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BPSG 및 PSG CVD 공정 중 발생하는 오염입자 발생특성

  • Na, Jeong-Gil;Mun, Ji-Hun;Choe, Hu-Mi;Kim, Tae-Seong;Choe, Jae-Bung;Im, Seong-Gyu;Park, Sang-Hyeon;Lee, Heon-Jeong;Go, Yong-Gyun;Lee, Sang-Mi;Yun, Ju-Yeong;Gang, Sang-U
    • Proceedings of the Korean Vacuum Society Conference
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    • 2010.02a
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    • pp.261-261
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    • 2010
  • 본 연구에서는 PBMS (Particle Beam Mass Spectrometer)와 ISPM (In-Situ Particle Monitor)을 연계하여 BPSG (Borophosphosilicate Glass) 및 PSG (Phosphosilicate Glass) 박막 증착을 위한 CVD (chemical vapor deposition) 공정 중 발생하는 오염입자 발생특성에 대해 비교 평가하였다. 소스는 TEB (Triethylborate), TEPO (Triethylphosphate) 및 TEOS (Tetraethoxysilane)를 사용하였고, 운반가스 및 반응가스로 He과 $O_2$$O_3$를 사용하였다. 증착온도와 압력은 각각 $450^{\circ}C$, 200 Torr 이었다. 반응기의 배기라인에 PBMS와 ISPM을 설치하고 500 nm 이하의 입자에 대해 공정단계별 시간에 따른 모니터링 결과 전 공정에 걸쳐 동일한 패턴의 입자발생분포를 보였으며, 특히 PBMS의 경우 ISPM의 입자측정한계인 260 nm 이하의 입자크기도 측정할 수 있었다. 입자발생이 안정적으로 일어나는 증착공정 중 PBMS를 통하여 입자크기를 측정한 결과 BPSG의 경우 약 110 nm, PSG의 경우 약 80 nm의 분포를 나타내었다. 이를 통해 TEB 소스가 배제된 PSG의 경우 BPSG의 경우보다 입자의 성장이 지체됨을 확인하였다. 측정에 대한 신뢰성을 확보하기 위해 PBMS 내의 TEM (Transmission Electron Microscopy) grid를 이용하여 입자를 샘플링 하였고, TEM 분석을 실시한 결과 PBMS 측정결과와 잘 일치하였다. 또한 EDS (Energy Dispersive Spectroscopy) 분석을 통하여 입자성분에 대해 검증하였다.

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Sensitivity Analysis of Nozzle Geometry Variables for Estimating Residual Stress in RPV CRDM Penetration Nozzle (원자로 상부헤드 관통노즐의 잔류응력 예측을 위한 노즐 형상 변수 민감도 연구)

  • Bae, Hong Yeol;Oh, Chang Young;Kim, Yun Jae;Kim, Kwon Hee;Chae, Soo Won;Kim, Ju Hee
    • Transactions of the Korean Society of Mechanical Engineers A
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    • v.37 no.3
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    • pp.387-395
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    • 2013
  • Recently, several circumferential cracks were found in the control rod drive mechanism (CRDM) nozzles of U.S. nuclear power plants. According to the accident analyses, coolant leaks were caused by primary water stress corrosion cracking (PWSCC). The tensile residual stresses caused by welding, corrosion sensitive materials, and boric acid solution cause PWSCC. Therefore, an exact estimation of the residual stress is important for reliable operation. In this study, finite element simulations were conducted to investigate the effects of the tube geometry (thickness and radius) on the residual stresses in a J-groove weld for different CRDM tube locations. Two different tube locations were considered (center-hole and steepest side hill tube), and the tube radius and thickness variables ($r_o/t$=2, 3, 4) included two different reference values ($r_o$=51.6, t=16.9mm).

