• Proceedings of the Korean Vacuum Society Conference
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• 2012.08a
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• pp.245-245
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• 2012

차세대 디스플레이로 각광받고 있는 AMOLED에 대한 관심이 높아짐에 따라 구동 소자의 연구가 활발히 이루어지고 있다. 산화물 반도체 박막 트랜지스터는 비정질 실리콘 박막 트랜지스터에 비해 100 $cm^2$/Vs 이하의 높은 이동도와 우수한 전기적 특성으로 AMOLED 구동 소자로서 학계에서 입증되어왔고, 현재 여러 기업에서 산화물 반도체를 이용한 박막 트랜지스터 제작 연구가 활발히 이루어지고 있다. 본 연구는 열처리 조건을 가변하여 제작한 산화물 반도체 박막 트랜지스터의 전기적 특성 분석을 목적으로 한다. 실리콘 기판에 oxidation 공정을 이용하여 SiO2 100 nm, DC스퍼터링을 이용하여 ITZO (Indium-Tin-Zinc Oxide) 산화물 반도체 박막 50 nm, 증착된 산화물 반도체 박막의 열처리 후, evaporation을 이용하여 source/drain 전극 Ag 150 nm 증착하여 박막 트랜지스터를 제작하였다. 12 sccm의 산소유량, 1시간의 열처리 시간에서 열처리 온도 $400^{\circ}C$, $200^{\circ}C$의 샘플은 각각 이동도 $29.52cm^2/V{\cdot}s$, $16.15cm^2/V{\cdot}s$, 문턱전압 2.61 V, 6.14 V, $S{\cdot}S$ 0.37 V/decade, 0.85 V/decade, on-off ratio 5.21 E+07, 1.10 E+07이었다. 30 sccm의 산소유량, 열처리 온도 $200^{\circ}C$에서 열처리 시간 1시간, 1시간 30분 샘플은 각각 이동도 $12.27cm^2/V{\cdot}s$, $10.15cm^2/V{\cdot}s$, 문턱전압 8.07 V, 4.21 V, $S{\cdot}S$ 0.89 V/decade, 0.71 V/decade, on-off ratio 4.31 E+06, 1.05 E+07이었다. 산화물 반도체의 열처리 효과 분석을 통하여 높은 열처리 온도, 적은 산소의 유량, 열처리 시간이 길수록 이동도, 문턱전압, $S{\cdot}S$의 산화물 박막 트랜지스터 소자의 전기적 특성이 개선되었다.

• Journal of Surface Science and Engineering
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• v.47 no.5
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• pp.239-243
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• 2014

The electrical and optical properties of amorphous In-Tin-Zinc-Oxide(ITZO) deposited at room temperature using rf-magnetron sputtering were investigated. The amorphous ITZO thin films were obtained at the composition of In:Sn:Zn = 6:2:2, 4:3:3, and 2:4:4, but the ITZO (8:1:1) showed a crystalline phase of bixbyite structure of In2O3. The resistivity of ITZO could be controlled by oxygen pressure in the sputtering ambient. The resistivity of post-annealed ITZO thin films exhibited the dependence on the amount of Indium. Optical energy band gap and transmittance increased as the amount of indium in ITZO increased. For the device application with ITZO, the bottom-gated thin-film transistor using ITZO as a active channel layer was fabricated. It showed a threshold voltage of 1.42V and an on/off ratio of $5.63{\times}10^7$ operated with saturation field-effect mobility of $14.2cm^2/V{\cdot}s$.

