• Tribology and Lubricants
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• 제15권2호
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• pp.184-192
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• 1999

Various compositions of$ Cr_2$$O_3$/Mo composite powders were fabricated using spray-drying method and plasma-spray coatings of these powders were prepared to understand their tribological properties. Experiments were conducted using a reciprocal type tribo-tester at room temperature under dry sliding condition. The worn surface of coated specimens were observed using SEM (Scanning Electron Microscopy) and chemical compositions were analyzed using XRD (X-ray Diffractometry) and XPS (X-ray Photoelectron Spectroscopy). The results showed that friction coefficient of the Mo added specimens were lower than that of $Cr_2$$O_3$specimen. However $Cr_2$$O_3$specimen showed the lowest wear loss. Wear protecting layer were observed at the worn surface of coated specimens with Mo addition. From the XPS analysis, the mixed phases of $Cr_2$$O_3$ $CrO_3$and $MoO_3$were founded in the wear protecting layer.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2011년도 제41회 하계 정기 학술대회 초록집
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• pp.188-188
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• 2011

MgO는 암염구조의 이온결합성 화합물로 7.8 eV의 높은 띠 틈과 약 95%의 탁월한 투과도를 갖는다. 또한, ${\gamma}$ process에 의한 이차 전자 방출이 높고 이온 스퍼터링에 의한 표면 손상이 적어 면 방전 AC-PDP의 보호막으로 이용된다. 따라서 MgO 보호막에 관한 연구는 이차 전자 방출 계수를 높여 방전 전압을 감소시키고 높은 유전율과 투과도를 유지시키기 위한 목적으로 전개되어지고 있다. 본 연구는 이온 스퍼터링에 의한 MgO 보호막의 표면 특성의 변화를 알아보기 위해 이루어졌다. MgO 박막은 electron beam evaporation의 방법을 통해 챔버 내에 O 기체를 주입하고 P type Si 기판을 300$^{\circ}C$ 가열하여 40 nm 두께로 제작되었다. 박막 시료는 표면분석 전 초고진공챔버 내에서 표면에 산화된 불순물 제거를 위해 550$^{\circ}C$의 열처리가 되어졌다. 그리고 250 eV의 He 이온으로 박막 표면을 스퍼터링 하여 XPS, REELS, UPS를 이용하여 전자 및 광학적 특성을 연구하였다. XPS 분석을 통해 MgO 박막은 He 이온 스퍼터링에 의해 표면의 화학적 조성이 변하지 않는다는 것을 확인했다. MgO 박막에 이온 스퍼터링을 하면 표준 시료와 비교하여 Ep=1,500 eV일 때 7.54 eV에서 7.63 eV로 높아지는 경향이 있다. 일함수는 He 이온 스퍼터링 한 결과 3.85 eV로부터 4.09 eV로 약간 높아졌다. 또한, QUEELS simulation으로 얻은 가시광 투과도는 91~92%로 분석되었다.

• 한국염색가공학회지
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• 제26권3호
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• pp.201-208
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• 2014

The high value-added functionality for synthetic fiber can be considered through a plasma enhanced treatment. In this study, PET(Polyethyleneterephthalate) was treated with a glow plasma and corona treatment. Surface characteristics of treated fabric were investigated using electron scanning microscopy(SEM), contact angle, X-ray photoelectron spectroscopy(XPS), tensile and adhesion strength. It was found that the contact angle showed $85.5^{\circ}$ for untreated fabric, $0^{\circ}$ for plasma and corona treatment at the condition of 200W for 7min. By XPS analysis, atomic ratio of O 1s/C 1s was increased from 0.27 to 0.43 by glow plasma and 0.27 to 0.41 by corona treatment at 200W for 7min, respectively. Glow plasma and corona treatment did not significantly change the tensile strength of PET fabric. Adhesion strength showed a substantial enhancement for the surface treated with the glow plasma, while corona treatment was adversely affected.

• 한국표면공학회지
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• 제49권5호
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• pp.467-471
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• 2016

In order to investigate the Na gettering, PSG/$SiO_2$/Al-1%Si multilevel thin films were fabricated. DC magnetron sputter techniques and APCVD (atmosphere pressure chemical vapor deposition) were utilized for the deposition of Al-1%Si thin films and PSG/$SiO_2$ passivations, respectively. Heat treatment was carried out at $300^{\circ}C$ for 5 h in air. SIMS (secondary ion mass spectrometry) depth profiling and XPS (X-ray Photoelectron Spectroscopy) analysis were used to determine the distribution and binding energies of Na, Al, Si, O, P and other elements throughout the PSG/$SiO_2$/Al-1%Si multilevel thin films. Na peaks were mainly observed at the the PSG/$SiO_2$ interface and at the $SiO_2$/Al-1%Si interfaces. Na impurity gettering in PSG/$SiO_2$/Al-1%Si multilevel thin films is considered to be caused by a segregation type of gettering. The chemical state of Si and O elements in PSG passivation appears to be $SiO_2$.

