 0.85, suggesting a high degree of maturity and intensive chemical weathering, further confirmed on a CIA vs. PIA plot. On log (K2O/Na2O) against SiO2 and tectonic setting discriminant function diagrams, the shales plot mostly in the field of passive continental margin tectonic setting. The discriminant function diagrams as well as Al2O3/TiO2 ratio of the shales showed that they were derived from a mixed source (mafic and intermediate igneous rocks).

Mineralogy and Geochemistry of Iron Hydroxides in the Stream of Abandoned Gold Mine in Kwangyang, Korea (광양 폐금광 수계에 형성된 철수산화물에 대한 광물학적 및 지구화학적 특성)

  • Park, Cheon-Young;Jeoung, Yeon-Joong;Kim, Seoung-Ku
    • Journal of the Korean earth science society
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    • v.22 no.3
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    • pp.208-222
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    • 2001
  • Geochemical investigations on suspended amorphous iron oxide material from the Kwangyang gold mine and its surrounding area, Cheonnam, Korea have been carried out. The sediments samples were collected from 11 location along Kwangyang mine area and were air dried and sieved to -80 mesh. These samples consist mainly of iron, silicon and alumina. The Fe$_2$O$_3$ contents ranges from 17.9 wt.% to 72.3 wt.%. The content of Fe$_2$O$_3$ increase with decreasing Si, Al, Mg, Na, K, Mn, and Ti, whereas the contents of Te, Au, Ga, Bi, Cd, Hg, Sb, and Se increase in the amorphous stream sediments. Amorphous stream sediments have been severely enriched for As (up to 54.9 ppm), Bi (up to 3.77 ppm), Cd (up to 3.65 ppm), Hg (up to 64 ppm), Sb (up to 10.1 ppm), Cu (up to 37.1 ppm), Mo (up to 8.86 ppm), Pb (up to 9.45 ppm) and Zn (up to 29.7 ppm). At the upstream site, the Au content (up to 4.4 ppm) in the amorphous stream sediments are relatively high but those contents decrease with distance of mine location. The content of Ag (up to 0.24 ppm) were low in upstream site but those contents increase significantly in the downstream sites. The X-ray diffraction patterns of the samples have virtually no sharp and discrete peaks, indicating that some samples are amorphous or poorly-ordered. The quartz, goethite, kaolinite and illite were associated in amorphous stream sediments. The infrared spectra for amorphous stream sediments show major absorption bands due to OH stretching, adsorbed molecular water, sulfate and Fe-O stretching, respectively.

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용액 공정을 이용한 High-k 게이트 절연막을 갖는 고성능 InGaZnO Thin Film Transistors의 전기적 특성 평가

  • So, Jun-Hwan;Park, Seong-Pyo;Lee, In-Gyu;Lee, Gi-Hun;Sin, Geon-Jo;Lee, Se-Won;Jo, Won-Ju
    • Proceedings of the Korean Vacuum Society Conference
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    • 2012.08a
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    • pp.339-339
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    • 2012
  • 지난 몇 년 동안, 투명 비정질 산화물 반도체는 유기 발광 다이오드, 플렉서블 전자 소자, 솔라 셀, 바이오 센서 등 많은 응용분야에 연구되고 있다. 투명 비정질 산화물 반도체 그룹들 중, 특히 비정질 IGZO 박막 트랜지스터는 비정질 상태임에도 불구하고 높은 이동도와 낮은 동작 전압으로 훌륭한 소자 특성을 보인다. 이러한 고성능의 IGZO 박막 트랜지스터는 RF 마그네트론 스퍼터링이나 pulsed laser deposition과 같은 고진공 장비를 이용하여 이미 여러 그룹에서 제작되고 발표되었다. 하지만 진공 증착 시스템은 제조 비용의 절감이나 디스플레이 패널의 대면적화에 큰 걸림돌이 되고 있고, 이러한 문제점을 극복하기 위해서 용액 공정은 하나의 해결책이 될 수 있다. 용액 공정의 가장 큰 장점으로는 저온 공정이 가능하기 때문에 글라스나 플라스틱 기판에서 대면적으로 제작할 수 있고 진공 장비가 필요없기 때문에 제조 비용을 획기적으로 절감시킬 수 있다. 본 연구에서는 high-k 게이트 절연막과 IGZO 채널 층을 용액 공정을 이용하여 박막 트랜지스터를 제작하고 그에 따른 전기적 특성을 분석하였다. IGZO의 몰 비율은 In, Ga, Zn 순으로 각각 0.2 mol, 0.1 mol, 0.1 mol로 제작하였고, high-k 게이트 절연막으로는 Al2O3, HfO2, ZrO2을 제작하였다. 또한, 용액 공정 IGZO TFT를 제작하기 전, 용액 공정 high-k 게이트 절연막 캐패시터를 제작하여 그 특성을 분석하였다. 다양한 용액 공정 high-k 게이트 절연막 중, 용액공정 HfO2를 이용한 IGZO TFT는 228.3 [mV/dec]의 subthreshold swing, 18.5 [$cm^2/V{\cdot}s$]의 유효 전계 이동도, $4.73{\times}106$의 온/오프 비율을 보여 매우 뛰어난 전기적 특성을 확인하였다.