• Proceedings of the Korean Vacuum Society Conference
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• 2013.02a
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• pp.571-571
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• 2013

본 연구에서는 유연 유기태양전지용 플렉시블 InZnSnO (IZTO)/PEDOT:PSS 투명전극을 제작하고 그 특성을 연구하였다. 이를 위해 선형 대향 타겟 스퍼터(Linear Facing Target Sputtering: LFTS) 시스템을 이용하여 그라비아 프린팅된 PEDOT:PSS/PET 매우 얇은 IZTO 투명전극을 성막하였다. 일반적으로 PEDOT:PSS 전극은 수분/산소에 약하지만 매우 얇은 IZTO passivation 층을 코팅함으로써 PEDOT:PSS의 안정성을 향상시키는 동시에 전기적 특성을 향상시킬 수 있다. 이러한 PEDOT:PSS 기반 하이브리드 투명 전극을 제작하기 위해 IZTO 두께를 5 nm에서 40 nm 까지 조절하여 IZTO/PEDOT:PSS 다층 투명전극을 제작하였으며, 이때 IZTO 두께 변수에 따라 제작된 하이브리드 IZTO/PEDOT:PSS 투명전극의 전기적, 광학적 특성을 분석하였다. 최적화된 20 nm의 IZTO의 두께에서 IZTO/PEDOT:PSS 하이브리드 투명전극은 PEDOT:PSS 단일층으로 제작된 플렉서블 투명전극과 동일한 우수한 유연성을 가짐과 동시에 PEDOT:PSS 단일층보다 현저히 낮은 면저항 값(353.6 ohm/sq.)과 높은 광투과율(83.09%)을 나타내었다. 최적화된 IZTO/PEDOT:PSS 투명전극으로부터 제작된 플렉서블 유기태양전지는 IZTO의 passivation 특성으로 인해 PEDOT:PSS 단일막을 이용하여 제작된 플렉시블 투명전극보다 우수한 소자효율을(FF: 59.04%, Voc: 0.588 V, Jsc: 7.554 mA/cm2, PCE: 2.622%) 나타내었다. 이러한 결과들은 LFTS 공법으로 PEDOT:PSS위에 성막된 IZTO passivation 층이 PEDOT:PSS의 특성을 향상시킬 뿐만 아니라, PEDOT:PSS의 안정성도 향상시킬 수 있기 때문에 기존 PEDOT:PSS 기반 투명 전극의 문제점을 해결할 수 있는 해결책으로 적용이 가능하다.

• Korean Journal of Materials Research
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• v.23 no.8
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• pp.430-434
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• 2013

Quantum dots(QDs) with their tunable luminescence properties are uniquely suited for use as lumophores in light emitting device. We investigate the microstructural effect on the electroluminescence(EL). Here we report the use of inorganic semiconductors as robust charge transport layers, and demonstrate devices with light emission. We chose mechanically smooth and compositionally amorphous films to prevent electrical shorts. We grew semiconducting oxide films with low free-carrier concentrations to minimize quenching of the QD EL. The hole transport layer(HTL) and electron transport layer(ETL) were chosen to have carrier concentrations and energy-band offsets similar to the QDs so that electron and hole injection into the QD layer was balanced. For the ETL and the HTL, we selected a 40-nm-thick $ZnSnO_x$ with a resistivity of $10{\Omega}{\cdot}cm$, which show bright and uniform emission at a 10 V applied bias. Light emitting uniformity was improved by reducing the rpm of QD spin coating.At a QD concentration of 15.0 mg/mL, we observed bright and uniform electroluminescence at a 12 V applied bias. The significant decrease in QD luminescence can be attributed to the non-uniform QD layers. This suggests that we should control the interface between QD layers and charge transport layers to improve the electroluminescence.

• Proceedings of the Materials Research Society of Korea Conference
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• 2010.05a
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• pp.53.2-53.2
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• 2010