• Bulletin of the Korean Chemical Society
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• 제28권8호
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• pp.1341-1345
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• 2007

The surface chemistry of D2O dosed Zircaloy-4 (Zry-4) surface followed by Ar-ion bombardment and annealing was studied by means of X-ray photoelectron spectroscopy (XPS) and Ultraviolet photoelectron spectroscopy (UPS). In the XPS study, Ar-ion bombardment caused decrease of the oxygen on the surface region of Zry-4 and therefore led to change the oxidation states of the zirconium from oxide to metallic form. In addition, oxidation states of zirconium were changed to lower oxidation states of zirconium due to depopulation of oxygen on the surface region by annealing. Up to about 787 K, the bulk oxygen diffused out to the subsurface region and after this temperature, the oxygen on the surface of Zry-4 was depopulated. UPS study showed that the valence band spectrum of the D2O exposed Zry-4 exhibited a dominant peak at around 13 eV and no clear Fermi edge was detected. After stepwise Ar+ sputtering processes, the decrease of the oxygen on the surface of Zry-4 led to suppress the dominant peak around 13 eV, the peak around 9 eV and develop a new peak of the metallic Zr 4d state (20.5-21.0 eV) at the Fermi level.

• Transactions on Electrical and Electronic Materials
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• 제9권2호
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• pp.52-56
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• 2008

Carbon nanotube films were fabricated by the catalytic CVD method. Plasma processed time effects on the field emission property were studied. The atomic structure was observed by using X-ray photoelectron spectroscopy (XPS). The surface composition changes were observed on the plasma processed CNT films. The O1s/C1s signal ratio and the Fls/Cls signal ratio changed from 1.1 % to 24.65 % and from 0 % to 3.1 % with plasma process time, respectively. We could guess it from these results that the Ar plasma process could change the surface composition effectively. In the case of the original-CNT film, no carbon shift was observed. In the case of the Ar plasma processed CNT films, however the oxygen related carbon shifts were observed. This oxygen related carbon shift at higher binding energy implies the increment of amount of the oxygen. It's possible that the increment of these bonds between carbon and oxygen results in the improvement of field emission performance.

• 대한전자공학회논문지
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• 제26권3호
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• pp.124-129
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• 1989

비유전율 및 팽창계수가 낮다는 장점을 갖고 있는 코디에리트는 IC페키지로서 매우 흥미있는 재료이다. 졸겔방법에 의해서 얻어진 코디에리트는 무정형 하얀 가루의 결정으로 이를 약 $900^{circ}C$ 로 열처리 하여, 구운 코디에리트 시료를 만들었다. XPS에 의해서, 코디에리트 시료의 미시적 특성을 연구하였는데, 시료 표면에서는 시료내부의 값들과 비교해 볼때, Mg의 많은 감소와 AI과 Si의 증가를 알 수 있었다. $100{\AA}$ 이하의 시료표면에는 ${pi}$ - 코딩리트 상을 갖는 결정이 존재하고, 시료내부는 적은량의 마그네슘 알루미나트($MgAl_2O_4$)가 존재하였다. 한편 코디에리트 표면에서 열처리에 다른 화학적 변화가 없는 것을 알 수 있었다.

• Bulletin of the Korean Chemical Society
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• 제27권11호
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• pp.1851-1853
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• 2006

We herein report a new analytical application of XPS to the identification of organic molecules in room temperature ionic liquid for the first time. An organic compound, propargylamine (1), produced in 1-butyl-3-methylimidazolium hexafluorophosphate ([bmim][$PF_6$]), which is one of the room temperature ionic liquids (RTILs), via $A^3$ coupling reaction, is characterized by means of x-ray photoelectron spectroscopy (XPS) rather than using conventional organic compound analysis techniques. There are four non-equivalent carbons in RTILs and 1 each. The ratios of normalized integrated areas of the deconvoluted binding energy of core electron of carbon (C1s) peaks are well matched to the number of carbons in those compounds. The binding energies of C1s of the featured carbons in 1, C4 (sp carbons in acetylene group) and C5 ($sp^2$ carbons in benzene ring), are assigned 286.2 and 285.4 eV, respectively. These results will be able to provide an important tool and a new strategy for the analysis of organic molecules

• 한국광학회지
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• 제11권1호
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• pp.13-18
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• 2000

Si(100) 위에 RF 스퍼터링법으로 SiOxNy 박막을 제작하였다. 제작 조건은 반응 가스 비율에 따른 증착율과 RF 출력으로 하였다. XRD, XPS, n&k analyzer 그리고 FTIR로 SiOxNy 박막의 특성을 조사하였다. XRD 측정결과 ${SiO_x}{N_y}$ 박막은 비정질이었으며, XPS와 n&k analyzer 측정 결과 ${SiO_x}{N_y}$ 박막의 질소성분이 증가할수록 굴절률은 증가함을 알 수 있었다.

• 한국태양에너지학회 논문집
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• 제37권5호
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• pp.65-75
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• 2017

In this study, the change of heat loss due to the degree of deterioration of the XPS insulation in KEPCO's office buildings is analyzed. The acceleration aging test of the XPS insulation was carried out according to the test method A of KS M ISO 11561: 2009. The performance of the insulation was analyzed by applying it to the three - dimensional steady state heat transfer analysis program. The acceleration aging test of the XPS insulation, show that the thermal resistance performance decreased by 1.44% at the A regional headquarters, 0.85% at the B regional headquarters, 6.41% at the C branch office, 7.76% at the D regional headquarters, 8.51% at the E branch office, and by 8.54% at the F branch office respectively. Using simulation, we determined that the thermal resistance value of E branch office decreased by 8.04%, while its heat loss increased by 8.52%. At A regional headquarters, the thermal resistance decreased by 1.38%, and the heat loss increased by 1.51%. At D regional headquarters, these value are 6.82% and 7.17%, respectively.