Power Enhance Effect on the Hybrid Cell Based on Direct Current Nanogenerator and an Organic Photovoltaic Device

  • Yun, Gyu-Cheol;Sin, Gyeong-Sik;Lee, Geun-Yeong;Lee, Ju-Hyeok;Kim, Sang-U
    • Proceedings of the Korean Vacuum Society Conference
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    • 2013.08a
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    • pp.298-298
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    • 2013
  • Finding renewable and clean energy resources is essential research to solve global warming and depletion of fossil fuels in modern society. Recently, complex harvesting of energy from multiple sources is available in our living environments using a single device has become highly desirable, representing a new trend in energy technologies. We report that when simultaneously driving the fusion and composite cells of two or more types, it is possible to make an affect the other cells to obtain a greater synergistic effect. To understand the coupling effect of photovoltaic and piezoelectric device, we fabricate the serially integrated hybrid cell (s-HC) based on organic solar cell (OSC) and piezoelectric nanogenerator (PNG). The size of increased voltage peaks when OSC and PNG are working on is larger than the case when only PNG is working. This voltage difference is the Voc change of OSC, not the voltage change of PNG and current density difference between these two cases is manifested more clearly. When the OSC and PNG are working in s-HC at the same time, piezoelectric potential (VPNG) is generated in ZnO and theoretical total voltage is sum of voltage of an OSC (VOSC) and VPNG. However, electrons from OSC are influenced by piezoelectric potential in ZnO and current loss of OSC in whole circuit decreases. As a result, VOSC increases temporarily. Current shows the similar behavior. PNG acts a resistance in the whole circuit and current loss occurs when the electrons from OSC pass through the PNG. But piezoelectric potential recover current loss and decrease the resistance of PNG. Our PNG can maintain piezoelectric potential when the strain is held owing to the LDH layer while general PNG cannot maintain piezoelectric potential. During the section that strain is held, voltage enhancement effect is maintained and same effect appeared even turn off the light. Actually at this time, electrons in ZnO nanosheets move to LDH and trapped by the positive charges in this layer. After this strain is held, piezoelectric potential of ZnO nanosheets is disappeared but potential difference which is developed by negative charge dominant LDH layer is remained. This potential acts similar role like piezoelectric potential in ZnO. Electrons from the OSC also are influenced by this potential and the more current flows.

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Effects of cultivated wild ginseng pharmacopuncture on lowering lipid and oxidative capacity in biochemical and molecular biological study in obese rats (산양산삼약침의 지질강하 및 항산화효과에 대한 생화학적 및 분자생물학적 검토)

  • Choi, Eun-Ju;Lee, Joon-Moo;Won, Seung-Hwan;Kwon, Ki-Rok
    • Journal of Pharmacopuncture
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    • v.9 no.1
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    • pp.5-20
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    • 2006
  • Objectives : This study was carried out to identified the effects of distilled cultivated wild ginseng pharmacopuncture to the obesity. Methods : Cultivated wild ginseng pharmacopuncture was administered on the points of chung-wan(CV12), $Ch'{\breve{o}}nch'u$(ST25), and Chok-samni(ST36) on lowering lipid and oxidative capacity in biochemical and molecular biological aspects were investigated in obese rats fed with high fat diet. Results : 1. The contents of plasma ${\beta}-lipoprotein$ showed a tendency to decrease in the pharmacopuncture groups compared to the control group. In the pharmacopuncture groups, the values of ST25 and ST36 pharmacopuncture groups showed lower value. 2. The contents of plasma free fatty acids showed a tendency to decrease in pharmacopuncture groups compared to the control group. However, in the pharmacopuncture groups, the values were not significantly different. 3. Plasma triglyceride and glucose showed lower value in the ST25 pharmacopuncture groups compared with the other groups. 4. The activity of AST showed a tendency to decrease in the pharmacopuncture groups. However, the activity of ALT was not significantly different in all the treatment groups. 5. Plasma total cholesterol and LDL-cholesterol showed lower value in the ST25 and ST36 pharmacopuncture groups and HDL-cholesterol showed higher value in the CV12 pharmacopuncture groups than that of the other treatment groups. 6. Liver total cholesterol values didn't show significant difference in all the treatment groups, and triglyceride showed lower value in the pharmacopuncture groups. 7. The contents of plasma TEARS showed lower value in the ST25 pharmacopuncture group and contents of liver TBARS showed a tendency to decrease in the pharmacopuncture groups. However these values didn't show significant difference in the pharmaco puncture groups. 8. Liver super oxide dismutase activity showed higher value in the ST25 and ST36 pharmacopuncture groups, and the value of liver glutathione peroxidase and catalase activity showed a tendency to increase in the pharmacopuncture groups. However, these values showed no significant difference in the pharmacopuncture groups. 9. Expression of apo-B and E mRNA in liver cells was lower in the ST25 pharmacopuncture group than that of the other treatment groups. However, expression of $TNF-{\alpha}$ and leptin mRNA in adipose cell showed no difference among all the treatment groups. 10. ST25 pharmacopuncture group showed a good histological character of liver. It showed similar to that of normal group. However other treatment groups and control group showed slight vasodilation and slight fat accumulation. Conclusion : These results indicate that distilled cultivated wild ginseng pharmacopuncture suppressed adipose tissue mass and lipid peroxidation, and increased antioxidant capacity.

