• Title/Summary/Keyword: XPS analysis

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The Chemical COmposition Analysis by AES and XPS of PbTiO$_3$ Thin Films Fabricated by CVD (화학증착법에 의해 제조된 PbTiO$_3$ 박막의 AES와 XPS에 의한 조성분석)

  • Soon Gil Yoon;Ho Gi Kim
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 1989.06a
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    • pp.83-86
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    • 1989
  • Lead titanate thin films with a perovskite structure were successfully structure were successfully fabricated on titanium substrate by Chemical Vapour Deposition(CVD). Analyses of Auger Electron Spectroscopy(AES) and X-ray Photoelectron Spectroscopy (XPS) have been performed in order to find a chemical composition of lead titanate films. The analysis of chemical composition by AES and XPS was investigated for variations of deposition temperature and Ti(C$_2$H$_{5}$O)$_4$ fractions. The chemical composition of PbTiO$_3$by XPS analysis was almost constant regardless of deposition parameters and the comparison of chemical composition by AES and XPS was performed.d.

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Quantitative Surface Analysis of Co-Ni and Au-Cu alloys by XPS and SIMS (XPS와 SIMS에 의한 Co-Ni과 Au-Cu 합금표면 정량분석 연구)

  • 김경중;문대원;이광우
    • Journal of the Korean Vacuum Society
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    • v.1 no.1
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    • pp.106-114
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    • 1992
  • Abstract-Quantitative surface analysis of Co-Ni and Au-Cu alloys by XPS and SIMS was studied. For Co-Ni alloy, quantitative XPS analysis could be done within 1-2% relative error with pure element standards without any correction. For Au-Cu, quantitative XPS analysis was not possible without any correction. But it could be done with standard alloys of various composition within 1-2% relative error. Without standard alloys, Au-Cu alloys could be analyzed by XPS within 10% relative error with pure element standards. For SIMS analysis of Co-Ni alloys, the relative secondary ion yields of Co+/Nit has linear relation with ratio of each composition so that quantitative SIMS analysis was possible for Co-Ni alloys. Preliminary results of XPS round robin test of VAMAS-SCA Japan Project are given.

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Characterization of Surface Properties of $BaTiO_3$ Powder by XPS

  • Chun, Myoung-Pyo;Cho, Jung-Ho;Kim, Byung-Ik
    • Proceedings of the Korean Powder Metallurgy Institute Conference
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    • 2006.09a
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    • pp.678-679
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    • 2006
  • The effects of particle size on the surface properties of hydro-thermally synthesized barium titanate powders were investigated by means of particle size analysis, specific surface area, SEM, zeta potential and XPS. Particle sizes were measured by laser light scattering and are in the range of 150 to 1100nm. Zeta potential increased with increasing particle size and it was large minus value in the range of particle size from 500 to 900nm, which seems to be related with the dissolution of $Ba^{2+}$ ion in these particle sizes from the analysis of surface properties by XPS.

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Electric conduction mechanism Analysis of AW Thin Films using XPS Measurement (XPS 분석에 의한 AZO 박막의 전기전도 메커니즘 해석)

  • Jin, Eun-Mi;Kim, Kyeong-Min;Park, Choon-Bae
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2007.06a
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    • pp.446-447
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    • 2007
  • Aluminisum-doped zinc oxide (AZO) films are attractive materials as transparent conductive electrode because they are inexpensive, nontoxic and abundant element compared with indium tin oxide (ITO). In our paper, AZO films have been deposited on glass (coming 1737) substrates by RF magnetron sputtering. The AZO film was post-annealed at $600^{\circ}C$, $800^{\circ}C$ for 2 hr with $N_2$ atmosphere, respectively. We investigated that the electric properties and qualitative analysis of AZO films, which measured using the methods of Hall effect, X-ray photoelectron spectroscopy (XPS).

