Effects of In concentration and substrate temperature on properties of ZIO films deposited by RF magnetron sputtering (RF 스퍼터링법에 의해 증착한 ZIO 박막의 물성에 미치는 In 함량과 기판온도의 영향)
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- Proceedings of the Korean Institute of Surface Engineering Conference
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- 2009.05a
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- pp.135-135
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- 2009