지금까지 능동 구동 디스플레이의 TFT backplane에 사용하고 있는 채널 물질로는 수소화된 비정질 실리콘(a-Si:H)과 저온 폴리실리콘(low temperature poly-Si)이 대표적이다. 수소화된 비정질 실리콘은 TFT-LCD 제조에 주로 사용되는 물질로 제조 공정이 비교적 간단하고 안정적이며, 생산 비용이 낮고, 소자 간 특성이 균일하여 대면적 디스플레이 제조에 유리하다. 그러나 a-Si:H TFT의 이동도(mobility)가 1 cm2/Vs이하로 낮아 Full HD 이상의 대화면, 고해상도, 고속 동작을 요구하는 UD(ultra definition)급 디스플레이를 개발하는데 있어 한계 상황에 다다르고 있다. 또한 광 누설 전류(photo leakage current)의 발생을 억제하기 위해서 화소의 개구율(aperture ratio)을 감소시켜야하므로 패널의 투과율이 저하되고, 게이트 전극에 지속적으로 바이어스를 인가 시 TFT의 문턱전압(threshold voltage)이 열화되는 문제점을 가지고 있다. 문제점을 극복하기 위한 대안으로 근래 투명 산화물 반도체(transparent oxide semiconductor)가 많은 관심을 얻고 있다. 투명 산화물 반도체는 3 eV 이상의 높은 밴드갭(band-gap)을 가지고 있어 광 흡수도가 낮아 투명하고, 광 누설 전류의 영향이 작아 화소 설계시 유리하다. 최근 다양한 조성의 산화물 반도체들이 TFT 채널 층으로의 적용을 목적으로 활발하게 연구되고 있으며 ZnO, SnO2, In2O3, IGO(indium-gallium oxide), a-ZTO(amorphous zinc-tin-oxide), a-IZO (amorphous indium-zinc oxide), a-IGZO(amorphous indium-galliumzinc oxide) 등이 그 예이다. 이들은 상온 또는 $200^{\circ}C$ 이하의 낮은 온도에서 PLD(pulsed laser deposition)나 스퍼터링(sputtering)과 같은 물리적 기상 증착법(physical vapor deposition)으로 손쉽게 증착이 가능하다. 특히 이중에서도 a-IGZO는 비정질임에도 불구하고 이동도가 $10\;cm2/V{\cdot}s$ 정도로 a-Si:H에 비해 월등히 높은 이동도를 나타낸다. 이와 같이 a-IGZO는 비정질이 가지는 균일한 특성과 양호한 이동도로 인하여 대화면, 고속, 고화질의 평판 디스플레이용 TFT 제작에 적합하고, 뿐만 아니라 공정 온도가 낮은 장점으로 인해 플렉시블 디스플레이(flexible display)의 backplane 소재로서도 연구되고 있다. 본 실험에서는 rf sputtering을 이용하여 증착한 a-IGZO 박막에 대하여 열처리 조건 변화에 따른 a-IGZO 박막들의 광학적, 전기적 특성변화를 살펴보았고, 이와 더불어 a-IGZO 박막을 TFT에 적용하여 소자의 특성을 분석함으로써, 열처리에 따른 Transfer Curve에서의 우리가 요구하는 Threshold Voltage(Vth)의 변화를 관찰하였다.

• Economic and Environmental Geology
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• v.45 no.1
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• pp.9-21
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• 2012

In this study, we investigated the chemical characteristics of soils collected from the several deserts and loess in China known as the typical source areas of Asian dust (the Taklamakan desert, the Alashan desert, the Ordos desert and the Loess Plateau). Based on our analysis, we examined the possibility of adverse effects on environments and human health. In each desert and loess, major elemental compositions of soils did not show large variations, implying that the long-periodic mixing of soils in each area made their chemical compositions homogeneous. Minor elements of soils in each desert and loess showed more complicated patterns with strong correlations each other (e.g., Cr, Cu, As, Co, Ni, V, Y, Sc, Sn, Pb, Zn, Cd, Cs, Li, Th, U). These results thus enable us to discriminate the soil of the Loess Plateau from those of the other deserts in China. The results of sequential extraction experiments for soils showed that the chemical speciation of Fe was dominant in residual fraction (>85%) in all deserts and loess, but the fractions of Mn and Ca chemical speciations were very different in each area. In the case of Mn, the fraction of amorphous Fe-Mn hydroxides (55.4%) in the Central Loess Plateau and the carbonate fraction (33.8%) in Taklamakan desert were higher as much as 2 to 5 times than other deserts. The chemical speciations of Ca are dominant in carbonate fraction in Taklamakan (75.9%) and Alashan (50.5%) deserts, but carbonate fractions of Ca in the Loess Plateau and Ordos deserts were low (6.6% and 2.1%, respectively). According to the mobility of trace elements inferred from the results of sequential extraction procedure, we could classify them into five groups, and the mobility of Cd, Pb and Cu are more than 87%, 33% and 30%, respectively. Therefore, Cd, Pb and Cu in soils of deserts and loess could be easily dissolved when interacted with surface water. As such, they could give adverse effects on surficial environments and human health.

