• 천문학회보
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• 제45권1호
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• pp.67.2-67.2
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• 2020

Not only the magnitude of the mirror surface error, the pattern matters as it produces certain aberrations. In particular, the surface error of the freeform mirrors, which are optimized to eliminate specific aberrations, might show much higher sensitivity in optical performance. Therefore, we analyze the mirror surface error with Zernike polynomials with the goal of generating a realistic error surface. We investigate the surface error of the freeform mirror fabricated by diamond turning machine to analyze the realistic tendency of the error. The surface error with 0.22 ㎛ root-mean-square value is fitted to the Zernike terms using the incremental fitting method, which increases the number of the fitting coefficients through steps. Furthermore, optical performance via surface error pattern based on Zernike terms is studied to see the influences of each term. With this study, realistic error surface generation may allow higher accuracy not only for the feasibility test but also for all tests and predictions using optical simulations.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2000년도 춘계학술대회 논문집
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• pp.687-691
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• 2000

Diamond turning machines for manufacture of precision optics require deliberate diagnosis to ensure that all the machine elements are properly operating, kinematically, dynamically and thermally, to produce demanded work qualities. One effective way is to directly inspect topographical features of work surfaces that have been carefully generated with prescribed machining conditions intended to exaggerate faulty consequences of any ill-operating machine elements. In this research, a very-large-scale Phase measuring interferometric system that has been developed for years at Korea Advanced Institute of Science and Technology is used to fulfill the metrological requirements fur the surface analysis. A special stitching technique is used to extend the measuring range, which integrates all the patches that are separately sampled over the whole surface while moving the stage. Then, the measured surface profile is analyzed to releated the machine error sources. For this, zernike polynomial fitting is used together with the wavelet filter and the fourier transform. Experimental results showed that the suggested technique in this study is very effective in diagnosing actual diamond turning machines

• Journal of the Optical Society of Korea
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• 제18권4호
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• pp.335-340
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• 2014

Based on Zernike polynomial fitting, we propose an algorithm believed to be new for interferometric measurements of rotationally asymmetric surface deviation of optics. This method tests and calculates each angular surface by choosing specified rotation angles with lowest error. The entire figure can be obtained by superimposing these sub-surfaces. Simulation and experiment studies for verifying the proposed algorithm are presented. The results show that the accuracy of the proposed method is higher than single-rotation algorithm and almost comparable to the rotation-averaging algorithm with fewer rotation measurements. The new algorithm can achieve a balance between the efficiency and accuracy.

• 한국광학회지
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• 제8권3호
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• pp.189-193
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• 1997

광 pick-up용 비구면 대물 렌즈는 컴퓨터와 멀티미디어 기기 등의 발달로 수요가 급증하고 있으며 사출성형에 의하여 대량 생산되고 있다. 광 pick-up용 비구면 대물 렌즈의 생산성 향상을 위해서는 생산공정중의 전수검사를 요구하며 이는 측정환경에 강인한 측정기를 필요로 하고 있다. 본 연구에서는 생산공정중에 광 pick-up용 비구면 대물 렌즈를 측정할 수 있는 개선된 층밀리기 간섭계를 제안하고자 한다. 본 층밀리기 간섭계는 3개의 직각 프리즘과 1개의 광분할 코팅된 프리즘으로 구성되며 index matching oil에 의하여 상대이동이 가능하도록 조합되어 있다. 간섭무늬를 정확히 분석하기 위한 위상천이와 층밀림량의 조절은 프리즘 간의 상대 이동에 의하여 가능하며 이를 위한 구동 기구부를 제작하였다. 또한, 본 연구에서는 반복연산에 의한 일반 알고리즘을 도입하여 위상천이 시에 발생하는 index matching oil의 유막 두께변화에 의한 기준위상 오차를 보상하였다. 광 pick-up용 비구면 대물 렌즈의 수차량을 정량적으로 산출하기 위하여 Zernike 다항식 맞춤을 수행하였다. 본 간섭계는 측정환경에 매우 강인하며 방진과 밀폐가 없는 열악한 측정환경하에서 반복측정을 수행하였을 때 .lambda./100 이하의 반복능을 얻었다.