Syntheses and Solvolysis of Biological Active 1-(Methacryloyloxymethyl)-5-fluorouracil and Its Polymers (생물활성을 갖는 1-메타크릴로일옥시메틸-5-플루오로우라실 및 그 중합체의 합성과 가용매반응)

  • Lee, Neung-Ju;Oh, Sang-Hoon;Ha, Chang-Sik;Lee, Jin-Kook;Cho, Won-Jei
    • Applied Chemistry for Engineering
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    • v.1 no.2
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    • pp.190-196
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    • 1990
  • The biological active monomer, 1-(methacryloyloxymethyl)-5-fluorouracil(MAOMFU) was synthesized from 2, 4-bis(trimethylsilyloxy)-5-fluoropyrimidine. Poly(MAOMFU) poly(1-methacryloyloxymethyl-5-f1uorouracil-co-methyl methacrylate), and poly(MAOMFU-co-MMA) were also obtained by radical polymerization at $60^{\circ}C$. The monomer reactivity ratios, $r_1$ and $r_2$ were determined by $Kelen-T\ddot{u}d\ddot{o}s$ method ; $r_1(MAOMFU)=0.72$, and $r_2(MMA)=1.24$. These reactivity values imply that the copolymerization was mainly affected by the steric hindrance of MAOMFU. It was found from kinetic measurements that the rate constants of solvolysis are given as $6.42{\times}10^{-5}sec^{-1}$ and $7.40{\times}10^{-6}sec^{-6}$, respectively, for MAOMFU and poly(MAOMFU).

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EEG based Vowel Feature Extraction for Speech Recognition System using International Phonetic Alphabet (EEG기반 언어 인식 시스템을 위한 국제음성기호를 이용한 모음 특징 추출 연구)

  • Lee, Tae-Ju;Sim, Kwee-Bo
    • Journal of the Korean Institute of Intelligent Systems
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    • v.24 no.1
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    • pp.90-95
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    • 2014
  • The researchs using brain-computer interface, the new interface system which connect human to macine, have been maded to implement the user-assistance devices for control of wheelchairs or input the characters. In recent researches, there are several trials to implement the speech recognitions system based on the brain wave and attempt to silent communication. In this paper, we studied how to extract features of vowel based on international phonetic alphabet (IPA), as a foundation step for implementing of speech recognition system based on electroencephalogram (EEG). We conducted the 2 step experiments with three healthy male subjects, and first step was speaking imagery with single vowel and second step was imagery with successive two vowels. We selected 32 channels, which include frontal lobe related to thinking and temporal lobe related to speech function, among acquired 64 channels. Eigen value of the signal was used for feature vector and support vector machine (SVM) was used for classification. As a result of first step, we should use over than 10th order of feature vector to analyze the EEG signal of speech and if we used 11th order feature vector, the highest average classification rate was 95.63 % in classification between /a/ and /o/, the lowest average classification rate was 86.85 % with /a/ and /u/. In the second step of the experiments, we studied the difference of speech imaginary signals between single and successive two vowels.

