• 제목/요약/키워드: YAG laser annealing

검색결과 31건 처리시간 0.028초

박판 A3003 Al합금의 Nd : YAG 레이저빔 용접에 관한 연구 (A Study on the Welding Behavior of A3003 Aluminium Alloy Thin Sheet by Nd : YAG Laser Beam)

  • 허인석;김병철;김도훈;김진수;이한용
    • 한국레이저가공학회지
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    • 제4권1호
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    • pp.29-38
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    • 2001
  • This work was carried out to investigate the welding behavior of thin A3003 Al alloy sheets by Nd : YAG laser beam. Considering bead shape and mechanical properties, the laser pulse shapes selected were two kinds of 2-division and 3-division by varying power level and pulse duration. In order to obtain optimum conditions, the factorial design method and central composite design method were applied. Tensile test, optical microscopy, micro hardness test and TEM analysis were performed. Due to the annealing caused by thermal effect during laser welding, precipitates were coarsended. The HAZ was softened and failed during tensile test. The hardness of HAZ was lower than that of base metal, since the heat input relieved the work hardening effect and caused grain growth.

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Microstructure and electrical properties of high power laser thermal annealing on inkjet printed Ag films

  • Yoon, Yo-Han;Yi, Seol-Min;Yim, Jung-Ryoul;Lee, Ji-Hoon;Joo, Young-Chang
    • 한국재료학회:학술대회논문집
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    • 한국재료학회 2009년도 춘계학술발표대회
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    • pp.36.2-36.2
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    • 2009
  • In this work, the high power CW Nd:YAG laser has been used for thermal treatment of inkjet printed Ag films-involving eliminating organic additives (dispersant, binder, and organic solvent) of Ag ink and annealing Ag nanoparticles. By optimizing laser parameters, such as laser power and defocusing value, the laser energy can totally be converted to heat energy, which is used to thermal treatment of inkjet printed Ag films. This results in controlling the microstructures and the resistivity of films. We investigated the thermal diffusion mechanisms during laser annealing and the resulting microstructures. The impact of high power laser annealing on microstructures and electrical characteristic of inkjet printed Ag films is compared to those of the films annealed by a conventional furnace annealing. Focused ion beam (FIB) channeling image shows that the laser annealed Ag films have large columnar grains and dense structure (void free), while furnace annealed films have tiny grains and exhibit void formation. Due to these microstructural characteristics of laser annealed films, it has better electrical property (low resistivity) compared to furnace annealed samples.

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In-Situ Pulse Laser Annealing 증착에 의한 광학박막의 표면 개선 효과 (Effect of Surface Improvement on Thin Film by In-Situ Laser Annealing Deposition)

  • 이세호;유연석
    • 한국광학회지
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    • 제20권1호
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    • pp.34-40
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    • 2009
  • $MgF_2$, $SiO_2$ 및 ZnS 박막을 물리 증기 증착하는 동안 펄스 레이저(Nd-YAG, 제2고조파 532 nm)로 Annealing 하여 표면 거칠기 특성을 개선하였다. 펄스 반복율이 10 Hz, 펄스폭 5 ns, 파장 532 nm인 펄스레이저로 Annealing한 유리 기판에 증착된 $MgF_2$$SiO_2$ 시료들은 레이저 에너지가 $140\;mJ/cm^2$ 경우에 산란 총량 값이 최소가 되었지만, ZnS 박막의 경우에는 Annealing 레이저광 에너지가 $62\;mJ/cm^2$일 때 산란 총량이 최소값을 나타냈다. AFM을 사용하여 박막시료의 표면 거칠기에 대한 펄스 레이저 Annealing 효과를 측정 하였다. 그 결과는 TIS 측정치와 유사 하여 표면 거칠기는 Annealing 하기위해 조사된 레이저 에너지에 의존 하여 감소하였다.

ZnO:P 박막의 레이저 어닐링 연구 (Laser annealing on ZnO:P thin films)

  • 장현우;강홍성;김건희;임성훈;이상렬
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2005년도 추계학술대회 논문집 Vol.18
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    • pp.51-52
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    • 2005
  • Phosphorus doped ZnO thin films on (001) $Al_2O_3$ substrate have been prepared by a pulsed laser deposition (PLD) technique using a Nd:YAG laser. After deposition, phosphorus doped ZnO thin films have been annealed in vacuum, air, nitrogen, and oxygen ambients using pulsed Nd:YAG laser. We report the electrical properties of phosphorus doped ZnO thin films with the variation of the laser annealing conditions for the applications of optoelectronic devices.

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Application of 532 nm YAG-Laser Annealing to Crystallization of Amorphous Si Thin Films Deposited on Glass Substrates

  • Lee, Jong-Won;So, Byung-Soo;Chung, Ha-Seung;Hwang, Jin-Ha
    • 한국재료학회지
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    • 제18권3호
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    • pp.113-116
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    • 2008
  • A 532 nm Nd-YAG laser was applied to crystallize amorphous Si thin films in order to evaluate the applicability of a Nd-YAG laser to low-temperature polycrystalline Si technology. The irradiation of a green laser was controlled during the crystallization of amorphous Si thin films deposited onto glass substrates in a sophisticated process. Raman spectroscopy and UV-Visible spectrophotometry were employed to quantify the degree of crystallization in the Si thin films in terms of its optical transmission and vibrational characteristics. The effectiveness of the Nd-YAG laser is suggested as a feasible alternative that is capable of crystallizing the amorphous Si thin films.

