• The Bulletin of The Korean Astronomical Society
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• v.45 no.1
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• pp.67.2-67.2
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• 2020

Not only the magnitude of the mirror surface error, the pattern matters as it produces certain aberrations. In particular, the surface error of the freeform mirrors, which are optimized to eliminate specific aberrations, might show much higher sensitivity in optical performance. Therefore, we analyze the mirror surface error with Zernike polynomials with the goal of generating a realistic error surface. We investigate the surface error of the freeform mirror fabricated by diamond turning machine to analyze the realistic tendency of the error. The surface error with 0.22 ㎛ root-mean-square value is fitted to the Zernike terms using the incremental fitting method, which increases the number of the fitting coefficients through steps. Furthermore, optical performance via surface error pattern based on Zernike terms is studied to see the influences of each term. With this study, realistic error surface generation may allow higher accuracy not only for the feasibility test but also for all tests and predictions using optical simulations.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2000.05a
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• pp.687-691
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• 2000

Diamond turning machines for manufacture of precision optics require deliberate diagnosis to ensure that all the machine elements are properly operating, kinematically, dynamically and thermally, to produce demanded work qualities. One effective way is to directly inspect topographical features of work surfaces that have been carefully generated with prescribed machining conditions intended to exaggerate faulty consequences of any ill-operating machine elements. In this research, a very-large-scale Phase measuring interferometric system that has been developed for years at Korea Advanced Institute of Science and Technology is used to fulfill the metrological requirements fur the surface analysis. A special stitching technique is used to extend the measuring range, which integrates all the patches that are separately sampled over the whole surface while moving the stage. Then, the measured surface profile is analyzed to releated the machine error sources. For this, zernike polynomial fitting is used together with the wavelet filter and the fourier transform. Experimental results showed that the suggested technique in this study is very effective in diagnosing actual diamond turning machines

• Journal of the Optical Society of Korea
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• v.18 no.4
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• pp.335-340
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• 2014

Based on Zernike polynomial fitting, we propose an algorithm believed to be new for interferometric measurements of rotationally asymmetric surface deviation of optics. This method tests and calculates each angular surface by choosing specified rotation angles with lowest error. The entire figure can be obtained by superimposing these sub-surfaces. Simulation and experiment studies for verifying the proposed algorithm are presented. The results show that the accuracy of the proposed method is higher than single-rotation algorithm and almost comparable to the rotation-averaging algorithm with fewer rotation measurements. The new algorithm can achieve a balance between the efficiency and accuracy.

• Korean Journal of Optics and Photonics
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• v.8 no.3
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• pp.189-193
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• 1997

Aspheric pick-up lenses are increasingly used in consumer products such as computer and multimedia, as their mass production has become possible owing to the injection molding process. However still much work needs to be done for more effective manufacture of aspheric lenses, one area of which is the in-line inspection of produced lenses. In this paper, we present a lateral-shearing interferometer that has specially been designed to have a high immunity to external vibration and atmospheric disturbance. The interferometer comprises four prisms. They are directly attached to each other using an immersion oil so that relative sliding motions between the prisms are allowed. Their relative displacement can readily generate necessary lateral-shearing and phase-shifting to determine the wavefront of the beam collimated by the lens under inspection. A special phase-measuring algorithm of arbitrary-bucket is adopted to compensate the phase-shifting error caused by the thickness reduction in the immersion oil. Zernike polynomial fitting has done for determinating quantitative aberration of aspheric pick-up lenses. The interferometer built in this work is robust to external mechanical vibration and atmospheric disturbance so that experimental results show that it has a repeatability of less than λ/100.