Environmental Characteristics of Naturally Occurring Radioactive Materials (238U, 222Rn) Concentration in Drinking Groundwaters of Metamorphic Rock Areas: Korea (국내 변성암 지역 음용지하수 중 자연방사성물질(238U, 222Rn)의 환경 특성 연구)

  • Ju, Byoung Kyu;Kim, Moon Su;Jeong, Do Hwan;Hong, Jung Ki;Kim, Dong Su;Noh, Hoe Jung;Yoon, Jeong Ki;Kim, Tae Seung
    • Journal of Soil and Groundwater Environment
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    • v.18 no.3
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    • pp.82-92
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    • 2013
  • This study has investigated naturally occurring radioactive materials (N.O.R.M; $^{238}U$, $^{222}Rn$) for 353 drinking groundwater wells in metamorphic rock areas in Korea. Uranium concentrations ranged from N.D (not detected) to 563.56 ${\mu}g/L$ (median value, 0.68 ${\mu}g/L$) and radon concentrations ranged from 108 to 11,612 pCi/L (median value, 1,400 pCi/L). Uranium and radon concentrations in the groundwater generally are similar to USA with similar geological setting. Uranium concentrations in 9 wells (2.6%) exceeded 30 ${\mu}g/L$, which is the maximum contaminant level (MCL) by the US environmental protection agency (EPA), radon concentrations in 46 wells (13%) exceeded 4,000 pCi/L, which is the Alternative MCL (AMCL) by the US.EPA. The log-log correlation coefficient between uranium and radon was 0.32. The correlation coefficient between uranium and pH was 0.12 and the correlation coefficient between radon and temperature was -0.01. The correlation coefficient between uranium and $HCO_3$ was 0.09 and the correlation coefficient between uranium and Ca was 0.11. The median value of uranium was high Chung-Buk (1.78 ${\mu}g/L$), Gyeong-Buk (1.37 ${\mu}g/L$), In-Cheon (1.06 ${\mu}g/L$) for each province. On the other hand, the median value of radon was high In-Cheon (2,962 pCi/L), Chung-Buk (2,339 pCi/L), Jeon-Buk (2,165 pCi/L) for each province. Jeon-Buk for log-log correlation coefficient is the highest (0.63) among provinces.

NMDA Receptor and NO Mediate ET-1-Induced Behavioral and Cardiovascular Effects in Periaqueductal Gray Matter of Rats

  • Ryu, Jung-Su;Shin, Chang-Yell;Yang, Sung-Jun;Lee, Tai-Sang;La, Hyun-O;Song, Hyun-Ju;Yom, Yoon-Ki;Huh, In-Hoi;Sohn, Uy-Dong
    • Archives of Pharmacal Research
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    • v.24 no.1
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    • pp.64-68
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    • 2001
  • Endothelin-1 (ET-1 ), a novel and potent vasoconstrictor in blood vessel, is known to have some functions in the rat central nervous system (CNS), In order to investigate the central functions of ET-1 , ET-1 was administered to the periaqueductal gray area (PAC) of anesthetized rats to induce barrel rolling and increase the arterial blood pressure (ABP). ET-1 had a modulatory effect on central cardiovascular and behavioral control. The selective N-methyl-D-aspartate (NMDA) receptor antagonist MK-801 (3${u}m/ol/kg$, i.p.) blocked the ET-1 induced responses, and both the nitric oxide synthase (NOS) inhibitor L-NAME (N-nitro-L-arginine mIThyl-ester 1 nmol/rat) and the nitric oxide (NO) scavenger hemoglobin (15 nmol/rat) had similar effects in redtAcing the IT-1 (10 pmol/rat)-induced behavioral changes and ABP elevation. However, NO donor sodium nitroprusside (SNP 10${u}g$, 1${u}g/rat$) decreased the ET-1 induced ABP elevation, and recovered the ET-1 -induced barrel rolling effect that was reduced by MK-801. These results suggest that ET-1 might have neuromodulatory functions such as ABP elevation and barrel rolling induction in the PAG of the rats via the NMDA receptor and NO.