A Study on the Output Stabilization of the Nd:YAG Laser by the Monitoring of Capacitor Charging Voltage

  • Noh, Ki-Kyong;Song, Kum-Young;Park, Jin-Young;Hong, Jung-Hwan;Park, Sung-Joon;Kim, Hee-Je
    • KIEE International Transactions on Electrophysics and Applications
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    • 제4C권3호
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    • pp.96-100
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    • 2004
  • The Nd: YAG laser is commonly used throughout many fields such as accurate material processing, IC marking, semiconductor annealing, medical operation devices, etc., due to the fact that it has good thermal and mechanical properties and is easy to maintain. In materials processing, it is essential to vary the laser power density for specific materials. The laser power density can be mainly controlled by the current pulse width and pulse repetition rate. It is important to control the laser energy in those fields using a pulsed laser. In this paper we propose the constant-frequency current resonant half-bridge converter and monitoring of capacitor charging voltage. This laser power supply is designed and fabricated to have less switching loss, compact size, isolation with primary and secondary transformers, and detection of capacitor charging voltage. Also, the output stabilization characteristics of this Nd: YAG laser system are investigated. The test results are described as a function of laser output energy and flashlamp arc discharging constant. At the energy storage capacitor charges constant voltage, the laser output power is 2.3% error range in 600[V].

PLD를 이용한 ZnO 박막의 후열처리에 관한 연구 (Effects of Post-Annealing Treatment of ZnO Thin Films by Pulsed Laser)

  • 이천;김재홍
    • 대한전기학회논문지:전기물성ㆍ응용부문C
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    • 제54권3호
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    • pp.103-108
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    • 2005
  • ZnO thin films on (001) sapphire substrates have been deposited by pulsed laser deposition(PLD) technique using an Nd:YAG laser with a wavelength of 266nm. Before post-annealing treatment in the oxygen ambient, the experiment of the deposition of ZnO thin films has been performed for substrate temperatures in the range of $300\~450^{\circ}C$ and oxygen gas flow rate of $100\~700\;sccm$. In order to investigate the effect of post-annealing treatment of ZnO thin films, films have been annealed at various temperatures after deposition. After post-annealing treatment in the oxygen ambient, the structural properties of ZnO thin films were characterized by X-ray diffraction(XRD), scanning electron microscopy(SEM) and the optical properties of the ZnO were characterized by photoluminescence(PL).

로 열처리 및 펄스레이저에 의한 박막의 비젖음 현상을 이용한 코발트 나노 입자 형성 (Formation of Cobalt Nanoparticles by Thin Film Dewetting using Furnace and Pulse-Laser Annealing Processes)

  • 황석훈;김정환;오용준
    • 대한금속재료학회지
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    • 제47권5호
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    • pp.316-321
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    • 2009
  • Co nanoparticles on silica substrates were fabricated by inducing a thin-film dewetting through two different processes-furnace annealing and pulsed-laser annealing. The effects of annealing temperature, film thickness and laser energy density on dewetting morphology and mechanism were investigated. Co thinfilms with thicknesses between 3 to 15 nm were deposited using ion-beam sputtering, and then, in order to induce dewetting, thermally annealed in furnace at temperatures between 600 and $900^{\circ}C$. Some as-deposited films were irradiated using a Nd-YAG pulsed-laser of 266 nm wavelength to induce dewetting in liquid-state. Films annealed in furnace agglomerated to form nanoparticles above $700^{\circ}C$, and those average particle size and spacing were increased with an increase of film thickness. On the laser annealing process, above the energy density of $100mJ/cm^2$, metal films were completely dewetted and the agglomerated particles exhibited greater size uniformity than those on the furnace annealing process. A detailed dewetting mechanism underlaying both processes were discussed.

Hydrogen Passivation for the Enhancement of Poly-Si Performance Crystallized By Double-Frequency YAG Laser

  • Li, Juan;Chong, Luo;Ying, Yao;He, Li;Meng, Zhiguo;Chunya, Wu;Xiong, Shaozhen;Kwok, Hoi-Sing
    • 한국정보디스플레이학회:학술대회논문집
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    • 한국정보디스플레이학회 2009년도 9th International Meeting on Information Display
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    • pp.1608-1611
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    • 2009
  • Here the hydrogen passivation treatment has been adopted to enhance the performance of poly-Si crystallized by YAG laser annealing (LA poly-Si). We have investigated the effects of passivation time, passivation power and passivation temperature on the hall mobility of the LA poly-Si and analyzed the mechanism of the hydrogen passivation preliminary. It has been found that the quality of the poly-Si annealed by YAG laser could be improved after proper hydrogen plasma treatment.

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PLD를 이용한 ZnO 박막의 후열처리에 관한 연구 (Effects of post-annealing treatment of ZnO Thin Films by Pulsed Laser Deposition)

  • 김재홍;이천
    • 대한전기학회:학술대회논문집
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    • 대한전기학회 2004년도 하계학술대회 논문집 C
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    • pp.1627-1630
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    • 2004
  • ZnO thin films on (001) sapphire substrates have been deposited by pulsed laser deposition(PLD) technique using an Nd:YAG laser with a wavelength of 266nm. Before post-annealing treatment in the oxygen ambient, the experiment of the deposition of ZnO thin films has been performed for substrate temperatures in the range of $300{\sim}450^{\circ}C$ and flow rate of 100${\sim}$700 seem. In order to investigate the effect of post-annealing treatment of ZnO thin films, films have been annealed at various temperatures after deposition. After post-annealing treatment in the oxygen ambient, the structural properties of ZnO thin films were characterized by X-ray diffraction(XRD) and the optical properties of the ZnO were characterized by photoluminescence(PL).

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