• Economic and Environmental Geology
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• v.8 no.3
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• pp.117-124
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• 1975

Wet chemical analysis (for $MnO_2$, MnO, and $H_2O$(+)) and electron microprobe analysis (for $Fe_2O_3$ and PbO) give $MnO_2$ 74.91, MnO 11.33, $Fe_2O_3$ (total Fe) 4.19, PbO 0.03, $H_2O$ (+) 9.46, sum 99.92%. 'Available oxygen determined by oxalate titration method is allotted to $MnO_2$ from total Mn, and the remaining Mn is calculated as MnO. Traces of Ba, Ca, Mg, K, Cu, Zn, and Al were found. Li and Na were not found. The existence of (OH) is verified from the infrared absorption spectra. The analysis corresponds to the formula $Mn^{4+}{_{4.85}}(Mn^{2+}{_{0.90}}Fe^{3+}{_{0.30}})_{1.20}O_{8.09}(OH)_{5.91}$, on the basis of O=14, 'or ideally $Mn^{4+}{_{5-x}}(Mn^{2+},Fe^{3+})_{1+x}O_{8}(OH)_{6}$ ($x{\approx}0.2$). X-ray single crystal study could not be made because of the distortion of single crystals. But the x-ray powder pattern is satisfactorily indexed by an orthorhombic cell with a 9.324, b 14.05, c $7.956{\AA}$., Z=4. The indexed powder diffraction lines are 9.34(s) (100), 7.09(s) (020), 4.62(m) (200, 121), 4.17(m) (130), 3.547(s) (112), 3.212(vw) (041), 3.101(s) (300), 2.597(w) (013), 2.469(m) (331), 2.214(vw)(420), 2.098(vw) (260), 2.014 (vw) (402), 1.863(w) (500), 1.664(w) (314), 1.554(vw) (600), 1.525(m) (601), 1.405(m) (0.10.0). DTA curve shows the endothermic peaks at $250-370^{\circ}C$ and $955^{\circ}C$. The former is due to the dehydration: and oxidation forming$(Mn,\;Fe)_2O_3$(cubic, a $9.417{\AA}$), and the latter is interpreted as the formation of a hausmannite-type oxide (tetragonal, a 5.76, c $9.51{\AA}$) from $(Mn,\;Fe)_2O_3$. Infrared absorption spectral curve shows Mn-O stretching vibrations at $515cm^{-1}$ and $545cm^{-1}$, O-H bending vibration at $1025cm^{-1}$ and O-H stretching vibration at $3225cm^{-1}$. Opaque. Reflectance 13-15%. Bireflectance distinct in air and strong in oil. Reflection pleochroism changes from whitish to light grey. Between crossed nicols, color changes from yellowish brown with bluish tint to grey in air and yellowish brown to grey through bluish brown in oil. No internal reflections. Etching reactions: HCl(conc.) and $H_2SO_4+H_2O_2$-grey tarnish; $SnCl_2$(sat.)-dark color; $HNO_3$(conc.)-grey color; $H_2O_2$-tarnish with effervescence. It is black in color. Luster dull. Cleavage one direction perfect. Streak brownish black to dark brown. H. (Mohs) 2-3, very fragile. Specific gravity 3.59(obs.), 3.57(calc.). It occurs as radiating groups of flakes, flower-like aggregates, colloform bands, dendritic or arborescent masses composed of fine grains in the cementation zone of the supergene manganese oxide deposits of the Janggun mine, Bonghwa-gun, southeastern Korea. Associated minerals are calcite, nsutite, todorokite, and some undetermined manganese dioxide minerals. The name is for the mine, the first locality. The mineral and name were approved before publication by the Commission on New Minerals and Mineral Names, I.M.A.