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XPS Analysis of $Cd_{1-x}Co_xIn_2Se_4$ Crystals ($Cd_{1-x}Co_xIn_2Se_4$ 결정의 XPS 분석)

  • 최성휴
    • Journal of the Korean Vacuum Society
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    • v.3 no.3
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    • pp.355-359
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    • 1994
  • Cd1-xCoxIn2Se4(X=0.50) 결정을 수직 Bridgman 방법으로 성장시키고 성장된 결정의 결정구조 및 XPS 특성을 연구하였다. 성장된 결정은 pseudocubic 구조이고 격자상수는 a=5.778$\AA$으로 주어졌다. Cd1-xCoxIn2Se4 결정의 각 성분원소인 cadmium cobalt indium 그리고 selenium에 대한 XPS spectrum으 로부터 결합에너지와 결합상태를 조사하였다. Cd1-xCoxIn2Se4결정과 결합하지 안는 각 성분원소인 cadium cobalt imdium 그리고 selenium에 대한 core level의 XPS spectrum과 비교하면 각 성분원소상 이의 결합에 의한 chemical shift 현상 때문에 core level의 결합에너지가 0.10~4.87 eV 차이가 있다. Cd1-xCoxIn2Se4 결정에서 Co 2P3/2 core level의 주 peak와 statellite peak와의 결합에너지 차이로부터 cadmium과 치화된 cobalt는 Co2+ ion으로 Td symmetry 점에 위치함을 알 수 있다.

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Surface Analysis of Silicone Polymer used as Insulating Material by XPS and Surface Voltage Decay (XPS 및 Surface voltage decay를 이용한 실리콘 절연재료의 표면분석)

  • Youn, B.H.;Lee, K.T.;Park, C.R.;Kim, N.R.;Seo, Y.J.;Huh, C.S.;Cho, H.G.
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2002.11a
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    • pp.236-239
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    • 2002
  • Surface states of silicone polymer treated by plasma were investigated by the analysis by x-ray photoelectron spectroscopy (XPS) and surface voltage decay. Plasma treatment causes the silica-like oxidative layer, which is confirmed with XPS, and lowers surface resistivity with increasing the plasma treatment time. Using the decay time constant of surface voltage, the calculated surface resistivity was compared with the value directly measured by a voltage-current method. A good agreement between two methods was obtained. In addition, we estimated the thermal activation energy for surface conduction, Based on our results, we could understand the relationship between surface chemical states and surface electrical properties.

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XPS Analysis of Acrylic Acid Films Polymerized by Remote Plasma-Enhanced Chemical Vapor Deposition (원격 플라즈마 화학기상증착법에 의해 중합된 아크릴산 필름의 XPS 분석)

  • Kim, Seonghoon;Seomoon, Kyu
    • Applied Chemistry for Engineering
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    • v.20 no.5
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    • pp.536-541
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    • 2009
  • Plasma-polymerized acrylic acid films were deposited on Si wafer and KBr pellet by remote plasma-enhanced chemical vapor deposition (PECVD). Effects of plasma power, reaction pressure, indirect plasma method on the growth rate, chemical structure, and chemical bonding state of the films were investigated. Chemical structure and chemical state of the films were characterized by Fourier transformed infrared (FT-IR) spectroscopy and X-ray photoelectron spectroscopy (XPS) analysis and curve fitting technique. Growth rate of the film increased to a saturation value with plasma power of 100 W, but showed the maximum with reaction pressure at 300 mtorr. Whenever W/FM factor (applied energy per gas molecule) increased by increasing plasma power or lowering pressure, the fragmentation of acrylic acid molecules was promoted. From the XPS curve fitting analyses, we found that the intensity of carboxyl COO bonding peak decreased with W/FM factor, and the tendency of intensity change of carboxylic COO peak was contrary to those of ether C-O and carbonyl C=O peaks.

Tribological Behavior Analysis of CrMoN Coating by XPS (XPS 분석을 통한 CrMoN 코팅의 마찰마모 거동 연구)

  • Yang, Young-Hwan;Lyo, In-Woong;Park, Sang-Jin;Lim, Dea-soon;Oh, Yoon-Suk
    • Korean Journal of Metals and Materials
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    • v.50 no.8
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    • pp.549-556
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    • 2012
  • The tribological behavior of CrMoN films with respect to surface chemistry was investigated by using X-ray photoelectron spectroscopy (XPS). All of the films were prepared from a hybrid PVD system consisting of DC unbalanced magnetron (UBM) sputtering and arc ion plating (AIP) sources. The tribological property of the films was evaluated by a friction coefficient using a Ball-on-disk type tribometer. The chemistry of wear track was analyzed by energy dispersive spectroscopy (EDS) and XPS. The friction coefficient was measured to be 0.4 for the CrMoN film, which is lower than that of a monolithic CrN film. EDS and XPS results imply the formation of an oxide layer on the coating surface, which was identified as molybdenum oxide phases, known to be a solid lubricant during the wear test.