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Controlling the Work Functions of Graphene by Functionalizing the Surface of $SiO_2$ Substrates with Self-assembled Monolayers

  • Jo, Ju-Mi;Kim, Yu-Seok;Cha, Myeong-Jun;Lee, Su-Il;Jeong, Sang-Hui;Song, U-Seok;Kim, Seong-Hwan;Jeon, Seung-Han;Park, Jong-Yun
    • Proceedings of the Korean Vacuum Society Conference
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    • 2012.08a
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    • pp.400-401
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    • 2012
  • 그래핀(Graphene)은 열 전도도가 높고 전자 이동도(200 000 cm2V-1s-1)가 우수한 전기적 특성을 가지고 있어 전계 효과 트랜지스터(Field effect transistor; FET), 유기 전자 소자(Organic electronic device)와 광전자 소자(Optoelectronic device) 같은 반도체 소자에 응용 가능하다. 그러나 에너지 밴드 갭이 없기 때문에 소자의 전기적 특성이 제한되는 단점이 있다. 최근에는 아크 방출(Arc discharge method), 화학적 기상 증착법(Chemical vapor deposition; CVD), 이온-조사법(Ion-irradiation) 등을 이용한 이종원자(Hetero atom)도핑과 화학적 처리를 이용한 기능화(Functionalization) 등의 방법으로 그래핀을 도핑 후 에너지 밴드 갭을 형성시키는 연구 결과들이 보고된 바 있다. 그러나 이러한 방법들은 표면이 균일하지 않고, 그래핀에 많은 결함들이 발생한다는 단점이 있다. 이러한 단점을 극복하기 위해 자가조립 단층막(Self-assembled monolayers; SAMs)을 이용하여 이산화규소(Silicon oxide; SiO2) 기판을 기능화한 후 그 위에 그래핀을 전사하면 그래핀의 일함수를 쉽게 조절하여 소자의 전기적 특성을 최적화할 수 있다. SAMs는 그래핀과 SiO2 사이에 부착된 매우 얇고 안정적인 층으로 사용된 물질의 특성에 따라 운반자 농도나 도핑 유형, 디락 점(Dirac point)으로부터의 페르미 에너지 준위(Fermi energy level)를 조절할 수 있다[1-3]. 본 연구에서는 SAMs한 기판을 이용하여 그래핀의 도핑 효과를 확인하였다. CVD를 이용하여 균일한 그래핀을 합성하였고, 기판을 3-Aminopropyltriethoxysilane (APTES)와 Borane-Ammonia(Borazane)을 이용하여 각각 아민 기(Amine group; -NH2)와 보론 나이트라이드(Boron Nitride; BN)로 기능화한 후, 그 위에 합성한 그래핀을 전사하였다. 기판 위에 NH2와 BN이 SAMs 형태로 존재하는 것을 접촉각 측정(Contact angle measurement)을 통해 확인하였고, 그 결과 NH2와 BN에 의해 그래핀에 도핑 효과가 나타난 것을 라만 분광법(Raman spectroscopy)과 X-선 광전자 분광법(X-ray photoelectron spectroscopy: XPS)을 이용하여 확인하였다. 본 연구 결과는 안정적이면서 패턴이 가능하기 때문에 그래핀을 기반으로 하는 반도체 소자에 적용 가능할 것이라 예상된다.