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Evaluation of Characteristics of Sludge generated from Active Treatment System of Mine Drainage (광산배수의 적극적 처리시설에서 발생하는 슬러지 특성 평가)

  • Jung-Eun Kim;Won Hyun Ji
    • Economic and Environmental Geology
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    • v.56 no.4
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    • pp.409-419
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    • 2023
  • Acid mine drainage(AMD) treatment is classified as both passive and active treatment. During the treatment, about 5,000 tons of neutralization sludge is generated as a by-product per year in Korea. This study was conducted to evaluate the characteristics of sludge generated from physico·chemical treatment processes as an active treatment from 5 different sources (D, H, S, T, Y) and the possibility of the sludges being recycled. The sludges have a pH range of 5.86 ~ pH 7.89, and a water content range of 51% ~ 82%. Most of particle sizes were less than 25 ㎛. In analysis of inorganic elements, the concentration of Al, Fe, and Mn were between 1,189 mg/kg ~ 129,344 mg/kg, 106,132 mg/kg ~ 338,011 mg/kg, and 3,472 mg/kg ~ 11,743 mg/kg, respectively. The concentration of As and Zn in sludge-T, Cd in sludge-D, Ni in sludge-H, Zn in sludge-S, and Cd in sludge-Y exceeded the soil contamination standards of Korea. The results from 2 separate kinds of leaching test, the Korea Standard Leaching Test(KSLT) and Toxicity Characteristic Leaching Procedure(TCLP), showed that all the sludges met the Korea groundwater standards. From the XRD and SEM-EDS analysis, the peaks of calcite and quartz were found in the sludges. The sludge also had a high proportion of Fe and O, and the majority of the composition was amorphous iron hydroxide.

Effects of the Thickness and the Morphology of a ZnO Buffer Layer in Inverted Organic Solar Cells

  • Lee, Hyeon-U;O, Jin-Yeong;Baek, Hong-Gu
    • Proceedings of the Korean Vacuum Society Conference
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    • 2013.08a
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    • pp.151-151
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    • 2013
  • 무기물 기반, Si-based 태양전지에 비해 가볍고 저렴하다는 관점에서 유기태양전지에 대한 연구가 진행되고 있다. 유기태양전지는 Si-based 태양전지에 비해 그 효율이 낮다는 점이 문제로 제기되어 왔지만, 억셉터와 도너의 nanocomposite 구조인 bulk-heterojunction (BHJ) 구조가 개발이 되면서 유기물의 짧은 엑시톤(exciton) 거리를 극복할 수 있게 되어 그 효율이 비약적으로 증가되는 결과를 낳았다. 또한 넓은 범위의 파장을 흡수 할 수 있는 작은 band-gap을 갖는 물질이 개발됨으로써 유기 태양전지의 효율은 점차 증가하고 있다. 최근에는 독일 회사인 Heliatek에서 12%가 넘는 유기태양전지를 발표함으로써 유기태양전지가 Si-based 태양전지를 대체할 수 있는 차세대 에너지 공급원으로의 가능성을 충분히 보였다. 이런 유기 태양전지는 하부 투명전극인 인듐주석산화물(ITO)/정공이동층(PEDOT:PSS)/광흡수층/전자이동층(LiF)/낮은 일함수를 갖는 상부전극인 Al 구조의 일반적인 구조; ITO/전자이동층/광흡수층/정공이동층/높은 일함수를 갖는 상부전극(Ag), 전하의 이동방향이 반대인 역구조 태양전지, 두 가지로 분류할 수 있다. 하지만 소자 안정성의 관점에서 일반적인 구조의 태양전지는 ITO/PEDOT:PSS 계면에서의 화학적 불안정성과, 낮을 일함수를 갖는 상부전극이 쉽게 산화되는 등의 문제가 있어 상부전극으로 높은 일함수를 갖는 전극을 사용하는 역구조 태양전지가 더 유리하다. 이러한 역구조 태양전지에서 효율을 높일 수 있는 요인 중 하나는 전자이동층에 있다. 광흡수층에서 형성되어 분리된 전자가 전극으로 이동하기위해서는 전자이동층을 거쳐야 한다. 하지만 이 전자이동층 내에서의 전자 이동속도가 느리다면, 즉 저항이 크다면 광흡수증과의 계면에서 Back electron trasnfer현상으로 재결합이 일어나게 되어 전극으로 도달하는 전자의 양이 줄어들게 되고, 이는 유기태양전지 효율을 낮추는 요인이 된다. 전자이동층 자체의 저항뿐만 아니라, 전자이동층의 표면 거칠기(morphology) 또한 유기 태양전지의 효율을 좌우하는 요인 중 하나이다. 광흡수층과 전자이동층의 계면에서 전자의 이동이 일어나는데, 전자이동층의 표면 거칠기가 크게되면 그 위에 박막으로 형성되는 광흡수층과의 계면저항이 증가하게 되고, 이는 광흡수층에서 전자이동층으로의 원활한 전자이동을 저해함으로써 소자 효율의 감소를 일으키게 된다. 따라서 우리는 전자이동층인 ZnO 박막의 스퍼터링 조건을 변화시킴으로써 ZnO 층의 두께에 따른 광투과도, 전기전도성 변화 및 유기태양전지의 효율변화와, 표면 거칠기에 따른 광변환 효율 변화를 관찰하고자 한다.

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