• Journal of the Korean Magnetics Society
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• v.7 no.1
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• pp.25-30
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• 1997

Physical and magnetic behaviors of reduced Co-Zn-Ti-Sn substituted Ba-ferrite particles with hydrogen are different from those of reduced-pure Ba-ferrite particles. The coercivity of substituted Ba-feffite particles shows a peaking effect with the reduction temperature ranging from 250 to 520 $^{\circ}C$, while the coercivity of pure Ba-ferrite decreases monotonically. The reduction process of substituted Ba-ferrite has been found to be devided into three steps. At the first and second steps, the magneto-plumbite structure maintained. When the reduced-substituted Ba-ferrite particles are reoxidized, the coercivity is reversible at the first step but irreversible at the second step. During the third step of reduction process above 410 $^{\circ}C$. The magneto plumbite structure was collapsed with formation of $\alpha$-Fe and $BaFeO_{3-x}$ phases and consequently the coercivity distribution is broaden and the coercivity irreversible. The coercivity and saturation magnetization decreases and increases up to 130 emu/g respectively. In this study, it is found that the substituted elements prevent the magneto-plumbite structure from collapse during the reduction process and furthermore migrate from the magnetic sites of $2a+4f_{IV}$, 2b, and 12k to $4f_{VI}$ and 12k'. An increase in the coercivity before the collapse of magneto-plumbite structure is attributed to the migration of cations in hexagonal Ba-ferrite structure.

• Journal of Food Hygiene and Safety
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• v.3 no.1
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• pp.7-18
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• 1988

In 1987, the level of heavy metals were determined ina total of 200 samples of 9 species of shellfish of Korea. The samples were collected at the fish. markets by 10 Public Institute of Health. The samples were whelk (Buccinum striatiBBimum), oyster (Crassostrea gigas), ark shell(Tegillarca granesa), shartnecked clam (Venerupis semidecussta), hard clam (Meretrix lusoria), top shell (Turbo cornutus), abalone (Haliotis gigantea), ark shell (Scapharea broughtonii), sea-mussel (Mytilus conuscus gould), respectively. The levels of total mercury, lead, cadmium, arsenic, copper, zinc and manganese were determined. The total mercury levels were determined by mercury analyzer using the combustion gold amalgamation method. The arsenic level were determined by spectrophotometry using colorimetric sil ver diethyldithiocarbamate method after dry ash dige8tion of the samples with magnesium oxide and magnesium nitrate. The levels of other metals were determined by inductively coupled pluma spectrophotometry after wet digestion of the samples with nitric acid and su1furic acid. The results were summerized as follows; 1. The overallranges and mean(ppm) were; Hg, ND-O.221 (0.036); Pb, 0.05-1.51 (0.37); Cd, 0.02-1.86 (0.61); As, 0.5-3.97 (1.22); Cu, 0.14-54.16 (4.93); Zn, 7.40-207.17 (30.09); Mn, 0.13-s.72 (3.40). 2. The levels of all 6 metals were found to be below the maximum permissible Iimits set by the Japan lor mercury, the Netherland for lead the Hong Kong for cadmium. The Finland for Arsenic no statutory Iimits for Zn and Mn in shellfish in any countries. 3. The results show that all the 9 species of shellfish studied, none have accumulated levels dangerous enough to pose a health problem.roblem.

• Economic and Environmental Geology
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• v.22 no.1
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• pp.35-63
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• 1989

Geochemical characteristics of the Guryongsan (Ogcheon) uraniferous black slate show that this is an analogue to the conventional Chattanooga and Alum shales in occurrences. Whereas, its highest enrichment ratio in metals including uranium, among others, is explained by the cyclic sedimentation of the black muds and quartz-rich silts, and the uniform depositional condition with some what higher pH condition compared to the conditions of the known occurrences. The cyclic sedimentation, caused by the periodic open and close of the silled basin, has brought about the flush-out) of the uranium depleted water and the recharge with the new metal-rich sea water, which consequently contributed to the high concentration of metals in mud. The metal-rich marine black muds, which mostly occur in the early to middle Palaeozoic times, is attributed by the geologic conditions which related to the atmospheric oxygen contents, and these are scarcely met in the late Precambrian and/or with the onset of Palaeozoic era in the geologic evolution of the earth.