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Improvement of Electrical Characteristics in Double Gate a-IGZO Thin Film Transistor

  • Lee, Hyeon-U;Jo, Won-Ju
    • Proceedings of the Korean Vacuum Society Conference
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    • 2016.02a
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    • pp.311-311
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    • 2016
  • 최근 고성능 디스플레이 개발이 요구되면서 기존 비정질 실리콘(a-Si)을 대체할 산화물 반도체에 대한 연구 관심이 급증하고 있다. 여러 종류의 산화물 반도체 중 a-IGZO (amorphous indium-gallium-zinc oxide)가 높은 전계효과 이동도, 저온 공정, 넓은 밴드갭으로 인한 투명성 등의 장점을 가지며 가장 연구가 활발하게 보고되고 있다. 기존에는 SG(단일 게이트) TFT가 주로 제작 되었지만 본 연구에서는 DG(이중 게이트) 구조를 적용하여 고성능의 a-IGZO 기반 박막 트랜지스터(TFT)를 구현하였다. SG mode에서는 하나의 게이트가 채널 전체 영역을 제어하지만, double gate mode에서는 상, 하부 두 개의 게이트가 동시에 채널 영역을 제어하기 때문에 채널층의 형성이 빠르게 이루어지고, 이는 TFT 스위칭 속도를 향상시킨다. 또한, 상호 모듈레이션 효과로 인해 S.S(subthreshold swing)값이 낮아질 뿐만 아니라, 상(TG), 하부 게이트(BG) 절연막의 계면 산란 현상이 줄어들기 때문에 이동도가 향상되고 누설전류 감소 및 안정성이 향상되는 효과를 얻을 수 있다. Dual gate mode로 동작을 시키면, TG(BG)에는 일정한 positive(or negative)전압을 인가하면서 BG(TG)에 전압을 가해주게 된다. 이 때, 소자의 채널층은 depletion(or enhancement) mode로 동작하여 다른 전기적인 특성에는 영향을 미치지 않으면서 문턱 전압을 쉽게 조절 할 수 있는 장점도 있다. 제작된 소자는 p-type bulk silicon 위에 thermal SiO2 산화막이 100 nm 형성된 기판을 사용하였다. 표준 RCA 클리닝을 진행한 후 BG 형성을 위해 150 nm 두께의 ITO를 증착하고, BG 절연막으로 두께의 SiO2를 300 nm 증착하였다. 이 후, 채널층 형성을 위하여 50 nm 두께의 a-IGZO를 증착하였고, 소스/드레인(S/D) 전극은 BG와 동일한 조건으로 ITO 100 nm를 증착하였다. TG 절연막은 BG 절연막과 동일한 조건에서 SiO2를 50 nm 증착하였다. TG는 S/D 증착 조건과 동일한 조건에서, 150 nm 두께로 증착 하였다. 전극 물질과, 절연막 물질은 모두 RF magnetron sputter를 이용하여 증착되었고, 또한 모든 patterning 과정은 표준 photolithography, wet etching, lift-off 공정을 통하여 이루어졌다. 후속 열처리 공정으로 퍼니스에서 질소 가스 분위기, $300^{\circ}C$ 온도에서 30 분 동안 진행하였다. 결과적으로 $9.06cm2/V{\cdot}s$, 255.7 mV/dec, $1.8{\times}106$의 전계효과 이동도, S.S, on-off ratio값을 갖는 SG와 비교하여 double gate mode에서는 $51.3cm2/V{\cdot}s$, 110.7 mV/dec, $3.2{\times}108$의 값을 나타내며 훌륭한 전기적 특성을 보였고, dual gate mode에서는 약 5.22의 coupling ratio를 나타내었다. 따라서 산화물 반도체 a-IGZO TFT의 이중게이트 구조는 우수한 전기적 특성을 나타내며 차세대 디스플레이 시장에서 훌륭한 역할을 할 것으로 기대된다.

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