The Effects of Metal Structure on the Junction Stability of Sub-micron Contacts Using Selective CVD-W Plug (금속 구조 변화에 따른 선택 화학기상증착 W Plug의 접합 신뢰성 연구)
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- Journal of the Korean Institute of Telematics and Electronics A
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- v.31A no.5
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- pp.94-100
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- 1994